Patents by Inventor Benjamin Chu

Benjamin Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150349077
    Abstract: Deep gate-all-around semiconductor devices having germanium or group III-V active layers are described. For example, a non-planar semiconductor device includes a hetero-structure disposed above a substrate. The hetero-structure includes a hetero-junction between an upper layer and a lower layer of differing composition. An active layer is disposed above the hetero-structure and has a composition different from the upper and lower layers of the hetero-structure. A gate electrode stack is disposed on and completely surrounds a channel region of the active layer, and is disposed in a trench in the upper layer and at least partially in the lower layer of the hetero-structure. Source and drain regions are disposed in the active layer and in the upper layer, but not in the lower layer, on either side of the gate electrode stack.
    Type: Application
    Filed: August 7, 2015
    Publication date: December 3, 2015
    Inventors: Ravi Pillarisetty, Willy Rachmady, Van H. Le, Seung Hoon Sung, Jessica S. Kachian, Jack T. Kavalieros, Han Wui Then, Gilbert Dewey, Marko Radosavljevic, Benjamin Chu-Kung, Niloy Mukherjee
  • Publication number: 20150325481
    Abstract: Architectures and techniques for co-integration of heterogeneous materials, such as group III-V semiconductor materials and group IV semiconductors (e.g., Ge) on a same substrate (e.g. silicon). In embodiments, multi-layer heterogeneous semiconductor material stacks having alternating nanowire and sacrificial layers are employed to release nanowires and permit formation of a coaxial gate structure that completely surrounds a channel region of the nanowire transistor. In embodiments, individual PMOS and NMOS channel semiconductor materials are co-integrated with a starting substrate having a blanket layers of alternating Ge/III-V layers. In embodiments, vertical integration of a plurality of stacked nanowires within an individual PMOS and individual NMOS device enable significant drive current for a given layout area.
    Type: Application
    Filed: July 13, 2015
    Publication date: November 12, 2015
    Inventors: Marko RADOSAVLJEVIC, Ravi PILLARISETTY, Gilbert DEWEY, Niloy MUKHERJEE, Jack KAVALIEROS, Willy RACHMADY, Van LE, Benjamin CHU-KUNG, Matthew METZ, Robert CHAU
  • Publication number: 20150298065
    Abstract: A membrane is provided including a coating layer having cellulose nanofibers produced from oxidized cellulose microfibers and an electrospun substrate upon which the coating layer is applied. The nanofibers of the electrospun substrate have a diameter greater than that of the cellulose nanofibers. The membrane also has non-woven support upon which the electrospun substrate is disposed. Microfibers of the non-woven support have a diameter greater than that of the nanofibers of the electrospun substrate. Application of electrospun membrane is in microfiltration area, while the cellulose nanofiber membrane serves in ultrafiltration, nanofiltration, and reverse osmosis after chemical modification.
    Type: Application
    Filed: April 1, 2015
    Publication date: October 22, 2015
    Inventors: Benjamin CHU, Benjamin S. Hsiao, Hongyang Ma
  • Patent number: 9159823
    Abstract: Transistor structures having channel regions comprising alternating layers of compressively and tensilely strained epitaxial materials are provided. The alternating epitaxial layers can form channel regions in single and multigate transistor structures. In alternate embodiments, one of the two alternating layers is selectively etched away to form nanoribbons or nanowires of the remaining material. The resulting strained nanoribbons or nanowires form the channel regions of transistor structures. Also provided are computing devices comprising transistors comprising channel regions comprised of alternating compressively and tensilely strained epitaxial layers and computing devices comprising transistors comprising channel regions comprised of strained nanoribbons or nanowires.
    Type: Grant
    Filed: December 9, 2011
    Date of Patent: October 13, 2015
    Assignee: Intel Corporation
    Inventors: Van H. Le, Benjamin Chu-Kung, Harold Hal W. Kennel, Willy Rachmady, Ravi Pillarisetty, Jack T. Kavalieros
  • Patent number: 9153671
    Abstract: Techniques are disclosed for forming a non-planar germanium quantum well structure. In particular, the quantum well structure can be implemented with group IV or III-V semiconductor materials and includes a germanium fin structure. In one example case, a non-planar quantum well device is provided, which includes a quantum well structure having a substrate (e.g. SiGe or GaAs buffer on silicon), a IV or III-V material barrier layer (e.g., SiGe or GaAs or AlGaAs), a doping layer (e.g., delta/modulation doped), and an undoped germanium quantum well layer. An undoped germanium fin structure is formed in the quantum well structure, and a top barrier layer deposited over the fin structure. A gate metal can be deposited across the fin structure. Drain/source regions can be formed at respective ends of the fin structure.
