Patents by Inventor Chia-Shiung Tsai

Chia-Shiung Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190115531
    Abstract: A manufacture includes a first electrode having an upper surface and a side surface, a resistance variable film over the first electrode, and a second electrode over the resistance variable film. The resistance variable film extends along the upper surface and the side surface of the first electrode. The second electrode has a side surface. A portion of the side surface of the first electrode and a portion of the side surface of the second electrode sandwich a portion of the resistance variable film.
    Type: Application
    Filed: December 12, 2018
    Publication date: April 18, 2019
    Inventors: Ching-Pei Hsieh, Chia-Shiung Tsai, Chern-Yow Hsu, Fu-Ting Sung, Shih-Chang Liu
  • Publication number: 20190094682
    Abstract: A method for forming a pellicle apparatus involves forming a device substrate by depositing one or more pellicle layers defined over a base device layer, where a release layer is formed thereover. An adhesive layer is formed over a transparent carrier substrate. The adhesive layer is bonded to the release layer, defining a composite substrate comprised of the device and carrier substrates. The base device layer is removed from the composite structure and a pellicle frame is attached to an outermost one of the pellicle layers. A pellicle region is isolated from a remainder of the composite structure, and an ablation of the release layer is performed through the transparent carrier substrate, defining the pellicle apparatus comprising a pellicle film attached to the pellicle frame. The pellicle apparatus is then from a remaining portion of the composite substrate.
    Type: Application
    Filed: June 20, 2018
    Publication date: March 28, 2019
    Inventors: Ping-Yin Liu, Chang-Ming Wu, Chia-Shiung Tsai, Xin-Hua Huang
  • Publication number: 20190097009
    Abstract: The present disclosure, in some embodiments, relates to a method of forming a memory cell. The method may be performed by forming a select gate on a side of a sacrificial spacer that is disposed over an upper surface of a substrate. The select gate has a non-planar top surface. An inter-gate dielectric layer is formed on the select gate and a memory gate is formed on the inter-gate dielectric layer. The inter-gate dielectric layer extends under the memory gate and defines a recess between sidewalls of the memory gate and select gate. The recess is filled with a first dielectric material.
    Type: Application
    Filed: October 22, 2018
    Publication date: March 28, 2019
    Inventors: Chang-Ming Wu, Wei Cheng Wu, Shih-Chang Liu, Harry-Hak-Lay Chuang, Chia-Shiung Tsai
  • Publication number: 20190080907
    Abstract: A semiconductor structure comprises a substrate comprising an interlayer dielectric (ILD) and a silicon layer disposed over the ILD, wherein the ILD comprises a conductive structure disposed therein, a dielectric layer disposed over the silicon layer, and a conductive plug electrically connected with the conductive structure and extended from the dielectric layer through the silicon layer to the ILD, wherein the conductive plug has a length extending from the dielectric layer to the ILD and a width substantially consistent along the length.
    Type: Application
    Filed: November 12, 2018
    Publication date: March 14, 2019
    Inventors: SHIH-PEI CHOU, CHEN-FA LU, JIECH-FUN LU, YEUR-LUEN TU, CHIA-SHIUNG TSAI
  • Publication number: 20190058070
    Abstract: A photo-sensitive device includes a uniform layer, a gradated buffer layer over the uniform layer, a silicon layer over the gradated buffer layer, a photo-sensitive light-sensing region in the uniform layer and the silicon layer, a device layer on the silicon layer, and a carrier wafer bonded to the device layer.
