Patents by Inventor Benoit Froment

Benoit Froment has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180233460
    Abstract: A decoupling capacitor includes: two capacitor cells sharing the same well; a first trench isolation passing through the well between the two cells without reaching the bottom of the well; and a contact with the well formed in each cell.
    Type: Application
    Filed: October 19, 2017
    Publication date: August 16, 2018
    Inventors: Mathieu Lisart, Benoit Froment
  • Publication number: 20180061781
    Abstract: A semiconductor chip includes at least two insulated vias passing through the chip from the front face to the rear face in which, on the side of the rear face, the vias are connected to one and the same conducting strip and, on the side of the front face, each via is separated from a conducting pad by a layer of a dielectric.
    Type: Application
    Filed: June 30, 2017
    Publication date: March 1, 2018
    Inventors: Sebastien Petitdidier, Nicolas Hotellier, Raul Andres Bianchi, Alexis Farcy, Benoît Froment
  • Patent number: 8975682
    Abstract: An integrated circuit (IC) includes at least one capacitor with metal electrodes. At least one of the electrodes (10 or 30) is formed from at least surface-silicided hemispherical grain silicon or silicon alloy. A fabrication process for obtaining such a capacitor with silicided metal electrodes is also provided.
    Type: Grant
    Filed: August 23, 2010
    Date of Patent: March 10, 2015
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: Aomar Halimaoui, Rebha El Farhane, Benoit Froment
  • Patent number: 8354725
    Abstract: The invention concerns a conducting layer having a thickness of between 1 and 5 atoms, an insulated gate being formed over a part of the conducting layer.
    Type: Grant
    Filed: January 4, 2011
    Date of Patent: January 15, 2013
    Assignee: STMicroelectronics Crolles 2 SAS
    Inventors: Benoit Froment, Etienne Robilliart
  • Patent number: 8295028
    Abstract: Capacitive coupling devices and methods of fabricating a capacitive coupling device are disclosed. The coupling device could include a stack of layers forming electrodes and at least one insulator. The insulator could include a region of doped silicon. The silicon could be doped with a species selected from Ce, Cr, Co, Cu, Dy, Er, Eu, Ho, Ir, Li, Lu, Mn, Pr, Rb, Sm, Sr, Tb, Tm, Yb, Y, Ac, Am, Ba, Be, Cd, Gd, Fe, La, Pb, Ni, Ra, Sc, Th, Hf, Tl, Sn, Np, Rh, U, Zn, Ag, and Yb in relief and forming roughnesses relative to the neighboring regions of the same level in the stack. The electrodes and the insulator form conformal layers above the doped silicon region.
    Type: Grant
    Filed: February 29, 2008
    Date of Patent: October 23, 2012
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventor: Benoit Froment
  • Patent number: 7947583
    Abstract: An embodiment of a method for forming silicide areas of different thicknesses in a device comprising first and second silicon areas, comprising the steps of: implanting antimony or aluminum in the upper portion of the first silicon areas; covering the silicon areas with a metallic material; and heating the device to transform all or part of the silicon areas into silicide areas, whereby the silicide areas formed at the level of the first silicon areas are thinner than the silicide areas formed at the level of the second silicon areas.
    Type: Grant
    Filed: November 2, 2006
    Date of Patent: May 24, 2011
    Assignee: STMicroelectronics, SA
    Inventors: Delphine Aime, Benoît Froment
  • Publication number: 20110095375
    Abstract: The invention concerns a conducting layer having a thickness of between 1 and 5 atoms, an insulated gate being formed over a part of the conducting layer.
    Type: Application
    Filed: January 4, 2011
    Publication date: April 28, 2011
    Applicant: STMicroelectronics Crolles 2 SAS
    Inventors: Benoit Froment, Etienne Robilliart
  • Publication number: 20110095381
    Abstract: A MOS transistor having its gate successively comprising an insulating layer, a metal silicide layer, a layer of a conductive encapsulation material, and a polysilicon layer.
    Type: Application
    Filed: October 5, 2005
    Publication date: April 28, 2011
    Inventors: Markus Müller, Benoît Froment
  • Publication number: 20100320567
    Abstract: An integrated circuit (IC) includes at least one capacitor with metal electrodes. At least one of the electrodes (10 or 30) is formed from at least surface-silicided hemispherical grain silicon or silicon alloy. A fabrication process for obtaining such a capacitor with silicided metal electrodes is also provided.
    Type: Application
    Filed: August 23, 2010
    Publication date: December 23, 2010
    Applicants: STMicroelectronics (Crolles 2) SAS, Koninklijke Philips Electronics N.V.
    Inventors: Aomar HALIMAOUI, Rebha EL FARHANE, Benoit FROMENT
  • Patent number: 7781296
    Abstract: An integrated circuit (IC) includes at least one capacitor with metal electrodes. At least one of the electrodes (10 or 30) is formed from at least surface-silicided hemispherical grain silicon or silicon alloy. A fabrication process for obtaining such a capacitor with silicided metal electrodes is also provided.
    Type: Grant
    Filed: June 7, 2005
    Date of Patent: August 24, 2010
    Assignees: STMicroelectronics SAS, Koninklijke Philips Electronics N.V.
    Inventors: Aomar Halimaoui, Rebha El Farhane, Benoit Froment
  • Patent number: 7638427
    Abstract: An MOS transistor with a fully silicided gate is produced by forming a silicide compound in the gate separately and independently of silicide portions located in source and drain zones of the transistor. To this end, the silicide portions of the source and drain zones are covered by substantially impermeable coatings. The coatings prevent the silicide portions of the source and drain zones from increasing in volume during separate and independent formation of the gate silicide compound. The silicide gate may thus be thicker than the silicide portions of the source and drain zones.
