Patents by Inventor Chia-Shiung Tsai

Chia-Shiung Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10003022
    Abstract: The present disclosure relates to a resistive random access memory (RRAM) device architecture, that includes a thin single layer of a conductive etch-stop layer between a lower metal interconnect and a bottom electrode of an RRAM cell. The conductive etch-stop layer provides simplicity in structure and the etch-selectivity of this layer provides protection to the underlying layers. The conductive etch stop layer can be etched using a dry or wet etch to land on the lower metal interconnect. In instances where the lower metal interconnect is copper, etching the conductive etch stop layer to expose the copper does not produce as much non-volatile copper etching by-products as in traditional methods. Compared to traditional methods, some embodiments of the disclosed techniques reduce the number of mask step and also reduce chemical mechanical polishing during the formation of the bottom electrode.
    Type: Grant
    Filed: March 4, 2014
    Date of Patent: June 19, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ming Chyi Liu, Yuan-Tai Tseng, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 9991440
    Abstract: The present disclosure provides a semiconductor memory device. The device includes a pinning layer having an anti-ferromagnetic material and disposed over a first electrode; a pinned layer disposed over the pinning layer; a tunneling layer disposed over the pinned layer, a free layer disposed over the tunneling layer and a capping layer disposed over the free layer. The capping layer includes metal-oxide and metal-nitride materials.
    Type: Grant
    Filed: October 30, 2015
    Date of Patent: June 5, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Ming Wu, Chia-Shiung Tsai, Cheng-Yuan Tsai, Kai-Wen Cheng
  • Publication number: 20180151692
    Abstract: A semiconductor structure includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A dielectric passivation layer is disposed on the second III-V compound layer. A source feature and a drain feature are disposed on the second III-V compound layer, and extend through the dielectric passivation layer. A gate electrode is disposed over the second III-V compound layer between the source feature and the drain feature. The gate electrode has an exterior surface. An oxygen containing region is embedded at least in the second III-V compound layer under the gate electrode. A gate dielectric layer has a first portion and a second portion. The first portion is under the gate electrode and on the oxygen containing region. The second portion is on a portion of the exterior surface of the gate electrode.
    Type: Application
    Filed: January 9, 2018
    Publication date: May 31, 2018
    Inventors: Han-Chin Chiu, Chi-Ming Chen, Chung-Yi Yu, Chia-Shiung Tsai
  • Patent number: 9978754
    Abstract: A semiconductor arrangement includes a logic region and a memory region. The memory region has an active region that includes a semiconductor device. The memory region also has a capacitor within one or more dielectric layers over the active region. The semiconductor arrangement includes a protective ring within at least one of the logic region or the memory region and that separates the logic region from the memory region. The capacitor has a first electrode, a second electrode and an insulating layer between the first electrode and the second electrode, where an electrode unit of the first electrode has a first portion and a second portion, and where the second portion is above the first portion and is wider than the first portion.
    Type: Grant
    Filed: January 23, 2017
    Date of Patent: May 22, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Chern-Yow Hsu, Chen-Jong Wang, Chia-Shiung Tsai, Shih-Chang Liu, Xiaomeng Chen
  • Patent number: 9978759
    Abstract: A method comprises forming a memory gate structure adjacent to a control gate structure over a substrate, wherein a charge storage layer is between the memory gate structure and the control gate structure and a top surface of the memory gate structure is covered by a gate mask layer, forming a first spacer along sidewalls of the memory gate structure and the gate mask layer, wherein a sidewall of the memory gate structure is fully covered by the first spacer, applying an etching process to the charge storage layer to form an L-shaped charge storage layer and forming a first drain/source region adjacent to the memory gate structure and a second drain/source region adjacent to the control gate structure.
    Type: Grant
    Filed: November 18, 2016
    Date of Patent: May 22, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chang-Ming Wu, Wei Cheng Wu, Shih-Chang Liu, Chia-Shiung Tsai, Harry-Hak-Lay Chuang
  • Patent number: 9978603
    Abstract: A method comprises forming a control gate structure over a substrate, depositing a memory gate layer over the substrate, applying a first etching process to the memory gate layer to form a memory gate structure, wherein, after applying the first etching process, a remaining portion of the memory gate layer is an L-shaped structure, forming a first spacer along a sidewall of the memory gate structure and forming a second spacer over the memory gate structure.
    Type: Grant
    Filed: January 23, 2017
    Date of Patent: May 22, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chang-Ming Wu, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20180138402
    Abstract: The present disclosure, in some embodiments, relates to a resistive random access memory (RRAM) cell. The RRAM cell has a bottom electrode disposed over a lower interconnect layer and a data storage layer having a first thickness over the bottom electrode. A capping layer is disposed over the data storage layer. The capping layer has a second thickness that is in a range of between approximately 2 and approximately 3 times thicker than the first thickness. A top electrode is disposed over the capping layer and an upper interconnect layer is disposed over the top electrode.
