Abstract: A head module of an imprint lithography system includes a base, a control body coupled to the base, a first set of actuators configured to generate a first force to translate the control body relative to the base along a first axis and to rotate the control body relative to the base about a second axis perpendicular to the first axis and about a third axis perpendicular to the first axis and to the second axis, a second set of actuators configured to generate a second force to translate the control body relative to the base in a plane defined by the second axis and the third axis and to rotate the control body relative to the base about the first axis, and a flexure coupling the base and the control body and restricting translation and rotation of the control body with respect to the base.

Abstract: A touch sensor integrated with OLED includes an organic light emitting diode (OLED) device, a touch electrode having a mesh type and a self-capacitance type structure. The touch electrode is attached to a surface of the OLED device and included at least a double-layered structure that includes a metal layer and a metal oxide.

Abstract: An imprint lithography alignment method includes assessing a first alignment error between the template and the substrate, generating a first input signal corresponding to a first relative motion between the template and the substrate, initiating the first relative motion between the template and the substrate via the first input signal, assessing an output signal corresponding to the first relative motion, comparing the first input signal and the output signal to yield a motion control action corresponding to a second relative motion between the template and the substrate, generating a second input signal corresponding to the second relative motion between the template and the substrate, initiating the second relative motion between the template and the substrate via the second input signal, and assessing a second alignment error between the template and the substrate, wherein a magnitude of the first alignment error exceeds a magnitude of the second alignment error.

Abstract: The present invention relates to a touch sensor comprising: a plurality of first sensing electrode patterns formed in a way that they are connected to each other along a first direction on a substrate; a plurality of second sensing electrode patterns formed in a way that they are separated from each other along a second direction on the substrate; insulating portions electrically insulating the first sensing electrode patterns and the second sensing electrode patterns; and bridge pattern portions electrically connecting the adjacent second sensing electrode patterns, wherein the bridge pattern portions comprise: contact portions which are respectively contacted to the adjacent second sensing electrode patterns, and connecting portions connecting the contact portions and having a narrower width than the contact portions.

Abstract: A touch sensor includes a base layer, a plurality of sensing electrodes and a conductive capping pattern covering each of the sensing electrodes. Each of the sensing electrodes includes a first transparent conductive oxide pattern, a metal pattern and a second transparent conductive oxide pattern which are sequentially stacked on the base layer.

Abstract: A method that can be used in the formation of replica imprint templates. The method can include providing a substrate with a substrate mesa defining an active region having a first area and a template with a template mesa defining a patterning region having a second area, where first area is larger than the second area. The template can then be positioned relative to the substrate such that patterning region of the template mesa overlaps the active region of the substrate mesa. The method can be used in forming a replica template. The formed replica template can be used to form a patterned layer on e.g. a semiconductor wafer in fabricating an electronic device. A system can be configured to carry out the methods.

Abstract: An electrode connection structure includes a substrate layer, a plurality of pads on the substrate layer, and an insulation layer at least partially covering the substrate layer and the pads. The insulation layer includes a plurality of holes on the pads and at least one first groove line extending between the pads neighboring each other.

Abstract: A touch sensor includes a substrate layer, a plurality of sensing electrodes on the substrate layer, and at least one device hole penetrating through one or more of the sensing electrodes. A functional device of an image display device may overlap the device hole so that an optical interference by the touch sensor may be prevented.

Abstract: A touch sensor includes a substrate layer, a plurality of sensing electrodes on the substrate layer, and a dummy line between the sensing electrodes, the dummy line extending along a boundary of the sensing electrode. Electrode visibility is reduced by the dummy line, and touch sensitivity of the touch sensor is also improved.

Abstract: Control of lateral strain and lateral strain ratio (dt/db) between template and substrate through the selection of template and/or substrate thicknesses (Tt and/or Tb), control of template and/or substrate back pressure (Pt and/or Pb), and/or selection of material stiffness are described.

Abstract: A touch sensor includes a substrate layer, a plurality of sensing electrodes on the substrate layer, the sensing electrodes including electrode lines therein, and dummy patterns disposed between the sensing electrodes by a pattern period corresponding to that of the electrode lines included in the sensing electrodes. Electrode visibility is reduced by the dummy patterns, and optical and electrical properties of the touch sensor are also improved.

