Patents by Inventor Chao-Hung Lin

Chao-Hung Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9881831
    Abstract: A semiconductor device and a method of fabricating the same, the semiconductor device includes a silicon substrate, a fin shaped structure and a shallow trench isolation. The fin shaped structure is disposed on the silicon substrate and includes a silicon germanium (SiGe) layer extending from bottom to top in the fin shaped structure. The shallow trench isolation covers a bottom portion of the fin shaped structure.
    Type: Grant
    Filed: March 22, 2017
    Date of Patent: January 30, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chung-Yi Chiu, Shih-Fang Hong, Chao-Hung Lin
  • Patent number: 9859148
    Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a first region, a second region, and a third region; forming a plurality of spacers on the first region, the second region, and the third region; forming a first patterned mask to cover the spacers on the first region and the second region; and removing the spacers on the third region.
    Type: Grant
    Filed: May 31, 2017
    Date of Patent: January 2, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Li-Wei Feng, Shih-Hung Tsai, Chao-Hung Lin, Shih-Fang Hong, Jyh-Shyang Jenq
  • Patent number: 9847402
    Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate, wherein the substrate comprises a first region and a second region; forming a high-k dielectric layer on the first region and the second region; forming a first bottom barrier metal (BBM) layer on the high-k dielectric layer of the first region and the second region; forming a stop layer on the first region and the second region; removing the stop layer on the second region; and forming a second BBM layer on the first region and the second region.
    Type: Grant
    Filed: August 2, 2017
    Date of Patent: December 19, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chao-Hung Lin, Shih-Hung Tsai, Jyh-Shyang Jenq
  • Publication number: 20170352541
    Abstract: The invention provides a method for fabricating a fin field effect transistor (FinFET), comprising: providing a substrate having a logic region and a large region; forming a plurality of fin structures in the logic region by removing a portion of the substrate in the logic region; forming an oxide layer on the substrate filling in-between the fin structures in the logic region; forming an first epitaxial structure in the large region by removing a portion of the substrate in the large region; exposing a portion of the fin structures and a portion of the epitaxial structure by removing a portion of the oxide layer; and forming a gate electrode on portions of the fin structures.
    Type: Application
    Filed: June 2, 2016
    Publication date: December 7, 2017
    Inventors: CHIH-KAI HSU, YU-HSIANG HUNG, WEI-CHI CHENG, SSU-I FU, JYH-SHYANG JENQ, CHAO-HUNG LIN
  • Patent number: 9831133
    Abstract: A method for manufacturing semiconductor devices having metal gate includes follow steps. A substrate including a plurality of isolation structures is provided. A first nFET device and a second nFET device are formed on the substrate. The first nFET device includes a first gate trench and the second nFET includes a second gate trench. A third bottom barrier layer is formed in the first gate trench and a third p-work function metal layer is formed in the second gate trench, simultaneously. The third bottom barrier layer and the third p-work function metal layer include a same material. An n-work function metal layer is formed in the first gate trench and the second gate trench. The n-work function metal layer in the first gate trench directly contacts the third bottom barrier layer, and the n-work function metal layer in the second gate trench directly contacts the third p-work function metal layer.
    Type: Grant
    Filed: November 16, 2016
    Date of Patent: November 28, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chao-Hung Lin, Chih-Kai Hsu, Li-Wei Feng, Shih-Hung Tsai, Chien-Ting Lin, Jyh-Shyang Jenq, Ching-Wen Hung, Jia-Rong Wu, Yi-Hui Lee, Ying-Cheng Liu, Yi-Kuan Wu, Chih-Sen Huang, Yi-Wei Chen
  • Publication number: 20170330956
    Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate, wherein the substrate comprises a first region and a second region; forming a high-k dielectric layer on the first region and the second region; forming a first bottom barrier metal (BBM) layer on the high-k dielectric layer of the first region and the second region; forming a stop layer on the first region and the second region; removing the stop layer on the second region; and forming a second BBM layer on the first region and the second region.
    Type: Application
    Filed: August 2, 2017
    Publication date: November 16, 2017
    Inventors: Chao-Hung Lin, Shih-Hung Tsai, Jyh-Shyang Jenq
  • Publication number: 20170317124
    Abstract: An image sensor package includes an image sensor with a pixel array disposed in a semiconductor material. A first transparent shield is adhered to the semiconductor material, and the pixel array is disposed between the semiconductor material and the first transparent shield. The image sensor package further includes a second transparent shield, where the first transparent shield is disposed between the pixel array and the second transparent shield. A light blocking layer is disposed between the first transparent shield and the second transparent shield, and the light blocking layer is disposed to prevent light from reflecting off edges of the first transparent shield into the pixel array.
