Patents by Inventor Cheng-I Lin

Cheng-I Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230360960
    Abstract: A semiconductor device and a method of forming the same are provided. The method includes forming a trench in a substrate. A liner layer is formed along sidewalls and a bottom of the trench. A silicon-rich layer is formed over the liner layer. Forming the silicon-rich layer includes flowing a first silicon precursor into a process chamber for a first time interval, and flowing a second silicon precursor and a first oxygen precursor into the process chamber for a second time interval. The second time interval is different from the first time interval. The method further includes forming a dielectric layer over the silicon-rich layer.
    Type: Application
    Filed: July 13, 2023
    Publication date: November 9, 2023
    Inventors: Cheng-I Lin, Bang-Tai Tang
  • Publication number: 20230282524
    Abstract: An embodiment includes a device including a first semiconductor fin extending from a substrate, a second semiconductor fin extending from the substrate, a hybrid fin over the substrate, the hybrid fin disposed between the first semiconductor fin and the second semiconductor fin, and the hybrid fin having an oxide inner portion extending downward from a top surface of the hybrid fin. The device also includes a first isolation region between the second semiconductor fin, the first semiconductor fin, and the hybrid fin, the hybrid fin extending above a top surface of the first isolation region, a high-k gate dielectric over sidewalls of the hybrid fin, sidewalls of the first semiconductor fin, and sidewalls of the second semiconductor fin, a gate electrode on the high-k gate dielectric, and source/drain regions on the first semiconductor fin on opposing sides of the gate electrode.
    Type: Application
    Filed: May 13, 2022
    Publication date: September 7, 2023
    Inventors: Cheng-I Lin, Da-Yuan Lee, Chi On Chui
  • Patent number: 11742238
    Abstract: A semiconductor device and a method of forming the same are provided. The method includes forming a trench in a substrate. A liner layer is formed along sidewalls and a bottom of the trench. A silicon-rich layer is formed over the liner layer. Forming the silicon-rich layer includes flowing a first silicon precursor into a process chamber for a first time interval, and flowing a second silicon precursor and a first oxygen precursor into the process chamber for a second time interval. The second time interval is different from the first time interval. The method further includes forming a dielectric layer over the silicon-rich layer.
    Type: Grant
    Filed: August 9, 2022
    Date of Patent: August 29, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-I Lin, Bang-Tai Tang
  • Publication number: 20230008994
    Abstract: A method of forming a semiconductor device includes forming a first layer over a semiconductor fin and forming a second layer over the first layer. The first layer is a first material and the second layer is a second material different from the first layer. The second layer is thicker on a top of the semiconductor fin than along a sidewall of the semiconductor fin. The method further includes performing an oxidation process, the oxidation process oxidizing at least a portion of the second layer, and patterning the second layer and the first layer.
    Type: Application
    Filed: January 5, 2022
    Publication date: January 12, 2023
    Inventors: Cheng-I Lin, Ming-Ho Lin, Da-Yuan Lee, Chi On Chui
  • Publication number: 20220384611
    Abstract: A method of forming a semiconductor device includes forming a first layer on a semiconductor fin; forming a mask on the first layer, the mask being thicker on a top of the semiconductor fin than along a sidewall of the semiconductor fin. The first layer is thinned along the sidewall of the semiconductor fin using the mask. A second layer is formed on the semiconductor fin, the second layer covering the mask and the first layer. A dummy gate layer is formed on the semiconductor fin and patterned to expose a top surface of the semiconductor fin.
    Type: Application
    Filed: August 4, 2021
    Publication date: December 1, 2022
    Inventors: Cheng-I Lin, Ming-Ho Lin, Chun-Heng Chen, Yung-Cheng Lu
  • Publication number: 20220384248
    Abstract: A semiconductor device and a method of forming the same are provided. The method includes forming a trench in a substrate. A liner layer is formed along sidewalls and a bottom of the trench. A silicon-rich layer is formed over the liner layer. Forming the silicon-rich layer includes flowing a first silicon precursor into a process chamber for a first time interval, and flowing a second silicon precursor and a first oxygen precursor into the process chamber for a second time interval. The second time interval is different from the first time interval. The method further includes forming a dielectric layer over the silicon-rich layer.
    Type: Application
    Filed: August 9, 2022
    Publication date: December 1, 2022
    Inventors: Cheng-I Lin, Bang-Tai Tang
  • Publication number: 20220359720
    Abstract: A method includes forming a protruding structure, and forming a non-conformal film on the protruding structure using an Atomic Layer Deposition (ALD) process. The non-conformal film includes a top portion directly over the protruding structure, and a sidewall portion on a sidewall of the protruding structure. The top portion has a first thickness, and the sidewall portion has a second thickness smaller than the first thickness.