    Type: Application
    Filed: October 22, 2018
    Publication date: February 21, 2019
    Inventors: Yu-Hung Cheng, Chia-Shiung Tsai, Cheng-Ta Wu, Xiaomeng Chen, Yen-Chang Chu, Yeur-Luen Tu
  • Publication number: 20190051628
    Abstract: Hybrid bonding systems and methods for semiconductor wafers are disclosed. In one embodiment, a hybrid bonding system for semiconductor wafers includes a chamber and a plurality of sub-chambers disposed within the chamber. A robotics handler is disposed within the chamber that is adapted to move a plurality of semiconductor wafers within the chamber between the plurality of sub-chambers. The plurality of sub-chambers includes a first sub-chamber adapted to remove a protection layer from the plurality of semiconductor wafers, and a second sub-chamber adapted to activate top surfaces of the plurality of semiconductor wafers prior to hybrid bonding the plurality of semiconductor wafers together. The plurality of sub-chambers also includes a third sub-chamber adapted to align the plurality of semiconductor wafers and hybrid bond the plurality of semiconductor wafers together.
    Type: Application
    Filed: October 15, 2018
    Publication date: February 14, 2019
    Inventors: Ping-Yin Liu, Shih-Wei Lin, Xin-Hua Huang, Lan-Lin Chao, Chia-Shiung Tsai
  • Publication number: 20190035681
    Abstract: An integrated circuit structure includes a package component, which further includes a non-porous dielectric layer having a first porosity, and a porous dielectric layer over and contacting the non-porous dielectric layer, wherein the porous dielectric layer has a second porosity higher than the first porosity. A bond pad penetrates through the non-porous dielectric layer and the porous dielectric layer. A dielectric barrier layer is overlying, and in contact with, the porous dielectric layer. The bond pad is exposed through the dielectric barrier layer. The dielectric barrier layer has a planar top surface. The bond pad has a planar top surface higher than a bottom surface of the dielectric barrier layer.
    Type: Application
    Filed: October 2, 2018
    Publication date: January 31, 2019
    Inventors: Hsun-Chung Kuang, Yen-Chang Chu, Cheng-Tai Hsiao, Ping-Yin Liu, Lan-Lin Chao, Yeur-Luen Tu, Chia-Shiung Tsai, Xiaomeng Chen
  • Patent number: 10193065
    Abstract: An integrated circuit or semiconductor structure of a resistive random access memory (RRAM) cell is provided. The RRAM cell includes a bottom electrode and a data storage region having a variable resistance arranged over the bottom electrode. Further, the RRAM cell includes a diffusion barrier layer arranged over the data storage region, an ion reservoir region arranged over the diffusion barrier layer, and a top electrode arranged over the ion reservoir region. A method for manufacture the integrated circuit or semiconductor structure of the RRAM cell is also provided.
    Type: Grant
    Filed: August 28, 2014
    Date of Patent: January 29, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Trinh Hai Dang, Hsing-Lien Lin, Chin-Wei Liang, Cheng-Yuan Tsai, Chia-Shiung Tsai
  • Publication number: 20190027360
    Abstract: A semiconductor structure including a substrate and a nucleation layer over the substrate. The semiconductor structure further includes a first III-V layer over the nucleation layer, wherein the first III-V layer includes a first dopant type. The semiconductor structure further includes one or more sets of III-V layers over the first III-V layer. Each set of the one or more sets of III-V layers includes a lower III-V layer, wherein the lower III-V layer has a second dopant type opposite the first dopant type, and an upper III-V layer on the lower III-V layer, wherein the upper III-V layer has the first dopant type. The semiconductor structure further includes a second III-V layer over the one or more sets of III-V layers, the second III-V layer having the second dopant type.
    Type: Application
    Filed: September 10, 2018
    Publication date: January 24, 2019
    Inventors: Chi-Ming CHEN, Po-Chun LIU, Chung-Yi YU, Chia-Shiung TSAI
  • Patent number: 10181558
    Abstract: A magnetoresistive random access memory (MRAM) structure includes a bottom electrode structure. A magnetic tunnel junction (MTJ) element is over the bottom electrode structure. The MTJ element includes an anti-ferromagnetic material layer. A ferromagnetic pinned layer is over the anti-ferromagnetic material layer. A tunneling layer is over the ferromagnetic pinned layer. A ferromagnetic free layer is over the tunneling layer. The ferromagnetic free layer has a first portion and a demagnetized second portion. The MRAM also includes a top electrode structure over the first portion.