    Type: Application
    Filed: February 10, 2017
    Publication date: November 2, 2017
    Inventors: Chia-Chun Miao, Yin Qian, Chao-Hung Lin, Chen-Wei Lu, Dyson H. Tai, Ming Zhang, Jin Li
  • Patent number: 9786662
    Abstract: A method for fabricating semiconductor device is disclosed. First, a substrate is provided, a first gate pattern is formed on the substrate, a first spacer is formed around the first gate pattern, part of the first gate pattern is removed to form a first slot, a first dielectric layer is formed into the first slot, and a replacement metal gate (RMG) process is performed to transform part of the first gate pattern into a metal gate.
    Type: Grant
    Filed: August 2, 2016
    Date of Patent: October 10, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chao-Hung Lin, Shih-Hung Tsai, Jyh-Shyang Jenq, Yu-Hsiang Hung
  • Patent number: 9781362
    Abstract: An image sensor capable of capturing an image formed by a lens includes a substrate and a bonding wire. The substrate has a pixel array and a bonding pad on a top surface of the substrate between the pixel array and a substrate edge. The bonding wire is electrically connected to the bonding pad and has a region forming a non-zero angle with respect to the substrate top surface. The non-zero angle is in at least one of a lower and an upper angular range for minimizing reflection of incident light on the region from reaching the image sensor. The lower angular range is selected such that the region reflects the incident light away from the pixel array toward a plane including the lens. The upper angular range is selected such that the region reflects the incident light to a clearance between the bonding pad and the pixel array.
    Type: Grant
    Filed: March 22, 2016
    Date of Patent: October 3, 2017
    Assignee: OmniVision Technologies, Inc.
    Inventors: Chao-Hung Lin, Hong Jun Li, Ping-Hsu Chen, Denis Chu
  • Publication number: 20170280075
    Abstract: An image sensor capable of capturing an image formed by a lens includes a substrate and a bonding wire. The substrate has a pixel array and a bonding pad on a top surface of the substrate between the pixel array and a substrate edge. The bonding wire is electrically connected to the bonding pad and has a region forming a non-zero angle with respect to the substrate top surface. The non-zero angle is in at least one of a lower and an upper angular range for minimizing reflection of incident light on the region from reaching the image sensor. The lower angular range is selected such that the region reflects the incident light away from the pixel array toward a plane including the lens. The upper angular range is selected such that the region reflects the incident light to a clearance between the bonding pad and the pixel array.
    Type: Application
    Filed: March 22, 2016
    Publication date: September 28, 2017
    Inventors: Chao-Hung Lin, Hong Jun Li, Ping-Hsu Chen, Denis Chu
  • Patent number: 9773887
    Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having a gate structure thereon, a first spacer around the gate structure, and a contact etch stop layer (CESL) adjacent to the first spacer; forming a cap layer on the gate structure, the first spacer, and the CESL; and removing part of the cap layer for forming a second spacer adjacent to the CESL.
    Type: Grant
    Filed: December 3, 2015
    Date of Patent: September 26, 2017
    Assignee: UNITED MICORELECTRONICS CORP.
    Inventors: Ying-Chiao Wang, Chao-Hung Lin, Ssu-I Fu, Jyh-Shyang Jenq, Li-Wei Feng, Yu-Hsiang Hung
  • Publication number: 20170271197
    Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a first region, a second region, and a third region; forming a plurality of spacers on the first region, the second region, and the third region; forming a first patterned mask to cover the spacers on the first region and the second region; and removing the spacers on the third region.
    Type: Application
    Filed: May 31, 2017
    Publication date: September 21, 2017
    Inventors: Li-Wei Feng, Shih-Hung Tsai, Chao-Hung Lin, Shih-Fang Hong, Jyh-Shyang Jenq
  • Patent number: 9761692
    Abstract: A method for fabricating semiconductor device preferably forms a stop layer composed of amorphous silicon between a first BM layer and a second BBM layer of one of the gate structure during the fabrication of a device having multi-VT gate structures. By doing so, it would be desirable to use the stop layer as a protecting layer during the etching process of work function metal layers and the second BBM layer so that the first BBM layer could be protected from etchant such as SC1 and the overall thickness of the first BBM layer and the performance of the device could be maintained.
    Type: Grant
    Filed: May 23, 2016
    Date of Patent: September 12, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chao-Hung Lin, Shih-Hung Tsai, Jyh-Shyang Jenq
  • Patent number: 9755056
    Abstract: A method of forming a semiconductor device includes following steps. Firstly, a substrate having a transistor is provided, where the transistor includes a source/drain region. A dielectric layer is formed on the substrate, and a contact plug is formed in the dielectric layer to electrically connect the source/drain region. Next, a mask layer is formed on the dielectric layer, where the mask layer includes a first layer and a second layer stacked thereon. After this a slot-cut pattern is formed on the second layer of the mask layer, and a contact slot pattern is formed on the first layer of the mask layer. Finally, the second layer is removed and a contact opening is formed by using the contact slot pattern on the first layer.
