Patents by Inventor Benjamin Chu

Benjamin Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9511329
    Abstract: A membrane is provided including a coating layer having cellulose nanofibers produced from oxidized cellulose microfibers and an electrospun substrate upon which the coating layer is applied. The nanofibers of the electrospun substrate have a diameter greater than that of the cellulose nanofibers. The membrane also has non-woven support upon which the electrospun substrate is disposed. Microfibers of the non-woven support have a diameter greater than that of the nanofibers of the electrospun substrate. Application of electrospun membrane is in microfiltration area, while the cellulose nanofiber membrane serves in ultrafiltration, nanofiltration, and reverse osmosis after chemical modification.
    Type: Grant
    Filed: April 1, 2015
    Date of Patent: December 6, 2016
    Assignee: The Research Foundation for The State University of New York
    Inventors: Benjamin Chu, Benjamin S. Hsiao, Hongyang Ma
  • Publication number: 20160343844
    Abstract: Transistors for high voltage and high frequency operation. A non-planar, polar crystalline semiconductor body having a top surface disposed between first and second opposite sidewalls includes a channel region with a first crystalline semiconductor layer disposed over the first and second sidewalls. The first crystalline semiconductor layer is to provide a two dimensional electron gas (2DEG) within the channel region. A gate structure is disposed over the first crystalline semiconductor layer along at least the second sidewall to modulate the 2DEG. First and second sidewalls of the non-planar polar crystalline semiconductor body may have differing polarity, with the channel proximate to a first of the sidewalls. The gate structure may be along a second of the sidewalls to gate a back barrier. The polar crystalline semiconductor body may be a group III-nitride formed on a silicon substrate with the (1010) plane on a (110) plane of the silicon.
    Type: Application
    Filed: August 4, 2016
    Publication date: November 24, 2016
    Inventors: Han Wui Then, Robert CHAU, Benjamin CHU-KUNG, Gilbert DEWEY, Jack KAVALIEROS, Matthew METZ, Niloy MUKHERJEE, Ravi PILLARISETTY, Marko RADOSAVLJEVIC
  • Publication number: 20160322480
    Abstract: Tunneling field effect transistors (TFETs) for CMOS architectures and approaches to fabricating N-type and P-type TFETs are described. For example, a tunneling field effect transistor (TFET) includes a homojunction active region disposed above a substrate. The homojunction active region includes a relaxed Ge or GeSn body having an undoped channel region therein. The homojunction active region also includes doped source and drain regions disposed in the relaxed Ge or GeSn body, on either side of the channel region. The TFET also includes a gate stack disposed on the channel region, between the source and drain regions. The gate stack includes a gate dielectric portion and gate electrode portion.
    Type: Application
    Filed: July 13, 2016
    Publication date: November 3, 2016
    Inventors: Roza Kotlyar, Stephen M. Cea, Gilbert Dewey, Benjamin Chu-Kung, Uygar E. Avci, Rafael Rios, Anurag Chaudhry, Thomas D. Linton, JR., Ian A. Young, Kelin J. Kuhn
  • Publication number: 20160315153
    Abstract: A group III-N nanowire is disposed on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first group III-N material, a source region electrically coupled with a first end of the channel region, and a drain region electrically coupled with a second end of the channel region. A second group III-N material on the first group III-N material serves as a charge inducing layer, and/or barrier layer on surfaces of nanowire. A gate insulator and/or gate conductor coaxially wraps completely around the nanowire within the channel region. Drain and source contacts may similarly coaxially wrap completely around the drain and source regions.
    Type: Application
    Filed: June 29, 2016
    Publication date: October 27, 2016
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Patent number: 9478635
    Abstract: A quantum well transistor has a germanium quantum well channel region. A silicon-containing etch stop layer provides easy placement of a gate dielectric close to the channel. A group III-V barrier layer adds strain to the channel. Graded silicon germanium layers above and below the channel region improve performance. Multiple gate dielectric materials allow use of a high-k value gate dielectric.
    Type: Grant
    Filed: October 27, 2015
    Date of Patent: October 25, 2016
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Been-Yih Jin, Benjamin Chu-Kung, Matthew V. Metz, Jack T. Kavalieros, Marko Radosavljevic, Roza Kotlyar, Willy Rachmady, Niloy Mukherjee, Gilbert Dewey, Robert S. Chau
  • Publication number: 20160308041
    Abstract: Techniques are disclosed for forming a GaN transistor on a semiconductor substrate. An insulating layer forms on top of a semiconductor substrate. A trench, filled with a trench material comprising a III-V semiconductor material, forms through the insulating layer and extends into the semiconductor substrate. A channel structure, containing III-V material having a defect density lower than the trench material, forms directly on top of the insulating layer and adjacent to the trench. A source and drain form on opposite sides of the channel structure, and a gate forms on the channel structure. The semiconductor substrate forms a plane upon which both GaN transitors and other transistors can form.
