Patents by Inventor Cheng-Yuan Tsai

Cheng-Yuan Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9859323
    Abstract: A complementary metal-oxide-semiconductor (CMOS) image sensor having a passivation layer is provided. The CMOS image sensor includes a sensing device substrate. Isolation structures are positioned within trenches of the sensing device substrate. The isolation structures are arranged along opposing sides of a plurality of image sensing devices. The CMOS image sensor also includes a passivation layer. The passivation layer includes passivation sidewalls arranged along the sidewalls of the isolation structures. A metallic grid overlies the passivation layer. The metallic grid includes a metal framework surrounding openings overlying the plurality of image sensing devices. The passivation layer further includes passivation section underlying the openings.
    Type: Grant
    Filed: June 13, 2016
    Date of Patent: January 2, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Sheng-Chau Chen, Cheng-Hsien Chou, Cheng-Yuan Tsai, Sheng-Chan Li, Zhi-Yang Wang
  • Publication number: 20170365514
    Abstract: A semiconductor device and a fabrication method thereof are provided. The semiconductor device includes a semiconductor structure, a dielectric layer, a metal-semiconductor compound film and a cover layer. The semiconductor structure has an upper surface and a lateral surface. The dielectric layer encloses the lateral surface of the semiconductor structure and exposes the upper surface of the semiconductor structure. The metal-semiconductor compound film is on the semiconductor structure, wherein the dielectric layer exposes a portion of a surface of the metal-semiconductor compound film. The cover layer encloses the portion of the surface of the metal-semiconductor compound film exposed by the dielectric layer, and exposes the dielectric layer.
    Type: Application
    Filed: September 1, 2017
    Publication date: December 21, 2017
    Inventors: Chun-Han TSAO, Chih-Ming CHEN, Han-Yu CHEN, Szu-Yu WANG, Lan-Lin CHAO, Cheng-Yuan TSAI
  • Patent number: 9847401
    Abstract: A semiconductor device comprising a substrate, a channel layer over the substrate, an active layer over the channel layer and a laminate layer in contact with the active layer. The active layer has a band gap discontinuity with the channel layer.
    Type: Grant
    Filed: February 20, 2014
    Date of Patent: December 19, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Han-Chin Chiu, Hsing-Lien Lin, Cheng-Yuan Tsai
  • Publication number: 20170358620
    Abstract: A complementary metal-oxide-semiconductor (CMOS) image sensor having a passivation layer is provided. The CMOS image sensor includes a sensing device substrate. Isolation structures are positioned within trenches of the sensing device substrate. The isolation structures are arranged along opposing sides of a plurality of image sensing devices. The CMOS image sensor also includes a passivation layer. The passivation layer includes passivation sidewalls arranged along the sidewalls of the isolation structures. A metallic grid overlies the passivation layer. The metallic grid includes a metal framework surrounding openings overlying the plurality of image sensing devices. The passivation layer further includes passivation section underlying the openings.
    Type: Application
    Filed: June 13, 2016
    Publication date: December 14, 2017
    Inventors: Sheng-Chau Chen, Cheng-Hsien Chou, Cheng-Yuan Tsai, Sheng-Chan Li, Zhi-Yang Wang
  • Patent number: 9825117
    Abstract: Some embodiments of the present disclosure provide an integrated circuit (IC) device including a metal-insulator-metal (MIM) capacitor structure. The MIM capacitor structure includes a lower metal capacitor electrode, an upper metal capacitor electrode, and a capacitor dielectric separating the lower metal capacitor electrode from the upper metal capacitor electrode. The capacitor dielectric is made up of an amorphous oxide/nitride matrix and a plurality of metal or metal oxide/nitride nano-particles that are randomly distributed over the volume of amorphous oxide/nitride matrix.
    Type: Grant
    Filed: December 28, 2016
    Date of Patent: November 21, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jian-Shiou Huang, Yao-Wen Chang, Hsing-Lien Lin, Cheng-Yuan Tsai, Chia-Shiung Tsai
  • Patent number: 9818885
    Abstract: A system and method for manufacturing a semiconductor device is provided. An embodiment comprises forming a deposited layer using an atomic layer deposition (ALD) process. The ALD process may utilize a first precursor for a first time period, a first purge for a second time period longer than the first time period, a second precursor for a third time period longer than the first time period, and a second purge for a fourth time period longer than the third time period.
    Type: Grant
    Filed: December 19, 2016
    Date of Patent: November 14, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yao-Wen Chang, Cheng-Yuan Tsai, Hsing-Lien Lin
  • Publication number: 20170301728
    Abstract: The present disclosure provides a semiconductor structure and a method for manufacturing the same. The semiconductor structure includes a bottom electrode via (BEVA), a recap layer on the BEVA, and a magnetic tunneling junction (MTJ) layer over the recap layer. The BEVA includes a lining layer over a bottom and a sidewall of a trench of the BEVA, and electroplated copper over the lining layer, filling the trench of the BEVA. The recap layer overlaps a top surface of the lining layer and a top surface of the electroplated copper.
