Patents by Inventor Chi Tu

Chi Tu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10727337
    Abstract: A semiconductor device includes a memory circuit and a logic circuit. The memory circuit includes a word line, a bit line, a common line and a memory transistor having a gate coupled to the word line, a drain coupled to the bit line and a source coupled to the common line. The logic circuit includes a field effect transistor (FET) having a gate, a drain and a source. The memory transistor has a gate electrode layer formed on a gate dielectric layer, and the gate dielectric layer includes a first insulating layer and a first ferroelectric (FE) material layer. The FET has a gate electrode layer formed on a gate dielectric layer, and the gate dielectric layer includes a second insulating layer and a second FE material layer.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: July 28, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Chi Tu, Jen-Sheng Yang, Sheng-Hung Shih, Tong-Chern Ong, Wen-Ting Chu
  • Patent number: 10700275
    Abstract: The present disclosure, in some embodiments, relates to a memory device. The memory device includes a bottom electrode via and a bottom electrode over a top of the bottom electrode via. A data storage layer is over the bottom electrode and a top electrode is over the data storage layer. A top electrode via is on an upper surface of the top electrode and is centered along a first line that is laterally offset from a second line centered upon a bottommost surface of the bottom electrode via. The first line is perpendicular to the upper surface of the top electrode and parallel to the second line.
    Type: Grant
    Filed: December 20, 2018
    Date of Patent: June 30, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Yang Chang, Wen-Ting Chu, Kuo-Chi Tu, Yu-Wen Liao, Hsia-Wei Chen, Chin-Chieh Yang, Sheng-Hung Shih, Wen-Chun You
  • Publication number: 20200136040
    Abstract: An integrated circuit device has an RRAM cell that includes a top electrode, an RRAM dielectric layer, and a bottom electrode having a surface that interfaces with the RRAM dielectric layer. Oxides of the bottom electrode are substantially absent from the bottom electrode surface. The bottom electrode has a higher density in a zone adjacent the surface as compared to a bulk region of the bottom electrode. The surface has a roughness Ra of 2 nm or less. A process for forming the surface includes chemical mechanical polishing followed by hydrofluoric acid etching followed by argon ion bombardment. An array of RRAM cells formed by this process is superior in terms of narrow distribution and high separation between low and high resistance states.
    Type: Application
    Filed: April 26, 2019
    Publication date: April 30, 2020
    Inventors: Fu-Chen Chang, Kuo-Chi Tu, Wen-Ting Chu
  • Patent number: 10622300
    Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a lower interconnect layer disposed within a first inter-level dielectric (ILD) layer over a substrate. A plurality of MIM (metal-insulator-metal) structures are disposed within a second inter-level dielectric (ILD) layer over the lower interconnect layer. An upper interconnect layer is coupled to the plurality of MIM structures at first locations that are directly over second locations at which the lower interconnect layer is coupled to the plurality of MIM structures. One or both of the lower interconnect layer and the upper interconnect layer are comprised within a conductive path that electrically couples the plurality of MIM structures in a series connection.
    Type: Grant
    Filed: April 17, 2019
    Date of Patent: April 14, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Chi Tu, Chin-Chieh Yang, Wen-Ting Chu
  • Publication number: 20200105772
    Abstract: Some embodiments relate to a ferroelectric random access memory (FeRAM) device. The FeRAM device includes a bottom electrode structure and a top electrode overlying the ferroelectric structure. The top electrode has a first width as measured between outermost sidewalls of the top electrode. A ferroelectric structure separates the bottom electrode structure from the top electrode. The ferroelectric structure has a second width as measured between outermost sidewalls of the ferroelectric structure. The second width is greater than the first width such that the ferroelectric structure includes a ledge that reflects a difference between the first width and the second width. A dielectric sidewall spacer structure is disposed on the ledge and covers the outermost sidewalls of the top electrode.