    Type: Application
    Filed: December 23, 2013
    Publication date: October 20, 2016
    Inventors: Han Wui Then, Robert S. CHAU, Sansaptak DASGUPTA, Marko RADOSAVLJEVIC, Benjamin CHU-KUNG, Seung Hoon Hoon SUNG, Sanaz K. GARDNER, Ravi PILLARISETTY
  • Publication number: 20160293774
    Abstract: A III-N semiconductor channel is compositionally graded between a transition layer and a III-N polarization layer. In embodiments, a gate stack is deposited over sidewalls of a fin including the graded III-N semiconductor channel allowing for formation of a transport channel in the III-N semiconductor channel adjacent to at least both sidewall surfaces in response to a gate bias voltage. In embodiments, a gate stack is deposited completely around a nanowire including a III-N semiconductor channel compositionally graded to enable formation of a transport channel in the III-N semiconductor channel adjacent to both the polarization layer and the transition layer in response to a gate bias voltage.
    Type: Application
    Filed: June 9, 2016
    Publication date: October 6, 2016
    Inventors: Han Wui Then, Sansaptak Dasgupta, Marko Radosavljevic, Benjamin Chu-Kung, Seung Hoon Sung, Sanaz K. Gardner, Robert S. Chau
  • Patent number: 9461160
    Abstract: Transistors for high voltage and high frequency operation. A non-planar, polar crystalline semiconductor body having a top surface disposed between first and second opposite sidewalls includes a channel region with a first crystalline semiconductor layer disposed over the first and second sidewalls. The first crystalline semiconductor layer is to provide a two dimensional electron gas (2DEG) within the channel region. A gate structure is disposed over the first crystalline semiconductor layer along at least the second sidewall to modulate the 2DEG. First and second sidewalls of the non-planar polar crystalline semiconductor body may have differing polarity, with the channel proximate to a first of the sidewalls. The gate structure may be along a second of the sidewalls to gate a back barrier. The polar crystalline semiconductor body may be a group III-nitride formed on a silicon substrate with the (1010) plane on a (110) plane of the silicon.
    Type: Grant
    Filed: December 19, 2011
    Date of Patent: October 4, 2016
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Patent number: 9461141
    Abstract: Embodiments of the present disclosure provide contact techniques and configurations for reducing parasitic resistance in nanowire transistors. In one embodiment, an apparatus includes a semiconductor substrate, an isolation layer formed on the semiconductor substrate, a channel layer including nanowire material formed on the isolation layer to provide a channel for a transistor, and a contact coupled with the channel layer, the contact being configured to surround, in at least one planar dimension, nanowire material of the channel layer and to provide a source terminal or drain terminal for the transistor.
    Type: Grant
    Filed: August 20, 2015
    Date of Patent: October 4, 2016
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Benjamin Chu-Kung, Willy Rachmady, Van H. Le, Gilbert Dewey, Niloy Mukherjee, Matthew V. Metz, Han Wui Then, Marko Radosavljevic
  • Publication number: 20160276438
    Abstract: Techniques are disclosed for forming a defect-free semiconductor structure on a dissimilar substrate with a multi-aspect ratio mask. The multi-aspect ratio mask comprises a first, second, and third layer formed on a substrate. The second layer has a second opening wider than a first opening and a third opening in the first and third layers, respectively. All three openings are centered along a common central axis. A semiconductor material is grown from the top surface of the substrate and laterally onto the top surface of the first layer within the second opening. The semiconductor material disposed within and vertically below the third opening is etched by using the third layer as an etch mask so that the remaining material that laterally overflowed onto the top surface of the first layer forms a remaining structure.
