Patents by Inventor Chia-Chung Chen

Chia-Chung Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11552076
    Abstract: A method of fabricating a semiconductor device includes forming a gate structure, a first edge structure and a second edge structure on a semiconductor strip. The method further includes forming a first source/drain feature between the gate structure and the first edge structure. The method further includes forming a second source/drain feature between the gate structure and the second edge structure, wherein a distance between the gate structure and the first source/drain feature is different from a distance between the gate structure and the second source/drain feature. The method further includes implanting a buried channel in the semiconductor strip, wherein the buried channel is entirely below a top-most surface of the semiconductor strip, a maximum depth of the buried channel is less than a maximum depth of the first source/drain feature, and a dopant concentration of the buried channel is highest under the gate structure.
    Type: Grant
    Filed: July 24, 2020
    Date of Patent: January 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shu Fang Fu, Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Fu-Huan Tsai
  • Patent number: 11532614
    Abstract: FinFET varactors having low threshold voltages and methods of making the same are disclosed herein. An exemplary FinFET varactor includes a fin and a gate structure disposed over a portion of the fin, such that the gate structure is disposed between a first source/drain feature and a second source/drain feature that include a first type dopant. The portion of the fin includes the first type dopant and a second type dopant. A dopant concentration of the first type dopant and a dopant concentration of the second type dopant vary from an interface between the fin and the gate structure to a first depth in the fin. The dopant concentration of the first type dopant is greater than the dopant concentration of the second type dopant from a second depth to a third depth in the fin, where the second depth and the third depth are less than the first depth.
    Type: Grant
    Filed: April 22, 2021
    Date of Patent: December 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Huan Tsai, Han-Min Tsai, Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Publication number: 20220367637
    Abstract: The present disclosure describes structure with a substrate, a first well region, a second well region, and a third well region. The first well region is in the substrate. The second well region is in the first well region and includes a first source/drain (S/D) region. The third well region is in the substrate and adjacent to the first well region. The third well region includes a second S/D region, where a spacing between the first and second S/D regions is less than about 3 ?m.
    Type: Application
    Filed: November 10, 2021
    Publication date: November 17, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Chung Chen, Tsung-Hsin Yu, Chung-Hui Chen, Hui-Zhong Zhuang, Ya Yun Liu
  • Publication number: 20220367295
    Abstract: A method of determining the reliability of a high-voltage PMOS (HVPMOS) device includes determining a bulk resistance of the HVPMOS device, and evaluating the reliability of the HVPMOS device based on the bulk resistance.
    Type: Application
    Filed: July 27, 2022
    Publication date: November 17, 2022
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Tse-Hua Lu
  • Publication number: 20220367634
    Abstract: Provided is a semiconductor device including a substrate having a lower portion and an upper portion on the lower portion; an isolation region disposed on the lower portion of the substrate and surrounding the upper portion of the substrate in a closed path; a gate structure disposed on and across the upper portion of the substrate; source and/or drain (S/D) regions disposed in the upper portion of the substrate at opposite sides of the gate structure; and a channel region disposed below the gate structure and abutting between the S/D regions, wherein the channel region and the S/D regions have different conductivity types, and the channel region and the substrate have the same conductivity type.
    Type: Application
    Filed: July 29, 2022
    Publication date: November 17, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Chung-Hao Chu
  • Publication number: 20220359275
    Abstract: A semiconductor device includes a plurality of gate electrodes over a substrate, and a source/drain epitaxial layer. The source/drain epitaxial layer is disposed in the substrate and between two adjacent gate electrodes, wherein a bottom surface of the source/drain epitaxial layer is buried in the substrate to a depth less than or equal to two-thirds of a spacing between the two adjacent gate electrodes.
    Type: Application
    Filed: July 27, 2022
    Publication date: November 10, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Chung-Hao Chu, Ching-Yu Yang
  • Patent number: 11482459
    Abstract: A method of determining the reliability of a high-voltage PMOS (HVPMOS) device includes determining a bulk resistance of the HVPMOS device, and evaluating the reliability of the HVPMOS device based on the bulk resistance.