    Type: Grant
    Filed: January 28, 2015
    Date of Patent: September 5, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Kai Hsu, Chao-Hung Lin, Yu-Hsiang Hung, Ssu-I Fu, Ying-Tsung Chen, Shih-Hung Tsai, Jyh-Shyang Jenq
  • Publication number: 20170221834
    Abstract: The present invention provides a semiconductor structure comprising a wafer and an aligning mark. The wafer has a dicing region which comprises a central region, a middle region surrounds the central region, and a peripheral region surrounds the middle region. The aligning mark is disposed in the dicing region, wherein the alignment mark is a mirror symmetrical pattern. The aligning mark comprises a plurality of second patterns in the middle region and a plurality of third patterns disposed in peripheral region, wherein each third pattern comprises a plurality of lines, and a width of the line is 10 times less than a width of the L-shapes. The present invention further provides a method of forming the same.
    Type: Application
    Filed: April 13, 2017
    Publication date: August 3, 2017
    Inventors: Ying-Chiao Wang, Yu-Hsiang Hung, Chao-Hung Lin, Ssu-I Fu, Chih-Kai Hsu, Jyh-Shyang Jenq
  • Patent number: 9722078
    Abstract: A semiconductor device and a method of fabricating the same, the semiconductor device includes a silicon substrate, a fin shaped structure and a shallow trench isolation. The fin shaped structure is disposed on the silicon substrate and includes a silicon germanium (SiGe) layer extending downwardly from a top end and at least occupying 80% to 90% of the fin shaped structure. The shallow trench isolation covers a bottom portion of the fin shaped structure.
    Type: Grant
    Filed: September 16, 2015
    Date of Patent: August 1, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chung-Yi Chiu, Shih-Fang Hong, Chao-Hung Lin
  • Patent number: 9704737
    Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having a first region, a second region, and a third region; forming a plurality of spacers on the first region, the second region, and the third region; forming a first patterned mask to cover the spacers on the first region and the second region; and removing the spacers on the third region.
    Type: Grant
    Filed: August 3, 2015
    Date of Patent: July 11, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Li-Wei Feng, Shih-Hung Tsai, Chao-Hung Lin, Shih-Fang Hong, Jyh-Shyang Jenq
  • Publication number: 20170194193
    Abstract: A semiconductor device and a method of fabricating the same, the semiconductor device includes a silicon substrate, a fin shaped structure and a shallow trench isolation. The fin shaped structure is disposed on the silicon substrate and includes a silicon germanium (SiGe) layer extending from bottom to top in the fin shaped structure. The shallow trench isolation covers a bottom portion of the fin shaped structure.
    Type: Application
    Filed: March 22, 2017
    Publication date: July 6, 2017
    Inventors: Chung-Yi Chiu, Shih-Fang Hong, Chao-Hung Lin
  • Publication number: 20170194203
    Abstract: A semiconductor device and method of forming the same, the semiconductor device includes a first and second fin shaped structures, a first and second gate structures and a first and second plugs. The first and second fin shaped structures are disposed on a first region and a second region of a substrate and the first and second gate structure are disposed across the first and second fin shaped structures, respectively. A dielectric layer is disposed on the substrate, covering the first and second gate structure. The first and second plugs are disposed in the dielectric layer, wherein the first plug is electrically connected first source/drain regions adjacent to the first gate structure and contacts sidewalls of the first gate structure, and the second plug is electrically connected to second source/drain regions adjacent to the second gate structure and not contacting sidewalls of the second gate structure.
    Type: Application
    Filed: February 3, 2016
    Publication date: July 6, 2017
    Inventors: Yu-Hsiang Hung, Ssu-I Fu, Chao-Hung Lin, Chih-Kai Hsu, Jyh-Shyang Jenq
  • Publication number: 20170186872
    Abstract: A semiconductor device includes a silicon substrate, a fin shaped structure and a shallow trench isolation. The fin shaped structure includes a top portion which protrudes from a bottom surface of the fin shaped structure and the fin shaped structure is directly disposed on the silicon substrate. The bottom surface of the fin shaped structure covers an entire top surface of the silicon substrate. The fin shaped structure further includes a silicon germanium (SiGe) layer extending within the fin shaped structure and occupying the whole top portion of the shaped structure. The fin shaped structure is a semiconductor fin shaped structure, and the material of the silicon substrate is different from the material of the silicon germanium layer The shallow trench isolation is disposed on the top portion and the bottom surface of the fin shaped structure.
    Type: Application
    Filed: March 14, 2017
    Publication date: June 29, 2017
    Inventors: Chung-Yi Chiu, Shih-Fang Hong, Chao-Hung Lin