    Type: Application
    Filed: December 23, 2013
    Publication date: September 22, 2016
    Inventors: Benjamin CHU-KUNG, Sherry R. TAFT, Van H. LE, Sansaptak DASGUPTA, Seung Hoon Hoon SUNG, Sanaz K. GARDNER, Matthew V. METZ, Marko RADOSAVLJEVIC, Han Wui THEN
  • Publication number: 20160276440
    Abstract: Embodiments of the disclosure described herein comprise a tunneling field effect transistor (TFET) having a drain region, a source region having a conductivity type opposite of the drain region, a channel region disposed between the source region and the drain region, a gate disposed over the channel region, and a heterogeneous pocket disposed near a junction of the source region and the channel region. The heterogeneous pocket comprises a semiconductor material different than the channel region, and comprises a tunneling barrier less than the bandgap in the channel region and forming a quantum well in the channel region to in crease a current through the TFET transistor when a voltage applied to the gate is above a threshold voltage.
    Type: Application
    Filed: December 23, 2013
    Publication date: September 22, 2016
    Inventors: Uygar E. Avci, Roza KOTLYAR, Gilbert DEWEY, Benjamin CHU-KUNG, Ian A. YOUNG
  • Publication number: 20160268407
    Abstract: Techniques are disclosed for providing a low resistance self-aligned contacts to devices formed in a semiconductor heterostructure. The techniques can be used, for example, for forming contacts to the gate, source and drain regions of a quantum well transistor fabricated in III-V and SiGe/Ge material systems. Unlike conventional contact process flows which result in a relatively large space between the source/drain contacts to gate, the resulting source and drain contacts provided by the techniques described herein are self-aligned, in that each contact is aligned to the gate electrode and isolated therefrom via spacer material.
    Type: Application
    Filed: May 25, 2016
    Publication date: September 15, 2016
    Inventors: Ravi Pillarisetty, Benjamin Chu-Kung, Mantu K. Hudait, Marko Radosavljevic, Jack T. Kavalieros, Willy Rachmady, Niloy Mukherjee, Robert S. Chau
  • Publication number: 20160263552
    Abstract: Articles are provided for absorbing fluids. In embodiments, the articles of the present disclosure are modified to make them hydrophobic, thereby decreasing their affinity for water and similar liquids, while increasing their affinity for other hydrophobic materials, including oil. After use, the articles, in embodiments polyurethane sponges, may have their absorbed materials removed therefrom, and the articles may then be reused to absorb additional materials.
    Type: Application
    Filed: November 4, 2014
    Publication date: September 15, 2016
    Applicant: The Research Foundation for the State University of New York
    Inventors: Benjamin Chu, Benjamin Hsiao, Zhe Wang
  • Publication number: 20160263554
    Abstract: Water filtration membranes are provided. Such membranes include polysaccharide fibers that have been modified to possess thiol groups thereon, resulting in materials that effectively bind heavy metal ions. The resulting fibers may be used by themselves or applied to a scaffold to form a membrane suitable for removing heavy metals from water, including groundwater.
    Type: Application
    Filed: March 10, 2016
    Publication date: September 15, 2016
    Inventors: Robert B. Grubbs, Benjamin S. Hsiao, Benjamin Chu, Rui Yang
  • Publication number: 20160240617
    Abstract: A III-N semiconductor channel is formed on a III-N transition layer formed on a (111) or (110) surface of a silicon template structure, such as a fin sidewall. In embodiments, the silicon fin has a width comparable to the III-N epitaxial film thicknesses for a more compliant seeding layer, permitting lower defect density and/or reduced epitaxial film thickness. In embodiments, a transition layer is GaN and the semiconductor channel comprises Indium (In) to increase a conduction band offset from the silicon fin. In other embodiments, the fin is sacrificial and either removed or oxidized, or otherwise converted into a dielectric structure during transistor fabrication. In certain embodiments employing a sacrificial fin, the III-N transition layer and semiconductor channel is substantially pure GaN, permitting a breakdown voltage higher than would be sustainable in the presence of the silicon fin.
    Type: Application
    Filed: April 21, 2016
    Publication date: August 18, 2016
    Inventors: Han Wui Then, Sansaptak Dasgupta, Marko Radosavljevic, Benjamin Chu-Kung, Sanaz Gardner, Seung Hoon Sung, Robert S. Chau
  • Publication number: 20160240671
    Abstract: An apparatus including a heterostructure disposed on a substrate and defining a channel region, the heterostructure including a first material having a first band gap less than a band gap of a material of the substrate and a second material having a second band gap that is greater than the first band gap; and a gate stack on the channel region, wherein the second material is disposed between the first material and the gate stack. A method including forming a first material having a first band gap on a substrate; forming a second material having a second band gap greater than the first band gap on the first material; and forming a gate stack on the second material.
