Patents by Inventor Chao-Hsiung Wang

Chao-Hsiung Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20050243598
    Abstract: A non-destructive technique and related array for writing and reading magnetic memory cells, including sampling a first signal of a selected read line corresponding to select memory cells, applying a magnetic field to the select memory cells, sampling a second signal of the selected read line, and comparing the first and second signals to determine a logic state of the select memory cells.
    Type: Application
    Filed: April 27, 2005
    Publication date: November 3, 2005
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Chin Lin, Denny Tang, Li-Shyue Lai, Chao-Hsiung Wang, Fang-Shi Lai
  • Publication number: 20050236616
    Abstract: A reliable semiconductor structure and its fabrication method. Active regions and/or scribe lines on a semiconductor substrate are configured along a crack resistant crystalline direction. Thermal cracking due to the abrupt temperature ramp of rapid thermal processing can be avoided.
    Type: Application
    Filed: April 26, 2004
    Publication date: October 27, 2005
    Inventors: Horng-Huei Tseng, Chung-Hu Ge, Chao-Hsiung Wang
  • Publication number: 20050234659
    Abstract: A magnetic random access memory device (MRAM) and the method for forming the same are disclosed. The MRAM has a magnetic tunnel junction (MTJ) device, a first write line, and a second write line orthogonal to the first write line, wherein at least one of the first and second write lines has a width narrower than that of the MTJ.
    Type: Application
    Filed: April 20, 2004
    Publication date: October 20, 2005
    Inventors: Wen Lin, Denny Tang, Li-shyue Lai, Chao-Hsiung Wang
  • Publication number: 20050231695
    Abstract: A method and system is disclosed for conducting immersion photolithography. The system includes at least one lens for transmitting a predetermined radiation on a predetermined product substrate, and a fluid volume in contact with the lens on its first end and with the product substrate on its second end, wherein the fluid volume has a molar concentration of hydroxyl ions more than 10?7 mole per liter.
    Type: Application
    Filed: April 15, 2004
    Publication date: October 20, 2005
    Inventors: Chao -Hsiung Wang, Horng-Huei Tseng
  • Publication number: 20050233552
    Abstract: A semiconductor device 10 includes a substrate 12 (e.g., a silicon substrate) with an insulating layer 14 (e.g., an oxide such as silicon dioxide) disposed thereon. A first semiconducting material layer 16 (e.g., SiGe) is disposed on the insulating layer 14 and a second semiconducting material layer 18 (e.g., Si) is disposed on the first semiconducting material layer 16. The first and second semiconducting material layers 16 and 18 preferably have different lattice constants such that the first semiconducting material layer 16 is compressive and the second semiconducting material layer is tensile 18.
    Type: Application
    Filed: March 18, 2005
    Publication date: October 20, 2005
    Inventors: Chung-Hu Ke, Chao-Hsiung Wang, Chien-Chao Huang, Wen-Chin Lee, Chenming Hu
  • Publication number: 20050227493
    Abstract: A microelectronics device including a semiconductor device located at least partially over a substrate, a bombarded area located at least partially over the substrate and adjacent the semiconductor device, and a bombarded attenuator interposing the semiconductor device and the bombarded area.
    Type: Application
    Filed: April 5, 2004
    Publication date: October 13, 2005
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Chin Lin, Denny Tang, Chao-Hsiung Wang
  • Publication number: 20050191804
    Abstract: A phase change memory structure and method for forming the same, the method including providing a substrate comprising a conductive area; forming a spacer having a partially exposed sidewall region at an upper portion of the spacer defining a phase change memory element contact area; and, wherein the spacer bottom portion partially overlaps the conductive area. Both these two methods can reduce active area of a phase change memory element, therefore, reducing a required phase changing electrical current.
    Type: Application
    Filed: March 1, 2004
    Publication date: September 1, 2005
    Inventors: Li-Shyue Lai, Chao-Hsiung Wang, Denny Tang, Wen-Chin Lin
  • Patent number: 6924181
    Abstract: A strained silicon layer fabrication and a method for fabrication thereof employ a strained insulator material layer formed over a strained silicon layer in turn formed upon a strained silicon-germanium alloy material layer which is formed upon a relaxed material substrate. The strained insulator material layer provides increased fabrication options which provide for enhanced fabrication efficiency when fabricating the strained silicon layer fabrication.
    Type: Grant
    Filed: February 13, 2003
    Date of Patent: August 2, 2005
    Assignee: Taiwan SEmiconductor Manufacturing Co., Ltd
    Inventors: Chien-Chao Huang, Chao-Hsiung Wang, Chung-Hu Ge, Wen-Chin Lee, Chen Ming Hu
  • Publication number: 20050158971
    Abstract: A method of forming a strained silicon layer on a relaxed, low defect density semiconductor alloy layer such as SiGe is provided.