    Type: Grant
    Filed: December 27, 2013
    Date of Patent: October 6, 2015
    Assignee: INTEL CORPORATION
    Inventors: Ravi Pillarisetty, Jack T. Kavalieros, Willy Rachmady, Uday Shah, Benjamin Chu-Kung, Marko Radosavljevic, Niloy Mukherjee, Gilbert Dewey, Been Y. Jin, Robert S. Chau
  • Publication number: 20150270265
    Abstract: An apparatus including a device including a channel material having a first lattice structure on a well of a well material having a matched lattice structure in a buffer material having a second lattice structure that is different than the first lattice structure. A method including forming a trench in a buffer material; forming an n-type well material in the trench, the n-type well material having a lattice structure that is different than a lattice structure of the buffer material; and forming an n-type transistor. A system including a computer including a processor including complimentary metal oxide semiconductor circuitry including an n-type transistor including a channel material, the channel material having a first lattice structure on a well disposed in a buffer material having a second lattice structure that is different than the first lattice structure, the n-type transistor coupled to a p-type transistor.
    Type: Application
    Filed: June 8, 2015
    Publication date: September 24, 2015
    Inventors: Niti Goel, Ravi Pillarisetty, Niloy Mukherjee, Robert S. Chau, Willy Rachmady, Matthew V. Metz, Van H. Le, Jack T. Kavalieros, Marko Radosavljevic, Benjamin Chu-Kung, Gilbert Dewey, Seung Hoon Sung
  • Patent number: 9136343
    Abstract: Deep gate-all-around semiconductor devices having germanium or group III-V active layers are described. For example, a non-planar semiconductor device includes a hetero-structure disposed above a substrate. The hetero-structure includes a hetero-junction between an upper layer and a lower layer of differing composition. An active layer is disposed above the hetero-structure and has a composition different from the upper and lower layers of the hetero-structure. A gate electrode stack is disposed on and completely surrounds a channel region of the active layer, and is disposed in a trench in the upper layer and at least partially in the lower layer of the hetero-structure. Source and drain regions are disposed in the active layer and in the upper layer, but not in the lower layer, on either side of the gate electrode stack.
    Type: Grant
    Filed: January 24, 2013
    Date of Patent: September 15, 2015
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Willy Rachmady, Van H. Le, Seung Hoon Sung, Jessica S. Kachian, Jack T. Kavalieros, Han Wui Then, Gilbert Dewey, Marko Radosavljevic, Benjamin Chu-Kung, Niloy Mukherjee
  • Publication number: 20150249131
    Abstract: An embodiment of the invention includes an epitaxial layer that directly contacts, for example, a nanowire, fin, or pillar in a manner that allows the layer to relax with two or three degrees of freedom. The epitaxial layer may be included in a channel region of a transistor. The nanowire, fin, or pillar may be removed to provide greater access to the epitaxial layer. Doing so may allow for a “all-around gate” structure where the gate surrounds the top, bottom, and sidewalls of the epitaxial layer. Other embodiments are described herein.
    Type: Application
    Filed: May 8, 2015
    Publication date: September 3, 2015
    Inventors: BENJAMIN CHU-KUNG, VAN LE, ROBERT CHAU, SANSAPTAK DASGUPTA, GILBERT DEWEY, NITIKA GOEL, JACK KAVALIEROS, MATTHEW METZ, NILOY MUKHERJEE, RAVI PILLARISETTY, WILLY RACHMADY, MARKO RADOSAVLJEVIC, HAN WUI THEN, NANCY ZELICK
  • Patent number: 9123790
    Abstract: Embodiments of the present disclosure provide contact techniques and configurations for reducing parasitic resistance in nanowire transistors. In one embodiment, an apparatus includes a semiconductor substrate, an isolation layer formed on the semiconductor substrate, a channel layer including nanowire material formed on the isolation layer to provide a channel for a transistor, and a contact coupled with the channel layer, the contact being configured to surround, in at least one planar dimension, nanowire material of the channel layer and to provide a source terminal or drain terminal for the transistor.
    Type: Grant
    Filed: December 28, 2011
    Date of Patent: September 1, 2015
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Benjamin Chu-Kung, Willy Rachmady, Van H. Le, Gilbert Dewey, Niloy Mukherjee, Matthew V. Metz, Han Wui Then, Marko Radosavljevic
  • Patent number: 9123567
    Abstract: Architectures and techniques for co-integration of heterogeneous materials, such as group III-V semiconductor materials and group IV semiconductors (e.g., Ge) on a same substrate (e.g. silicon). In embodiments, multi-layer heterogeneous semiconductor material stacks having alternating nanowire and sacrificial layers are employed to release nanowires and permit formation of a coaxial gate structure that completely surrounds a channel region of the nanowire transistor. In embodiments, individual PMOS and NMOS channel semiconductor materials are co-integrated with a starting substrate having a blanket layers of alternating Ge/III-V layers. In embodiments, vertical integration of a plurality of stacked nanowires within an individual PMOS and individual NMOS device enable significant drive current for a given layout area.
