Abstract: Methods and apparatus for separation of a nanoimprint template from a solidified patterned layer on a substrate that minimize separation defects, including last point of separation (LPOS) defects. The method can include: moving the template and substrate relative to one another to create a tensional force that is applied to the template and the substrate; measuring the tensional force applied to the template and the substrate; determining an amount of pressure to apply to the backsides of the template and the substrate to reduce the amount of applied tensional force; reducing the tensional force applied to the template or the substrate by applying the determined amount of pressure to the backsides of the template and the substrate; and then repeating the above steps one or more times until the template fully separates from the solidified patterned layer. The apparatus can be configured to achieve such methods.

Abstract: A touch sensor laminate includes a polarizing plate having a predetermined stretching direction, and a sensing pattern layer formed on at least one surface of the polarizing plate. The sensing pattern layer includes a first pattern formed along a first direction, a second pattern formed along a second direction, and a bridge electrode electrically connecting isolated unit patterns included in the second pattern. The first pattern includes a plurality of unit patterns, and a connection portion connecting neighboring unit patterns of the plurality of unit patterns, the connection portion having a width smaller than a maximum width of the unit pattern of the first pattern. An angle between the stretching direction of the polarizing plate and a length direction of the connection portion is 60° or less.

Abstract: A touch panel comprises a substrate and a touch sensing electrode formed on at least one surface of the substrate. The touch sensing electrode includes a first sensing pattern formed in a first direction, a second sensing pattern formed in a second direction, a first relay pattern formed at an inside of the first sensing pattern in an island form, a second relay pattern formed between the first sensing pattern and the second sensing pattern, and a connection pattern which electrically connect separated unit patterns of the second sensing pattern via the first relay pattern and the second relay pattern. The connection pattern includes a first connection pattern which connects the first relay pattern and the second relay pattern, and a second connection pattern which connects the second relay pattern and the unit pattern of the second sensing pattern.

Abstract: Methods and systems are provided for fabricating polymer-based imprint lithography templates having thin metallic or oxide coated patterning surfaces. Such templates show enhanced fluid spreading and filling (even in absence of purging gases), good release properties, and longevity of use. Methods and systems for fabricating oxide coated versions, in particular, can be performed under atmospheric pressure conditions, allowing for lower cost processing and enhanced throughput.

Abstract: A touch sensor includes a sensing pattern which include a first mesh pattern formed in a first direction and a second mesh pattern formed in a second direction, the second mesh pattern including isolated unit patterns, a bridge electrode connecting the neighboring unit patterns of the second mesh pattern, an insulation layer disposed between the sensing pattern and the bridge electrode, and an auxiliary electrode layer on an at least one of the first mesh pattern and the second mesh pattern, the auxiliary electrode layer being connected to at least one of the first mesh pattern and the second mesh pattern.

Abstract: A touch sensor includes a sensing pattern which includes a first mesh pattern formed in a first direction and a second mesh pattern formed in a second direction, the second mesh pattern including isolated unit patterns, a bridge electrode connecting the neighboring isolated unit patterns of the second mesh patterns, an insulation layer disposed between the sensing pattern and the bridge electrodes, and an auxiliary mesh pattern disposed on or below at least one of the first mesh pattern and the second mesh pattern, the auxiliary mesh pattern being connected to at least one of the first mesh pattern and the second mesh pattern.

Abstract: Methods and systems are provided for fabricating polymer-based imprint lithography templates having thin metallic or oxide coated patterning surfaces. Such templates show enhanced fluid spreading and filling (even in absence of purging gases), good release properties, and longevity of use. Methods and systems for fabricating oxide coated versions, in particular, can be performed under atmospheric pressure conditions, allowing for lower cost processing and enhanced throughput.

Abstract: A touch sensor includes a driving electrode which includes at least two divided areas electrically separated from each other, wherein each divided area includes first patterns connected to each other in a first direction and second patterns extending from the first pattern in a second direction, and a receiving electrode which is formed on the same plane as the driving electrode in the second direction, wherein the driving electrodes are respectively connected to separate driving channels by driving electrode wirings for each divided area, such that it is possible to sense touch positions over the entire area only by a smaller number of channels. Thereby, it is possible to significantly reduce the bezel width, and may maintain excellent touch sensitivity while significantly shortening the touch recognition time.

Abstract: An imprint lithography system that pressurizes and depressurizes an air cavity behind a retained imprint template or substrate so as to deflect the template or substrate to aid in filling the template pattern with fluid resist and/or separating the template from the cured resist on the substrate. The system includes a controller, pressure sensors, and an impedance valve for modulating the air cavity pressure so as to reduce pressure wave oscillations within the cavity that otherwise negatively impact overlay accuracy control, fluid spread control and separation control.

Abstract: The present invention relates to a touch sensor comprising: a plurality of first sensing electrode patterns formed in a way that they are connected to each other along a first direction on a substrate; a plurality of second sensing electrode patterns formed in a way that they are separated from each other along a second direction on the substrate; insulating portions electrically insulating the first sensing electrode patterns and the second sensing electrode patterns; and bridge pattern portions electrically connecting the adjacent second sensing electrode patterns, wherein the bridge pattern portions comprise: contact portions which are respectively contacted to the adjacent second sensing electrode patterns, and connecting portions connecting the contact portions and having a narrower width than the contact portions.