    Type: Application
    Filed: September 27, 2013
    Publication date: August 18, 2016
    Inventors: Willy RACHMADY, Van H. LE, Ravi PILLARISETTY, Marko RADOSAVLJEVIC, Gilbert DEWEY, Niloy MUKHERJEE, Jack T. KAVALIEROS, Robert S. CHAU, Benjamin CHU-KUNG, Roza KOTLYAR
  • Publication number: 20160240612
    Abstract: Non-planar semiconductor devices having group III-V material active regions with multi-dielectric gate stacks are described. For example, a semiconductor device includes a hetero-structure disposed above a substrate. The hetero-structure includes a three dimensional group III-V material body with a channel region. A source and drain material region is disposed above the three-dimensional group III-V material body. A trench is disposed in the source and drain material region separating a source region from a drain region, and exposing at least a portion of the channel region. A gate stack is disposed in the trench and on the exposed portion of the channel region. The gate stack includes first and second dielectric layers and a gate electrode.
    Type: Application
    Filed: April 21, 2016
    Publication date: August 18, 2016
    Inventors: Gilbert Dewey, Marko Radosavljevic, Ravi Pillarisetty, Benjamin Chu-Kung, Niloy Mukherjee
  • Publication number: 20160233344
    Abstract: Deep gate-all-around semiconductor devices having germanium or group III-V active layers are described. For example, a non-planar semiconductor device includes a hetero-structure disposed above a substrate. The hetero-structure includes a hetero-junction between an upper layer and a lower layer of differing composition. An active layer is disposed above the hetero-structure and has a composition different from the upper and lower layers of the hetero-structure. A gate electrode stack is disposed on and completely surrounds a channel region of the active layer, and is disposed in a trench in the upper layer and at least partially in the lower layer of the hetero-structure. Source and drain regions are disposed in the active layer and in the upper layer, but not in the lower layer, on either side of the gate electrode stack.
    Type: Application
    Filed: April 20, 2016
    Publication date: August 11, 2016
    Inventors: Ravi Pillarisetty, Willy Rachmady, Van H. Le, Seung Hoon Sung, Jessica S. Kachian, Jack T. Kavalieros, Han Wui Then, Gilbert Dewey, Marko Radosavljevic, Benjamin Chu-Kung, Niloy Mukherjee
  • Patent number: 9412872
    Abstract: Tunneling field effect transistors (TFETs) for CMOS architectures and approaches to fabricating N-type and P-type TFETs are described. For example, a tunneling field effect transistor (TFET) includes a homojunction active region disposed above a substrate. The homojunction active region includes a relaxed Ge or GeSn body having an undoped channel region therein. The homojunction active region also includes doped source and drain regions disposed in the relaxed Ge or GeSn body, on either side of the channel region. The TFET also includes a gate stack disposed on the channel region, between the source and drain regions. The gate stack includes a gate dielectric portion and gate electrode portion.
    Type: Grant
    Filed: October 22, 2014
    Date of Patent: August 9, 2016
    Assignee: Intel Corporation
    Inventors: Roza Kotlyar, Stephen M. Cea, Gilbert Dewey, Benjamin Chu-Kung, Uygar E. Avci, Rafael Rios, Anurag Chaudhry, Thomas D. Linton, Jr., Ian A. Young, Kelin J. Kuhn
  • Publication number: 20160211263
    Abstract: A single fin or a pair of co-integrated n- and p-type single crystal electronic device fins are epitaxially grown from a substrate surface at a bottom of one or a pair of trenches formed between shallow trench isolation (STI) regions. The fin or fins are patterned and the STI regions are etched to form a height of the fin or fins extending above etched top surfaces of the STI regions. The fin heights may be at least 1.5 times their width. The exposed sidewall surfaces and a top surface of each fin is epitaxially clad with one or more conformal epitaxial materials to form device layers on the fin. Prior to growing the fins, a blanket buffer epitaxial material may be grown from the substrate surface; and the fins grown in STI trenches formed above the blanket layer. Such formation of fins reduces defects from material interface lattice mismatches.
    Type: Application
    Filed: September 27, 2013
    Publication date: July 21, 2016
    Inventors: Niti GOEL, Robert S. CHAU, Jack T. KAVALIEROS, Benjamin CHU-KUNG, Matthew V. METZ, Niloy MUKHERJEE, Nancy M. ZELICK, Gilbert DEWEY, Willy RACHMADY, Marko RADOSAVLJEVIC, Van H. LE, Ravi PILLARISETTY, Sansaptak DASGUPTA