Patents by Inventor Chia-Chung Chen

Chia-Chung Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11088136
    Abstract: A semiconductor device and method of forming the same are provided. The semiconductor device includes a substrate, a growth promoting region, a first gate stack, and a second gate stack. The substrate includes a first region and a second region. The growth promoting region is located in a surface of the substrate in the first region. The growth promoting region includes a first implantation species, and a surface of the substrate in the second region is free of the first implantation species. The first gate stack includes a first gate dielectric layer on the substrate in the first region. The second gate stack includes a second gate dielectric layer on the substrate in the second region.
    Type: Grant
    Filed: February 25, 2020
    Date of Patent: August 10, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Victor Chiang Liang, Chi-Feng Huang, Chia-Chung Chen, Chun-Pei Wu, Fu-Huan Tsai, Chung-Hao Chu, Chin-Nan Chang, Ching-Yu Yang, Ankush Chaudhary
  • Publication number: 20210242197
    Abstract: FinFET varactors having low threshold voltages and methods of making the same are disclosed herein. An exemplary FinFET varactor includes a fin and a gate structure disposed over a portion of the fin, such that the gate structure is disposed between a first source/drain feature and a second source/drain feature that include a first type dopant. The portion of the fin includes the first type dopant and a second type dopant. A dopant concentration of the first type dopant and a dopant concentration of the second type dopant vary from an interface between the fin and the gate structure to a first depth in the fin. The dopant concentration of the first type dopant is greater than the dopant concentration of the second type dopant from a second depth to a third depth in the fin, where the second depth and the third depth are less than the first depth.
    Type: Application
    Filed: April 22, 2021
    Publication date: August 5, 2021
    Inventors: Fu-Huan Tsai, Han-Min Tsai, Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Publication number: 20210226043
    Abstract: The present disclosure provides a semiconductor device, including a substrate, a fin over the substrate, wherein the fin extends along a primary direction, a gate over the fin, the gate extends along the secondary direction orthogonal to the primary direction, a first conductive contact over the gate, and a conductive routing layer over the first conductive contact, wherein at least a portion of the fin is free from the coverage of a vertical projection of the conductive routing layer.
    Type: Application
    Filed: January 16, 2020
    Publication date: July 22, 2021
    Inventors: CHUNG-HAO CHU, CHIA-CHUNG CHEN, SHU FANG FU, CHI-FENG HUANG, VICTOR CHIANG LIANG
  • Patent number: 11063559
    Abstract: A method for manufacturing a semiconductor device including an upper-channel implant transistor is provided. The method includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is shallowly implanted in an upper portion of the first region of the fins but not in the second regions and not in a lower portion of the first region of the fins. A gate structure extending in a second direction perpendicular to the first direction is formed overlying the first region of the fins, and source/drains are formed overlying the second regions of the fins, thereby forming an upper-channel implant transistor.
    Type: Grant
    Filed: June 5, 2015
    Date of Patent: July 13, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Fu-Huan Tsai, Hsieh-Hung Hsieh, Tzu-Jin Yeh, Han-Min Tsai, Hong-Lin Chu
  • Publication number: 20210202252
    Abstract: A method of manufacturing a semiconductor structure, comprising providing a substrate; forming a fin structure over the substrate; depositing an insulation material over the fin structure; performing a plurality of ion implantations in-situ with implantation energy increased or decreased stepwise; and removing at least a portion of the insulation material to expose a portion of the fin structure.
    Type: Application
    Filed: May 26, 2020
    Publication date: July 1, 2021
    Inventors: CHIA-CHUNG CHEN, CHUNG-HAO CHU, CHI-FENG HUANG, VICTOR CHIANG LIANG
  • Patent number: 11043431
    Abstract: A method includes forming a deep well region of a first conductivity type in a substrate, implanting a portion of the deep well region to form a first gate, and implanting the deep well region to form a well region. The well region and the first gate are of a second conductivity type opposite the first conductivity type. An implantation is performed to form a channel region of the first conductivity type over the first gate. A portion of the deep well region overlying the channel region is implanted to form a second gate of the second conductivity type. A source/drain implantation is performed to form a source region and a drain region of the first conductivity type on opposite sides of the second gate. The source and drain regions are connected to the channel region, and overlap the channel region and the first gate.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: June 22, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Mingo Liu
  • Patent number: 10991687
    Abstract: FinFET varactors having low threshold voltages and methods of making the same are disclosed herein. An exemplary FinFET varactor includes a fin and a gate structure disposed over a portion of the fin, such that the gate structure is disposed between a first source/drain feature and a second source/drain feature that include a first type dopant. The portion of the fin includes the first type dopant and a second type dopant. A dopant concentration of the first type dopant and a dopant concentration of the second type dopant vary from an interface between the fin and the gate structure to a first depth in the fin. The dopant concentration of the first type dopant is greater than the dopant concentration of the second type dopant from a second depth to a third depth in the fin, where the second depth and the third depth are less than the first depth.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: April 27, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Huan Tsai, Han-Min Tsai, Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Patent number: 10991688
    Abstract: A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a gate stack, a first doped region, a second doped region, and a buried doped region. The first doped region has a first conductivity type and is located in the substrate at a first side of the gate stack. The second doped region has the first conductivity type and is located in the substrate at a second side of the gate stack. The buried doped region has the first conductivity type and is buried in the substrate, extended from the first doped region to the second doped region, and separated from the gate stack by a distance.
