Patents by Inventor Chang-Woo Oh

Chang-Woo Oh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8815702
    Abstract: Semiconductor devices include a semiconductor substrate with a stack structure protruding from the semiconductor substrate and surrounded by an isolation structure. The stack structure includes an active layer pattern and a gap-filling insulation layer between the semiconductor substrate and the active layer pattern. A gate electrode extends from the isolation structure around the stack structure. The gate electrode is configured to provide a support structure for the active layer pattern. The gate electrode may be a gate electrode of a silicon on insulator (SOI) device formed on the semiconductor wafer and the semiconductor device may further include a bulk silicon device formed on the semiconductor substrate in a region of the semiconductor substrate not including the gap-filing insulation layer.
    Type: Grant
    Filed: April 1, 2013
    Date of Patent: August 26, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-Woo Oh, Dong-Gun Park, Dong-Won Kim, Ming Li, Sung-Hwan Kim
  • Publication number: 20140127872
    Abstract: A method of fabricating a fin field effect transistor may include forming a fin portion protruding from a substrate, forming a device isolation layer to cover a lower sidewall of the fin portion, forming a semiconductor layer using an epitaxial method to cover an upper sidewall and a top surface of the fin portion, selectively etching an upper portion of the device isolation layer to form a gap region between a top surface of the device isolation layer and a bottom surface of the semiconductor layer, and forming a gate electrode pattern on the semiconductor layer to fill the gap region. Related devices are also described.
    Type: Application
    Filed: January 8, 2014
    Publication date: May 8, 2014
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Chang-Woo Oh, Sang-Hoon LEE, Sung-Bong KIM, Hyung-Suk LEE
  • Patent number: 8685805
    Abstract: Provided is a semiconductor device. The semiconductor device includes a semiconductor substrate, a first isolation dielectric pattern on the semiconductor substrate, and an active pattern on the first isolation dielectric pattern. A semiconductor pattern is interposed between the semiconductor substrate and the first isolation dielectric pattern, and a second isolation dielectric pattern is interposed between the semiconductor substrate and the semiconductor pattern. The semiconductor substrate and the semiconductor pattern are electrically connected by a connection pattern.
    Type: Grant
    Filed: August 11, 2011
    Date of Patent: April 1, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Chang-Woo Oh
  • Patent number: 8680588
    Abstract: A field effect transistor includes a buried gate pattern that is electrically isolated by being surrounded by a tunneling insulating film. The field effect transistor also includes a channel region that is floated by source and drain regions, a gate insulating film, and the tunneling insulating film. The buried gate pattern and the tunneling insulating film extend into the source and drain regions. Thus, the field effect transistor efficiently stores charge carriers in the buried gate pattern and the floating channel region.
    Type: Grant
    Filed: February 26, 2008
    Date of Patent: March 25, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ming Li, Dong-Uk Choi, Chang-Woo Oh, Dong-Won Kim, Min-Sang Kim, Sung-Hwan Kim, Kyoung-Hwan Yeo
  • Publication number: 20130285143
    Abstract: An integrated circuit can include first and second FETs of a particular conductivity type on a substrate, wherein a first source/drain region of the first FET is closer to a center of a first channel region of the first FET than a second source/drain region of the second FET is to a center of a second channel region of the second FET.
    Type: Application
    Filed: September 14, 2012
    Publication date: October 31, 2013
    Inventors: Chang-Woo Oh, Myung-Gil Kang, Young-Chai Jung
  • Publication number: 20130244396
    Abstract: A method of fabricating a fin field effect transistor may include forming a fin portion protruding from a substrate, forming a device isolation layer to cover a lower sidewall of the fin portion, forming a semiconductor layer using an epitaxial method to cover an upper sidewall and a top surface of the fin portion, selectively etching an upper portion of the device isolation layer to form a gap region between a top surface of the device isolation layer and a bottom surface of the semiconductor layer, and forming a gate electrode pattern on the semiconductor layer to fill the gap region. Related devices are also described.
    Type: Application
    Filed: November 26, 2012
    Publication date: September 19, 2013
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Chang-Woo OH, Sang-Hoon Lee, Sung-Bong Kim, Hyung-Suk Lee
  • Publication number: 20130244392
    Abstract: Provided are methods of forming field effect transistors. The method includes preparing a substrate with a first region and a second region, forming fin portions on the first and second regions, each of the fin portions protruding from the substrate and having a first width, forming a first mask pattern to expose the fin portions on the first region and cover the fin portions on the second region, and changing widths of the fin portions provided on the first region.
    Type: Application
    Filed: February 28, 2013
    Publication date: September 19, 2013
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Chang Woo OH, Shincheol Min, Jongwook Lee, Choongho Lee
  • Patent number: 8466511
    Abstract: A fin field-effect transistor (FinFET) device includes a fin-shaped active region having first and second source/drain regions therein and a channel region therebetween vertically protruding from a semiconductor substrate. A gate electrode is formed on an upper surface and sidewalls of the channel region. First and second source/drain contacts are formed on respective upper surfaces and sidewalls of the first and second source/drain regions of the fin-shaped active region at opposite sides of the gate electrode. The channel region may be narrower than the first and second source/drain regions of the fin-shaped active region.
    Type: Grant
    Filed: November 5, 2009
    Date of Patent: June 18, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-Woo Oh, Dong-Gun Park, Sung-Young Lee, Jeong-Dong Choe, Dong-Won Kim
  • Patent number: 8461653
    Abstract: A semiconductor device may include a substrate, an active semiconductor region of the substrate, and a gate electrode. The active semiconductor region may include a channel region between first and second junction regions. The channel region may include a first semiconductor material, the first and second junction regions may include a second semiconductor material, and the first and second semiconductor materials may be different. The gate electrode may be on the channel region with portions of the first and second junction regions being free of the gate electrode.
    Type: Grant
    Filed: April 28, 2011
    Date of Patent: June 11, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-woo Oh, Dong-gun Park, Dong-won Kim, Sung-dae Suk
  • Patent number: 8426901
    Abstract: Semiconductor devices include a semiconductor substrate with a stack structure protruding from the semiconductor substrate and surrounded by an isolation structure. The stack structure includes an active layer pattern and a gap-filling insulation layer between the semiconductor substrate and the active layer pattern. A gate electrode extends from the isolation structure around the stack structure. The gate electrode is configured to provide a support structure for the active layer pattern. The gate electrode may be a gate electrode of a silicon on insulator (SOI) device formed on the semiconductor wafer and the semiconductor device may further include a bulk silicon device formed on the semiconductor substrate in a region of the semiconductor substrate not including the gap-filing insulation layer.
    Type: Grant
    Filed: June 23, 2011
    Date of Patent: April 23, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-woo Oh, Dong-gun Park, Dong-won Kim, Ming Li, Sung-hwan Kim
  • Patent number: 8415210
    Abstract: A field effect transistor (FET) and a method for manufacturing the same, in which the FET may include an isolation film formed on a semiconductor substrate to define an active region, and a gate electrode formed on a given portion of the semiconductor substrate. A channel layer may be formed on a portion of the gate electrode, with source and drain regions formed on either side of the channel layer so that boundaries between the channel layer and the source and drain regions of the FET may be perpendicular to a surface of the semiconductor substrate.
    Type: Grant
    Filed: October 29, 2011
    Date of Patent: April 9, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-Woo Oh, Dong-Gun Park, Dong-Won Kim, Dong-Uk Choi, Kyoung-Hwan Yeo
  • Patent number: 8298899
    Abstract: Exposed are a semiconductor device and method of fabricating the same. The device includes an insulation film that is disposed between an active pattern and a substrate, which provides various improvements. This structure enhances the efficiency of high integration and offers an advanced structure for semiconductor devices.
    Type: Grant
    Filed: September 10, 2010
    Date of Patent: October 30, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-Woo Oh, Sung-Hwan Kim, Dong-Gun Park
  • Patent number: 8178924
    Abstract: A semiconductor device having a floating body element and a bulk body element and a manufacturing method thereof are provided. The semiconductor device includes a substrate having a bulk body element region and floating body element regions. An isolation region defining an active region of the bulk body element region of the substrate and defining first buried patterns and first active patterns, which are sequentially stacked on a first element region of the floating body element regions of the substrate is provided. A first buried dielectric layer interposed between the first buried patterns and the substrate and between the first buried patterns and the first active patterns is provided.
    Type: Grant
    Filed: June 25, 2008
    Date of Patent: May 15, 2012
    Assignee: Samsung Electronic Co., Ltd.
    Inventors: Chang-Woo Oh, Dong-Gun Park
  • Publication number: 20120058613
    Abstract: A field effect transistor (FET) and a method for manufacturing the same, in which the FET may include an isolation film formed on a semiconductor substrate to define an active region, and a gate electrode formed on a given portion of the semiconductor substrate. A channel layer may be formed on a portion of the gate electrode, with source and drain regions formed on either side of the channel layer so that boundaries between the channel layer and the source and drain regions of the FET may be perpendicular to a surface of the semiconductor substrate.
    Type: Application
    Filed: October 29, 2011
    Publication date: March 8, 2012
    Inventors: Chang-Woo Oh, Dong-Gun Park, Dong-Won Kim, Dong-Uk Choi, Kyoung-Hwan Yeo
  • Patent number: 8101475
    Abstract: A field effect transistor (FET) and a method for manufacturing the same, in which the FET may include an isolation film formed on a semiconductor substrate to define an active region, and a gate electrode formed on a given portion of the semiconductor substrate. A channel layer may be formed on a portion of the gate electrode, with source and drain regions formed on either side of the channel layer so that boundaries between the channel layer and the source and drain regions of the FET may be perpendicular to a surface of the semiconductor substrate.
    Type: Grant
    Filed: October 7, 2009
    Date of Patent: January 24, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-Woo Oh, Dong-Gun Park, Dong-Won Kim, Dong-Uk Choi, Kyoung-Hwan Yeo
  • Publication number: 20110300693
    Abstract: Provided is a semiconductor device. The semiconductor device includes a semiconductor substrate, a first isolation dielectric pattern on the semiconductor substrate, and an active pattern on the first isolation dielectric pattern. A semiconductor pattern is interposed between the semiconductor substrate and the first isolation dielectric pattern, and a second isolation dielectric pattern is interposed between the semiconductor substrate and the semiconductor pattern. The semiconductor substrate and the semiconductor pattern are electrically connected by a connection pattern.
    Type: Application
    Filed: August 11, 2011
    Publication date: December 8, 2011
    Inventor: Chang-woo Oh
  • Publication number: 20110272738
    Abstract: A semiconductor device may include a substrate, an active semiconductor region of the substrate, and a gate electrode. The active semiconductor region may include a channel region between first and second junction regions. The channel region may include a first semiconductor material, the first and second junction regions may include a second semiconductor material, and the first and second semiconductor materials may be different. The gate electrode may be on the channel region with portions of the first and second junction regions being free of the gate electrode.
    Type: Application
    Filed: April 28, 2011
    Publication date: November 10, 2011
    Inventors: Chang-Woo Oh, Dong-Gun Park, Dong-won Kim, Sung-dae Suk
  • Publication number: 20110248376
    Abstract: Semiconductor devices include a semiconductor substrate with a stack structure protruding from the semiconductor substrate and surrounded by an isolation structure. The stack structure includes an active layer pattern and a gap-filling insulation layer between the semiconductor substrate and the active layer pattern. A gate electrode extends from the isolation structure around the stack structure. The gate electrode is configured to provide a support structure for the active layer pattern. The gate electrode may be a gate electrode of a silicon on insulator (SOI) device formed on the semiconductor wafer and the semiconductor device may further include a bulk silicon device formed on the semiconductor substrate in a region of the semiconductor substrate not including the gap-filing insulation layer.
    Type: Application
    Filed: June 23, 2011
    Publication date: October 13, 2011
    Inventors: Chang-woo Oh, Dong-gun Park, Dong-won Kim, Ming Li, Sung-hwan Kim
  • Patent number: 7989854
    Abstract: Semiconductor devices include a semiconductor substrate with a stack structure protruding from the semiconductor substrate and surrounded by an isolation structure. The stack structure includes an active layer pattern and a gap-filling insulation layer between the semiconductor substrate and the active layer pattern. A gate electrode extends from the isolation structure around the stack structure. The gate electrode is configured to provide a support structure for the active layer pattern. The gate electrode may be a gate electrode of a silicon on insulator (SOI) device formed on the semiconductor wafer and the semiconductor device may further include a bulk silicon device formed on the semiconductor substrate in a region of the semiconductor substrate not including the gap-filing insulation layer.
    Type: Grant
    Filed: March 30, 2005
    Date of Patent: August 2, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-woo Oh, Dong-gun Park, Dong-won Kim, Ming Li, Sung-hwan Kim
  • Patent number: 7952151
    Abstract: A semiconductor device may include a substrate, an active semiconductor region of the substrate, and a gate electrode. The active semiconductor region may include a channel region between first and second junction regions. The channel region may include a first semiconductor material, the first and second junction regions may include a second semiconductor material, and the first and second semiconductor materials may be different. The gate electrode may be on the channel region with portions of the first and second junction regions being free of the gate electrode.
    Type: Grant
    Filed: November 19, 2010
    Date of Patent: May 31, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-woo Oh, Dong-gun Park, Dong-won Kim, Sung-dae Suk