    Type: Grant
    Filed: March 10, 2017
    Date of Patent: January 15, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chern-Yow Hsu, Wei-Hang Huang, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 10170699
    Abstract: The present disclosure relates to a method of forming a resistive random access memory (RRAM) cell having a reduced leakage current, and an associated apparatus. In some embodiments, the method is performed by forming a bottom electrode layer over a lower metal interconnect layer. A dielectric data storage layer having a variable resistance is formed onto the bottom electrode layer in-situ with forming at least a part of the bottom electrode layer. A top electrode layer is formed over the dielectric data storage layer. By forming the dielectric data storage layer in-situ with forming at least a part of the bottom electrode layer, leakage current, leakage current distribution and device yield of the RRAM cell are improved.
    Type: Grant
    Filed: February 15, 2017
    Date of Patent: January 1, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Trinh Hai Dang, Hsing-Lien Lin, Kai-Wen Cheng, Cheng-Yuan Tsai, Chia-Shiung Tsai, Ru-Liang Lee
  • Patent number: 10163972
    Abstract: A method of forming a semiconductor image sensing device includes: providing a semiconductor substrate; forming a radiation sensitive region and a peripheral region in the semiconductor substrate, wherein the peripheral region surrounds the radiation sensitive region and includes a top surface projected from a backside of the semiconductor substrate and a sidewall coplanar with a sidewall of the semiconductor substrate and perpendicular to the top surface; forming a photon blocking spacer in the peripheral region, wherein the photon blocking spacer covers a portion of the sidewall of the peripheral region; and forming an anti reflective coating adjacent to the photon blocking layer.
    Type: Grant
    Filed: April 6, 2016
    Date of Patent: December 25, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Hung-Wen Hsu, Jung-I Lin, Ching-Chung Su, Jiech-Fun Lu, Yeur-Luen Tu, Chia-Shiung Tsai
  • Patent number: 10164184
    Abstract: A memory structure includes a first dielectric layer, having a first top surface, over a conductive structure. A first opening in the first dielectric layer exposes an area of the conductive structure, and has an interior sidewall. A first electrode structure, having a first portion and a second portion, is over the exposed area of the conductive structure. The second portion extends upwardly along the interior sidewall. A resistance variable layer is disposed over the first electrode. A second electrode structure, having a third portion and a fourth portion, is over the resistance variable layer. The third portion has a second top surface below the first top surface of the first dielectric layer. The fourth portion extends upwardly along the resistance variable layer. A second opening is defined by the second electrode structure. At least a part of a second dielectric layer is disposed in the second opening.
    Type: Grant
    Filed: November 6, 2017
    Date of Patent: December 25, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fu-Ting Sung, Ching-Pei Hsieh, Chia-Shiung Tsai, Chern-Yow Hsu, Shih-Chang Liu
  • Patent number: 10157706
    Abstract: An inductor structure is provided. The inductor structure includes a first dielectric layer formed over a substrate and a magnetic layer formed over the first dielectric layer. The magnetic layer has a planar top surface, a planar bottom surface, a protruding portion surrounding the planar top surface, and the protruding portion is higher than the planar top surface.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: December 18, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yuan-Tai Tseng, Ming-Chyi Liu, Chung-Yen Chou, Chia-Shiung Tsai
  • Patent number: 10158069
    Abstract: A manufacture includes a first electrode having an upper surface and a side surface, a resistance variable film over the first electrode, and a second electrode over the resistance variable film. The resistance variable film extends along the upper surface and the side surface of the first electrode. The second electrode has a side surface. A portion of the side surface of the first electrode and a portion of the side surface of the second electrode sandwich a portion of the resistance variable film.