    Type: Grant
    Filed: October 16, 2020
    Date of Patent: October 25, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Tse-Hua Lu
  • Publication number: 20220310395
    Abstract: A method of manufacturing a semiconductor structure, comprising providing a substrate; forming a fin structure over the substrate; depositing an insulation material over the fin structure; performing a plurality of ion implantation cycles in-situ with implantation energy increased or decreased stepwise; and removing at least a portion of the insulation material to expose a portion of the fin structure.
    Type: Application
    Filed: June 14, 2022
    Publication date: September 29, 2022
    Inventors: CHIA-CHUNG CHEN, CHUNG-HAO CHU, CHI-FENG HUANG, VICTOR CHIANG LIANG
  • Patent number: 11456355
    Abstract: Provided is a semiconductor device including a substrate having a first conductivity type; an isolation structure disposed in the substrate to form an active region in the substrate; a well region having the first conductivity type, extending from an inner sidewall of the isolation structure into the active region, wherein a portion of the substrate is surrounded by the well region to form a native region in the active region; a gate structure disposed over the active region; and doped regions having a second conductivity type, disposed respectively in the active region at two sides of the gate structure, wherein a portion of the native region is sandwiched between the doped regions to form a channel region below the gate structure, and a doping concentration of the channel region is substantially equal to a doping concentration of the substrate.
    Type: Grant
    Filed: May 31, 2020
    Date of Patent: September 27, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Chung-Hao Chu
  • Patent number: 11443980
    Abstract: A method of fabricating a semiconductor device includes at least the following steps is provided. A first metal layer is formed on a substrate. A first dielectric layer is formed on the substrate. The first dielectric layer is patterned, thereby forming a first opening exposing the first metal layer. A second metal layer is formed on the first dielectric layer and filling into the first opening. The second metal layer is patterned, thereby forming a metal pad. A second dielectric layer is formed on the first dielectric layer and the metal pad. The second dielectric layer is patterned, thereby forming a second opening exposing the metal pad. A first annealing process is performed in an atmosphere of a gas including 50 vol % to 100 vol % of hydrogen.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: September 13, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Chung-Hao Chu, Ching-Yu Yang
  • Patent number: 11380548
    Abstract: A method of manufacturing a semiconductor structure, comprising providing a substrate; forming a fin structure over the substrate; depositing an insulation material over the fin structure; performing a plurality of ion implantations in-situ with implantation energy increased or decreased stepwise; and removing at least a portion of the insulation material to expose a portion of the fin structure.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: July 5, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chia-Chung Chen, Chung-Hao Chu, Chi-Feng Huang, Victor Chiang Liang
  • Patent number: 11264486
    Abstract: The present disclosure provides a semiconductor device, including a substrate, a fin over the substrate, wherein the fin extends along a primary direction, a gate over the fin, the gate extends along the secondary direction orthogonal to the primary direction, a first conductive contact over the gate, and a conductive routing layer over the first conductive contact, wherein at least a portion of the fin is free from the coverage of a vertical projection of the conductive routing layer.
    Type: Grant
    Filed: January 16, 2020
    Date of Patent: March 1, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chung-Hao Chu, Chia-Chung Chen, Shu Fang Fu, Chi-Feng Huang, Victor Chiang Liang
  • Patent number: 11264471
    Abstract: A junction gate field-effect transistor (JFET) includes a substrate, a source region formed in the substrate, a drain region formed in the substrate, a channel region formed in the substrate, and at least one gate region formed in the substrate. The channel region connects the source and drain regions. The at least one gate region contacts one of the source and drain regions at an interface, and the at least one gate region is isolated from the other of the source and drain regions. A dielectric layer covers the interface while exposing portions of the gate region and the one of the source and drain regions.
    Type: Grant
    Filed: September 13, 2019
    Date of Patent: March 1, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Publication number: 20210375862
    Abstract: A method for manufacturing a semiconductor device includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is implanted in the first region of the fins but not in the second regions. A gate structure overlies the first region of the fins and source/drains are formed on the second regions of the fins.
