Patents by Inventor Cheng-I Lin
Cheng-I Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250126840Abstract: The present disclosure describes a semiconductor device having a source/drain dielectric. The semiconductor device includes a channel structure on a substrate, a dielectric structure on the substrate and adjacent to the channel structure, and an epitaxial structure on a top surface of the dielectric structure. The epitaxial structure is in contact with the channel structure.Type: ApplicationFiled: February 6, 2024Publication date: April 17, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Cheng-Yu WEI, Cheng-I LIN, Shu-Han CHEN, Chi On CHUI
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Publication number: 20250089330Abstract: A method includes forming a protruding fin, and forming a first dielectric layer including a first dielectric layer and a second dielectric layer over the first dielectric layer. The first dielectric layer includes a first top portion on a top surface of the protruding fin, and a sidewall portion on a sidewall of the protruding fin. The second dielectric layer is over the first top portion and the top surface of the protruding fin, and is formed using an anisotropic deposition process. The method further includes forming a dummy gate electrode on the second dielectric layer, forming a gate spacer on a sidewall of the dummy gate electrode, removing the dummy gate electrode, and forming a replacement gate electrode in a space left by the dummy gate electrode.Type: ApplicationFiled: November 21, 2023Publication date: March 13, 2025Inventors: Cheng-Yu Wei, Cheng-I Lin, Hao-Ming Tang, Shu-Han Chen, Chi On Chui
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Patent number: 12243786Abstract: An embodiment includes a device including a first semiconductor fin extending from a substrate, a second semiconductor fin extending from the substrate, a hybrid fin over the substrate, the hybrid fin disposed between the first semiconductor fin and the second semiconductor fin, and the hybrid fin having an oxide inner portion extending downward from a top surface of the hybrid fin. The device also includes a first isolation region between the second semiconductor fin, the first semiconductor fin, and the hybrid fin, the hybrid fin extending above a top surface of the first isolation region, a high-k gate dielectric over sidewalls of the hybrid fin, sidewalls of the first semiconductor fin, and sidewalls of the second semiconductor fin, a gate electrode on the high-k gate dielectric, and source/drain regions on the first semiconductor fin on opposing sides of the gate electrode.Type: GrantFiled: May 13, 2022Date of Patent: March 4, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Cheng-I Lin, Da-Yuan Lee, Chi On Chui
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Publication number: 20250048703Abstract: Semiconductor devices and methods of manufacture are presented. In embodiments a method of manufacturing the semiconductor device includes forming a fin from a plurality of semiconductor materials, depositing a dummy gate over the fin, depositing a plurality of spacers adjacent to the dummy gate, removing the dummy gate to form an opening adjacent to the plurality of spacers, widening the opening adjacent to a top surface of the plurality of spacers, after the widening, removing one of the plurality of semiconductor materials to form nanowires, and depositing a gate electrode around the nanowires.Type: ApplicationFiled: October 19, 2023Publication date: February 6, 2025Inventors: Cheng-Yu Wei, Hao-Ming Tang, Cheng-I Lin, Shu-Han Chen, Chi On Chui
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Publication number: 20250048725Abstract: A semiconductor device structure and methods of forming the same are described. The structure includes a first semiconductor layer disposed over a substrate, the first semiconductor layer has an edge portion and a center portion, and a height of the center portion is substantially greater than a height of the edge portion. The structure further includes a dielectric spacer disposed below and in contact with the edge portion of the first semiconductor layer, a gate dielectric layer surrounding the center portion of the first semiconductor layer, and a gate electrode layer disposed on the gate dielectric layer surrounding the center portion of the first semiconductor layer.Type: ApplicationFiled: October 17, 2023Publication date: February 6, 2025Inventors: Cheng-I LIN, Shu-Han CHEN, Chi On CHUI
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Patent number: 12198974Abstract: A semiconductor device and a method of forming the same are provided. The method includes forming a trench in a substrate. A liner layer is formed along sidewalls and a bottom of the trench. A silicon-rich layer is formed over the liner layer. Forming the silicon-rich layer includes flowing a first silicon precursor into a process chamber for a first time interval, and flowing a second silicon precursor and a first oxygen precursor into the process chamber for a second time interval. The second time interval is different from the first time interval. The method further includes forming a dielectric layer over the silicon-rich layer.Type: GrantFiled: July 13, 2023Date of Patent: January 14, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Cheng-I Lin, Bang-Tai Tang