    Type: Application
    Filed: July 20, 2022
    Publication date: November 10, 2022
    Inventors: Ming-Ho Lin, Cheng-I Lin, Chun-Heng Chen, Chi On Chui
  • Patent number: 11488855
    Abstract: A semiconductor device and a method of forming the same are provided. The method includes forming a trench in a substrate. A liner layer is formed along sidewalls and a bottom of the trench. A silicon-rich layer is formed over the liner layer. Forming the silicon-rich layer includes flowing a first silicon precursor into a process chamber for a first time interval, and flowing a second silicon precursor and a first oxygen precursor into the process chamber for a second time interval. The second time interval is different from the first time interval. The method further includes forming a dielectric layer over the silicon-rich layer.
    Type: Grant
    Filed: August 3, 2020
    Date of Patent: November 1, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-I Lin, Bang-Tai Tang
  • Patent number: 11437491
    Abstract: A method includes forming a protruding structure, and forming a non-conformal film on the protruding structure using an Atomic Layer Deposition (ALD) process. The non-conformal film includes a top portion directly over the protruding structure, and a sidewall portion on a sidewall of the protruding structure. The top portion has a first thickness, and the sidewall portion has a second thickness smaller than the first thickness.
    Type: Grant
    Filed: May 21, 2020
    Date of Patent: September 6, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Ho Lin, Cheng-I Lin, Chun-Heng Chen, Chi On Chui
  • Publication number: 20220223595
    Abstract: A semiconductor device includes a semiconductor substrate and a first dielectric layer. The semiconductor substrate includes at least one fin. The first dielectric layer is disposed on the at least one fin. A thickness of the first dielectric layer located on a top surface of the at least one fin is greater than a thickness of the first dielectric layer located on a sidewall of the at least one fin.
    Type: Application
    Filed: March 29, 2022
    Publication date: July 14, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-I Lin, Chun-Heng Chen, Ming-Ho Lin, Chi-On Chui
  • Patent number: 11296084
    Abstract: Provided are a deposition method, a semiconductor device and a method of fabricating the same. The semiconductor device includes a substrate and a dielectric structure. The substrate includes at least one fin thereon. The dielectric structure covers the at least one fin. A thickness of the dielectric structure located on a top surface of the at least one fin is greater than a thickness of the dielectric structure located on a sidewall of the at least one fin. The dielectric structure includes a first dielectric layer and a second dielectric layer. The first dielectric layer is conformally disposed on the at least one fin. The second dielectric layer is disposed on the first dielectric layer over the top surface of the at least one fin. A thickness of the second dielectric layer is greater than a thickness of the first dielectric layer.
    Type: Grant
    Filed: March 2, 2020
    Date of Patent: April 5, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-I Lin, Chun-Heng Chen, Ming-Ho Lin, Chi-On Chui
  • Publication number: 20210223925
    Abstract: The present disclosure generally relates to underwater user interfaces. In some embodiments, a method includes at an electronic device with a display and one or more input devices, receiving a first request to display a user interface for accessing a first function of the electronic device. In response to receiving the first request, and in accordance with a determination that the electronic device is under water, the method includes displaying a first user interface for accessing the first function. In response to receiving the first request, and in accordance with a determination that the electronic device is not under water, the method also includes displaying a second user interface for accessing the first function.
    Type: Application
    Filed: April 5, 2021
    Publication date: July 22, 2021
    Inventors: Benjamin W. BYLENOK, Alan AN, Alyssa C. RAMDYAL, Andrew CHEN, Anya PRASITTHIPAYONG, Cheng-I LIN, Eric SHI, Kenneth H. MAHAN, Ki Myung LEE, Kyle B. CRUZ, Maxime CHEVRETON, Richard J. BLANCO, Sung Chang LEE, Walton FONG, Wei Guang WU, Xuefeng WANG
  • Publication number: 20210208210
    Abstract: The invention provides a signal detector. The signal detector comprises a housing, having a connector and a display unit; a tuner, configured to receive a cable signal; a microcontroller unit (MCU), electrically connected with the tuner and the display unit; a scanning switch, electrically connected with the MCU; a power supply, configured to supply a power to the MCU; and a power switch, electrically connected with the MCU.
    Type: Application
    Filed: December 28, 2020
    Publication date: July 8, 2021
    Inventors: CHENG-I LIN, CHIOU-HAO PENG
  • Publication number: 20210134983
    Abstract: A method includes forming a protruding structure, and forming a non-conformal film on the protruding structure using an Atomic Layer Deposition (ALD) process. The non-conformal film includes a top portion directly over the protruding structure, and a sidewall portion on a sidewall of the protruding structure. The top portion has a first thickness, and the sidewall portion has a second thickness smaller than the first thickness.
    Type: Application
    Filed: May 21, 2020
    Publication date: May 6, 2021
    Inventors: Ming-Ho Lin, Cheng-I Lin, Chun-Heng Chen, Chi On Chui
  • Patent number: 10969941
    Abstract: The present disclosure generally relates to underwater user interfaces. In some embodiments, a method includes at an electronic device with a display and one or more input devices, receiving a first request to display a user interface for accessing a first function of the electronic device. In response to receiving the first request, and in accordance with a determination that the electronic device is under water, the method includes displaying a first user interface for accessing the first function. In response to receiving the first request, and in accordance with a determination that the electronic device is not under water, the method also includes displaying a second user interface for accessing the first function.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: April 6, 2021
    Assignee: Apple Inc.