    Type: Application
    Filed: April 15, 2016
    Publication date: October 19, 2017
    Inventors: HARRY-HAK-LAY CHUANG, KUEI-HUNG SHEN, HSUN-CHUNG KUANG, CHENG-YUAN TSAI, RU-LIANG LEE
  • Patent number: 9793243
    Abstract: A structure includes first and second substrates, first and second stress buffer layers, and a post-passivation interconnect (PPI) structure. The first and second substrates include first and second semiconductor substrates and first and second interconnect structures on the first and second semiconductor substrates, respectively. The second interconnect structure is on a first side of the second semiconductor substrate. The first substrate is bonded to the second substrate at a bonding interface. A via extends at least through the second semiconductor substrate into the second interconnect structure. The first stress buffer layer is on a second side of the second semiconductor substrate opposite from the first side of the second semiconductor substrate. The PPI structure is on the first stress buffer layer and is electrically coupled to the via. The second stress buffer layer is on the PPI structure and the first stress buffer layer.
    Type: Grant
    Filed: August 13, 2014
    Date of Patent: October 17, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Fa Lu, Cheng-Yuan Tsai, Yeur-Luen Tu, Chia-Shiung Tsai
  • Publication number: 20170294363
    Abstract: A method includes providing a semiconductor device disposed on a substrate, wherein the semiconductor device includes a semiconductor device feature, forming a conductive layer over the substrate such that the conductive layer is electrically coupled to the semiconductor device feature, forming a getter layer over the conductive layer, wherein the getter layer includes a first layer that is formed of titanium and a second layer overlying the first layer that is formed of tantalum nitride, and forming an interconnect layer over the getter layer such that the interconnect layer is electrically coupled to the semiconductor device feature.
    Type: Application
    Filed: June 19, 2017
    Publication date: October 12, 2017
    Inventors: Yao-Wen Chang, Cheng-Yuan Tsai, Kai-Wen Cheng
  • Patent number: 9786619
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure comprises a semiconductive substrate and an interconnect structure over the semiconductive substrate. The semiconductor structure also comprises a bond pad in the semiconductive substrate and coupled to the metal layer. The bond pad comprises two conductive layers.
    Type: Grant
    Filed: May 17, 2016
    Date of Patent: October 10, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Chau Chen, Shih-Pei Chou, Ming-Jhe Lee, Kuo-Ming Wu, Cheng-Hsien Chou, Cheng-Yuan Tsai, Yeur-Luen Tu
  • Publication number: 20170271492
    Abstract: A semiconductor structure comprises a semiconductive substrate comprising a top surface, a III-V compound layer over the semiconductive substrate, and a first passivation layer over the III-V compound layer. The semiconductor structure also includes an etch stop layer over the first passivation layer. The semiconductor structure further includes a gate stack over the first passivation layer and surrounded by the etch stop layer.
    Type: Application
    Filed: March 17, 2016
    Publication date: September 21, 2017
    Inventors: HAN-CHIN CHIU, SHENG-DE LIU, YU-SYUAN LIN, YAO-CHUNG CHANG, CHENG-YUAN TSAI
  • Publication number: 20170271473
    Abstract: Some embodiments of the present disclosure relate to a high electron mobility transistor (HEMT) which includes a heterojunction structure arranged over a semiconductor substrate. The heterojunction structure includes a binary III/V semiconductor layer made of a first III-nitride material to act as a channel region of the e-HEMT, and a ternary III/V semiconductor layer arranged over the binary III/V semiconductor layer and made of a second III-nitride material to act as a barrier layer. Source and drain regions are arranged over the ternary III/V semiconductor layer and are spaced apart laterally from one another. A gate structure is arranged over the heterojunction structure and is arranged between the source and drain regions. The gate structure is made of a third III-nitride material. A first passivation layer is disposed about sidewalls of the gate structure and is made of a fourth III-nitride material.
    Type: Application
    Filed: June 5, 2017
    Publication date: September 21, 2017
    Inventors: Han-Chin Chiu, Chi-Ming Chen, Cheng-Yuan Tsai, Fu-Wei Yao
  • Publication number: 20170271383
    Abstract: An image sensor device is disclosed. The image sensor device includes: a substrate having a front surface and a back surface; a radiation-sensing region formed in the substrate; an opening extending from the back surface of the substrate into the substrate; a first metal oxide film including a first metal, the first metal oxide film being formed on an interior surface of the opening; and a second metal oxide film including a second metal, the second metal oxide film being formed over the first metal oxide film; wherein the electronegativity of the first metal is greater than the electronegativity of the second metal. An associated fabricating method is also disclosed.
    Type: Application
    Filed: March 17, 2016
    Publication date: September 21, 2017
    Inventors: CHIH-YU LAI, MIN-YING TSAI, YEUR-LUEN TU, HAI-DANG TRINH, CHENG-YUAN TSAI
  • Publication number: 20170263657
    Abstract: A system and method for forming pixels in an image sensor is provided. In an embodiment, a semiconductor device includes an image sensor including a first pixel region and a second pixel region in a substrate, the first pixel region being adjacent to the second pixel region. A first anti-reflection coating is over the first pixel region, the first anti-reflection coating reducing reflection for a first wavelength range of incident light. A second anti-reflection coating is over the second pixel region, the second anti-reflection coating reducing reflection for a second wavelength range of incident light that is different from the first wavelength range.