    Type: Grant
    Filed: November 26, 2018
    Date of Patent: April 27, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Victor Chiang Liang, Chi-Feng Huang, Chia-Chung Chen, Chun-Pei Wu, Fu-Huan Tsai, Chung-Hao Chu, Chin-Nan Chang, Ching-Yu Yang, Ankush Chaudhary
  • Publication number: 20210098286
    Abstract: A method of fabricating a semiconductor device includes at least the following steps is provided. A first metal layer is formed on a substrate. A first dielectric layer is formed on the substrate. The first dielectric layer is patterned, thereby forming a first opening exposing the first metal layer. A second metal layer is formed on the first dielectric layer and filling into the first opening. The second metal layer is patterned, thereby forming a metal pad. A second dielectric layer is formed on the first dielectric layer and the metal pad. The second dielectric layer is patterned, thereby forming a second opening exposing the metal pad. A first annealing process is performed in an atmosphere of a gas including 50 vol % to 100 vol % of hydrogen.
    Type: Application
    Filed: May 26, 2020
    Publication date: April 1, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Chung-Hao Chu, Ching-Yu Yang
  • Publication number: 20210035974
    Abstract: A method of determining the reliability of a high-voltage PMOS (HVPMOS) device includes determining a bulk resistance of the HVPMOS device, and evaluating the reliability of the HVPMOS device based on the bulk resistance.
    Type: Application
    Filed: October 16, 2020
    Publication date: February 4, 2021
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Tse-Hua Lu
  • Publication number: 20210028309
    Abstract: A transistor includes a gate structure over a substrate, wherein the substrate includes a channel region. The transistor further includes a source/drain (S/D) in the substrate adjacent to the gate structure. The transistor further includes a lightly doped drain (LDD) region adjacent to the S/D, wherein a dopant concentration in the first LDD is less than a dopant concentration in the S/D. The transistor further includes a doping extension region adjacent the LDD region, wherein the doping extension region extends farther under the gate structure than the LDD region, and a maximum depth of the doping extension region is 10-times to 30-times greater than a maximum depth of the LDD.
    Type: Application
    Filed: September 21, 2020
    Publication date: January 28, 2021
    Inventors: Chu Fu CHEN, Chi-Feng HUANG, Chia-Chung CHEN, Chin-Lung CHEN, Victor Chiang LIANG, Chia-Cheng PAO
  • Publication number: 20210018419
    Abstract: A powder dispersing device of a powder particle size distribution measuring equipment has a base, an elastic force generating assembly and a first housing. The elastic force generating assembly includes a bumping piece, a force applying board and a power transmission assembly. Two ends of the power transmission assembly are respectively connected to the bumping piece and the force applying board. When the force applying board is applied with a first displacement, the power transmission assembly actuates the bumping piece to generate a second displacement which enables the bumping piece to have a first elastic force. The first housing is formed with a through hole on a side surface for one end of the force applying board to extend out. The first elastic force of the bumping piece triggers the bumping piece to strike on any surface facing toward the inside of the first housing and touching the other end of the bumping piece.
    Type: Application
    Filed: May 26, 2020
    Publication date: January 21, 2021
    Inventors: Chia-Chung CHEN, Shang-Te TU
  • Patent number: 10849352
    Abstract: A coffee bean roasting-degree distribution measuring device includes a housing, a micro-processing unit, an image-capturing unit, a light-emitting unit, and a displaying unit. The housing has a first end and a second end opposite the first end with an accommodating space existing between the first end and the second end. The second end is disposed to surround a group of coffee beans under measurement. The micro-processing unit and the image-capturing unit are disposed inside the accommodating space and electrically connected to each other. The light-emitting unit is disposed inside the accommodating space and includes at least one light emitter and a circuit board electrically connected to the light emitter. The circuit board is further electrically connected to the micro-processing unit and each of the light emitter has a light emitting port facing toward the second end.
    Type: Grant
    Filed: April 12, 2019
    Date of Patent: December 1, 2020
    Assignee: Lighttells Corp., Ltd.
    Inventors: Chia-Chung Chen, Meng-Fang Yu
  • Publication number: 20200357799
    Abstract: A method of fabricating a semiconductor device includes forming a gate structure, a first edge structure and a second edge structure on a semiconductor strip. The method further includes forming a first source/drain feature between the gate structure and the first edge structure. The method further includes forming a second source/drain feature between the gate structure and the second edge structure, wherein a distance between the gate structure and the first source/drain feature is different from a distance between the gate structure and the second source/drain feature. The method further includes implanting a buried channel in the semiconductor strip, wherein the buried channel is entirely below a top-most surface of the semiconductor strip, a maximum depth of the buried channel is less than a maximum depth of the first source/drain feature, and a dopant concentration of the buried channel is highest under the gate structure.