    Type: Application
    Filed: March 8, 2005
    Publication date: July 21, 2005
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun Chich Lin, Yee-Chia Yeo, Chien-Chao Huang, Chao-Hsiung Wang, Tien-Chih Chang, Chenming Hu, Fu-Liang Yang, Shih-Chang Chen, Mong-Song Liang, Liang-Gi Yao
  • Publication number: 20050133817
    Abstract: A method comprises providing a semiconductor alloy layer on a semiconductor substrate, forming a gate structure on the semiconductor alloy layer, forming source and drain regions in the semiconductor substrate on both sides of the gate structure, removing at least a portion of the semiconductor alloy layer overlying the source and drain regions, and forming a metal silicide region over the source and drain regions.
    Type: Application
    Filed: June 11, 2004
    Publication date: June 23, 2005
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chien-Chao Huang, Yee-Chia Yeo, Chao-Hsiung Wang, Chun-Chieh Lin, Chenming Hu
  • Publication number: 20050118790
    Abstract: A method is disclosed for dicing a wafer having a base material with a diamond structure. The wafer first undergoes a polishing process, in which a predetermined portion of the wafer is polished away from its back side. The wafer is then diced through at least one line along a direction at a predetermined offset angle from a natural cleavage direction of the diamond structure.
    Type: Application
    Filed: December 1, 2003
    Publication date: June 2, 2005
    Inventors: Hsin-Hui Lee, Chien-Chao Huang, Chao-Hsiung Wang, Fu-Liang Yang, Chenming Hu
  • Publication number: 20050110147
    Abstract: A copper filled damascene structure and method for forming the same the method including providing a substrate comprising a semiconductor substrate; forming an insulator layer on the substrate; forming a damascene opening through a thickness portion of the insulator layer; forming a diffusion barrier layer to line the damascene opening; forming a first seed layer overlying the diffusion barrier; plasma treating the first seed layer in-situ with a first treatment plasma comprising plasma source gases selected from the group consisting of argon, nitrogen, hydrogen, and NH3; forming a second seed layer overlying the first seed layer; forming a copper layer overlying the second seed layer according to an electro-chemical plating (ECP) process to fill the damascene opening; and, planarizing the copper layer to form a metal interconnect structure.
    Type: Application
    Filed: November 25, 2003
    Publication date: May 26, 2005
    Inventors: Ping-Kun Wu, Horng-Huei Tseng, Chine-Gie Lo, Chao-Hsiung Wang, Shau-Lin Shue
  • Publication number: 20050077627
    Abstract: Semiconductor devices and methods of forming the semiconductor devices using an HTS (High Temperature Superconductor) layer in combination with a typical diffusion layer between the dielectric material and the copper (or other metal) conductive wiring. The HTS layer includes a superconductor material comprised of barium copper oxide and a rare earth element. The rare earth element yttrium is particularly suitable. For semiconductor devices having other semiconductor circuits or elements above the wiring, a capping layer of HTS material is deposited over the wiring before a cover layer of dielectric is deposited.
    Type: Application
    Filed: October 10, 2003
    Publication date: April 14, 2005
    Inventors: Chen-Hua Yu, Horng-Huei Tseng, Chenming Hu, Chao-Hsiung Wang
  • Publication number: 20050077485
    Abstract: A method and system is disclosed for concentrating high energy particles on a predetermined area on a target semiconductor substrate. A high energy source for generating a predetermined amount of high energy particles, and an electromagnetic radiation source for generating low energy beams are used together. The system also uses a mask set having at least one mask with at least one alignment area and at least one mask target area thereon, the mask target area passing more high energy particles then any other area of the mask. At least one protection shield is incorporated in the system for protecting the alignment area from being exposed to the high energy particles, wherein the mask is aligned with the predetermined target semiconductor substrate by passing the low energy beams through the alignment area, wherein the high energy particles generated by the high energy source pass through the mask target area to land on the predetermined area on the target semiconductor substrate.
