Patents by Inventor Chen Ming

Chen Ming has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230378270
    Abstract: A method of semiconductor fabrication includes providing a semiconductor structure having a substrate and first, second, third, and fourth fins above the substrate. The method further includes forming an n-type epitaxial source/drain (S/D) feature on the first and second fins, forming a p-type epitaxial S/D feature on the third and fourth fins, and performing a selective etch process on the semiconductor structure to remove upper portions of the n-type epitaxial S/D feature and the p-type epitaxial S/D feature such that more is removed from the n-type epitaxial S/D feature than the p-type epitaxial S/D feature.
    Type: Application
    Filed: July 27, 2023
    Publication date: November 23, 2023
    Inventors: I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang, Chun-An Lin, Wei-Yuan Lu, Guan-Ren Wang, Peng Wang
  • Publication number: 20230377943
    Abstract: Semiconductor structures and methods are provided. An exemplary method according to the present disclosure includes providing a workpiece including a semiconductor fin protruding from a substrate, a first placeholder gate and a second placeholder gate over channel regions of the semiconductor fin, and a source/drain feature disposed between the channel regions. The method also includes removing a portion of the first placeholder gate and a portion of the substrate directly disposed thereunder to form an isolation trench, forming a dielectric feature in the isolation trench, replacing the second placeholder gate with a metal gate stack, selectively recessing the dielectric feature, forming a first capping layer over the metal gate stack and a second capping layer over the recessed dielectric feature, and forming a source/drain contact over and electrically coupled to the source/drain feature.
    Type: Application
    Filed: May 19, 2022
    Publication date: November 23, 2023
    Inventors: I-Wen Wu, Po-Yu Huang, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang
  • Publication number: 20230369405
    Abstract: A semiconductor structure and a method of forming the same are provided. In an embodiment, a semiconductor structure includes a first plurality of channel members over a backside dielectric layer, a second plurality of channel members over the backside dielectric layer, a first gate structure over and wrapping around each of the first plurality of channel members, a second gate structure over and wrapping around each of the second plurality of channel members, and a through-substrate contact that extends between the first plurality of channel members and the second plurality of channel members, between the first gate structure and the second gate structure, and through the backside dielectric layer.
    Type: Application
    Filed: July 27, 2023
    Publication date: November 16, 2023
    Inventors: Ruei-Ping Lin, Kai-Di Tzeng, Chen-Ming Lee, Wei-Yang Lee
  • Publication number: 20230369110
    Abstract: A FinFET device structure is provided. The FinFET device structure includes a gate structure formed over a fin structure, and an S/D contact structure formed adjacent to the gate structure. The FinFET device structure includes a protection layer formed on the S/D contact structure, and an S/D conductive plug formed over the protection layer. The S/D conductive plug is electrically connected to the S/D contact structure by the protection layer.
    Type: Application
    Filed: July 3, 2023
    Publication date: November 16, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Yuan CHEN, Chen-Ming LEE, Fu-Kai YANG, Mei-Yun WANG
  • Publication number: 20230369427
    Abstract: Examples of an integrated circuit with an interconnect structure and a method for forming the integrated circuit are provided herein. In some examples, the method includes receiving a workpiece that includes an inter-level dielectric layer. A first contact that includes a fill material is formed that extends through the inter-level dielectric layer. The inter-level dielectric layer is recessed such that the fill material extends above a top surface of the inter-level dielectric layer. An etch-stop layer is formed on the inter-level dielectric layer such that the fill material of the first contact extends into the etch-stop layer. A second contact is formed extending through the etch-stop layer to couple to the first contact. In some such examples, the second contact physically contacts a top surface and a side surface of the first contact.
    Type: Application
    Filed: July 25, 2023
    Publication date: November 16, 2023
    Inventors: Chen-Hung Tsai, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang
  • Publication number: 20230369419
    Abstract: A semiconductor structure includes an active region including a source/drain feature, a contact protruding from a bottom surface of the source/drain feature, a first dielectric layer disposed directly below the active region and surrounding the contact, an air gap disposed between the contact and the first dielectric layer, and a seal disposed between the contact and the first dielectric layer, such that the air gap is disposed between the seal and the source/drain feature.