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Publication number: 20250006829Abstract: A method includes alternately stacking first semiconductor layers and second semiconductor layers over a substrate, patterning the first and second semiconductor layers into a fin structure, forming a dummy gate structure across the fin structure, depositing gate spacers over sidewalls of the dummy gate structure, removing the dummy gate structure to form a recess, removing the first semiconductor layers, depositing an interfacial layer wrapping the second semiconductor layers, depositing a high-k dielectric layer over the interfacial layer and over the sidewalls of the gate spacers, depositing a first gate electrode over the high-k dielectric layer, recessing the first gate electrode and the high-k dielectric layer to expose a top portion of the sidewalls of the gate spacers, depositing a low-k dielectric layer over the recessed high-k dielectric layer, and depositing a second gate electrode over the first gate electrode.Type: ApplicationFiled: October 17, 2023Publication date: January 2, 2025Inventors: Cheng-I Lin, Shu-Han Chen, Chi On Chui
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Publication number: 20240395912Abstract: A method of forming a semiconductor device includes forming a first layer on a semiconductor fin; forming a mask on the first layer, the mask being thicker on a top of the semiconductor fin than along a sidewall of the semiconductor fin. The first layer is thinned along the sidewall of the semiconductor fin using the mask. A second layer is formed on the semiconductor fin, the second layer covering the mask and the first layer. A dummy gate layer is formed on the semiconductor fin and patterned to expose a top surface of the semiconductor fin.Type: ApplicationFiled: July 31, 2024Publication date: November 28, 2024Inventors: Cheng-I Lin, Ming-Ho Lin, Chun-Heng Chen, Yung-Cheng Lu
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Publication number: 20240347622Abstract: A method includes forming a protruding structure, and forming a non-conformal film on the protruding structure using an Atomic Layer Deposition (ALD) process. The non-conformal film includes a top portion directly over the protruding structure, and a sidewall portion on a sidewall of the protruding structure. The top portion has a first thickness, and the sidewall portion has a second thickness smaller than the first thickness.Type: ApplicationFiled: June 19, 2024Publication date: October 17, 2024Inventors: Ming-Ho Lin, Cheng-I Lin, Chun-Heng Chen, Chi On Chui
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Patent number: 12046660Abstract: A method includes forming a protruding structure, and forming a non-conformal film on the protruding structure using an Atomic Layer Deposition (ALD) process. The non-conformal film includes a top portion directly over the protruding structure, and a sidewall portion on a sidewall of the protruding structure. The top portion has a first thickness, and the sidewall portion has a second thickness smaller than the first thickness.Type: GrantFiled: July 20, 2022Date of Patent: July 23, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ming-Ho Lin, Cheng-I Lin, Chun-Heng Chen, Chi On Chui
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Publication number: 20240186190Abstract: In an embodiment, a method includes: forming a first fin and a second fin over a semiconductor substrate; forming an isolation region between the first fin and the second fin, forming the isolation region comprising: depositing an oxide liner along the first fin, the second fin, and the semiconductor substrate, the oxide liner comprising a first upper portion and a first lower portion along the first fin, the first lower portion being between the first upper portion and the semiconductor substrate; thinning the oxide liner; depositing an insulation material over the oxide liner; and recessing the insulation material; and forming a gate structure over the first fin, the second fin, and the isolation region.Type: ApplicationFiled: January 10, 2023Publication date: June 6, 2024Inventors: Cheng-I Lin, Cheng-Wei Chang, Ting-Hsiang Chang, Chih-Tang Peng, Yung-Cheng Lu
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Publication number: 20240170563Abstract: A device includes a gate stack having a top portion, and a stacked structure underlying the top portion of the gate stack. The stacked structure includes a plurality of semiconductor nanostructures, with upper nanostructures in the plurality of semiconductor nanostructures overlapping respective lower nanostructures. The stacked structure further includes a plurality of gate structures, each including a lower portion of the gate stack. Each of the plurality of gate structures is between two of the plurality of semiconductor nanostructures. A dielectric layer extends on a top surface and a sidewall of the stacked structure. The dielectric layer includes a lower sub layer comprising a first dielectric material, and an upper sub layer over the lower sub layer and formed of a second dielectric material different from the first dielectric material. A gate spacer is on the dielectric layer. A source/drain region is aside of the gate stack.Type: ApplicationFiled: January 16, 2023Publication date: May 23, 2024Inventors: Cheng-I Lin, Shu-Han Chen, Chi On Chui
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Patent number: 11988724Abstract: The invention provides a signal detector. The signal detector comprises a housing, having a connector and a display unit; a tuner, configured to receive a cable signal; a microcontroller unit (MCU), electrically connected with the tuner and the display unit; a scanning switch, electrically connected with the MCU; a power supply, configured to supply a power to the MCU; and a power switch, electrically connected with the MCU.Type: GrantFiled: December 28, 2020Date of Patent: May 21, 2024Assignee: Hitron Technologies Inc.Inventors: Cheng-I Lin, Chiou-Hao Peng