    Type: Grant
    Filed: December 19, 2011
    Date of Patent: September 1, 2015
    Assignee: Intel Corporation
    Inventors: Marko Radosavljevic, Ravi Pillarisetty, Gilbert Dewey, Niloy Mukherjee, Jack Kavalieros, Willy Rachmady, Van Le, Benjamin Chu-Kung, Matthew Metz, Robert Chau
  • Patent number: 9112028
    Abstract: An apparatus including a device including a channel material having a first lattice structure on a well of a well material having a matched lattice structure in a buffer material having a second lattice structure that is different than the first lattice structure. A method including forming a trench in a buffer material; forming an n-type well material in the trench, the n-type well material having a lattice structure that is different than a lattice structure of the buffer material; and forming an n-type transistor. A system including a computer including a processor including complimentary metal oxide semiconductor circuitry including an n-type transistor including a channel material, the channel material having a first lattice structure on a well disposed in a buffer material having a second lattice structure that is different than the first lattice structure, the n-type transistor coupled to a p-type transistor.
    Type: Grant
    Filed: April 28, 2014
    Date of Patent: August 18, 2015
    Assignee: Intel Corporation
    Inventors: Niti Goel, Ravi Pillarisetty, Niloy Mukherjee, Robert S. Chau, Willy Rachmady, Matthew V. Metz, Van H. Le, Jack T. Kavalieros, Marko Radosavljevic, Benjamin Chu-Kung, Gilbert Dewey, Seung Hoon Sung
  • Publication number: 20150221762
    Abstract: Non-planar semiconductor devices having group III-V material active regions with multi-dielectric gate stacks are described. For example, a semiconductor device includes a hetero-structure disposed above a substrate. The hetero-structure includes a three-dimensional group III-V material body with a channel region. A source and drain material region is disposed above the three-dimensional group III-V material body. A trench is disposed in the source and drain material region separating a source region from a drain region, and exposing at least a portion of the channel region. A gate stack is disposed in the trench and on the exposed portion of the channel region. The gate stack includes first and second dielectric layers and a gate electrode.
    Type: Application
    Filed: April 16, 2015
    Publication date: August 6, 2015
    Inventors: Gilbert Dewey, Marko Radosavljevic, Ravi Pillarisetty, Benjamin Chu-Kung, Niloy Mukherjee
  • Publication number: 20150206796
    Abstract: A trench comprising a portion of a substrate is formed. A nucleation layer is deposited on the portion of the substrate within the trench. A III-N material layer is deposited on the nucleation layer. The III-N material layer is laterally grown over the trench. A device layer is deposited on the laterally grown III-N material layer. A low defect density region is obtained on the laterally grown material and is used for electronic device fabrication of III-N materials on Si substrates.
    Type: Application
    Filed: January 23, 2014
    Publication date: July 23, 2015
    Inventors: Sansaptak Dasgupta, Han Wui Then, Sanaz K. Gardner, Seung Hoon Sung, Marko Radosavljevic, Benjamin Chu-Kung, Sherry R. Taft, Ravi Pillarisetty, Robert S. Chau
  • Publication number: 20150187924
    Abstract: Transistors or transistor layers include an InAlN and AlGaN bi-layer capping stack on a 2DEG GaN channel, such as for GaN MOS structures on Si substrates. The GaN channel may be formed in a GaN buffer layer or stack, to compensate for the high crystal structure lattice size and coefficient of thermal expansion mismatch between GaN and Si. The bi-layer capping stack an upper InAlN layer on a lower AlGaN layer to induce charge polarization in the channel, compensate for poor composition uniformity (e.g., of Al), and compensate for rough surface morphology of the bottom surface of the InAlN material. It may lead to a sheet resistance between 250 and 350 ohms/sqr. It may also reduce bowing of the GaN on Si wafers during growth of the layer of InAlN material, and provide a AlGaN setback layer for etching the InAlN layer in the gate region.