    Type: Application
    Filed: January 15, 2018
    Publication date: May 17, 2018
    Inventors: Trinh Hai Dang, Hsing-Lien Lin, Cheng-Yuan Tsai, Chin-Chieh Yang, Yu-Wen Liao, Wen-Ting Chu, Chia-Shiung Tsai
  • Publication number: 20180137966
    Abstract: An inductor structure is provided. The inductor structure includes a first dielectric layer formed over a substrate and a magnetic layer formed over the first dielectric layer. The magnetic layer has a planar top surface, a planar bottom surface, a protruding portion surrounding the planar top surface, and the protruding portion is higher than the planar top surface.
    Type: Application
    Filed: December 22, 2017
    Publication date: May 17, 2018
    Inventors: Yuan-Tai Tseng, Ming-Chyi Liu, Chung-Yen Chou, Chia-Shiung Tsai
  • Publication number: 20180122820
    Abstract: Methods for forming semiconductor structures are provided. The method for forming the semiconductor structure includes forming a control gate over a substrate and forming a dielectric layer covering the control gate. The method further includes forming a conductive layer having a first portion and a second portion over the dielectric layer. In addition, the first portion of the conductive layer is separated from the control gate by the dielectric layer. The method further includes forming an oxide layer on a top surface of the first portion of the conductive layer and removing the second portion of the conductive layer to form a memory gate.
    Type: Application
    Filed: December 27, 2017
    Publication date: May 3, 2018
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Ting SUNG, Chung-Chiang MIN, Wei-Hang HUANG, Shih-Chang LIU, Chia-Shiung TSAI
  • Patent number: 9960129
    Abstract: A method of forming a hybrid bonding structure includes depositing an etch stop layer over surface of a substrate, wherein the substrate comprises a conductive structure, and the etch stop layer contacts the conductive structure. The method further includes depositing a dielectric material over the etch stop layer. The method further includes depositing a first diffusion barrier layer over the dielectric material. The method further includes forming an opening extending through the etch stop layer, the dielectric material and the diffusion barrier layer. The method further includes lining the opening with a second diffusion barrier layer. The method further includes depositing a conductive pad on the second diffusion barrier layer in the opening, wherein a surface of the first diffusion barrier layer is aligned with a surface of the conductive pad.
    Type: Grant
    Filed: August 20, 2015
    Date of Patent: May 1, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ping-Yin Liu, Szu-Ying Chen, Chen-Jong Wang, Chih-Hui Huang, Xin-Hua Huang, Lan-Lin Chao, Yeur-Luen Tu, Chia-Shiung Tsai, Xiaomeng Chen
  • Patent number: 9960285
    Abstract: One or more techniques or systems for forming a contact structure for a deep trench capacitor (DTC) are provided herein. In some embodiments, a contact structure includes a substrate region, a first region, a second region, contact landings, a first trench region, a first landing region, and a second trench region. In some embodiments, a first region is over the substrate region and a second region is over the first region. For example, the first region and the second region are in the first trench region or the second trench region. Additionally, a contact landing over the first trench region, the second trench region, or the first landing region is in contact with the first region, the second region, or the substrate region. In this manner, additional contacts are provided and landing area is reduced, thus reducing resistance of the DTC, for example.
    Type: Grant
    Filed: October 24, 2012
    Date of Patent: May 1, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chung-Yen Chou, Po-ken Lin, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 9960353
    Abstract: Embodiments of forming an image sensor with an organic photodiode are provided. The organic photodiode uses dual electron-blocking layers formed next to the anode of the organic photodiode to reduce dark current. By using dual electron-blocking layers, the values of highest occupied molecular orbital (HOMO) for the neighboring anode layer and the organic electron-blocking layer are matched by one of the dual electron-blocking layers to form a photodiode with good performance. The values of the lowest occupied molecular orbital (LOMOs) of the dual electron-blocking layers are selected to be lower than the neighboring anode layer to reduce dark current.
    Type: Grant
    Filed: October 31, 2016
    Date of Patent: May 1, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chin-Wei Liang, Hsing-Lien Lin, Cheng-Yuan Tsai, Chia-Shiung Tsai
  • Publication number: 20180114935
    Abstract: The present disclosure provides a photosensitive device. The photosensitive device includes a donor-intermix-acceptor (PIN) structure. The PIN structure includes an organic hole transport layer; an organic electron transport layer; and an intermix layer sandwiched between the hole transport organic material layer and the electron transport organic material layer. The intermix layer includes a mixture of an n-type organic material and a p-type organic material.
    Type: Application
    Filed: December 19, 2017
    Publication date: April 26, 2018
    Inventors: Chin-Wei Liang, Hsing-Lien Lin, Cheng-Yuan Tsai, Chia-Shiung Tsai
  • Patent number: 9944516
    Abstract: A method for performing a high aspect ratio etch is provided. A semiconductor substrate is provided with a hard mask layer arranged over the semiconductor substrate. A first etch is performed into the hard mask layer to form a hard mask opening exposing the semiconductor substrate. The hard mask opening has a bottom width. A second etch is performed into the semiconductor substrate, through the hard mask opening, to form a substrate opening with a top width that is about equal to the bottom width of the hard mask opening. A protective layer is formed lining a sidewall of the substrate opening. A third etch is performed into the semiconductor substrate, through the hard mask opening, to increase a height of the substrate opening. The top width of the substrate opening remains substantially unchanged during the third etch. A semiconductor structure with a high aspect ratio opening is also provided.
