Patents by Inventor Atsushi Miyamoto

Atsushi Miyamoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140320627
    Abstract: An pattern evaluation method includes a step of estimating imaging deviation allowed to evaluate an overlay position on one or more evaluation point candidates based on pattern layout information, a step of deciding one or more evaluation points from among the evaluation point candidates based on the allowed imaging deviation, a step of deciding an imaging sequence for imaging the selected evaluation point, and a step of evaluating an overlay position between first and second patterns based on an image obtained by imaging the evaluation point according to the imaging sequence.
    Type: Application
    Filed: January 30, 2013
    Publication date: October 30, 2014
    Inventors: Atsushi Miyamoto, Mayuka Osaki, Maki Kimura, Chie Shishido
  • Publication number: 20140307946
    Abstract: A plurality of images is captured, and the plurality of images is integrated and displayed after one or more ROIs included in the captured images are extracted and classified. At integration, an integration method is controlled according to a classification result of the ROI.
    Type: Application
    Filed: April 11, 2014
    Publication date: October 16, 2014
    Inventors: Kenji Nakahira, Atsushi Miyamoto, Takehiro Hirai
  • Patent number: 8853630
    Abstract: (1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and output information for imaging recipe creation can be set arbitrarily, and (3) decision is made of imaging or processing at an arbitrary imaging point as to whether to be successful/unsuccessful and in case a failure is determined, a relief process can be conducted in which the imaging point or imaging sequence is changed.
    Type: Grant
    Filed: January 29, 2014
    Date of Patent: October 7, 2014
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma
  • Patent number: 8797385
    Abstract: There is provided a robot device including an irradiation unit that irradiates pattern light to an external environment, an imaging unit that acquires an image by imaging the external environment, an external environment recognition unit that recognizes the external environment, an irradiation determining unit that controls the irradiation unit to be turned on when it is determined that irradiation of the pattern light is necessary based on an acquisition status of the image, and a light-off determining unit that controls the irradiation unit to be turned off when it is determined that irradiation of the pattern light is unnecessary or that irradiation of the pattern light is necessary to be forcibly stopped, based on the external environment.
    Type: Grant
    Filed: March 23, 2011
    Date of Patent: August 5, 2014
    Assignee: Sony Corporation
    Inventors: Toshimitsu Tsuboi, Kenta Kawamoto, Yasunori Kawanami, Atsushi Miyamoto
  • Publication number: 20140210988
    Abstract: In order to obtain a quality image without deterioration owing to radiation noise in inspection using the optical video camera in high radiation environment, an inspection apparatus is formed of an image pick-up unit, an image obtaining unit which fetches a video image that contains a signal (noise) that is substantially independent of each frame obtained by the image pick-up unit, a local alignment unit which locally aligns frames with different time phases for forming the image fetched by the image obtaining unit, a frame synthesizing unit which synthesizes the plurality of frames aligned by the local alignment unit for generating a synthesis frame with an SN ratio higher than the SN ratio of the frame before frame synthesis, and an image output unit for displaying or recording the image formed of the synthesis frame generated by the frame synthesizing unit.
    Type: Application
    Filed: March 27, 2014
    Publication date: July 31, 2014
    Applicant: Hitachi-GE Nuclear Energy, Ltd.
    Inventors: Kenji NAKAHIRA, Atsushi MIYAMOTO, Naoki HOSOYA, Minoru YOSHIDA
  • Patent number: 8767038
    Abstract: Provided is a panorama image synthesis technique using a scanning charged-particle microscope and capable of obtaining a panorama image synthesis that is robust against contamination and the imaging shift and distortion of an image in a wide-field imaging region (EP) for semiconductor fine patterns. The panorama image synthesis technique in the wide-field imaging region (EP) using the scanning charged-particle microscope is characterized in that the layout of each adjustment point, each local imaging region, and an imaging sequence comprising the imaging order of the each adjustment point are optimized and created as an imaging recipe.
    Type: Grant
    Filed: September 2, 2009
    Date of Patent: July 1, 2014
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Atsushi Miyamoto, Go Kotaki, Ryoichi Matsuoka
  • Publication number: 20140169657
    Abstract: A defect inspection method for inspecting a defect on a semiconductor wafer, using plural inspection methods includes: merging hot-spot coordinates as coordinates on the semiconductor wafer, designated by a user, or coordinates where a systematic defect can occur, with detected defect coordinates on the semiconductor wafer, acquired from inspection information, after information indicating the type of coordinates are added thereto; deciding an inspection sequence of the coordinates merged with each other; and defect inspection for executing selection using the information indicating the respective types of the coordinates merged with each other, and executing an inspection by selecting an inspection method for every coordinates to be inspected.