    Type: Application
    Filed: June 26, 2019
    Publication date: April 2, 2020
    Inventors: Tzu-Yu Chen, Kuo-Chi Tu, Sheng-Hung Shih, Wen-Ting Chu, Yong-Shiuan Tsair
  • Publication number: 20200105344
    Abstract: A method of forming a memory device includes: forming a polish stop layer over a metallization layer in an inter-metal dielectric layer; performing an etching process to form an opening in the polish stop layer, in which a sidewall of the opening extends at an acute angle relative to a top surface of the polish stop layer; forming an electrode material in the opening and over the polish stop layer; planarizing the electrode material until a top surface of the polish stop layer is exposed so as to form a bottom electrode surrounded by the polish stop layer; and forming a stack of a resistance switching layer and a top electrode over the bottom electrode.
    Type: Application
    Filed: December 2, 2019
    Publication date: April 2, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Chi TU, Chu-Jie HUANG, Sheng-Hung SHIH, Nai-Chao SU, Wen-Ting CHU
  • Publication number: 20200105343
    Abstract: A memory device includes a metal structure, a first dielectric layer, a bottom electrode, a second dielectric layer, a resistance switching layer, and a top electrode. The first dielectric layer surrounds the metal structure. The bottom electrode is in contact with a top surface of the metal structure. The second dielectric layer surrounds the bottom electrode, in which a top surface of the bottom electrode is higher than a top surface of the second dielectric layer. The resistance switching layer is over the bottom electrode. The top electrode is over the resistance switching layer.
    Type: Application
    Filed: December 2, 2019
    Publication date: April 2, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Chi TU, Chu-Jie HUANG, Sheng-Hung SHIH, Nai-Chao SU, Wen-Ting CHU
  • Publication number: 20200098828
    Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a memory device over a substrate and forming an inter-level dielectric (ILD) layer over the memory device. The ILD layer is selectively etched to define a first cavity that exposes a top of the memory device and to define a second cavity that is laterally separated from the first cavity by the ILD layer. The second cavity is defined by a smooth sidewall of the ILD layer that extends between upper and lower surfaces of the ILD layer. A conductive material is formed within the first cavity and the second cavity.
    Type: Application
    Filed: November 26, 2019
    Publication date: March 26, 2020
    Inventors: Hsia-Wei Chen, Chih-Yang Chang, Chin-Chieh Yang, Jen-Sheng Yang, Kuo-Chi Tu, Wen-Ting Chu, Yu-Wen Liao
  • Publication number: 20200098983
    Abstract: Some embodiments relate to a device. The device includes a top electrode and a via disposed over the top electrode. A peripheral upper surface of the top electrode is above a central upper surface of the top electrode, and a tapered inner sidewall of the top electrode connects the peripheral upper surface to the central upper surface. The via establishes electrical contact with the tapered inner sidewall but is spaced apart from the central upper surface.
    Type: Application
    Filed: November 25, 2019
    Publication date: March 26, 2020
    Inventors: Hsia-Wei Chen, Wen-Ting Chu, Kuo-Chi Tu, Chih-Yang Chang, Chin-Chieh Yang, Yu-Wen Liao, Wen-Chun You, Sheng-Hung Shih
  • Publication number: 20200083294
    Abstract: A resistive random access memory (RRAM) structure includes a resistive memory element formed on a semiconductor substrate. The resistive element includes a top electrode, a bottom electrode, and a resistive material layer positioned between the top electrode and the bottom electrode. The RRAM structure further includes a field effect transistor (FET) formed on the semiconductor substrate, the FET having a source and a drain. The drain has a zero-tilt doping profile and the source has a tilted doping profile. The resistive memory element is coupled with the drain via a portion of an interconnect structure.
    Type: Application
    Filed: November 11, 2019
    Publication date: March 12, 2020
    Inventors: Chin-Chieh Yang, Hsia-Wei Chen, Chih-Yang Chang, Kuo-Chi Tu, Wen-Ting Chu, Yu-Wen Liao
  • Publication number: 20200075075
    Abstract: In some embodiments, the present disclosure relates to a memory structure. The memory structure has a source region and a drain region disposed within a substrate. A select gate disposed over the substrate between the source region and the drain region. A ferroelectric random access memory (FeRAM) device is disposed over the substrate between the select gate and the source region. The FeRAM device includes a ferroelectric material arranged between the substrate and a conductive electrode.
