Patents by Inventor Chao-Hsiung Wang

Chao-Hsiung Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7157367
    Abstract: A substrate is provided having semiconductor device structures formed in and on the substrate. The semiconductor device structures comprise conductor layers embedded in openings in dielectric layers having a dielectric constant of less than 4.5. The dielectric layer has a roughness between the dielectric and the conductor wherein the roughness of the dielectric layer divided by the thickness of a barrier layer underlying the conductor layer is 0 to 1. The integrated circuit structure is prepared for failure analysis by removing the low dielectric constant dielectric layers and exposing the conductor layers for further failure analysis by optical examination or scanning electron microscope (SEM).
    Type: Grant
    Filed: June 4, 2004
    Date of Patent: January 2, 2007
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hway Chi Lin, Yi-Lung Cheng, Chao-Hsiung Wang
  • Patent number: 7154798
    Abstract: A non-destructive technique and related array for writing and reading magnetic memory cells, including sampling a first signal of a selected read line corresponding to select memory cells, applying a magnetic field to the select memory cells, sampling a second signal of the selected read line, and comparing the first and second signals to determine a logic state of the select memory cells.
    Type: Grant
    Filed: April 27, 2005
    Date of Patent: December 26, 2006
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Chin Lin, Denny Tang, Li-Shyue Lai, Chao-Hsiung Wang, Fang-Shi Jordan Lai
  • Patent number: 7151271
    Abstract: A method and system is disclosed for concentrating high energy particles on a predetermined area on a target semiconductor substrate. A high energy source for generating a predetermined amount of high energy particles, and an electro-magnetic radiation source for generating low energy beams are used together. The system also uses a mask set having at least one mask with at least one alignment area and at least one mask target area thereon, the mask target area passing more high energy particles then any other area of the mask. At least one protection shield is incorporated in the system for protecting the alignment area from being exposed to the high energy particles, wherein the mask is aligned with the predetermined target semiconductor substrate by passing the low energy beams through the alignment area, wherein the high energy particles generated by the high energy source pass through the mask target area to land on the predetermined area on the target semiconductor substrate.
    Type: Grant
    Filed: October 8, 2003
    Date of Patent: December 19, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chao-Hsiung Wang, Denny Tang, Wen-Chin Lin, Li-Shyue Lai
  • Publication number: 20060278908
    Abstract: A magnetic random access memory device (MRAM) and the method for forming the same are disclosed. The MRAM has a magnetic tunnel junction (MTJ) device, a first write line, and a second write line orthogonal to the first write line, wherein at least one of the first and second write lines has a width narrower than that of the MTJ.
    Type: Application
    Filed: August 16, 2006
    Publication date: December 14, 2006
    Inventors: Wen Lin, Denny Tang, Li-shyue Lai, Chao-Hsiung Wang
  • Publication number: 20060238925
    Abstract: Disclosed herein is a magnetoresistive structure, for example useful as a spin-valve or GMR stack in a magnetic sensor, and a fabrication method thereof. The magnetoresistive structure uses twisted coupling to induce a perpendicular magnetization alignment between the free layer and the pinned layer. Ferromagnetic layers of the free and pinned layers are exchange-coupled using antiferromagnetic layers having substantially parallel exchange-biasing directions. Thus, embodiments can be realized that have antiferromagnetic layers formed of a same material and/or having a same blocking temperature. At least one of the free and pinned layers further includes a second ferromagnetic layer and an insulating layer, such as a NOL, between the two ferromagnetic layers. The insulating layer causes twisted coupling between the two ferromagnetic layers, rotating the magnetization direction of one 90 degrees relative to the magnetization direction of the other.
    Type: Application
    Filed: April 22, 2005
    Publication date: October 26, 2006
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Jen Wang, Chih-Huang Lai, Wen-Chin Lin, Denny Tang, Chao-Hsiung Wang
  • Publication number: 20060229683
    Abstract: A circuit with an inter-module radiation interference shielding mechanism is disclosed. The circuit includes a circuit module producing a radiation field. At least one radiation shielding module is situated between the circuit module and another module that is vulnerable to the interference of the radiation field. The shielding module is substantially tangential to the radiation field.
    Type: Application
    Filed: March 25, 2005
    Publication date: October 12, 2006
    Inventors: Chao-Hsiung Wang, Horng-Huei Tseng, Denny Tang, Wen-Chin Lin, Mark Hsieh
  • Patent number: 7105897
    Abstract: This invention discloses a method and a semiconductor structure for integrating at least one bulk device and at least one silicon-on-insulator (SOI) device. The semiconductor structure includes a first substrate having an SOI area and a bulk area, on which the bulk device is formed; an insulation layer formed on the first substrate in the SOI area; and a second substrate, on which the SOI device is formed, stacked on the insulation layer. The surface of the first substrate is not on the substantially same plane as the surface of the second substrate.