    Type: Application
    Filed: July 6, 2012
    Publication date: June 19, 2014
    Applicant: Hitachi High-Technologies Corporation
    Inventors: Minoru Harada, Atsushi Miyamoto, Takehiro Hirai, Fumihiko Fukunaga
  • Publication number: 20140145078
    Abstract: (1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and output information for imaging recipe creation can be set arbitrarily, and (3) decision is made of imaging or processing at an arbitrary imaging point as to whether to be successful/unsuccessful and in case a failure is determined, a relief process can be conducted in which the imaging point or imaging sequence is changed.
    Type: Application
    Filed: January 29, 2014
    Publication date: May 29, 2014
    Applicant: Hitachi High-Technologies Corporation
    Inventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma
  • Patent number: 8730318
    Abstract: In order to obtain a quality image without deterioration owing to radiation noise in inspection using the optical video camera in high radiation environment, an inspection apparatus is formed of an image pick-up unit, an image obtaining unit which fetches a video image that contains a signal (noise) that is substantially independent of each frame obtained by the image pick-up unit, a local alignment unit which locally aligns frames with different time phases for forming the image fetched by the image obtaining unit, a frame synthesizing unit which synthesizes the plurality of frames aligned by the local alignment unit for generating a synthesis frame with an SN ratio higher than the SN ratio of the frame before frame synthesis, and an image output unit for displaying or recording the image formed of the synthesis frame generated by the frame synthesizing unit.
    Type: Grant
    Filed: June 14, 2011
    Date of Patent: May 20, 2014
    Assignee: Hitachi-GE Nuclear Energy, Ltd.
    Inventors: Kenji Nakahira, Atsushi Miyamoto, Naoki Hosoya, Minoru Yoshida
  • Patent number: 8731275
    Abstract: Disclosed is a method for reviewing defects in a large number of samples within a short period of time through the use of a defect review apparatus. To collect defect images steadily and at high throughput, a defect detection method is selected before imaging and set up for each of review target defects in the samples in accordance with the external characteristics of the samples that are calculated from the design information about the samples. The defect images are collected after an imaging sequence is set up for the defect images and reference images in such a manner as to reduce the time required for stage movement in accordance with the defect coordinates of the samples and the selected defect detection method.
    Type: Grant
    Filed: December 28, 2012
    Date of Patent: May 20, 2014
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Minoru Harada, Ryo Nakagaki, Kenji Obara, Atsushi Miyamoto
  • Patent number: 8725296
    Abstract: There is provided a gripping judgment apparatus including a plan unit that generates a target orbit for moving a gripping unit in a state in which an object as a gripping target is gripped by the gripping unit, an observation unit that measures movement of the gripping unit driven based on the target orbit, a gripping state judgment unit that judges whether or not an object as a gripping target is grippable based on a target value of the gripping unit derived from the target orbit and an actual measured value measured by the observation unit, and a gripping state change unit that changes a gripping state of an object gripped by the gripping unit based on a judgment result obtained by the gripping state judgment unit.
    Type: Grant
    Filed: February 9, 2011
    Date of Patent: May 13, 2014
    Assignee: Sony Corporation
    Inventors: Kenichiro Nagasaka, Toshimitsu Tsuboi, Atsushi Miyamoto, Yasunori Kawanami, Tetsuharu Fukushima, Kenta Kawamoto
  • Patent number: 8704464
    Abstract: A charged particle orbit control device (100) is used in a ring-shaped charged particle accelerator or a charged particle storage ring. The charged particle orbit control device (100) is configured to enable the orbit of a charged particle to return to the original orbit in multiple cycles. The charged particle orbit control device (100) includes multiple bending magnets (1) that bend the charged particle (3). In the charged particle orbit control device (100), the bending angle and relative position of each bending magnet (1) are prescribed such that every time the charged particle (3) passes through, the orbit of the charged particle (3) in each bending magnet (1) alternately switches between two orbits.
    Type: Grant
    Filed: December 19, 2011
    Date of Patent: April 22, 2014
    Assignee: Hiroshima University
    Inventors: Shigemi Sasaki, Atsushi Miyamoto
  • Patent number: 8699906
    Abstract: A printing system includes a first printing apparatus, a second printing apparatus, and a control device. The second printing apparatus is provided at a rear stage of the first printing apparatus, and includes a second preheating unit that preheats a recording medium from one surface before thermally fixing a toner image to another surface, and a temperature control unit that increase the temperature of the second preheating unit from a normal temperature to a target temperature, in response to a printing preparation instruction received in a temporary printing stop state from the control device. The control device starts printing, when the temperature of the second preheating unit reaches the target temperature. The temperature control unit decreases the temperature of the second preheating unit from the target temperature to the normal temperature, when the recording medium is conveyed by a length from a deformed portion to the second preheating unit.
    Type: Grant
    Filed: September 21, 2010
    Date of Patent: April 15, 2014
    Assignee: Ricoh Company, Limited
    Inventors: Atsushi Miyamoto, Soushi Kikuchi
  • Publication number: 20140092231
    Abstract: A specimen image capture method using a charged particle microscope device includes: a first image acquisition step in which the gain of a detector in a charged particle microscope is set to a first gain value, charged particle beam scanning is carried out on a specimen, and a first image is obtained; a second image acquisition step in which the gain of the detector is set to a second gain value, which is different to the first gain value, charged particle beam scanning is carried out on the specimen, and a second image is obtained; and an image combination step in which the first gain value and the second gain value are used and the first image and the second image are combined.