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Publication number: 20240143141Abstract: The present disclosure generally relates to underwater user interfaces.Type: ApplicationFiled: January 5, 2024Publication date: May 2, 2024Inventors: Benjamin W. BYLENOK, Alan AN, Richard J. BLANCO, Andrew CHEN, Maxime CHEVRETON, Kyle B. CRUZ, Walton FONG, Ki Myung LEE, Sung Chang LEE, Cheng-I LIN, Kenneth H. MAHAN, Anya PRASITTHIPAYONG, Alyssa RAMDYAL, Eric SHI, Xuefeng WANG, Wei Guang WU
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Publication number: 20240088156Abstract: A semiconductor device includes at least one fin, a first dielectric layer and a second dielectric layer. The first dielectric layer is disposed on the at least one fin. The second dielectric layer between the at least one fin and the first dielectric layer. A thickness of the first dielectric layer on a sidewall of the at least one fin is less than a thickness of the second dielectric layer on the sidewall of the at least one fin.Type: ApplicationFiled: November 23, 2023Publication date: March 14, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Cheng-I Lin, Chun-Heng Chen, Ming-Ho Lin, Chi-On Chui
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Publication number: 20240038872Abstract: Gate profile tuning techniques are disclosed herein. An exemplary gate profile tuning method includes forming a gate structure over a channel layer. The gate structure includes a dummy gate and gate spacers disposed along sidewalls of the dummy gate. The method further includes partially removing the dummy gate to form a gate opening that defines a gate profile. The gate profile is then modified by treating portions of the gate spacers (for example, by oxygen plasma treatment) and removing the treated portions of the gate spacers (for example, by oxide removal). After removing a remainder of the dummy gate to expose the channel layer, a gate stack of the gate structure is formed in the gate opening. The gate stack has a funnel-shaped profile. In some embodiments, a width of the gate stack above the channel layer is greater than a width of the gate stack below the channel layer.Type: ApplicationFiled: January 12, 2023Publication date: February 1, 2024Inventors: Cheng-I Lin, Hao-Ming Tang, Shu-Han Chen, Chi On Chui
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Patent number: 11875021Abstract: The present disclosure generally relates to underwater user interfaces. In some embodiments, a method includes at an electronic device with a display and one or more input devices, receiving a first request to display a user interface for accessing a first function of the electronic device. In response to receiving the first request, and in accordance with a determination that the electronic device is under water, the method includes displaying a first user interface for accessing the first function. In response to receiving the first request, and in accordance with a determination that the electronic device is not under water, the method also includes displaying a second user interface for accessing the first function.Type: GrantFiled: April 5, 2021Date of Patent: January 16, 2024Assignee: Apple Inc.Inventors: Benjamin W. Bylenok, Alan An, Alyssa C. Ramdyal, Andrew Chen, Anya Prasitthipayong, Cheng-I Lin, Eric Shi, Kenneth H. Mahan, Ki Myung Lee, Kyle B. Cruz, Maxime Chevreton, Richard J. Blanco, Sung Chang Lee, Walton Fong, Wei Guang Wu, Xuefeng Wang
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Patent number: 11855095Abstract: A semiconductor device includes a semiconductor substrate and a first dielectric layer. The semiconductor substrate includes at least one fin. The first dielectric layer is disposed on the at least one fin. A thickness of the first dielectric layer located on a top surface of the at least one fin is greater than a thickness of the first dielectric layer located on a sidewall of the at least one fin.Type: GrantFiled: March 29, 2022Date of Patent: December 26, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Cheng-I Lin, Chun-Heng Chen, Ming-Ho Lin, Chi-On Chui
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Publication number: 20230360960Abstract: A semiconductor device and a method of forming the same are provided. The method includes forming a trench in a substrate. A liner layer is formed along sidewalls and a bottom of the trench. A silicon-rich layer is formed over the liner layer. Forming the silicon-rich layer includes flowing a first silicon precursor into a process chamber for a first time interval, and flowing a second silicon precursor and a first oxygen precursor into the process chamber for a second time interval. The second time interval is different from the first time interval. The method further includes forming a dielectric layer over the silicon-rich layer.Type: ApplicationFiled: July 13, 2023Publication date: November 9, 2023Inventors: Cheng-I Lin, Bang-Tai Tang
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Publication number: 20230282524Abstract: An embodiment includes a device including a first semiconductor fin extending from a substrate, a second semiconductor fin extending from the substrate, a hybrid fin over the substrate, the hybrid fin disposed between the first semiconductor fin and the second semiconductor fin, and the hybrid fin having an oxide inner portion extending downward from a top surface of the hybrid fin. The device also includes a first isolation region between the second semiconductor fin, the first semiconductor fin, and the hybrid fin, the hybrid fin extending above a top surface of the first isolation region, a high-k gate dielectric over sidewalls of the hybrid fin, sidewalls of the first semiconductor fin, and sidewalls of the second semiconductor fin, a gate electrode on the high-k gate dielectric, and source/drain regions on the first semiconductor fin on opposing sides of the gate electrode.Type: ApplicationFiled: May 13, 2022Publication date: September 7, 2023Inventors: Cheng-I Lin, Da-Yuan Lee, Chi On Chui