    Type: Grant
    Filed: October 28, 2004
    Date of Patent: September 12, 2006
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Hao-Yu Chen, Fu-Liang Yang, Hung-Wei Chen, Ping-Kun Wu, Chao-Hsiung Wang
  • Patent number: 7105928
    Abstract: Semiconductor devices and methods of forming the semiconductor devices using an HTS (High Temperature Superconductor) layer in combination with a typical diffusion layer between the dielectric material and the copper (or other metal) conductive wiring. The HTS layer includes a superconductor material comprised of barium copper oxide and a rare earth element. The rare earth element yttrium is particularly suitable. For semiconductor devices having other semiconductor circuits or elements above the wiring, a capping layer of HTS material is deposited over the wiring before a cover layer of dielectric is deposited.
    Type: Grant
    Filed: October 10, 2003
    Date of Patent: September 12, 2006
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Horng-Huei Tseng, Chenming Hu, Chao-Hsiung Wang
  • Patent number: 7105879
    Abstract: A magnetic random access memory device (MRAM) and the method for forming the same are disclosed. The MRAM has a magnetic tunnel junction (MTJ) device, a first write line, and a second write line orthogonal to the first write line, wherein at least one of the first and second write lines has a width narrower than that of the MTJ.
    Type: Grant
    Filed: April 20, 2004
    Date of Patent: September 12, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen Chin Lin, Denny Tang, Li-shyue Lai, Chao-Hsiung Wang
  • Publication number: 20060186440
    Abstract: A method of manufacturing a memory device is provided. The method includes forming an electrode over a substrate. The method also includes forming an opening in the electrode to provide a tapered electrode contact surface proximate the opening. The method further includes forming a phase change feature over the electrode and on the tapered electrode contact surface.
    Type: Application
    Filed: February 23, 2005
    Publication date: August 24, 2006
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chao-Hsiung Wang, Li-Shyue Lai, Denny Tang, Wen-Chin Lin
  • Publication number: 20060180880
    Abstract: A magnetic shielding device is provided for protecting at least one magnetically sensitive component on a substrate according to embodiments of the present invention. The device comprises a first shield having a top portion, and one or more side portions, wherein the top and side portions along with the substrate encloses the magnetic sensitive component within for protecting the same from an external magnetic field, and wherein the magnetic shielding device contains at least two magnetic shielding materials with one having a relatively higher magnetic permeability property but lower magnetic saturation property while the other having a relatively lower magnetic permeability property but higher magnetic saturation property.
    Type: Application
    Filed: February 17, 2005
    Publication date: August 17, 2006
    Inventors: Chao-Hsiung Wang, Horng-Huei Tseng, Denny Tang
  • Publication number: 20060148229
    Abstract: A method of manufacturing a memory device including forming an electrode over a substrate, then forming a dielectric feature proximate a contact region of a sidewall of the electrode, and then forming a phase change feature proximate the contact region.
    Type: Application
    Filed: January 4, 2005
    Publication date: July 6, 2006
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chao-Hsiung Wang, Li-Shyue Lai, Denny Tang, Wen-Chen Lin
  • Patent number: 7071007
    Abstract: A method of forming a low-voltage drive thin film ferroelectric capacitor includes the steps of depositing a ferroelectric and platinum thin film dielectric layer over a bottom electrode, annealing the dielectric layer, wherein a nanocomposite layer is formed including nanoparticles of platinum and forming a top electrode over the dielectric layer. An integrated circuit is also provided including a ferroelectric capacitor. The capacitor includes a bottom electrode formed over a substrate and a ferroelectric and platinum thin film nanocomposite dielectric layer formed over the bottom electrode, wherein the nanocomposite layer includes nanoparticles of platinum. A top electrode is formed over the dielectric layer.
    Type: Grant
    Filed: December 6, 2002
    Date of Patent: July 4, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yuan-Chieh Tseng, Chao-Hsiung Wang, Tai-Bor Wu
  • Publication number: 20060097316
    Abstract: This invention discloses a method and a semiconductor structure for integrating at least one bulk device and at least one silicon-on-insulator (SOI) device. The semiconductor structure includes a first substrate having an SOI area and a bulk area, on which the bulk device is formed; an insulation layer formed on the first substrate in the SOI area; and a second substrate, on which the SOI device is formed, stacked on the insulation layer. The surface of the first substrate is not on the substantially same plane as the surface of the second substrate.