    Type: Grant
    Filed: April 29, 2015
    Date of Patent: April 17, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Yen Chou, Chia-Shiung Tsai, Lee-Chuan Tseng, Ru-Liang Lee
  • Publication number: 20180102368
    Abstract: A semiconductor arrangement includes an active region including a semiconductor device. The semiconductor arrangement includes a capacitor having a first electrode layer, a second electrode layer, and an insulating layer between the first electrode layer and the second electrode layer. At least three dielectric layers are between a bottom surface of the capacitor and the active region.
    Type: Application
    Filed: December 4, 2017
    Publication date: April 12, 2018
    Inventors: Chern-Yow HSU, Chen-Jong WANG, Chia-Shiung TSAI, Shih-Chang LIU, Xiaomeng CHEN
  • Patent number: 9941320
    Abstract: An interconnect apparatus and a method of forming the interconnect apparatus is provided. Two substrates, such as wafers, dies, or a wafer and a die, are bonded together. A first mask is used to form a first opening extending partially to an interconnect formed on the first wafer. A dielectric liner is formed, and then another etch process is performed using the same mask. The etch process continues to expose interconnects formed on the first substrate and the second substrate. The opening is filled with a conductive material to form a conductive plug.
    Type: Grant
    Filed: March 21, 2016
    Date of Patent: April 10, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih Pei Chou, Hung-Wen Hsu, Ching-Chung Su, Chun-Han Tsao, Chia-Chieh Lin, Shu-Ting Tsai, Jiech-Fun Lu, Shih-Chang Liu, Yeur-Luen Tu, Chia-Shiung Tsai
  • Publication number: 20180090500
    Abstract: A semiconductor arrangement includes an active region including a semiconductor device. The semiconductor arrangement includes a capacitor. The capacitor includes a first electrode over at least one dielectric layer over the active region. The first electrode surrounds an open space within the capacitor. The first electrode has a non-linear first electrode sidewall.
    Type: Application
    Filed: November 20, 2017
    Publication date: March 29, 2018
    Inventors: Chern-Yow HSU, Chen-Jong Wang, Chia-Shiung Tsai, Ming Chyi Liu, Shih-Chang Liu, Xiaomeng Chen
  • Publication number: 20180090348
    Abstract: An apparatus for and a method of bonding a first substrate and a second substrate are provided. In an embodiment a first wafer chuck has a first curved surface and a second wafer chuck has a second curved surface. A first wafer is placed on the first wafer chuck and a second wafer is placed on a second wafer chuck, such that both the first wafer and the second wafer are pre-warped prior to bonding. Once the first wafer and the second wafer have been pre-warped, the first wafer and the second wafer are bonded together.
    Type: Application
    Filed: December 4, 2017
    Publication date: March 29, 2018
    Inventors: Chih-Hui Huang, Chun-Han Tsao, Sheng-Chau Chen, Yeur-Luen Tu, Chia-Shiung Tsai, Xiaomeng Chen
  • Publication number: 20180090680
    Abstract: A manufacture includes a first electrode having an upper surface and a side surface, a resistance variable film over the first electrode, and a second electrode over the resistance variable film. The resistance variable film extends along the upper surface and the side surface of the first electrode. The second electrode has a side surface. A portion of the side surface of the first electrode and a portion of the side surface of the second electrode sandwich a portion of the resistance variable film.
    Type: Application
    Filed: November 20, 2017
    Publication date: March 29, 2018
    Inventors: Ching-Pei Hsieh, Chia-Shiung Tsai, Chern-Yow Hsu, Fu-Ting Sung, Shih-Chang Liu
  • Patent number: 9929007
    Abstract: The present disclosure relates to a structure and method for reducing dangling bonds around quantum dots in a memory cell. In some embodiments, the structure has a semiconductor substrate having a tunnel dielectric layer disposed over it and a plurality of quantum dots disposed over the tunnel dielectric layer. A passivation layer is formed conformally over outer surfaces of the quantum dots and a top dielectric layer is disposed conformally around the passivation layer. The passivation layer can be formed prior to forming the top dielectric layer over the quantum dots or after forming the top dielectric layer. The passivation layer reduces the dangling bonds at an interface between the quantum dots and the top dielectric layer, thereby preventing trap sites that may hinder operations of the memory cell.
    Type: Grant
    Filed: December 26, 2014
    Date of Patent: March 27, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Ming Chen, Tsu-Hui Su, Szu-Yu Wang, Chung-Yi Yu, Chia-Shiung Tsai