    Type: Grant
    Filed: November 20, 2017
    Date of Patent: December 18, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Pei Hsieh, Chia-Shiung Tsai, Chern-Yow Hsu, Fu-Ting Sung, Shih-Chang Liu
  • Patent number: 10157820
    Abstract: A novel integrated circuit and method thereof are provided. The integrated circuit includes a plurality of first interconnect pads, a plurality of second interconnect pads, a first inter-level dielectric layer, a thin film resistor, and at least two end-caps. The end-caps, which are connectors for the thin film resistor, are positioned at the same level with the plurality of second interconnect pads. Therefore, an electrical connection between the end-caps and the plurality of second interconnect pads can be formed by directly connection of them. An integrated circuit with a thin film resistor can be made in a cost benefit way accordingly, so as to overcome disadvantages mentioned above.
    Type: Grant
    Filed: April 17, 2017
    Date of Patent: December 18, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yuan-Tai Tseng, Chia-Shiung Tsai, Chung-Yen Chou, Ming-Chyi Liu
  • Patent number: 10155214
    Abstract: A getter is provided. The getter consists essentially of from about 0% to 50% of titanium, from about 0% to 50% zirconium, and from about 5% to 50% of tantalum. A MEMS device is provided. The MEMS device includes a substrate and a getter over the substrate. The getter consists essentially of from about 0% to 50% of titanium, from about 0% to 50% zirconium, and from about 5% to 50% of tantalum. A method of forming a MEMS device is provided. The method includes the following operations: providing a substrate; and providing a getter over the substrate, wherein the getter consists essentially of from about 0% to 50% of titanium, from about 0% to 50% zirconium, and from about 5% to 50% of tantalum, and wherein all of the percentages are atomic percentages.
    Type: Grant
    Filed: April 15, 2014
    Date of Patent: December 18, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chin-Wei Liang, Cheng-Yuan Tsai, Chun-Wen Cheng, Chia-Shiung Tsai
  • Patent number: 10157994
    Abstract: A semiconductor structure includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A dielectric passivation layer is disposed on the second III-V compound layer. A source feature and a drain feature are disposed on the second III-V compound layer, and extend through the dielectric passivation layer. A gate electrode is disposed over the second III-V compound layer between the source feature and the drain feature. The gate electrode has an exterior surface. An oxygen containing region is embedded at least in the second III-V compound layer under the gate electrode. A gate dielectric layer has a first portion and a second portion. The first portion is under the gate electrode and on the oxygen containing region. The second portion is on a portion of the exterior surface of the gate electrode.
    Type: Grant
    Filed: January 9, 2018
    Date of Patent: December 18, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Han-Chin Chiu, Chi-Ming Chen, Chung-Yi Yu, Chia-Shiung Tsai
  • Patent number: 10147794
    Abstract: The present disclosure relates to a split gate memory device. In some embodiments, the split gate memory device includes a memory gate arranged over a substrate, and a select gate arranged over the substrate. An inter-gate dielectric layer is arranged between sidewalls of the memory gate and the select gate that face one another. The inter-gate dielectric layer extends under the memory gate. A first dielectric is disposed above the inter-gate dielectric layer and is arranged between the sidewalls of the memory gate and the select gate.
    Type: Grant
    Filed: October 24, 2016
    Date of Patent: December 4, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chang-Ming Wu, Wei Cheng Wu, Shih-Chang Liu, Harry-Hak-Lay Chuang, Chia-Shiung Tsai
  • Patent number: 10138118
    Abstract: An integrated circuit (IC) device is provided. The IC device includes a first die including a first substrate and a second die including a second substrate. A plasma-reflecting layer is included on an upper surface of the first die. The plasma-reflecting layer is configured to reflect a plasma therefrom. The second substrate is bonded to the first die so as to form a cavity, wherein a lower surface of the cavity is lined by the plasma-reflecting layer. A dielectric protection layer is present on a lower surface of the second die and lines the upper surface of the cavity. A material of the second substrate has a first etch rate for the plasma and a material of the dielectric protection layer has a second etch rate for the plasma. The second etch rate is less than the first etch rate.
    Type: Grant
    Filed: August 8, 2017
    Date of Patent: November 27, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Yen Chou, Chih-Jen Chan, Chia-Shiung Tsai, Ru-Liang Lee, Yuan-Chih Hsieh