    Type: Application
    Filed: February 5, 2019
    Publication date: March 5, 2020
    Inventors: Tzu-Yu Chen, Kuo-Chi Tu, Wen-Ting Chu, Yong-Shiuan Tsair
  • Patent number: 10566387
    Abstract: The present disclosure relates to a method of forming an integrated circuit. In some embodiments, the method may be performed by forming a lower interconnect structure within a first inter-level dielectric (ILD) layer over an upper surface of a substrate, and forming a resistive random access memory (RRAM) device over the lower interconnect structure. A second ILD layer is formed over the RRAM device. The second ILD layer is patterned to remove a part of the second ILD layer that defines a cavity. The cavity vertically extends from an upper surface of the second ILD layer to an upper surface of the RRAM device and laterally extends past opposing sidewalls of the RRAM device. An upper interconnect wire is formed within the cavity.
    Type: Grant
    Filed: August 22, 2018
    Date of Patent: February 18, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsia-Wei Chen, Chih-Yang Chang, Chin-Chieh Yang, Jen-Sheng Yang, Kuo-Chi Tu, Wen-Ting Chu, Yu-Wen Liao
  • Publication number: 20200035875
    Abstract: A light-emitting device including at least one light-emitting unit, a wavelength conversion adhesive layer, and a reflective protecting element is provided. The light-emitting unit has an upper surface and a lower surface opposite to each other. The light-emitting unit includes two electrode pads, and the two electrode pads are located on the lower surface. The wavelength conversion adhesive layer is disposed on the upper surface. The wavelength conversion adhesive layer includes a low-concentration fluorescent layer and a high-concentration fluorescent layer. The high-concentration fluorescent layer is located between the low-concentration fluorescent layer and the light-emitting unit. The width of the high-concentration fluorescent layer is WH. The width of the low-concentration fluorescent layer is WL. The width of the light-emitting unit is WE. The light-emitting device further satisfies the following inequalities: WE<WL, WH<WL and 0.8<WH/WE?1.2.
    Type: Application
    Filed: October 7, 2019
    Publication date: January 30, 2020
    Applicant: Genesis Photonics Inc.
    Inventors: Cheng-Wei Hung, Long-Chi Tu, Jui-Fu Chang, Chun-Ming Tseng, Yun-Chu Chen
  • Publication number: 20200028533
    Abstract: Systems and methods are provided for receiver nonlinearity estimation and cancellation. Narrowband (NB) estimation may be performed in a receiver during handling of received radio frequency (RF) signals. The narrowband (NB) may include generating estimation channelization information relating to received RF signals; generating reference nonlinearity information relating to one or more other signals, which may cause or contribute to nonlinearity that affects the processing of the received RF signals; and generating, based on the estimation channelization information relating to the received RF signals and the reference nonlinearity information relating to the other signals, control data for configuring nonlinearity cancellation functions. The received RF signals may be channelized, and the estimation channelization information may be generated based on the channelization of the received RF signals.
    Type: Application
    Filed: October 1, 2019
    Publication date: January 23, 2020
    Inventors: Wen-Chi Tu, Stephane Laurent-Michel
  • Publication number: 20200020745
    Abstract: The present disclosure, in some embodiments, relates to an integrated circuit. The integrated circuit has a first inter-level dielectric (ILD) layer over a substrate. A lower electrode is over the first ILD layer, a data storage structure is over the lower electrode, and an upper electrode is over the data storage structure. An upper interconnect wire directly contacts an entirety of an upper surface of the upper electrode. A conductive via directly contacts an upper surface of the upper interconnect wire. The conductive via has an outermost sidewall that is directly over the upper surface of the upper interconnect wire.