    Type: Application
    Filed: December 26, 2013
    Publication date: July 2, 2015
    Inventors: Sansaptak Dasgupta, Han Wui Then, Marko Radosavljevic, Sanaz K. Gardner, Seung Hoon Sung, Benjamin Chu-Kung, Robert S. Chau
  • Publication number: 20150171205
    Abstract: III-N transistors with recessed gates. An epitaxial stack includes a doped III-N source/drain layer and a III-N etch stop layer disposed between a the source/drain layer and a III-N channel layer. An etch process, e.g., utilizing photochemical oxidation, selectively etches the source/drain layer over the etch stop layer. A gate electrode is disposed over the etch stop layer to form a recessed-gate III-N HEMT. At least a portion of the etch stop layer may be oxidized with a gate electrode over the oxidized etch stop layer for a recessed gate III-N MOS-HEMT including a III-N oxide. A high-k dielectric may be formed over the oxidized etch stop layer with a gate electrode over the high-k dielectric to form a recessed gate III-N MOS-HEMT having a composite gate dielectric stack.
    Type: Application
    Filed: February 24, 2015
    Publication date: June 18, 2015
    Inventors: HAN WUI THEN, Marko Radosavljevic, Uday Shah, Niloy Mukherjee, Ravi Pillarisetty, Benjamin Chu-Kung, Jack T. Kavalieros, Robert S. Chau
  • Patent number: 9054190
    Abstract: An apparatus including a device including a channel material having a first lattice structure on a well of a well material having a matched lattice structure in a buffer material having a second lattice structure that is different than the first lattice structure. A method including forming a trench in a buffer material; forming an n-type well material in the trench, the n-type well material having a lattice structure that is different than a lattice structure of the buffer material; and forming an n-type transistor. A system including a computer including a processor including complimentary metal oxide semiconductor circuitry including an n-type transistor including a channel material, the channel material having a first lattice structure on a well disposed in a buffer material having a second lattice structure that is different than the first lattice structure, the n-type transistor coupled to a p-type transistor.
    Type: Grant
    Filed: April 28, 2014
    Date of Patent: June 9, 2015
    Assignee: Intel Corporation
    Inventors: Niti Goel, Ravi Pillarisetty, Niloy Mukherjee, Robert S. Chau, Willy Rachmady, Matthew V. Metz, Van H. Le, Jack T. Kavalieros, Marko Radosavljevic, Benjamin Chu-Kung, Gilbert Dewey, Seung Hoon Sung
  • Patent number: 9048266
    Abstract: Embodiments of an apparatus and methods of providing a quantum well device for improved parallel conduction are generally described herein. Other embodiments may be described and claimed.
    Type: Grant
    Filed: August 1, 2013
    Date of Patent: June 2, 2015
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Mantu Hudait, Been-Yih Jin, Benjamin Chu-Kung, Robert Chau
  • Publication number: 20150141711
    Abstract: Membranes are provided for energy efficient purification of alcohol by pervaporation. Such membranes include a nanofibrous scaffold in combination with a barrier layer. The barrier layer includes a graphene oxide. The membranes may, in embodiments, also include a substrate.
    Type: Application
    Filed: November 19, 2013
    Publication date: May 21, 2015
    Inventors: Benjamin Chu, Benjamin S. Hsiao, Devinder Mahajan, Tsung-Ming Yeh
  • Patent number: 9029835
    Abstract: An embodiment of the invention includes an epitaxial layer that directly contacts, for example, a nanowire, fin, or pillar in a manner that allows the layer to relax with two or three degrees of freedom. The epitaxial layer may be included in a channel region of a transistor. The nanowire, fin, or pillar may be removed to provide greater access to the epitaxial layer. Doing so may allow for a “all-around gate” structure where the gate surrounds the top, bottom, and sidewalls of the epitaxial layer. Other embodiments are described herein.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: May 12, 2015
    Assignee: Intel Corporation
    Inventors: Benjamin Chu-King, Van Le, Robert Chau, Sansaptak Dasgupta, Gilbert Dewey, Nitika Goel, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Willy Rachmady, Marko Radosavljevic, Han Wui Then, Nancy Zelick
  • Patent number: 9018680
    Abstract: Non-planar semiconductor devices having group III-V material active regions with multi-dielectric gate stacks are described. For example, a semiconductor device includes a hetero-structure disposed above a substrate. The hetero-structure includes a three-dimensional group III-V material body with a channel region. A source and drain material region is disposed above the three-dimensional group III-V material body. A trench is disposed in the source and drain material region separating a source region from a drain region, and exposing at least a portion of the channel region. A gate stack is disposed in the trench and on the exposed portion of the channel region. The gate stack includes first and second dielectric layers and a gate electrode.
    Type: Grant
    Filed: July 25, 2014
    Date of Patent: April 28, 2015
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Marko Radosavljevic, Ravi Pillarisetty, Benjamin Chu-Kung, Niloy Mukherjee