Patents by Inventor Chao-Hsiung Wang

Chao-Hsiung Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7381649
    Abstract: A method for forming a semiconductor device and a device made using the method are provided. In one example, the method includes forming a hard mask layer on a semiconductor substrate and patterning the hard mask layer to form multiple openings. The substrate is etched through the openings to form forming a plurality of trenches separating multiple semiconductor mesas. The trenches are partially filled with a dielectric material. The hard mask layer is removed and multiple-gate features are formed, with each multiple-gate feature being in contact with a top surface and sidewalls of at least one of the semiconductor mesas.
    Type: Grant
    Filed: July 29, 2005
    Date of Patent: June 3, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Wei Chen, Tang-Xuan Zhong, Sheng-Da Liu, Chang-Yun Chang, Ping-Kun Wu, Chao-Hsiung Wang, Fu-Liang Yang
  • Patent number: 7357838
    Abstract: A method of forming a strained silicon layer on a relaxed, low defect density semiconductor alloy layer such as SiGe is provided.
    Type: Grant
    Filed: March 8, 2005
    Date of Patent: April 15, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Chun Chieh Lin, Yee-Chia Yeo, Chien-Chao Huang, Chao-Hsiung Wang, Tien-Chih Chang, Chenming Hu, Fu-Liang Yang, Shih-Chang Chen, Mong-Song Liang, Liang-Gi Yao
  • Patent number: 7312512
    Abstract: Interconnect structures with polygonal cell structures. An exemplary interconnect structure comprises a substrate and a first dielectric layer, overlying the substrate and exposing a conductive feature formed therethrough and connected with the substrate, wherein the first dielectric layer includes a plurality of polygon cell structures with hollow interior.
    Type: Grant
    Filed: September 28, 2005
    Date of Patent: December 25, 2007
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ding-Chung Lu, Chao-Hsiung Wang, Cheng-Yuan Tsai
  • Publication number: 20070218686
    Abstract: A semiconductor device including a dielectric layer having a opening form therein having a cross-sectional area of less than 1 ?m2 and a PVD aluminum base conductor filled in the opening.
    Type: Application
    Filed: March 20, 2006
    Publication date: September 20, 2007
    Inventors: Chao-Hsiung Wang, Chien-Chao Huang, Chenming Hu, Horng-Huei Tseng
  • Publication number: 20070205406
    Abstract: A method of manufacturing a memory device is provided. The method includes forming an electrode over a substrate. The method also includes forming an opening in the electrode to provide a tapered electrode contact surface proximate the opening. The method further includes forming a phase change feature over the electrode and on the tapered electrode contact surface.
    Type: Application
    Filed: May 9, 2007
    Publication date: September 6, 2007
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chao-Hsiung Wang, Li-Shyue Lai, Denny Tang, Wen-Chin Lin
  • Patent number: 7265038
    Abstract: A copper filled damascene structure and method for forming the same the method including providing a substrate comprising a semiconductor substrate; forming an insulator layer on the substrate; forming a damascene opening through a thickness portion of the insulator layer; forming a diffusion barrier layer to line the damascene opening; forming a first seed layer overlying the diffusion barrier; plasma treating the first seed layer in-situ with a first treatment plasma comprising plasma source gases selected from the group consisting of argon, nitrogen, hydrogen, and NH3; forming a second seed layer overlying the first seed layer; forming a copper layer overlying the second seed layer according to an electro-chemical plating (ECP) process to fill the damascene opening; and, planarizing the copper layer to form a metal interconnect structure.
    Type: Grant
    Filed: November 25, 2003
    Date of Patent: September 4, 2007
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ping-Kun Wu, Horng-Huei Tseng, Chine-Gie Lo, Chao-Hsiung Wang, Shau-Lin Shue
  • Patent number: 7265373
    Abstract: A method of manufacturing a memory device including forming an electrode over a substrate, then forming a dielectric feature proximate a contact region of a sidewall of the electrode, and then forming a phase change feature proximate the contact region.
    Type: Grant
    Filed: January 4, 2005
    Date of Patent: September 4, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chao-Hsiung Wang, Li-Shyue Lai, Denny Tang, Wen-Chen Lin
  • Publication number: 20070188287
    Abstract: A semiconductor device having a semiconductor substrate and a first insulator overlying the semiconductor substrate. A spiral coil inductor overlies the first insulator and a second insulator overlies the spiral coil inductor. A patterned ferromagnetic film overlies the second insulator and a patterned magnetic-bias film overlies the patterned ferromagnetic film.