    Type: Application
    Filed: April 11, 2012
    Publication date: April 3, 2014
    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Kenji Nakahira, Atsushi Miyamoto
  • Patent number: 8642957
    Abstract: (1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and output information for imaging recipe creation can be set arbitrarily, and (3) decision is made of imaging or processing at an arbitrary imaging point as to whether to be successful/unsuccessful and in case a failure is determined, a relief process can be conducted in which the imaging point or imaging sequence is changed.
    Type: Grant
    Filed: March 28, 2012
    Date of Patent: February 4, 2014
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma
  • Publication number: 20130322737
    Abstract: A defect inspection method comprising: picking up an image of a subject under inspection to thereby acquire an inspection image; extracting multiple templates corresponding to multiple regions, respectively from design data of the subject under inspection; finding a first misregistration amount between the inspection image and the design data using a first template as any one template selected from among the plural templates; finding a second misregistration amount between the inspection image and the design data using a second template other than the first template, the second template being selected from among the plural templates, and the first misregistration-amount; and converting the design data, misregistration thereof being corrected using the first misregistration-amount, and the second misregistration-amount, into a design data image, and comparing the design data image with the inspection image to thereby detect a defect of the subject under inspection.
    Type: Application
    Filed: May 30, 2013
    Publication date: December 5, 2013
    Applicant: Hitachi High-Technologies Corporation
    Inventors: Shinya MURAKAMI, Chie SHISHIDO, Takashi HIROI, Taku NINOMIYA, Tsuyoshi MINAKAWA, Atsushi MIYAMOTO
  • Patent number: 8585599
    Abstract: It is possible to improve an image quality of an ultrasonographic device and improve visibility of a tissue structure and a lesion. According to a noise amount estimated for each of at least two resolution levels and reliability of the noise amount estimation, a corrected noise amount is calculated. An intensity conversion is performed on a decomposition coefficient obtained by a multi-resolution decomposition process using the corrected noise amount. Moreover, by performing intensity conversion of the respective decomposition coefficients according to a plurality of decomposition coefficients, it is possible to generate a high-quality image. Furthermore, by switching processing parameters in accordance with the imaging condition, the image type, and the imaging object, it is possible to simultaneously realize the processing time and the image quality appropriate for the purpose.
    Type: Grant
    Filed: May 9, 2008
    Date of Patent: November 19, 2013
    Assignee: Hitachi Medical Corporation
    Inventors: Kenji Nakahira, Atsushi Miyamoto
  • Publication number: 20130270452
    Abstract: A charged particle orbit control device (100) is used in a ring-shaped charged particle accelerator or a charged particle storage ring. The charged particle orbit control device (100) is configured to enable the orbit of a charged particle to return to the original orbit in multiple cycles. The charged particle orbit control device (100) includes multiple bending magnets (1) that bend the charged particle (3). In the charged particle orbit control device (100), the bending angle and relative position of each bending magnet (1) are prescribed such that every time the charged particle (3) passes through, the orbit of the charged particle (3) in each bending magnet (1) alternately switches between two orbits.
    Type: Application
    Filed: December 19, 2011
    Publication date: October 17, 2013
    Applicant: Hiroshima University
    Inventors: Shigemi Sasaki, Atsushi Miyamoto
  • Patent number: RE45204
    Abstract: In an imaging recipe creating apparatus that uses a scanning electron microscope to create an imaging recipe for SEM observation of a semiconductor pattern, in order that the imaging recipe for measuring the wiring width and other various dimension values of the pattern from an observation image and thus evaluating the shape of the pattern is automatically generated within a minimum time by the analysis using the CAD image obtained by conversion from CAD data, an CAD image creation unit that creates the CAD image by converting the CAD data into an image format includes an image-quantizing width determining section, a brightness information providing section, and a pattern shape deformation processing section; the imaging recipe being created using the CAD image created by the CAD image creation unit.
    Type: Grant
    Filed: November 6, 2009
    Date of Patent: October 21, 2014
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani
  • Patent number: RE45224
    Abstract: In an imaging recipe creating apparatus that uses a scanning electron microscope to create an imaging recipe for SEM observation of a semiconductor pattern, in order that the imaging recipe for measuring the wiring width and other various dimension values of the pattern from an observation image and thus evaluating the shape of the pattern is automatically generated within a minimum time by the analysis using the CAD image obtained by conversion from CAD data, an CAD image creation unit that creates the CAD image by converting the CAD data into an image format includes an image-quantizing width determining section, a brightness information providing section, and a pattern shape deformation processing section; the imaging recipe being created using the CAD image created by the CAD image creation unit.
    Type: Grant
    Filed: November 18, 2009
    Date of Patent: October 28, 2014
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani