Patents by Inventor Chantal Arena

Chantal Arena has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9246057
    Abstract: Semiconductor structures include an active region between a plurality of layers of InGaN. The active region may be at least substantially comprised by InGaN. The plurality of layers of InGaN include at least one well layer comprising InwGa1-wN, and at least one barrier layer comprising InbGa1-bN proximate the at least one well layer. In some embodiments, the value of w in the InwGa1-wN of the well layer may be greater than or equal to about 0.10 and less than or equal to about 0.40 in some embodiments, and the value of b in the InbGa1-bN of the at least one barrier layer may be greater than or equal to about 0.01 and less than or equal to about 0.10. Methods of forming semiconductor structures include growing such layers of InGaN to form an active region of a light emitting device, such as an LED. Luminary devices include such LEDs.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: January 26, 2016
    Assignee: SOITEC
    Inventors: Jean-Philippe Debray, Chantal Arena, Heather McFavilen, Ding Ding, Li Huang
  • Publication number: 20150380592
    Abstract: A method of fabricating a semiconductor structure includes the formation of a first bonding layer at least substantially comprised of a first III-V material on major a surface of a first element, and formation of a second bonding layer at least substantially comprised of a second III-V material on a major surface of a second element. The first bonding layer and the second bonding layer are disposed between the first element and the second element, and the first element and the second element are attached to one another at a bonding interface disposed between the first bonding layer and the second bonding layer. Semiconductor structures are fabricated using such methods.
    Type: Application
    Filed: June 24, 2015
    Publication date: December 31, 2015
    Inventors: Fred Newman, Frank Reinhardt, Chantal Arena
  • Patent number: 9202741
    Abstract: Embodiments relate to semiconductor structures and methods of forming them. In some embodiments, the methods may be used to fabricate a semiconductor substrate by forming a weakened zone in a donor structure at a predetermined depth to define a transfer layer between an attachment surface and the weakened zone and a residual donor structure between the weakened zone and a surface opposite the attachment surface. A metallic layer is formed on the attachment surface and provides an ohmic contact between the metallic layer and the transfer layer, a matched Coefficient of Thermal Expansion (CTE) for the metallic layer that closely matches a CTE of the transfer layer, and sufficient stiffness to provide structural support to the transfer layer. The transfer layer is separated from the donor structure at the weakened zone to form a composite substrate comprising the transfer layer and the metallic layer.
    Type: Grant
    Filed: March 21, 2013
    Date of Patent: December 1, 2015
    Assignee: SOITEC
    Inventors: Christiaan J. Werkhoven, Chantal Arena
  • Publication number: 20150340430
    Abstract: Embodiments relate to semiconductor structures and methods of forming semiconductor structures. The semiconductor structures include a substrate layer having a CTE that closely matches a CTE of one or more layers of semiconductor material formed over the substrate layer. In some embodiments, the substrate layers may comprise a composite substrate material including two or more elements. The substrate layers may comprise a metal material and/or a ceramic material in some embodiments.
    Type: Application
    Filed: August 4, 2015
    Publication date: November 26, 2015
    Inventors: Christiaan J. Werkhoven, Chantal Arena
  • Publication number: 20150333219
    Abstract: Semiconductor structures include an active region between a plurality of layers of InGaN. The active region may be at least substantially comprised by InGaN. The plurality of layers of InGaN include at least one well layer, and at least one barrier layer proximate the at least one well layer. Methods of forming semiconductor structures include growing such layers of InGaN to form an active region of a light emitting device, such as an LED. Luminary devices include such LEDs.
    Type: Application
    Filed: July 30, 2015
    Publication date: November 19, 2015
    Inventors: Chantal Arena, Jean-Philippe Debray, Richard Scott Kern
  • Patent number: 9178091
    Abstract: Methods of fabricating photovoltaic devices include forming a plurality of subcells in a vertically stacked arrangement on a semiconductor material, each of the subcells being formed at a different temperature than an adjacent subcell such that the adjacent subcells have differing effective band-gaps. The methods of fabricating also include inverting the structure, attaching another substrate to a second semiconductor material, and removing the substrate. For example, each of the subcells may comprise a III-nitride material, and each subsequent subcell may include an indium content different than the adjacent subcell. Novel structures may be formed using such methods.
    Type: Grant
    Filed: May 26, 2010
    Date of Patent: November 3, 2015
    Assignee: Soitec
    Inventors: Chantal Arena, Heather McFelea
  • Patent number: 9175419
    Abstract: This invention provides gas injector apparatus that extends into a growth chamber in order to provide more accurate delivery of thermalized precursor gases. The improved injector can distribute heated precursor gases into a growth chamber in flows that are spatially separated from each other up until they impinge on a growth substrate and that have volumes adequate for high-volume manufacture. Importantly, the improved injector is sized and configured so that it can fit into existing commercial growth chambers without hindering the operation of mechanical and robot substrate-handling equipment used with such chambers. This invention is useful for the high-volume growth of numerous elemental and compound semiconductors, and particularly useful for the high-volume growth of Group III-V compounds and GaN.
    Type: Grant
    Filed: December 5, 2008
    Date of Patent: November 3, 2015
    Assignee: SOITEC
    Inventors: Chantal Arena, Christiaan J. Werkhoven, Ronald Thomas Bertram, Jr., Ed Lindow, Dennis L. Goodwin
  • Patent number: 9142412
    Abstract: Embodiments relate to semiconductor structures and methods of forming semiconductor structures. The semiconductor structures include a substrate layer having a CTE that closely matches a CTE of one or more layers of semiconductor material formed over the substrate layer. In some embodiments, the substrate layers may comprise a composite substrate material including two or more elements. The substrate layers may comprise a metal material and/or a ceramic material in some embodiments.
    Type: Grant
    Filed: December 23, 2011
    Date of Patent: September 22, 2015
    Assignee: SOITEC
    Inventors: Christiaan J. Werkhoven, Chantal Arena
  • Patent number: 9117955
    Abstract: Semiconductor structures include an active region between a plurality of layers of InGaN. The active region may be at least substantially comprised by InGaN. The plurality of layers of InGaN include at least one well layer comprising InwGa1-wN, and at least one barrier layer comprising InbGa1-bN proximate the at least one well layer. In some embodiments, the value of w in the InwGa1-wN of the well layer may be greater than or equal to about 0.10 and less than or equal to about 0.40 in some embodiments, and the value of b in the InbGa1-bN of the at least one barrier layer may be greater than or equal to about 0.01 and less than or equal to about 0.10. Methods of fainting semiconductor structures include growing such layers of InGaN to form an active region of a light emitting device, such as an LED. Luminary devices include such LEDs.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: August 25, 2015
    Assignee: SOITEC
    Inventors: Chantal Arena, Jean-Philippe Debray, Richard Scott Kern
  • Patent number: 9082948
    Abstract: Methods for fabricating a semiconductor substrate include forming a first substrate layer over a surface of a first semiconductor layer, and thermally spraying a second substrate layer on a side of the first substrate layer opposite the first semiconductor layer. At least one additional semiconductor layer is epitaxially grown over the first semiconductor layer on a side thereof opposite the first substrate layer. At least one of the first substrate layer and the second substrate layer may be formulated to exhibit a Coefficient of Thermal Expansion (CTE) closely matching a CTE of at least one of the first semiconductor layer and the at least one additional semiconductor layer. Semiconductor structures are fabricated using such methods.
    Type: Grant
    Filed: December 23, 2011
    Date of Patent: July 14, 2015
    Assignee: SOITEC
    Inventors: Christiaan J. Werkhoven, Chantal Arena
  • Patent number: 9076666
    Abstract: Methods of depositing III-nitride semiconductor materials on substrates include depositing a layer of III-nitride semi-conductor material on a surface of a substrate in a nucleation HVPE process stage to form a nucleation layer having a microstructure comprising at least some amorphous III-nitride semiconductor material. The nucleation layer may be annealed to form crystalline islands of epitaxial nucleation material on the surface of the substrate. The islands of epitaxial nucleation material may be grown and coalesced in a coalescence HVPE process stage to form a nucleation template layer of the epitaxial nucleation material. The nucleation template layer may at least substantially cover the surface of the substrate. Additional III-nitride semiconductor material may be deposited over the nucleation template layer of the epitaxial nucleation material in an additional HVPE process stage. Final and intermediate structures comprising III-nitride semiconductor material are formed by such methods.
    Type: Grant
    Filed: November 23, 2011
    Date of Patent: July 7, 2015
    Assignees: SOITEC, Arizona Board of Regents For and On Behalf Arizona State University
    Inventors: Chantal Arena, Ronald Thomas Bertram, Jr., Ed Lindow, Subhash Mahajan, Ilsu Han
  • Patent number: 9070818
    Abstract: Embodiments of the invention relate to methods and structures for fabricating semiconductor structures that include at least one bonding layer for attaching two or more elements to one another. The at least one bonding layer may be at least substantially comprised of zinc, silicon and oxygen.
    Type: Grant
    Filed: June 22, 2010
    Date of Patent: June 30, 2015
    Assignee: SOITEC
    Inventor: Chantal Arena
  • Patent number: 9048169
    Abstract: A method of fabricating a device layer structure includes providing a III-nitride semiconductor layer which is bonded to a bonding substrate. A device layer structure is formed on a nitrogen polar surface of the III-nitride semiconductor layer. The device layer structure includes an indium gallium nitride layer with a metal polar surface adjacent to the nitrogen polar surface of the III-nitride semiconductor layer.
    Type: Grant
    Filed: May 22, 2009
    Date of Patent: June 2, 2015
    Assignee: SOITEC
    Inventor: Chantal Arena
  • Patent number: 9038565
    Abstract: Systems for the sustained, high-volume production of Group III-V compound semiconductor material suitable for fabrication of optic and electronic components, for use as substrates for epitaxial deposition, or for wafers. The equipment is optimized for producing Group III-N (nitrogen) compound semiconductor wafers and specifically for producing GaN wafers. The method includes reacting an amount of a gaseous Group III precursor as one reactant with an amount of a gaseous Group V component as another reactant in a reaction chamber to form the semiconductor material; removing exhaust gases including unreacted Group III precursor, unreacted Group V component and reaction byproducts; and heating the exhaust gases to a temperature sufficient to reduce condensation thereof and enhance manufacture of the semiconductor material. Advantageously, the exhaust gases are heated to sufficiently avoid condensation to facilitate sustained high volume manufacture of the semiconductor material.
    Type: Grant
    Filed: October 16, 2013
    Date of Patent: May 26, 2015
    Assignee: Soitec
    Inventors: Chantal Arena, Christiaan Werkhoven
  • Publication number: 20150122313
    Abstract: The present disclosure relates to a method for manufacturing a multi-junction solar cell device comprising the steps of: providing a first substrate with a lower surface and an upper surface; providing a second substrate with a lower surface and an upper surface; bonding the first substrate to the second substrate at the upper surface of the first substrate and the lower surface of the second substrate; and subsequently forming at least one first solar cell layer on the lower surface of the first substrate and at least one second solar cell layer at the upper surface of the second substrate.
    Type: Application
    Filed: March 13, 2013
    Publication date: May 7, 2015
    Applicant: SOITEC
    Inventors: Bruno Ghyselen, Chantal Arena, Matteo Piccin, Frank Dimroth, Matthias Grave
  • Patent number: 9023721
    Abstract: Bulk III-nitride semiconductor materials are deposited in an HPVE process using a metal trichloride precursor on a metal nitride template layer of a growth substrate. Deposition of the bulk III-nitride semiconductor material may be performed without ex situ formation of the template layer using a MOCVD process. In some embodiments, a nucleation template layer is formed ex situ using a non-MOCVD process prior to depositing bulk III-nitride semiconductor material on the template layer using an HVPE process. In additional embodiments, a nucleation template layer is formed in situ using an MOCVD process prior to depositing bulk III-nitride semiconductor material on the template layer using an HVPE process. In further embodiments, a nucleation template layer is formed in situ using an HVPE process prior to depositing bulk III-nitride semiconductor material on the template layer using an HVPE process.
    Type: Grant
    Filed: November 23, 2011
    Date of Patent: May 5, 2015
    Assignee: Soitec
    Inventors: Chantal Arena, Ronald Thomas Bertram, Ed Lindow
  • Patent number: 9012919
    Abstract: Embodiments of the invention relate to methods of fabricating semiconductor structures, and to semiconductor structures fabricated by such methods. In some embodiments, the methods may be used to fabricate semiconductor structures of III-V materials, such as InGaN. A semiconductor layer is fabricated by growing sublayers using differing sets of growth conditions to improve the homogeneity of the resulting layer, to improve a surface roughness of the resulting layer, and/or to enable the layer to be grown to an increased thickness without the onset of strain relaxation.
    Type: Grant
    Filed: January 10, 2013
    Date of Patent: April 21, 2015
    Assignee: Soitec
    Inventors: Ed Lindow, Chantal Arena, Ronald Bertram, Ranjan Datta, Subhash Mahajan
  • Publication number: 20150083202
    Abstract: The present disclosure relates to a method for manufacturing a multi-junction solar cell device comprising the steps of: providing a first engineered substrate; providing a second substrate; forming at least one first solar cell layer on the first engineered substrate to obtain a first wafer structure; forming at least one second solar cell layer on the second substrate to obtain a second wafer structure; bonding the first wafer structure to the second wafer structure; detaching the first engineered substrate; removing the second substrate; and bonding a third substrate to the at least one first solar cell layer.
    Type: Application
    Filed: March 3, 2013
    Publication date: March 26, 2015
    Inventors: Bruno Ghyselen, Chantal Arena, Frank Dimroth, Andreas W. Bett
  • Publication number: 20150059832
    Abstract: The present disclosure relates to a method for manufacturing a multi-junction solar cell device comprising the steps of: providing a final base substrate; providing a first engineered substrate comprising a first zipper layer and a first seed layer; providing a second substrate; transferring the first seed layer to the final base substrate; forming at least one first solar cell layer on the first seed layer after transferring the first seed layer to the final base substrate, thereby obtaining a first wafer structure; forming at least one second solar cell layer on the second substrate, thereby obtaining a second wafer structure; and bonding the first and the second wafer structure to each other.
    Type: Application
    Filed: March 13, 2013
    Publication date: March 5, 2015
    Applicant: SOITEC
    Inventors: Bruno Ghyselen, Chantal Arena, Frank Dimroth, Matthias Grave
  • Publication number: 20150027519
    Abstract: The present disclosure relates to a method for manufacturing a multi-junction solar cell device comprising the steps of: providing a first substrate, providing a second substrate having a lower surface and an upper surface, forming at least one first solar cell layer on the first substrate to obtain a first wafer structure, forming at least one second solar cell layer on the upper surface of the second substrate to obtain a second wafer structure, and bonding the first wafer structure to the second wafer structure, wherein the at least one first solar cell layer is bonded to the lower surface of the second substrate and removing the first substrate.
    Type: Application
    Filed: March 13, 2013
    Publication date: January 29, 2015
    Applicant: SOITEC
    Inventors: Bruno Ghyselen, Chantal Arena, Frank Dimroth, Andreas W. Bett