Abstract: A touch sensor includes a substrate having at least one bending portion; and a sensing pattern on the substrate, the sensing pattern including a first pattern and a second pattern, the first pattern being arranged along a first direction parallel to a surface of the substrate, the second pattern being arranged along a second direction, the second direction being parallel to the surface of the substrate and crossing the first direction. The second pattern includes unit patterns isolated from each other, and a bridge electrode electrically connecting neighboring unit patterns of the unit patterns. The bridge electrode extends along the same direction as a bending direction of the bending portion.

Abstract: An imprint lithography template or imprinting stack includes a porous material defining a multiplicity of pores with an average pore size of at least about 0.4 nm. A porosity of the porous material is at least about 10%. The porous template, the porous imprinting stack, or both may be used in an imprint lithography process to facilitate diffusion of gas trapped between the template and the imprinting stack into the template, the imprinting stack or both, such that polymerizable material between the imprinting stack and the template rapidly forms a substantially continuous layer between the imprinting stack and the template.

Abstract: Imprint lithography template chucks and related systems and methods are provided that substantially maintain structural support functions while significantly enhancing imprint quality functions. The chucks incorporate dynamic vacuum seals to substantially reduce template contact during alignment and distortion correction while still providing good structural support upon separation.

Abstract: The present invention relates to a touch sensing electrode with a polarizing plate, a display device comprising the same, and a method for fabricating the same. The touch sensing electrode with a polarizing plate according to the present invention comprises a touch sensing electrode capable of being folded and unfolded on its folding axis; a retardation film disposed on the touch sensing electrode and having a slow axis that forms an inclined angle with the folding axis; and a polarizing plate disposed on the retardation film.

Abstract: Provided is an imprint apparatus that imprints a pattern formed on a mold onto a substrate. The imprint apparatus includes a substrate holder that holds the substrate and can move in a direction along the surface of the substrate; a gas supply unit for supplying a gas into a space between a pattern part of the mold and the substrate; and a wall part that is disposed so as to enclose the space that is supplied with gas, wherein at a position opposed to the substrate and the mold, the wall part faces the substrate holder or the substrate with a gap therebetween.

Abstract: Methods and systems are provided for fabricating polymer-based imprint lithography templates having thin metallic or oxide coated patterning surfaces. Such templates show enhanced fluid spreading and filling (even in absence of purging gases), good release properties, and longevity of use. Methods and systems for fabricating oxide coated versions, in particular, can be performed under atmospheric pressure conditions, allowing for lower cost processing and enhanced throughput.

Abstract: In an embodiment, an imprint apparatus can include a substrate holder having a chucking region and a recessed support section; and a template holder, wherein the chucking region has more area as compared to a template region. In another embodiment, an imprint apparatus can include gas zones; and a gas controller that can be configured to adjust pressures within the gas zones to induce a convex curvature of a partial field of a workpiece used with the imprint apparatus. A method can include providing a workpiece within an imprint apparatus, wherein the workpiece includes a substrate and a formable material; and initially contacting a template with the formable material at a location spaced apart from the periphery of a partial field. In a particular embodiment, the method can further include modulating the substrate to form a convex shape contacting the template with the formable material.

Abstract: A composite cathode active material, a method of preparing the composite cathode active material, a cathode including the composite cathode active material, and a lithium battery including the cathode. The composite cathode active material includes a lithium intercalatable material; and a garnet oxide, wherein an amount of the garnet oxide is about 1.9 wt % or less, based on a total weight of the composite cathode active material.

Abstract: A touch panel comprises a substrate and a touch sensing electrode formed on at least one surface of the substrate. The touch sensing electrode includes a first sensing pattern formed in a first direction, a second sensing pattern formed in a second direction, a first relay pattern formed at an inside of the first sensing pattern in an island form, a second relay pattern formed between the first sensing pattern and the second sensing pattern, and a connection pattern which electrically connect separated unit patterns of the second sensing pattern via the first relay pattern and the second relay pattern. The connection pattern includes a first connection pattern which connects the first relay pattern and the second relay pattern, and a second connection pattern which connects the second relay pattern and the unit pattern of the second sensing pattern.

Abstract: A touch sensor includes a sensing pattern including a first pattern and has unit patterns connected with each other through connection parts thereof, and a second pattern having separated unit patterns, and bridge electrodes connecting the separated unit patterns, wherein at least a portion of a boundary between the first pattern and the second pattern includes convex parts of a curved line and concave parts of a curved line between the convex parts, and the convex part of the first pattern and the concave part of the second pattern face each other, and the concave part of the first pattern and the convex part of the second pattern face each other. The touch sensor has excellent touch sensitivity while suppressing an occurrence of cracks in the sensing pattern due to a stress concentration during bending, and preventing the sensing pattern from being viewed by a user.