    Type: Grant
    Filed: January 10, 2006
    Date of Patent: December 29, 2009
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: Benoît Froment, Delphine Aime
  • Patent number: 7622387
    Abstract: A fully-silicided gate electrode is formed from silicon and a metal by depositing at least two layers of silicon with the metal layer therebetween. One of the silicon layers may be amorphous silicon whereas the other silicon layer may be polycrystalline silicon. The silicon between the metal layer and the gate dielectric may be deposited in two layers having different crystallinities. This process enables greater control to be exercised over the phase of the silicide resulting from this silicidation process.
    Type: Grant
    Filed: August 29, 2005
    Date of Patent: November 24, 2009
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Vidya Kaushik, Benoit Froment
  • Publication number: 20080278886
    Abstract: Capacitive coupling devices and methods of fabricating a capacitive coupling device are disclosed. The coupling device could include a stack of layers forming electrodes and at least one insulator. The insulator could include a a region of doped silicon. The silicon could be doped with a species selected from Ce, Cr, Co, Cu, Dy, Er, Eu, Ho, Ir, Li, Lu, Mn, Pr, Rb, Sm, Sr, Tb, Tm, Yb, Y, Ac, Am, Ba, Be, Cd, Gd, Fe, La, Pb, Ni, Ra, Sc, Th, Hf, Tl, Sn, Np, Rh, U, Zn, Ag, and Yb in relief and forming roughnesses relative to the neighbouring regions of the same level in the stack. The electrodes and the insulator form conformal layers above the doped silicon region.
    Type: Application
    Filed: February 29, 2008
    Publication date: November 13, 2008
    Applicant: STMicroelectronics (Crolles 2) SAS
    Inventor: Benoit Froment
  • Publication number: 20080197498
    Abstract: A fully-silicided gate electrode is formed from silicon and a metal by depositing at least two layers of silicon with the metal layer therebetween. One of the silicon layers may be amorphous silicon whereas the other silicon layer may be polycrystalline silicon. The silicon between the metal layer and the gate dielectric may be deposited in two layers having different crystallinities. This process enables greater control to be exercised over the phase of the silicide resulting from this silicidation process.
    Type: Application
    Filed: August 29, 2005
    Publication date: August 21, 2008
    Applicant: Freescale Semiconductor, Inc.
    Inventors: Vidya Kaushik, Benoit Froment
  • Publication number: 20080185681
    Abstract: An integrated circuit (IC) includes at least one capacitor with metal electrodes. At least one of the electrodes (10 or 30) is formed from at least surface-silicided hemispherical grain silicon or silicon alloy. A fabrication process for obtaining such a capacitor with silicided metal electrodes is also provided.
    Type: Application
    Filed: June 7, 2005
    Publication date: August 7, 2008
    Inventors: Aomar Halimaoui, Rebha El Farhane, Benoit Froment
  • Publication number: 20080135827
    Abstract: The invention concerns a conducting layer having a thickness of between 1 and 5 atoms, an insulated gate being formed over a part of the conducting layer.
    Type: Application
    Filed: September 25, 2007
    Publication date: June 12, 2008
    Applicant: STMicroelectronics Crolles 2 SAS
    Inventors: Benoit Froment, Etienne Robilliart
  • Publication number: 20070099408
    Abstract: An embodiment of a method for forming silicide areas of different thicknesses in a device comprising first and second silicon areas, comprising the steps of: implanting antimony or aluminum in the upper portion of the first silicon areas; covering the silicon areas with a metallic material; and heating the device to transform all or part of the silicon areas into silicide areas, whereby the silicide areas formed at the level of the first silicon areas are thinner than the silicide areas formed at the level of the second silicon areas.
    Type: Application
    Filed: November 2, 2006
    Publication date: May 3, 2007
    Inventors: Delphine Aime, Benoit Froment
  • Publication number: 20070034948
    Abstract: An integrated circuit provided with an NMOS transistor includes a metal silicide on source, drain and gate regions and also on at least one portion of the source and drain extension zones The metal silicide portion located on the source and drain extension zones is thinner than the metal silicide portion located on the source and drain regions.
    Type: Application
    Filed: July 19, 2006
    Publication date: February 15, 2007
    Applicant: STMicroelectronics (Crolles 2) SAS
    Inventors: Florian Cacho, Benoit Froment
  • Publication number: 20060172492
    Abstract: An MOS transistor with a fully silicided gate is produced by forming a silicide compound in the gate separately and independently of silicide portions located in source and drain zones of the transistor. To this end, the silicide portions of the source and drain zones are covered by substantially impermeable coatings. The coatings prevent the silicide portions of the source and drain zones from increasing in volume during separate and independent formation of the gate silicide compound. The silicide gate may thus be thicker than the silicide portions of the source and drain zones.
    Type: Application
    Filed: January 10, 2006
    Publication date: August 3, 2006
    Applicant: STMicroelectronics (Crolles 2) SAS
    Inventors: Benoit Froment, Delphine Aime
  • Patent number: 7018865
    Abstract: A semiconductor material is protected against the formation of a metal silicide by forming a layer of a silicon/germanium alloy on the material. The material which is protected belongs to a component of an integrated circuit comprising other components that have to be subjected to a siliciding operation. The method of protection includes depositing a layer of silicon/germanium alloy on the integrated circuit. The layer of silicon/germanium alloy is then removed from the areas to be silicided. A metal is then deposited on the structure and a metal silicide is formed therefrom. The unreacted metal and the metal/silicon/germanium ternary alloy that may have formed are removed, and the layer of silicon/germanium alloy is removed so as to expose the unsilicided component.
    Type: Grant
    Filed: June 21, 2004
    Date of Patent: March 28, 2006
    Assignee: STMicroelectronics S.A.
    Inventors: Benoît Froment, François Wacquant