    Type: Application
    Filed: July 24, 2020
    Publication date: November 12, 2020
    Inventors: Shu Fang FU, Chi-Feng HUANG, Chia-Chung CHEN, Victor Chiang LIANG, Fu-Huan TSAI
  • Patent number: 10833082
    Abstract: A method of determining the reliability of a high-voltage PMOS (HVPMOS) device includes determining a bulk resistance of the HVPMOS device, and evaluating the reliability of the HVPMOS device based on the bulk resistance.
    Type: Grant
    Filed: October 11, 2019
    Date of Patent: November 10, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Tse-Hua Lu
  • Patent number: 10804228
    Abstract: A device includes a semiconductor substrate of a first conductivity type, and a deep well region in the semiconductor substrate, wherein the deep well region is of a second conductivity type opposite to the first conductivity type. The device further includes a well region of the first conductivity type over the deep well region. The semiconductor substrate has a top portion overlying the well region, and a bottom portion underlying the deep well region, wherein the top portion and the bottom portion are of the first conductivity type, and have a high resistivity. A gate dielectric is over the semiconductor substrate. A gate electrode is over the gate dielectric. A source region and a drain region extend into the top portion of the semiconductor substrate. The source region, the drain region, the gate dielectric, and the gate electrode form a Radio Frequency (RF) switch.
    Type: Grant
    Filed: May 1, 2019
    Date of Patent: October 13, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Shu Fang Fu, Tzu-Jin Yeh, Chewn-Pu Jou
  • Patent number: 10784781
    Abstract: A transistor includes a gate structure over a substrate, wherein the substrate includes a channel region under the gate structure. The transistor further includes a source in the substrate adjacent a first side of the gate structure. The transistor further includes a drain in the substrate adjacent a second side of the gate structure, wherein the second side of the gate structure is opposite the first side of the gate structure. The transistor further includes a first lightly doped drain (LDD) region adjacent the source. The transistor further includes a second LDD region adjacent the drain. The transistor further includes a doping extension region adjacent the first LDD region.
    Type: Grant
    Filed: March 28, 2018
    Date of Patent: September 22, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chu Fu Chen, Chi-Feng Huang, Chia-Chung Chen, Chin-Lung Chen, Victor Chiang Liang, Chia-Cheng Pao
  • Publication number: 20200295137
    Abstract: Provided is a semiconductor device including a substrate having a first conductivity type; an isolation structure disposed in the substrate to form an active region in the substrate; a well region having the first conductivity type, extending from an inner sidewall of the isolation structure into the active region, wherein a portion of the substrate is surrounded by the well region to form a native region in the active region; a gate structure disposed over the active region; and doped regions having a second conductivity type, disposed respectively in the active region at two sides of the gate structure, wherein a portion of the native region is sandwiched between the doped regions to form a channel region below the gate structure, and a doping concentration of the channel region is substantially equal to a doping concentration of the substrate.
    Type: Application
    Filed: May 31, 2020
    Publication date: September 17, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang, Chung-Hao Chu
  • Patent number: 10741553
    Abstract: A method includes forming a gate structure, a first edge structure and a second edge structure on a semiconductor strip. The method includes forming a first source/drain feature between the gate structure and the first edge structure; and a second source/drain feature between the gate structure and the second edge structure. A distance between the gate structure and the first source/drain feature is from about 1.5 to about 4.5 times greater than a distance between the gate structure and the second source/drain feature. The method includes implanting a buried channel in the semiconductor strip. A top surface of the buried channel is spaced from a top surface of the semiconductor strip. A bottom surface of the buried channel is closer to the top surface of the semiconductor strip than a bottom surface of the first source/drain feature. A dopant concentration of the buried channel is highest under the gate structure.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: August 11, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shu Fang Fu, Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Fu-Huan Tsai
  • Publication number: 20200245671
    Abstract: A coffee bean roasting-degree distribution measuring device includes a housing, a micro-processing unit, an image-capturing unit, a light-emitting unit, and a displaying unit. The housing has a first end and a second end opposite the first end with an accommodating space existing between the first end and the second end. The second end is disposed to surround a group of coffee beans under measurement. The micro-processing unit and the image-capturing unit are disposed inside the accommodating space and electrically connected to each other. The light-emitting unit is disposed inside the accommodating space and includes at least one light emitter and a circuit board electrically connected to the light emitter. The circuit board is further electrically connected to the micro-processing unit and each of the light emitter has a light emitting port facing toward the second end.
    Type: Application
    Filed: April 12, 2019
    Publication date: August 6, 2020
    Inventors: Chia-Chung CHEN, Meng-Fang YU