    Type: Application
    Filed: September 22, 2019
    Publication date: January 16, 2020
    Inventors: Hsia-Wei Chen, Chih-Yang Chang, Chin-Chieh Yang, Jen-Sheng Yang, Kuo-Chi Tu, Wen-Ting Chu, Yu-Wen Liao
  • Publication number: 20200006360
    Abstract: A method for forming an integrated circuit (IC) and an IC are disclosed. The method for forming the IC includes: forming an isolation structure separating a memory semiconductor region from a logic semiconductor region; forming a memory cell structure on the memory semiconductor region; forming a memory capping layer covering the memory cell structure and the logic semiconductor region; performing a first etch into the memory capping layer to remove the memory capping layer from the logic semiconductor region, and to define a slanted, logic-facing sidewall on the isolation structure; forming a logic device structure on the logic semiconductor region; and performing a second etch into the memory capping layer to remove the memory capping layer from the memory semiconductor, while leaving a dummy segment of the memory capping layer that defines the logic-facing sidewall.
    Type: Application
    Filed: September 3, 2019
    Publication date: January 2, 2020
    Inventors: Tzu-Yu Chen, Kuo-Chi Tu, Wen-Ting Chu, Yong-Shiuan Tsair
  • Patent number: 10510953
    Abstract: Some embodiments relate to a device. The device includes a top electrode and a via disposed over the top electrode. A peripheral upper surface of the top electrode is above a central upper surface of the top electrode, and a tapered inner sidewall of the top electrode connects the peripheral upper surface to the central upper surface. The via establishes electrical contact with the tapered inner sidewall but is spaced apart from the central upper surface.
    Type: Grant
    Filed: April 2, 2019
    Date of Patent: December 17, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsia-Wei Chen, Wen-Ting Chu, Kuo-Chi Tu, Chih-Yang Chang, Chin-Chieh Yang, Yu-Wen Liao, Wen-Chun You, Sheng-Hung Shih
  • Patent number: 10497436
    Abstract: A memory device includes a bottom electrode, a resistance switching layer and a top electrode. The bottom electrode is over a metallization layer embedded in an inter-metal dielectric layer. The bottom electrode has a top surface and a sidewall that extends at an obtuse angle relative to the top surface. The resistance switching layer is over the bottom electrode. The top electrode is over the resistance switching layer.
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: December 3, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Chi Tu, Chu-Jie Huang, Sheng-Hung Shih, Nai-Chao Su, Wen-Ting Chu
  • Patent number: 10475852
    Abstract: A resistive random access memory (RRAM) structure includes a resistive memory element formed on a semiconductor substrate. The resistive element includes a top electrode, a bottom electrode, and a resistive material layer positioned between the top electrode and the bottom electrode. The RRAM structure further includes a field effect transistor (FET) formed on the semiconductor substrate, the FET having a source and a drain. The drain of the FET has a higher doping concentration than the source of the FET. The resistive memory element is coupled with the drain via a portion of an interconnect structure.
    Type: Grant
    Filed: October 15, 2018
    Date of Patent: November 12, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chin-Chieh Yang, Hsia-Wei Chen, Chih-Yang Chang, Kuo-Chi Tu, Wen-Ting Chu, Yu-Wen Liao
  • Publication number: 20190333920
    Abstract: Various embodiments of the present application are directed to a method for forming a boundary structure separating a memory cell and a logic device. In some embodiments, an isolation structure is formed separating a memory semiconductor region from a logic semiconductor region. A memory cell structure is formed on the memory semiconductor region, and a memory capping layer is formed covering the memory cell structure and the logic semiconductor region. A first etch is performed into the memory capping layer to remove the memory capping layer from the logic semiconductor region, and to define a slanted, logic-facing sidewall on the isolation structure. A logic device structure is formed on the logic semiconductor region. Further, a second etch is performed into the memory capping layer to remove the memory capping layer from the memory semiconductor, while leaving a dummy segment of the memory capping layer that defines the logic-facing sidewall.
    Type: Application
    Filed: April 27, 2018
    Publication date: October 31, 2019
    Inventors: Tzu-Yu Chen, Kuo-Chi Tu, Wen-Ting Chu, Yong-Shiuan Tsair