    Type: Application
    Filed: July 24, 2023
    Publication date: November 16, 2023
    Inventors: Chen-Ming Lee, Wei-Yang Lee
  • Publication number: 20230369418
    Abstract: A semiconductor structure and a method of forming the same are provided. An exemplary method of forming the semiconductor structure includes receiving a workpiece including a fin structure over a front side of a substrate, recessing a source region of the fin structure to form a source opening, extending the source opening into the substrate to form a plug opening, forming a semiconductor plug in the plug opening, planarizing the substrate to expose the semiconductor plug from a back side of the substrate, performing a first wet etching process to remove a portion of the substrate, performing a pre-amorphous implantation (PAI) process to amorphize a rest portion of the substrate, performing a second wet etching process to remove the amorphized rest portion of the substrate to form a dielectric opening, depositing a dielectric layer in the dielectric opening, and replacing the semiconductor plug with a backside source contact.
    Type: Application
    Filed: July 19, 2023
    Publication date: November 16, 2023
    Inventors: Po-Yu Huang, Chen-Ming Lee, I-Wen Wu, Fu-Kai Yang, Mei-Yun Wang
  • Publication number: 20230352345
    Abstract: A method includes forming a fin protruding from a substrate, forming a gate structure across the fin, forming an epitaxial feature over the fin, depositing a dielectric layer covering the epitaxial feature and over sidewalls of the gate structure, performing an etching process to form a trench, the trench dividing the gate structure into first and second gate segments and extending into a region of the dielectric layer, forming a dielectric feature in the trench, recessing a portion of the dielectric feature located in the region, selectively etching the dielectric layer to expose the epitaxial feature, and depositing a conductive feature in physical contact with the epitaxial feature and directly above the portion of the dielectric feature.
    Type: Application
    Filed: June 30, 2023
    Publication date: November 2, 2023
    Inventors: I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang, Chang-Yun Chang, Ching-Feng Fu, Peng Wang
  • Publication number: 20230340298
    Abstract: The current disclosure describes carrier tape systems, which include a carrier tape including a plurality of pockets. Each pocket contains a semiconductor device adhered to a bottom surface of the pocket by an adhesive. In some embodiments, the adhesive is a reversible adhesive. Use of the adhesive reduces the likelihood the semiconductor device will be damaged due to movement of the semiconductor device in the pocket during shipment of the carrier tape. Methods of forming a semiconductor device carrier systems and methods of supplying semiconductor devices are also described.
    Type: Application
    Filed: June 29, 2023
    Publication date: October 26, 2023
    Inventors: Chen-Ming Kuo, Jing Ruei Lu, Pei-Haw Tsao
  • Patent number: 11798996
    Abstract: A method includes performing a first etching process on a backside of a substrate to expose a dummy contact structure, performing a first deposition process to deposit a first dielectric layer around the dummy contract structure, performing a second deposition process to deposit an oxide layer on the first dielectric layer, removing the dummy contract structure to form a trench, depositing a sacrificial layer on sidewalls of the trench, depositing a second dielectric layer on the sacrificial layer, filling the trench with a conductive material, and removing the sacrificial layer to form an air spacer between the first dielectric layer and the second dielectric layer.
    Type: Grant
    Filed: July 20, 2022
    Date of Patent: October 24, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Ming Lee, Wei-Yang Lee
  • Publication number: 20230333702
    Abstract: A membrane touch panel device includes a circuit board unit, a light-blocking frame plate, a plurality of light-blocking tabs, and an operation panel unit that are stacked along a front-rear direction. The circuit board unit includes a circuit board having a plurality of keypad circuits, and a plurality of LEDs being electrically connected to the circuit board. A light transmission rate of the circuit board ranges from 0% to 20%. The light-blocking frame plate is stacked on the circuit board, and defines a hollow section provided for the LEDs to protrude thereinto. The light-blocking tabs are connected to the light-blocking frame plate such that the light-blocking tabs respectively cover the LEDs. The operation panel unit is stacked on the light-blocking frame plate, and has a plurality of key segments being respectively aligned with the keypad circuits, and being adapted to permit light generated by the LEDs to pass therethrough.
