Abstract: Methods, systems, and apparatus for of adjusting a shape of an imprint lithography template, including identifying a shape of an active area positioned on a first side of the template, the active area including patterning features; determining a correspondence between a shape of an adaptive chuck and the shape of the active area positioned on the first side of the template, the adaptive chuck coupled to a second side of the template, the second side opposite the first side of the template; and adjusting, by an actuation system coupled to the adaptive chuck, the shape of the adaptive chuck based on the correspondence to obtain a target shape of the active area positioned on the first side of the template.

Abstract: Systems and methods for partial field imprinting are provided such that imprint templates are asymmetrically modulated to allow initial contact with a partial field on a substrate at a location spaced apart from the template center.

Abstract: The present invention relates to a touch sensor having an antenna. The touch sensor comprises: a touch sensor part including a sensing electrode part; and an antenna part formed on the touch sensor part. The antenna part is formed in a state of being insulated from the sensing electrode part on the sensing electrode part composing the touch sensor part. According to the present invention, even when mounting the antenna on a display region in which a touch sensor is installed, noise due to interference between a touch sensor signal and an antenna transmission/reception signal can be minimized.

Abstract: Methods, systems, and apparatus for applying an imprinting force to an imprint lithography template, including providing, by a controller using a first control loop, a first control signal to a first actuator associated with the first control loop; providing, by the controller using a second control loop, a second control signal to a second actuator associated with the second control loop, wherein the second control loop and the first control loop are different; and applying, to the imprint lithography template, at least one of: a first force by the first actuator in response to the first control signal, and a second force by the second actuator in response to the second control signal.

Abstract: A digitizer in which a touch sensing electrode of a self-capacitive type touch sensor and a first electrode of the digitizer are formed on the same layer is provided. The digitizer according to the present invention has a high level of pressure sensing and a simplified manufacturing process.

Abstract: A flexible digitizer comprising a flexible substrate and a first and a second electrodes having thicknesses of 2000 ? to 1 ?m is provided. The digitizer according to the present invention has sufficient flex resistance for application to a flexible display device with superior electrical characteristics and visibility.

Abstract: A system and method of imprinting a formable material on a substrate includes a feature with a template. The substrate is initially held with a first back pressure. After which the template is brought into contact with the formable material. A template strain tensor above the feature may be greater than a strain threshold. The substrate is then held with a second back pressure less than the first back pressure, after which the substrate strain below the feature increases. After which the formable material is solidified.

Abstract: A thermal frame of an imprinting apparatus has an motor and a cooling element. A metrology frame of the imprinting apparatus is coupled to an output end of the motor and receives an imprinting mold. Thermal isolation is provided between the motor and the metrology frame. Thermal sensors are disposed at locations of the frames. A digital controller applies a control signal for controlling a driving signal of the cooling element to maintain a thermal balance, such as thermal equilibrium, of heat flow between the frames. The digital controller uses output of the thermal sensors to identify transfer functions of heat flow used to calculate the control signal. The feedforward design avoids the very low control bandwidth that limits the performance of typical feedback designs.

Abstract: Provided is a touch sensor capable of forming a fine pattern by forming a touch sensor pattern layer on an outgassing prevention layer so that both a finger input and a pen input can be detected.

Abstract: A touch sensor includes a base layer, first sensing electrodes arranged on the base layer along a first direction, second sensing electrodes arranged on the base layer along a second direction, first compensation electrodes on the first sensing electrodes, and second compensation electrodes on the second sensing electrodes. The first compensation electrodes entirely cover each of the first sensing electrodes in a plan view, and the second compensation entirely cover each of the second sensing electrodes in a plan view.

Abstract: The present invention relates to an input sensor capable of sensing writing pressure and a display device including the same.

Abstract: An imprint lithography alignment method includes assessing a first alignment error between the template and the substrate, generating a first input signal corresponding to a first relative motion between the template and the substrate, initiating the first relative motion between the template and the substrate via the first input signal, assessing an output signal corresponding to the first relative motion, comparing the first input signal and the output signal to yield a motion control action corresponding to a second relative motion between the template and the substrate, generating a second input signal corresponding to the second relative motion between the template and the substrate, initiating the second relative motion between the template and the substrate via the second input signal, and assessing a second alignment error between the template and the substrate, wherein a magnitude of the first alignment error exceeds a magnitude of the second alignment error.

Abstract: A mold includes a pattern portion in which a pattern is formed, and a concave portion formed in the back surface of the pattern portion and having a size to include the pattern portion in a planar view. The edge of the pattern portion has an almost rectangular shape in the planar view. The concave portion has an almost rectangular shape with four rounded corners in the planar view. The shortest distance from each point on a side of the edge of the pattern portion to the edge of the concave portion is constant.

Abstract: A digitizer module is formed on a film substrate which is used as a substrate of an OLED module and stacked with the OLED module, thereby providing an OLED integrated digitizer applicable to a flexible display device.

Abstract: An electrode connection unit includes an electrode connection unit body and a protective layer which covers at least a portion of an edge portion of the electrode connection unit body to satisfy a specific relation of area. An occurrence of cracks in the edge portions of the electrode connection unit body may be prevented when a bending stress is applied during a manufacturing process or treating a product.

Abstract: Systems and methods for improving robust layer separation during the separation process of an imprint lithography process are described. Included are methods of matching strains between a substrate to be imprinted and the template, varying or modifying the forces applied to the template and/or the substrate during separation, or varying or modifying the kinetics of the separation process.

Abstract: A touch sensor includes a driving electrode which includes at least two divided areas electrically separated from each other, wherein each divided area includes first patterns connected to each other in a first direction and second patterns extending from the first pattern in a second direction, and a receiving electrode which is formed on the same plane as the driving electrode in the second direction, wherein the driving electrodes are respectively connected to separate driving channels by driving electrode wirings for each divided area, such that it is possible to sense touch positions over the entire area only by a smaller number of channels. Thereby, it is possible to significantly reduce the bezel width, and may maintain excellent touch sensitivity while significantly shortening the touch recognition time.

Abstract: A touch sensing electrode structure includes an electrode line and connecting electrodes. The electrode line extends in a first direction as a zigzag line shape, and a plurality of the electrode lines are arranged along a second direction that crosses the first direction. The connecting electrodes extend in the second direction and connect neighboring ones of the electrode lines to form a plurality of concave polygonal patterns.

Abstract: Provided is an imprint apparatus for contacting a resin applied to a substrate with a mold to perform patterning on the substrate. The imprint apparatus includes a substrate holding unit for holding the substrate, wherein the substrate holding unit comprises a plurality of holding areas arranged in a predetermined direction, the plurality of holding areas has different width dimension in the direction respectively based on positions in the direction, a surface ratio between two holding areas of the plurality of holding areas with different width dimension respectively is within a range of 0.8 to 1.2.

Abstract: A nanoimprint lithography template including, inter alia, a body having first and second opposed sides with a first surface disposed on the first side, the second side having a recess disposed therein, the body having first and second regions with the second region surrounding the first region and the recess in superimposition with the first region, with a portion of the first surface in superimposition with the first region being spaced-apart from the second side a first distance and a portion of the first surface in superimposition with the second region being spaced-apart from the second side a second distance, with the second distance being greater than the first distance; and a mold disposed on the first side of the body in superimposition a portion of the first region.