Abstract: An imprint apparatus includes a substrate holder including a plurality of chucking regions for chucking a substrate, and a controller that controls chucking forces of the chucking regions. The chucking regions include a first chucking region for chucking a periphery of a first substrate having a first diameter, a second chucking region for chucking a periphery of a second substrate having a second diameter larger than the first diameter, a third chucking region group divided into a plurality of regions inside the first chucking region, and a fourth chucking region group divided into a plurality of regions between the first chucking region and the second chucking region. The controller controls the chucking forces of each of the chucking regions.

Abstract: Reducing an alignment error of an imprint lithography template with respect to a substrate includes locating central alignment marks of the template with respect to corresponding central alignment marks of the substrate and locating peripheral alignment marks of the template with respect to corresponding peripheral alignment marks of the substrate. In-plane alignment error of the template is assessed based on relative positions of central alignment marks of the template and corresponding central alignment marks of the substrate. A combined alignment error of the template is assessed based on relative positions of peripheral alignment marks of the template and corresponding peripheral alignment marks of the substrate. Out-of-plane alignment error of the template is assessed based on a difference between the-combined and the in-plane alignment error of the template, and a relative position of the template and the substrate is adjusted to reduce the out-of-plane alignment error of the template.

Abstract: Reducing an overlay error in nanoimprint lithography includes forming an imprinted substrate having pairs of corresponding peripheral overlay marks and corresponding central overlay marks on the imprinted substrate. An in-plane overlay error is assessed based on relative positions of corresponding central overlay marks, and a combined overlay error is assessed based on relative positions of corresponding peripheral overlay marks. A difference between the combined overlay error and the in-plane overlay error is assessed to yield an adjusted overlay error for each pair of corresponding peripheral overlay marks.

Abstract: A touch sensor includes a substrate layer, first sensing electrodes arranged on the substrate layer along a first direction parallel to a top surface of the substrate layer, the first sensing electrodes including first slits therein, second sensing electrodes arranged on the substrate layer along a second direction parallel to a top surface of the substrate layer and crossing the first direction, the second sensing electrodes including second slits therein, bridge electrodes electrically connecting neighboring ones of the first sensing electrodes, and connecting portions which connect neighboring ones of the second sensing electrodes.

Abstract: An OLED-integrated touch sensor includes an organic light emitting diode (OLED) device, and a touch electrode on a surface of the OLED device. The touch electrode includes a driving electrode formed on one surface of a base layer and a receiving electrode formed on an opposing surface of the base layer relative to the one surface. The touch electrode is combined with the OLED device such that the driving electrode faces the surface of the OLED device.

Abstract: A touch sensing electrode structure includes sensing electrodes, each of which including a plurality of unit patterns, and traces electrically connected to the sensing electrodes. The traces include at least two trace lines and trace bridges connecting the at least two trace lines to each other. An electrode visibility due to a pattern deviation is reduced and a reliability of the trace is improved by the trace bridge.

Abstract: A touch sensor includes a sensing pattern including a first pattern and has unit patterns connected with each other through connection parts thereof, and a second pattern having separated unit patterns, and bridge electrodes connecting the separated unit patterns, wherein at least a portion of a boundary between the first pattern and the second pattern includes convex parts of a curved line and concave parts of a curved line between the convex parts, and the convex part of the first pattern and the concave part of the second pattern face each other, and the concave part of the first pattern and the convex part of the second pattern face each other. The touch sensor has excellent touch sensitivity while suppressing an occurrence of cracks in the sensing pattern due to a stress concentration during bending, and preventing the sensing pattern from being viewed by a user.

Abstract: A composite cathode active material, a method of preparing the composite cathode active material, a cathode including the composite cathode active material, and a lithium battery including the cathode. The composite cathode active material includes a lithium intercalatable material; and a garnet oxide, wherein an amount of the garnet oxide is about 1.9 wt % or less, based on a total weight of the composite cathode active material.

Abstract: A touch sensor laminate includes a polarizing plate having a predetermined stretching direction, and a sensing pattern layer formed on at least one surface of the polarizing plate. The sensing pattern layer includes a first pattern formed along a first direction, a second pattern formed along a second direction, and a bridge electrode electrically connecting isolated unit patterns included in the second pattern. The first pattern includes a plurality of unit patterns, and a connection portion connecting neighboring unit patterns of the plurality of unit patterns, the connection portion having a width smaller than a maximum width of the unit pattern of the first pattern. An angle between the stretching direction of the polarizing plate and a length direction of the connection portion is 60° or less.