Abstract: An antenna device according to an embodiment of the present invention includes a dielectric layer, a first electrode layer disposed on a top surface of the dielectric layer, the first electrode layer including a radiation pattern, a second electrode layer disposed on a bottom surface of the dielectric layer, and a flexible circuit board connecting the first electrode layer and the second electrode layer with each other along a lateral portion of the dielectric layer. Efficiency of grounding and noise removing may be improved by the flexible circuit board.

Abstract: Reducing an overlay error in nanoimprint lithography includes forming an imprinted substrate having pairs of corresponding peripheral overlay marks and corresponding central overlay marks on the imprinted substrate. An in-plane overlay error is assessed based on relative positions of corresponding central overlay marks, and a combined overlay error is assessed based on relative positions of corresponding peripheral overlay marks. A difference between the combined overlay error and the in-plane overlay error is assessed to yield an adjusted overlay error for each pair of corresponding peripheral overlay marks.

Abstract: Methods and systems are provided for fabricating polymer-based imprint lithography templates having thin metallic or oxide coated patterning surfaces. Such templates show enhanced fluid spreading and filling (even in absence of purging gases), good release properties, and longevity of use. Methods and systems for fabricating oxide coated versions, in particular, can be performed under atmospheric pressure conditions, allowing for lower cost processing and enhanced throughput.

Abstract: A forming apparatus forming a composition on a substrate by using a mold, includes a supplier configured to supply a composition on the substrate, a plurality of processors including a first processor and a second processor, each of the plurality of processors being configured to bring the mold into contact with the composition supplied onto the substrate by the supplier, and a substrate conveyer configured to convey the substrate onto which the composition is supplied by the supplier to the first processor and then convey other substrate onto which the composition is supplied following the substrate to the second processor.

Abstract: A touch sensor includes a substrate having at least one bending portion; and a sensing pattern on the substrate, the sensing pattern including a first pattern and a second pattern, the first pattern being arranged along a first direction parallel to a surface of the substrate, the second pattern being arranged along a second direction, the second direction being parallel to the surface of the substrate and crossing the first direction. The second pattern includes unit patterns isolated from each other, and a bridge electrode electrically connecting neighboring unit patterns of the unit patterns. The bridge electrode extends along the same direction as a bending direction of the bending portion.

Abstract: A method of separating a template from a cured layer on a substrate. Including, sending instructions to move the template away from the cured layer at a first rate, at a second point in time. Including, receiving a first data set as a function of time starting after the second point in time. Including, fitting a model of the first data set to a database of historical data sets. Including, identifying a target data set in the historical data sets based on results of the fit of the model of the first data set and information in the target data set. Including, sending instructions to move the template away from the substrate at a second rate at a third point in time after the second point in time based on the identified target data set.

Abstract: An OLED-integrated touch sensor includes an organic light emitting diode (OLED) device, and a touch electrode on a surface of the OLED device. The touch electrode includes a driving electrode formed on one surface of a base layer and a receiving electrode formed on an opposing surface of the base layer relative to the one surface. The touch electrode is combined with the OLED device such that the driving electrode faces the surface of the OLED device.

Abstract: A film antenna according to an embodiment of the present invention includes a dielectric layer, an antenna pattern including a mesh structure on a top surface of the dielectric layer, and a dummy pattern on a top surface of the dielectric layer. The dummy pattern includes the same mesh structure as that of the antenna pattern. Optical properties are improved by the same mesh structure of the antenna pattern and the dummy pattern.

Abstract: A cathode active material including a lithium nickel composite oxide; and a coating layer including a lithium metal pyrophosphate on the core.

Abstract: A template for imprint lithography can include a body. The body can include a base surface and have a recession extending from the base surface lying along a base plane, the recession including a main portion having a tapered sidewall. In a particular embodiment, the recession includes an intermediate portion having an intermediate sidewall. The intermediate sidewall is rounded or at least part of the intermediate sidewall lies at a different angle as compared to an average tapered angle of the main portion. In another aspect, a method of fabricating a semiconductor device can include forming a patterned resist layer having a tapered sidewall over a substrate having device layers; patterning the device layers using the patterned resist layer; and etching portions of at least some of device layers to expose lateral portions of the at least some device layers. The template is well suited for forming 3D memory arrays.