    Type: Application
    Filed: September 27, 2022
    Publication date: October 19, 2023
    Applicant: TONG LUNG METAL INDUSTRY CO., LTD.
    Inventors: Pai-Hsiang CHUANG, Ruei-Jie JENG, Chen-Ming LIN, Ding-Sian CAI, Chun-Yi FANG
  • Publication number: 20230335196
    Abstract: A memory device and method of making the same are disclosed. The memory device includes transistor devices located in both a memory region and a logic region of the device. Transistor devices in the memory region include sidewall spacers having a first oxide layer over a side surface of a gate structure, a first nitride layer over the first oxide layer, a second oxide layer over the first nitride layer, and a second nitride layer over the second oxide layer. Transistor devices in the logic region include sidewall spacers having a first oxide layer over a side surface of a gate structure, a first nitride layer over the first oxide layer, and a second nitride layer over the first nitride layer.
    Type: Application
    Filed: June 20, 2023
    Publication date: October 19, 2023
    Inventors: Chen-Ming Huang, Wen-Tuo Huang, Yu-Hsiang Yang, Yu-Ling Hsu, Wei-Lin Chang, Chia-Sheng Lin, ShihKuang Yang, Yu-Chun Chang, Hung-Ling Shih, Po-Wei Liu, Shih-Hsien Chen
  • Patent number: 11791387
    Abstract: A semiconductor structure and a method of forming the same are provided. In an embodiment, an exemplary semiconductor structure includes a gate structure disposed over a channel region of an active region, a drain feature disposed over a drain region of the active region; a source feature disposed over a source region of the active region, a backside source contact disposed under the source feature, an isolation feature disposed on and in contact with the source feature, a drain contact disposed over and electrically coupled to the drain feature, and a gate contact via disposed over and electrically coupled to the gate structure. A distance between the gate contact via and the drain contact is greater than a distance between the gate contact via and the isolation feature. The exemplary semiconductor structure would have a reduced parasitic capacitance and an enlarged leakage window.
    Type: Grant
    Filed: April 30, 2021
    Date of Patent: October 17, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Yu Huang, Chen-Ming Lee, I-Wen Wu, Fu-Kai Yang, Mei-Yun Wang
  • Patent number: 11791006
    Abstract: A memory circuit includes a bank of non-volatile memory (NVM) devices, a plurality of high-voltage (HV) drivers, a global HV power switch configured to generate a HV power signal, and a plurality of HV power switches coupled to the global HV switch. A first HV power switch of the plurality of HV power switches is coupled to each HV driver of the plurality of HV drivers, the first HV power switch of the plurality of HV power switches is configured to output a power signal responsive to the HV power signal, and each HV driver of the plurality of HV drivers is configured to output a HV activation signal to a corresponding column of the bank of NVM devices responsive to the power signal.
    Type: Grant
    Filed: July 29, 2022
    Date of Patent: October 17, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Gu-Huan Li, Chen-Ming Hung, Yu-Der Chih
  • Patent number: 11791292
    Abstract: An embedded touch panel display device includes: a display unit having a display surface and a non-display surface opposite to the display surface; a touch-control unit disposed inside the display unit; a conductive frame disposed on one side of the display unit and facing the non-display surface thereof; an insulating ink and a first conductive ink disposed on at least one sidewall of the display unit and extended to the non-display surface, in which the first conductive ink overlaps the insulating ink; and a double-sided adhesive disposed between the display unit and the conductive frame to secure them. The first conductive ink and the conductive frame are electrically connected to each other to form an electrostatic discharge path. The present invention can prevent the peripheral area of the viewed area from a blackening phenomenon induced by excessively high electrostatic voltage.