    Inventors: Benjamin W Bylenok, Alan An, Alyssa C Ramdyal, Andrew Chen, Anya Prasitthipayong, Cheng-I Lin, Eric Shi, Kenneth H Mahan, Ki Myung Lee, Kyle B Cruz, Maxime Chevreton, Richard J Blanco, Sung Chang Lee, Walton Fong, Wei Guang Wu, Xuefeng Wang
  • Publication number: 20210100122
    Abstract: An electronic device with a sealing layer is disclosed. The sealing layer may include several enhancements designed to improve the overall sealing performance. For instance, the sealing layer may include an adhesive material and several particles embedded in the adhesive material. The embedded particles may include liquid-activated particles that respond to liquid exposure. In some instances, the liquid-activated particles absorb the liquid. Additionally, the liquid-activated particles may expand and fill/cover areas previously occupied by the sealing layer or another structure of the electronic device. Further, the liquid-activated particles may adhere to one or more structures of the electronic device, thereby providing the sealing layer with sealing properties.
    Type: Application
    Filed: January 31, 2020
    Publication date: April 1, 2021
    Inventors: Xuefeng WANG, SungChang LEE, Alan AN, Richard BLANCO, Andrew CHEN, Maxime CHEVRETON, Kyle B. CRUZ, Walton FONG, Nigel J. FUNGE, Ki Myung LEE, Cheng-I LIN, Kenneth H. MAHAN, Anya PRASITTHIPAYONG, Alyssa C. RAMDYAL, Nikhil SHARMA, Eric SHI, Wei Guang WU
  • Publication number: 20210098458
    Abstract: Provided are a deposition method, a semiconductor device and a method of fabricating the same. The semiconductor device includes a substrate and a dielectric structure. The substrate includes at least one fin thereon. The dielectric structure covers the at least one fin. A thickness of the dielectric structure located on a top surface of the at least one fin is greater than a thickness of the dielectric structure located on a sidewall of the at least one fin. The dielectric structure includes a first dielectric layer and a second dielectric layer. The first dielectric layer is conformally disposed on the at least one fin. The second dielectric layer is disposed on the first dielectric layer over the top surface of the at least one fin. A thickness of the second dielectric layer is greater than a thickness of the first dielectric layer.
    Type: Application
    Filed: March 2, 2020
    Publication date: April 1, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Cheng-I Lin, Chun-Heng Chen, Ming-Ho Lin, Chi-On Chui
  • Publication number: 20200365448
    Abstract: A semiconductor device and a method of forming the same are provided. The method includes forming a trench in a substrate. A liner layer is formed along sidewalls and a bottom of the trench. A silicon-rich layer is formed over the liner layer. Forming the silicon-rich layer includes flowing a first silicon precursor into a process chamber for a first time interval, and flowing a second silicon precursor and a first oxygen precursor into the process chamber for a second time interval. The second time interval is different from the first time interval. The method further includes forming a dielectric layer over the silicon-rich layer.
    Type: Application
    Filed: August 3, 2020
    Publication date: November 19, 2020
    Inventors: Cheng-I Lin, Bang-Tai Tang
  • Patent number: 10748808
    Abstract: A semiconductor device and a method of forming the same are provided. The method includes forming a trench in a substrate. A liner layer is formed along sidewalls and a bottom of the trench. A silicon-rich layer is formed over the liner layer. Forming the silicon-rich layer includes flowing a first silicon precursor into a process chamber for a first time interval, and flowing a second silicon precursor and a first oxygen precursor into the process chamber for a second time interval. The second time interval is different from the first time interval. The method further includes forming a dielectric layer over the silicon-rich layer.
    Type: Grant
    Filed: July 16, 2018
    Date of Patent: August 18, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-I Lin, Bang-Tai Tang
  • Publication number: 20200104021
    Abstract: The present disclosure generally relates to underwater user interfaces. In some embodiments, a method includes at an electronic device with a display and one or more input devices, receiving a first request to display a user interface for accessing a first function of the electronic device. In response to receiving the first request, and in accordance with a determination that the electronic device is under water, the method includes displaying a first user interface for accessing the first function. In response to receiving the first request, and in accordance with a determination that the electronic device is not under water, the method also includes displaying a second user interface for accessing the first function.
    Type: Application
    Filed: December 17, 2018
    Publication date: April 2, 2020
    Inventors: Benjamin W. BYLENOK, Alan AN, Alyssa C. RAMDYAL, Andrew CHEN, Anya PRASITTHIPAYONG, Cheng-I LIN, Eric SHI, Kenneth H. MAHAN, Ki Myung LEE, Kyle B. CRUZ, Maxime CHEVRETON, Richard J. BLANCO, Sung Chang LEE, Walton FONG, Wei Guang WU, Xuefeng WANG