    Type: Application
    Filed: February 13, 2006
    Publication date: August 16, 2007
    Inventors: Wai-Yi Lien, Denny Tang, Wen-Chin Lin, Chao-Hsiung Wang
  • Publication number: 20070164369
    Abstract: A method comprises providing a semiconductor alloy layer on a semiconductor substrate, forming a gate structure on the semiconductor alloy layer, forming source and drain regions in the semiconductor substrate on both sides of the gate structure, removing at least a portion of the semiconductor alloy layer overlying the source and drain regions, and forming a metal silicide region over the source and drain regions.
    Type: Application
    Filed: March 6, 2007
    Publication date: July 19, 2007
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Chao Huang, Yee-Chia Yeo, Chao-Hsiung Wang, Chun-Chieh Lin, Chenming Hu
  • Patent number: 7229883
    Abstract: A method of manufacturing a memory device is provided. The method includes forming an electrode over a substrate. The method also includes forming an opening in the electrode to provide a tapered electrode contact surface proximate the opening. The method further includes forming a phase change feature over the electrode and on the tapered electrode contact surface.
    Type: Grant
    Filed: February 23, 2005
    Date of Patent: June 12, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chao-Hsiung Wang, Li-Shyue Lai, Denny Tang, Wen-Chin Lin
  • Publication number: 20070117352
    Abstract: A method provides for dicing a wafer having a base material with a diamond structure. The wafer first undergoes a polishing process, in which a predetermined portion of the wafer is polished away from its back side. The wafer is then diced through at least one line along a direction at a predetermined offset angle from a natural cleavage direction of the diamond structure. A wafer is produced with one or more dies formed thereon with at least one of its edges at an offset angle from a natural cleavage direction of a diamond structure of a base material forming the wafer. At least one dicing line has one or more protection elements for protecting the dies from undesired cracking while the wafer is being diced along the dicing line.
    Type: Application
    Filed: January 18, 2007
    Publication date: May 24, 2007
    Inventors: Hsin-Hui Lee, Chien-Chao Huang, Chao-Hsiung Wang, Fu-Liang Yang, Chenming Hu
  • Publication number: 20070099402
    Abstract: A reliable semiconductor structure and its fabrication method. Active regions and/or scribe lines on a semiconductor substrate are configured along a crack resistant crystalline direction. Thermal cracking due to the abrupt temperature ramp of rapid thermal processing can be avoided.
    Type: Application
    Filed: December 20, 2006
    Publication date: May 3, 2007
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Horng-Huei Tseng, Chung-Hu Ge, Chao-Hsiung Wang
  • Publication number: 20070091672
    Abstract: A non-destructive technique and related array for writing and reading magnetic memory cells, including sampling a first signal of a selected read line corresponding to select memory cells, applying a magnetic field to the select memory cells, sampling a second signal of the selected read line, and comparing the first and second signals to determine a logic state of the select memory cells.
    Type: Application
    Filed: December 14, 2006
    Publication date: April 26, 2007
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wen-Chin Lin, Denny Tang, Li-Shyue Lai, Chao-Hsiung Wang, Fan-Shi Lai
  • Patent number: 7208815
    Abstract: In preferred embodiments of the present invention, a method of forming CMOS devices using SOI and hybrid substrate orientations is described. In accordance with a preferred embodiment, a substrate may have multiple crystal orientations. One logic gate in the substrate may comprise at least one N-FET on one crystal orientation and at least one P-FET on another crystal orientation. Another logic gate in the substrate may comprise at least one N-FET and at least one P-FET on the same orientation. Alternative embodiments further include determining the preferred cleavage planes of the substrates and orienting the substrates relative to each other in view of their respective preferred cleavage planes. In a preferred embodiment, the cleavage planes are not parallel.
    Type: Grant
    Filed: November 15, 2004
    Date of Patent: April 24, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Wei Chen, Ping-Kun Wu, Chao-Hsiung Wang, Fu-Liang Yang, Chenming Hu
  • Patent number: 7205632
    Abstract: A microelectronics device including a semiconductor device located at least partially over a substrate, a bombarded area located at least partially over the substrate and adjacent the semiconductor device, and a bombarded attenuator interposing the semiconductor device and the bombarded area.