    Type: Application
    Filed: August 16, 2021
    Publication date: December 2, 2021
    Inventors: Chia-Chung CHEN, Chi-Feng HUANG, Victor Chiang LIANG, Fu-Huan TSAI, Hsieh-Hung HSIEH, Tzu-Jin YEH, Han-Min TSAI, Hong-Lin CHU
  • Patent number: 11187640
    Abstract: A powder dispersing device of a powder particle size distribution measuring equipment has a base, an elastic force generating assembly and a first housing. The elastic force generating assembly includes a bumping piece, a force applying board and a power transmission assembly. Two ends of the power transmission assembly are respectively connected to the bumping piece and the force applying board. When the force applying board is applied with a first displacement, the power transmission assembly actuates the bumping piece to generate a second displacement which enables the bumping piece to have a first elastic force. The first housing is formed with a through hole on a side surface for one end of the force applying board to extend out. The first elastic force of the bumping piece triggers the bumping piece to strike on any surface facing toward the inside of the first housing and touching the other end of the bumping piece.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: November 30, 2021
    Assignee: LIGHTTELLS CORP., LTD.
    Inventors: Chia-Chung Chen, Shang-Te Tu
  • Patent number: 11177384
    Abstract: A method of making a semiconductor device includes depositing an isolation region between adjacent fins of a plurality of fins over a substrate, wherein a top-most surface of the isolation region is a first distance from a bottom of the substrate. The method further includes doping each of the plurality of fins with a first dopant having a first dopant type to define a first doped region in each of the plurality of fins, wherein a bottom-most surface of the first doped region is a second distance from the bottom of the substrate, and the second distance is greater than the first distance. The method further includes doping each of the plurality of fins with a second dopant having a second dopant type to define a second doped region in each of the plurality of fins, wherein the second doped region contacts the isolation region.
    Type: Grant
    Filed: January 28, 2020
    Date of Patent: November 16, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chewn-Pu Jou, Tzu-Jin Yeh, Chia-Chung Chen
  • Publication number: 20210344303
    Abstract: A method for manufacturing a semiconductor device including an upper-channel implant transistor is provided. The method includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is shallowly implanted in an upper portion of the first region of the fins but not in the second regions and not in a lower portion of the first region of the fins. A gate structure extending in a second direction perpendicular to the first direction is formed overlying the first region of the fins, and source/drains are formed overlying the second regions of the fins, thereby forming an upper-channel implant transistor.
    Type: Application
    Filed: July 12, 2021
    Publication date: November 4, 2021
    Inventors: Chia-Chung CHEN, Chi-Feng HUANG, Victor Chiang LIANG, Fu-Huan TSAI, Hsieh-Hung HSIEH, Tzu-Jin YEH, Han-Min TSAI, Hong-Lin CHU
  • Patent number: 11145729
    Abstract: A semiconductor device includes a composite gate structure formed over a semiconductor substrate. The composite gate structure includes a gate dielectric layer, a metal layer, and a semiconductor layer. The metal layer is disposed on the gate dielectric layer. The semiconductor layer is disposed on the gate dielectric layer. The metal layer surrounds the semiconductor layer.
    Type: Grant
    Filed: April 10, 2020
    Date of Patent: October 12, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Meng-Chang Ho, Chung-Hao Chu, Tz-Hau Guo
  • Publication number: 20210305099
    Abstract: A method includes forming a deep well region of a first conductivity type in a substrate, implanting a portion of the deep well region to form a first gate, and implanting the deep well region to form a well region. The well region and the first gate are of a second conductivity type opposite the first conductivity type. An implantation is performed to form a channel region of the first conductivity type over the first gate. A portion of the deep well region overlying the channel region is implanted to form a second gate of the second conductivity type. A source/drain implantation is performed to form a source region and a drain region of the first conductivity type on opposite sides of the second gate. The source and drain regions are connected to the channel region, and overlap the channel region and the first gate.
    Type: Application
    Filed: June 11, 2021
    Publication date: September 30, 2021
    Inventors: Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Mingo Liu
  • Patent number: 11094694
    Abstract: A method for manufacturing a semiconductor device includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is implanted in the first region of the fins but not in the second regions. A gate structure overlies the first region of the fins and source/drains are formed on the second regions of the fins.
    Type: Grant
    Filed: December 31, 2019
    Date of Patent: August 17, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Fu-Huan Tsai, Hsieh-Hung Hsieh, Tzu-Jin Yeh, Han-Min Tsai, Hong-Lin Chu