    Type: Grant
    Filed: May 11, 2022
    Date of Patent: October 17, 2023
    Assignees: Interface Technology (Chengdu) Co., Ltd., Interface Optoelectronics (Shenzhen) Co., Ltd., Interface Optoelectronics (Wuxi) Co., Ltd., General Interface Solution Limited
    Inventors: Chen Ming Jen, Pei Hsun Wu, Hung Chien Lee, Yen Heng Huang
  • Publication number: 20230327021
    Abstract: A semiconductor structure includes a source/drain (S/D) feature disposed in a semiconductor layer, a metal gate stack (MG) disposed in a first interlayer dielectric (ILD) layer and adjacent to the S/D feature, a second ILD layer disposed over the MG, and an S/D contact disposed over the S/D feature. The semiconductor structure further includes an air gap disposed between a sidewall of a bottom portion of the S/D contact and the first ILD layer, where a sidewall of a top portion of the S/D contact is in direct contact with the second ILD layer.
    Type: Application
    Filed: June 16, 2023
    Publication date: October 12, 2023
    Inventors: Chao-Hsun Wang, Chen-Ming Lee, Kuo-Yi Chao, Mei-Yun Wang, Pei-Yu Chou, Kuo-Ju Chen
  • Patent number: 11783107
    Abstract: An IC device includes a first anti-fuse structure including a first dielectric layer between a first gate conductor and a first active area, and a second anti-fuse structure including a second dielectric layer between a second gate conductor and the first active area. A first via is electrically connected to the first gate conductor at a first location a first distance from the first active area, a second via is electrically connected to the second gate conductor at a second location a second distance from the first active area, and the first distance is approximately equal to the second distance.
    Type: Grant
    Filed: February 18, 2021
    Date of Patent: October 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Meng-Sheng Chang, Shao-Yu Chou, Yao-Jen Yang, Chen-Ming Hung
  • Patent number: 11784222
    Abstract: A method of semiconductor fabrication includes providing a semiconductor structure having a substrate and first, second, third, and fourth fins above the substrate. The method further includes forming an n-type epitaxial source/drain (S/D) feature on the first and second fins, forming a p-type epitaxial S/D feature on the third and fourth fins, and performing a selective etch process on the semiconductor structure to remove upper portions of the n-type epitaxial S/D feature and the p-type epitaxial S/D feature such that more is removed from the n-type epitaxial S/D feature than the p-type epitaxial S/D feature.
    Type: Grant
    Filed: January 10, 2022
    Date of Patent: October 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang, Chun-An Lin, Wei-Yuan Lu, Guan-Ren Wang, Peng Wang
  • Publication number: 20230317159
    Abstract: A memory device includes a main array comprising main memory cells; a redundancy array comprising redundancy memory cells; and write circuitry configured to perform a first programming operation on a main memory cell, to detect whether a current of the main memory cell exceeds a predefined current threshold during the first programming operation, and to disable a second programming operation for a redundancy memory cell if the current of the main memory cell exceeds the predefined current threshold during the first programming operation.
    Type: Application
    Filed: March 31, 2022
    Publication date: October 5, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Der Chih, Chung-Cheng Chou, Chun-Yun Wu, Chen-Ming Hung
  • Publication number: 20230317805
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The semiconductor device structure includes a gate electrode layer disposed over a substrate, a source/drain epitaxial feature disposed over the substrate, a first hard mask layer disposed over the gate electrode layer, and a contact etch stop layer (CESL) disposed over the source/drain epitaxial feature. The structure further includes a first interlayer dielectric (ILD) layer disposed on the CESL and a first treated portion of a second hard mask layer disposed on the CESL and the first ILD layer. A top surface of the first hard mask layer and a top surface of the first treated portion of the second mask layer are substantially coplanar. The structure further includes an etch stop layer disposed on the first hard mask layer and the first treated portion of the second mask layer.
    Type: Application
    Filed: March 21, 2022
    Publication date: October 5, 2023
    Inventors: Shih-Che LIN, Tzu-Yang HO, Chen-Ming LEE, Fu-Kai YANG, Mei-Yun WANG