Abstract: Methods and systems are provided for fabricating polymer-based imprint lithography templates having thin metallic or oxide coated patterning surfaces. Such templates show enhanced fluid spreading and filling (even in absence of purging gases), good release properties, and longevity of use. Methods and systems for fabricating oxide coated versions, in particular, can be performed under atmospheric pressure conditions, allowing for lower cost processing and enhanced throughput.

Abstract: An apparatus is described for separation of a nanoimprint template from a solidified patterned layer on a substrate that minimize separation defects, including last point of separation (LPOS) defects. The apparatus is configured to move the template and substrate relative to one another and determining an amount of pressure to apply to the backsides of the template and the substrate.

Abstract: A template for imprint lithography can include a body. The body can include a base surface and a recession extending from the base surface. The recession can have steps and a feature. The steps can include a distal step that is farther from the base surface as compared to any other step, each step having a corresponding height. The feature can include the distal step includes a rounded or tapered sidewall; a surface along a deepest part of the recession is non-planar; or the height corresponding to the distal step is different from an average height corresponding to remaining steps. The template can be used in an imprint lithography apparatus. The template can be used in manufacturing articles when patterning different layers at the same time. The template is well suited for forming 3D memory arrays.

Abstract: The present invention relates to a touch sensor and a manufacturing method therefor. A touch sensor, according to the present invention, comprises: a base layer; a touch sensor layer formed on the base layer; a connection line unit electrically connected to the touch sensor layer; a bonding pad unit electrically connected to the connection line unit; a first protection layer formed on the touch sensor layer and the connection line unit; and a second protection layer formed on the bonding pad unit and having a thickness thinner than the first protection layer. According to the present invention, there is an effect of enhancing durability and simultaneously improving adhesion characteristics between a bonding pad and an FPC.

Abstract: A composite cathode active material, a method of preparing the composite cathode active material, a cathode including the composite cathode active material, and a lithium battery including the cathode. The composite cathode active material includes a lithium intercalatable material; and a garnet oxide, wherein an amount of the garnet oxide is about 1.9 wt % or less, based on a total weight of the composite cathode active material.

Abstract: An imprint lithography system that pressurizes and depressurizes an air cavity behind a retained imprint template or substrate so as to deflect the template or substrate to aid in filling the template pattern with fluid resist and/or separating the template from the cured resist on the substrate. The system includes a controller, pressure sensors, and an impedance valve for modulating the air cavity pressure so as to reduce pressure wave oscillations within the cavity that otherwise negatively impact overlay accuracy control, fluid spread control and separation control.

Abstract: A touch sensor includes a sensing pattern which include a first mesh pattern formed in a first direction and a second mesh pattern formed in a second direction, the second mesh pattern including isolated unit patterns, a bridge electrode connecting the neighboring unit patterns of the second mesh pattern, an insulation layer disposed between the sensing pattern and the bridge electrode, and an auxiliary electrode layer on an at least one of the first mesh pattern and the second mesh pattern, the auxiliary electrode layer being connected to at least one of the first mesh pattern and the second mesh pattern.

Abstract: Methods and apparatus are described for separation of a nanoimprint template from a solidified patterned layer on a substrate that minimize separation defects, including last point of separation (LPOS) defects. The method can include: moving the template and substrate relative to one another to create a tensional force that is applied to the template and the substrate; measuring the tensional force applied to the template and the substrate; determining an amount of pressure to apply to the backsides of the template and the substrate to reduce the amount of applied tensional force; reducing the tensional force applied to the template or the substrate by applying the determined amount of pressure to the backsides of the template and the substrate; and then repeating the above steps one or more times until the template fully separates from the solidified patterned layer.

Abstract: A touch sensor includes a sensing pattern which includes a first mesh pattern formed in a first direction and a second mesh pattern formed in a second direction, the second mesh pattern including isolated unit patterns, a bridge electrode connecting the neighboring isolated unit patterns of the second mesh patterns, an insulation layer disposed between the sensing pattern and the bridge electrodes, and an auxiliary mesh pattern disposed on or below at least one of the first mesh pattern and the second mesh pattern, the auxiliary mesh pattern being connected to at least one of the first mesh pattern and the second mesh pattern.

Abstract: A composite cathode active material, a method of preparing the composite cathode active material, a cathode including the composite cathode active material, and a lithium battery including the cathode. The composite cathode active material includes a lithium intercalatable material; and a garnet oxide, wherein an amount of the garnet oxide is about 1.9 wt % or less, based on a total weight of the composite cathode active material.