    Type: Application
    Filed: October 8, 2003
    Publication date: April 14, 2005
    Inventors: Chao-Hsiung Wang, Denny Tang, Wen-Chin Lin, Li-Shyue Lai
  • Patent number: 6878610
    Abstract: A method of forming a strained silicon layer on a relaxed, low defect density semiconductor alloy layer such as SiGe, has been developed. In a first embodiment of this invention the relaxed, low density SiGe layer is epitaxially grown on an silicon layer which in turn is located on an underlying SiGe layer. During the epitaxial growth of the overlying SiGe layer defects are formed in the underlying silicon layer resulting in the desired, relaxation, and decreased defect density for the SiGe layer. A second embodiment features an anneal procedure performed during growth of the relaxed SiGe layer, resulting in additional relaxation and decreased defect density, while a third embodiment features an anneal procedure performed to the underlying silicon layer prior to epitaxial growth of the relaxed SiGe layer, again allowing optimized relaxation and defect density to be realized for the SiGe layer.
    Type: Grant
    Filed: August 27, 2002
    Date of Patent: April 12, 2005
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun Chich Lin, Yee-Chia Yeo, Chien-Chao Huang, Chao-Hsiung Wang, Tien-Chih Chang, Chenming Hu, Fu-Liang Yang, Shih-Chang Chen, Mong-Song Liang, Liang-Gi Yao
  • Patent number: 6873535
    Abstract: A magnetic random access memory (MRAM) cell including an MRAM cell stack located over a substrate and first and second write lines spanning opposing termini of the MRAM cell stack. At least one of the first and second write lines includes at least one first portion spanning the MRAM cell stack and at least one second portion proximate the MRAM cell stack. The first and second portions have first and second cross-sectional areas, respectively, wherein the first cross-sectional area is substantially less than the second cross-sectional area.
    Type: Grant
    Filed: February 4, 2004
    Date of Patent: March 29, 2005
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen Chin Lin, Denny Tang, Li-Shyue Lai, Chao-Hsiung Wang
  • Publication number: 20040195623
    Abstract: A semiconductor device 10 includes a substrate 12 (e.g., a silicon substrate) with an insulating layer 14 (e.g., an oxide such as silicon dioxide) disposed thereon. A first semiconducting material layer 16 (e.g., SiGe) is disposed on the insulating layer 14 and a second semiconducting material layer 18 (e.g., Si) is disposed on the first semiconducting material layer 16. The first and second semiconducting material layers 16 and 18 preferably have different lattice constants such that the first semiconducting material layer 16 is compressive and the second semiconducting material layer is tensile 18.
    Type: Application
    Filed: April 3, 2003
    Publication date: October 7, 2004
    Inventors: Chung-Hu Ge, Chao-Hsiung Wang, Chien-Chao Huang, Wen-Chin Lee, Chenming Hu
  • Publication number: 20040188730
    Abstract: A magnetoresistive magnetic data storage product and a method for fabrication thereof both employ a magnetic data storage device formed over a substrate. The magnetic data storage device comprises a free magnetoresistive material layer separated from a pinned magnetoresistive material layer by a dielectric spacer material layer, each having a sidewall. The magnetic data storage product also comprises a sidewall spacer material layer formed annularly surrounding and covering the sidewall of at least one of the free magnetoresistive material layer and the pinned magnetoresistive material layer. The magnetic data storage product is fabricated with enhanced magnetic data storage density.
    Type: Application
    Filed: March 27, 2003
    Publication date: September 30, 2004
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Chin Lin, Denny Duan-Lee Tang, Chao-Hsiung Wang
  • Publication number: 20040159834
    Abstract: A strained silicon layer fabrication and a method for fabrication thereof employ a strained insulator material layer formed over a strained silicon layer in turn formed upon a strained silicon-germanium alloy material layer which is formed upon a relaxed material substrate. The strained insulator material layer provides increased fabrication options which provide for enhanced fabrication efficiency when fabricating the strained silicon layer fabrication.
    Type: Application
    Filed: February 13, 2003
    Publication date: August 19, 2004
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chien-Chao Huang, Chao-Hsiung Wang, Chung-Hu Ge, Wen-Chin Lee, Chen Ming Hu
  • Publication number: 20040110309
    Abstract: A method of forming a low-voltage drive thin film ferroelectric capacitor includes the steps of depositing a ferroelectric and platinum thin film dielectric layer over a bottom electrode, annealing the dielectric layer, wherein a nanocomposite layer is formed including nanoparticles of platinum and forming a top electrode over the dielectric layer. An integrated circuit is also provided including a ferroelectric capacitor. The capacitor includes a bottom electrode formed over a substrate and a ferroelectric and platinum thin film nanocomposite dielectric layer formed over the bottom electrode, wherein the nanocomposite layer includes nanoparticles of platinum. A top electrode is formed over the dielectric layer.
    Type: Application
    Filed: December 6, 2002
    Publication date: June 10, 2004
    Inventors: Yuan-Chieh Tseng, Chao-Hsiung Wang, Tai-Bor Wu