    Type: Application
    Filed: May 31, 2017
    Publication date: September 14, 2017
    Inventors: Yen-Chang Chu, Yeur-Luen Tu, Cheng-Yuan Tsai
  • Publication number: 20170263729
    Abstract: A High Electron Mobility Transistor (HEMT) and a method of forming the same are disclosed. The HEMT includes a first III-V compound layer having a first band gap and a second III-V compound layer having a second band gap over the first III-V compound layer, wherein the second band gap is greater than the first band gap. The HEMT further includes a first oxide layer over the second III-V compound layer; a first interfacial layer over the first oxide layer; and a passivation layer over the first interfacial layer.
    Type: Application
    Filed: May 19, 2017
    Publication date: September 14, 2017
    Inventors: Han-Chin Chiu, Cheng-Yuan Tsai
  • Patent number: 9761799
    Abstract: A method for manufacturing an integrated circuit (IC) is provided. An etch is performed into an upper surface of an insulating layer to form an opening. A plurality of electrode layers is formed filling the opening. Forming the plurality of electrode layers comprises repeatedly forming an electrode layer conformally lining an unfilled region of the opening until the opening is filled. Forming the electrode layer comprises depositing the electrode layer and treating a surface of the electrode layer that faces an interior of the opening. A planarization is performed into the plurality of electrode layers to the upper surface of the insulating layer.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: September 12, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jian-Shiou Huang, Cheng-Yuan Tsai, Yao-Wen Chang
  • Patent number: 9754827
    Abstract: A semiconductor device and a fabrication method thereof are provided. The semiconductor device includes a semiconductor structure, a dielectric layer, a metal-semiconductor compound film and a cover layer. The semiconductor structure has an upper surface and a lateral surface. The dielectric layer encloses the lateral surface of the semiconductor structure and exposes the upper surface of the semiconductor structure. The metal-semiconductor compound film is on the semiconductor structure, wherein the dielectric layer exposes a portion of a surface of the metal-semiconductor compound film. The cover layer encloses the portion of the surface of the metal-semiconductor compound film exposed by the dielectric layer, and exposes the dielectric layer.
    Type: Grant
    Filed: April 29, 2016
    Date of Patent: September 5, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Chun-Han Tsao, Chih-Ming Chen, Han-Yu Chen, Szu-Yu Wang, Lan-Lin Chao, Cheng-Yuan Tsai
  • Patent number: 9754813
    Abstract: A bonding chuck is discussed with methods of using the bonding chuck and tools including the bonding chuck. A method includes loading a first wafer on first surface of a first bonding chuck, loading a second wafer on a second bonding chuck, and bonding the first wafer to the second wafer. The first surface is defined at least in part by a first portion of a first spherical surface and a second portion of a second spherical surface. The first spherical surface has a first radius, and the second spherical surface has a second radius. The first radius is less than the second radius.
    Type: Grant
    Filed: November 2, 2016
    Date of Patent: September 5, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hui Huang, Yen-Chang Chu, Kuan-Liang Liu, Ping-Yin Liu, Cheng-Yuan Tsai, Yeur-Luen Tu, Chia-Shiung Tsai, Ru-Liang Lee
  • Publication number: 20170229346
    Abstract: Semiconductor devices, methods of manufacture thereof, and methods of singulating semiconductor devices are disclosed. In some embodiments, a method of manufacturing a semiconductor device includes forming a trench in a substrate, the trench being formed within a first side of the substrate and disposed around a portion of the substrate. A first insulating material is formed over the first side of the substrate and the trench, and a second insulating material is formed over the first insulating material. Apertures are formed in the second insulating material and the first insulating material over the portion of the substrate. Features are formed in the apertures, and a carrier is coupled to the features and the second insulating material. A second side of the substrate is planarized, the second side of the substrate being opposite the first side of the substrate. The second insulating material is removed, and the carrier is removed.
    Type: Application
    Filed: June 1, 2016
    Publication date: August 10, 2017
    Inventors: Yao-Wen Chang, Jian-Shiou Huang, Cheng-Yuan Tsai, Kong-Beng Thei
  • Publication number: 20170229532
    Abstract: A semiconductor structure includes a first magnetic layer, an insulative oxide layer, an oxygen trapping layer and a cap layer. The insulative oxide layer is over the first magnetic layer. The oxygen trapping layer is over the insulative oxide layer. The oxygen concentration of the oxygen trapping layer is less than an oxygen concentration of the insulative oxide layer. The cap layer is over the oxygen trapping layer.
    Type: Application
    Filed: February 5, 2016
    Publication date: August 10, 2017
    Inventors: CHUN-CHI CHEN, KAI-WEN CHENG, CHENG-YUAN TSAI, KUO-MING WU