    Type: Application
    Filed: October 28, 2004
    Publication date: May 11, 2006
    Inventors: Hao-Yu Chen, Fu-Liang Yang, Hung-Wei Chen, Ping-Kun Wu, Chao-Hsiung Wang
  • Patent number: 7042032
    Abstract: A magnetoresistive magnetic data storage product and a method for fabrication thereof both employ a magnetic data storage device formed over a substrate. The magnetic data storage device comprises a free magnetoresistive material layer separated from a pinned magnetoresistive material layer by a dielectric spacer material layer, each having a sidewall. The magnetic data storage product also comprises a sidewall spacer material layer formed annularly surrounding and covering the sidewall of at least one of the free magnetoresistive material layer and the pinned magnetoresistive material layer. The magnetic data storage product is fabricated with enhanced magnetic data storage density.
    Type: Grant
    Filed: March 27, 2003
    Date of Patent: May 9, 2006
    Inventors: Wen-Chin Lin, Denny Duan-Lee Tang, Chao-Hsiung Wang
  • Patent number: 7029994
    Abstract: A semiconductor device 10 includes a substrate 12 (e.g., a silicon substrate) with an insulating layer 14 (e.g., an oxide such as silicon dioxide) disposed thereon. A first semiconducting material layer 16 (e.g., SiGe) is disposed on the insulating layer 14 and a second semiconducting material layer 18 (e.g., Si) is disposed on the first semiconducting material layer 16. The first and second semiconducting material layers 16 and 18 preferably have different lattice constants such that the first semiconducting material layer 16 is compressive and the second semiconducting material layer is tensile 18.
    Type: Grant
    Filed: March 18, 2005
    Date of Patent: April 18, 2006
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Hu Ge, Chao-Hsiung Wang, Chien-Chao Huang, Wen-Chin Lee, Chenming Hu
  • Patent number: 7016029
    Abstract: Detecting decay of equipment lens anti-reflective coating (ARC) by detecting undesired residue is disclosed. The undesired residue detected correlates with the decay of the ARC, where a greater amount of undesired residue detected indicates a greater level of the decay. The undesired residue is detected due to stray light reflected by the ARC because of its decay. In the context of semiconductor fabrication equipment, photoresist residue results from negative photoresist on a semiconductor wafer, and may be viewed on one or more scribe lines of a mask within a field of view of the lens of the semiconductor fabrication equipment.
    Type: Grant
    Filed: June 11, 2002
    Date of Patent: March 21, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hung-Chih Chen, Chao-Hsiung Wang, Niahn-Mauh Shih, Hsien-Wei Chin
  • Publication number: 20060049460
    Abstract: In preferred embodiments of the present invention, a method of forming CMOS devices using SOI and hybrid substrate orientations is described. In accordance with a preferred embodiment, a substrate may have multiple crystal orientations. One logic gate in the substrate may comprise at least one N-FET on one crystal orientation and at least one P-FET on another crystal orientation. Another logic gate in the substrate may comprise at least one N-FET and at least one P-FET on the same orientation. Alternative embodiments further include determining the preferred cleavage planes of the substrates and orienting the substrates relative to each other in view of their respective preferred cleavage planes. In a preferred embodiment, the cleavage planes are not parallel.
    Type: Application
    Filed: November 15, 2004
    Publication date: March 9, 2006
    Inventors: Hung-Wei Chen, Ping-Kun Wu, Chao-Hsiung Wang, Fu-Liang Yang, Chenming Hu
  • Publication number: 20060038214
    Abstract: A method of forming a low-voltage drive thin film ferroelectric capacitor includes the steps of depositing a ferroelectric and platinum thin film dielectric layer over a bottom electrode, annealing the dielectric layer, wherein a nanocomposite layer is formed including nanoparticles of platinum and forming a top electrode over the dielectric layer. An integrated circuit is also provided including a ferroelectric capacitor. The capacitor includes a bottom electrode formed over a substrate and a ferroelectric and platinum thin film nanocomposite dielectric layer formed over the bottom electrode, wherein the nanocomposite layer includes nanoparticles of platinum. A top electrode is formed over the dielectric layer.
    Type: Application
    Filed: October 18, 2005
    Publication date: February 23, 2006
    Inventors: Yuan-Chieh Tseng, Chao-Hsiung Wang, Tai-Bor Wu
  • Publication number: 20050272260
    Abstract: A substrate is provided having semiconductor device structures formed in and on the substrate. The semiconductor device structures comprise conductor layers embedded in openings in dielectric layers having a dielectric constant of less than 4.5. The dielectric layer has a roughness between the dielectric and the conductor wherein the roughness of the dielectric layer divided by the thickness of a barrier layer underlying the conductor layer is 0 to 1. The integrated circuit structure is prepared for failure analysis by removing the low dielectric constant dielectric layers and exposing the conductor layers for further failure analysis by optical examination or scanning electron microscope (SEM).
    Type: Application
    Filed: June 4, 2004
    Publication date: December 8, 2005
    Inventors: Hway Lin, Yi-Lung Cheng, Chao-Hsiung Wang