    Type: Grant
    Filed: April 5, 2004
    Date of Patent: April 17, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Chin Lin, Denny D. Tang, Chao-Hsiung Wang
  • Patent number: 7202122
    Abstract: A method comprises providing a semiconductor alloy layer on a semiconductor substrate, forming a gate structure on the semiconductor alloy layer, forming source and drain regions in the semiconductor substrate on both sides of the gate structure, removing at least a portion of the semiconductor alloy layer overlying the source and drain regions, and forming a metal silicide region over the source and drain regions.
    Type: Grant
    Filed: June 11, 2004
    Date of Patent: April 10, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Chao Huang, Yee-Chia Yeo, Chao-Hsiung Wang, Chun-Chieh Lin, Chenming Hu
  • Publication number: 20070075428
    Abstract: An integrated circuit device comprising a partially embedded and encapsulated damascene structure and method for forming the same to improve adhesion to an overlying dielectric layer, the integrated circuit device including a conductive material partially embedded in an opening formed in a dielectric layer; wherein said conductive material is encapsulated with a first barrier layer comprising sidewall and bottom portions and a second barrier layer covering a top portion, said conductive material and first barrier layer sidewall portions extending to a predetermined height above an upper surface of the dielectric layer to form a partially embedded damascene.
    Type: Application
    Filed: September 30, 2005
    Publication date: April 5, 2007
    Inventors: Chao-Hsiung Wang, Ping-Kun Wu
  • Publication number: 20070069381
    Abstract: Interconnect structures with polygonal cell structures. An exemplary interconnect structure comprises a substrate and a first dielectric layer, overlying the substrate and exposing a conductive feature formed therethrough and connected with the substrate, wherein the first dielectric layer includes a plurality of polygon cell structures with hollow interior.
    Type: Application
    Filed: September 28, 2005
    Publication date: March 29, 2007
    Inventors: Ding-Chung Lu, Chao-Hsiung Wang, Cheng-Yuan Tsai
  • Patent number: 7183617
    Abstract: A magnetic shielding device is provided for protecting at least one magnetically sensitive component on a substrate according to embodiments of the present invention. The device comprises a first shield having a top portion, and one or more side portions, wherein the top and side portions along with the substrate encloses the magnetic sensitive component within for protecting the same from an external magnetic field, and wherein the magnetic shielding device contains at least two magnetic shielding materials with one having a relatively higher magnetic permeability property but lower magnetic saturation property while the other having a relatively lower magnetic permeability property but higher magnetic saturation property.
    Type: Grant
    Filed: February 17, 2005
    Date of Patent: February 27, 2007
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chao-Hsiung Wang, Horng-Huei Tseng, Denny Tang
  • Patent number: 7183137
    Abstract: A method is disclosed for dicing a wafer having a base material with a diamond structure. The wafer first undergoes a polishing process, in which a predetermined portion of the wafer is polished away from its back side. The wafer is then diced through at least one line along a direction at a predetermined offset angle from a natural cleavage direction of the diamond structure.
    Type: Grant
    Filed: December 1, 2003
    Date of Patent: February 27, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Hsin-Hui Lee, Chien-Chao Huang, Chao-Hsiung Wang, Fu-Liang Yang, Chenming Hu
  • Patent number: 5200393
    Abstract: Methods and compositions are described for liquid or gel forms of a lipid excipient to be used in pharmaceutical or cosmetic preparations. The lipid excipient comprises a phospholipid such as a lysophospholipid, for example, mono-oleoyl-phosphatidylethanolamine ("MOPE"). Relatively low concentrations of the lipid can be employed in forming the gel, e.g., about 1-2%. The invention discloses the use of a lipid delivery system at a relatively low lipid concentration as a non-toxic, non-irritating carrier or excipient alone or in combination with other agents, for both drugs and cosmetics. For example, the lipid excipient in sprayable or droppable form has special utility in the non-irritating delivery of peptides (e.g., calcitonin and insulin) to the nasal mucosa, due to the ability of the excipient to enhance absorption across nasal membranes. As a cosmetic, it can be used alone or in combination with biologically active agents.
    Type: Grant
    Filed: August 27, 1991
    Date of Patent: April 6, 1993
    Assignee: The Liposome Company, Inc.
    Inventor: Alan L. Weiner