Patents by Inventor Chia-Shiung Tsai

Chia-Shiung Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210091169
    Abstract: Various embodiments of the present application are directed towards a method for forming a metal-insulator-metal (MIM) capacitor comprising an enhanced interfacial layer to reduce breakdown failure. In some embodiments, a bottom electrode layer is deposited over a substrate. A native oxide layer is formed on a top surface of the bottom electrode layer and has a first adhesion strength with the top surface. A plasma treatment process is performed to replace the native oxide layer with an interfacial layer. The interfacial layer is conductive and has a second adhesion strength with the top surface of the bottom electrode layer, and the second adhesion strength is greater than the first adhesion strength. An insulator layer is deposited on the interfacial layer. A top electrode layer is deposited on the insulator layer. The top and bottom electrode layers, the insulator layer, and the interfacial layer are patterned to form a MIM capacitor.
    Type: Application
    Filed: September 23, 2019
    Publication date: March 25, 2021
    Inventors: Hsing-Lien Lin, Chii-Ming Wu, Chia-Shiung Tsai, Chung-Yi Yu, Rei-Lin Chu
  • Patent number: 10957852
    Abstract: A memory structure includes a first dielectric layer, having a first top surface, over a conductive structure. A first opening in the first dielectric layer exposes an area of the conductive structure, and has an interior sidewall. A first electrode structure, having a first portion and a second portion, is over the exposed area of the conductive structure. The second portion extends upwardly along the interior sidewall. A resistance variable layer is disposed over the first electrode. A second electrode structure, having a third portion and a fourth portion, is over the resistance variable layer. The third portion has a second top surface below the first top surface of the first dielectric layer. The fourth portion extends upwardly along the resistance variable layer. A second opening is defined by the second electrode structure. At least a part of a second dielectric layer is disposed in the second opening.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: March 23, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Fu-Ting Sung, Ching-Pei Hsieh, Chia-Shiung Tsai, Chern-Yow Hsu, Shih-Chang Liu
  • Patent number: 10937956
    Abstract: A magnetoresistive random access memory (MRAM) structure includes a bottom electrode structure. A magnetic tunnel junction (MTJ) element is over the bottom electrode structure. The MTJ element includes an anti-ferromagnetic material layer. A ferromagnetic pinned layer is over the anti-ferromagnetic material layer. A tunneling layer is over the ferromagnetic pinned layer. A ferromagnetic free layer is over the tunneling layer. The ferromagnetic free layer has a first portion and a demagnetized second portion. The MRAM also includes a top electrode structure over the first portion.
    Type: Grant
    Filed: December 28, 2018
    Date of Patent: March 2, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chern-Yow Hsu, Wei-Hang Huang, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20210043832
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Application
    Filed: October 8, 2020
    Publication date: February 11, 2021
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20210036140
    Abstract: A semiconductor device includes a doped substrate and a seed layer in direct contact with the substrate. The seed layer includes a first seed sublayer having a first lattice structure. The first seed layer is doped with carbon. The seed layer further includes a second seed sublayer over the first see layer, wherein the second seed layer has a second lattice structure. The semiconductor device further includes a graded layer in direct contact with the seed layer. The graded layer includes a first graded sublayer including AlGaN having a first Al:Ga ratio; a second graded sublayer including AlGaN having a second Al:Ga ratio different from the first Al:Ga ratio; and a third graded sublayer over including AlGaN having a third Al:Ga ratio different from the second Al:Ga ratio. The semiconductor device includes a channel layer over the graded layer. The semiconductor device includes an active layer over the channel layer.
    Type: Application
    Filed: October 20, 2020
    Publication date: February 4, 2021
    Inventors: Chi-Ming CHEN, Po-Chun LIU, Chung-Yi YU, Chia-Shiung TSAI, Ru-Liang LEE
  • Publication number: 20210028016
    Abstract: A semiconductor structure includes a substrate. The semiconductor structure further includes a buffer layer over the substrate, wherein the buffer layer comprises a plurality of III-V layers, and a dopant type of each III-V layer of the plurality of III-V layers is opposite to a dopant of adjacent III-V layers of the plurality of III-V layers. The semiconductor structure further includes an active layer over the buffer layer. The semiconductor structure further includes a dielectric layer over the active layer.
    Type: Application
    Filed: September 30, 2020
    Publication date: January 28, 2021
    Inventors: Chi-Ming CHEN, Po-Chun LIU, Chung-Yi YU, Chia-Shiung TSAI
  • Publication number: 20210013098
    Abstract: An integrated circuit structure includes a package component, which further includes a non-porous dielectric layer having a first porosity, and a porous dielectric layer over and contacting the non-porous dielectric layer, wherein the porous dielectric layer has a second porosity higher than the first porosity. A bond pad penetrates through the non-porous dielectric layer and the porous dielectric layer. A dielectric barrier layer is overlying, and in contact with, the porous dielectric layer. The bond pad is exposed through the dielectric barrier layer. The dielectric barrier layer has a planar top surface. The bond pad has a planar top surface higher than a bottom surface of the dielectric barrier layer.
    Type: Application
    Filed: September 28, 2020
    Publication date: January 14, 2021
    Inventors: Hsun-Chung Kuang, Yen-Chang Chu, Cheng-Tai Hsiao, Ping-Yin Liu, Lan-Lin Chao, Yeur-Luen Tu, Chia-Shiung Tsai, Xiaomeng Chen
  • Publication number: 20200402797
    Abstract: A semiconductor structure includes a substrate. The semiconductor structure further includes a first III-V layer over the substrate, wherein the first III-V layer includes a first dopant type. The semiconductor structure further includes a second III-V layer over the first III-V layer, wherein the second III-V layer has a second dopant type opposite the first dopant type. The semiconductor structure further includes a third III-V layer over the second III-V layer, wherein the third III-V layer has the first dopant type. The semiconductor structure further includes a fourth III-V layer over the third III-V layer, the fourth III-V layer having the second dopant type. The semiconductor structure further includes an active layer over the fourth III-V layer. The semiconductor structure further includes a dielectric layer over the active layer.
    Type: Application
    Filed: September 3, 2020
    Publication date: December 24, 2020
    Inventors: Chi-Ming CHEN, Po-Chun LIU, Chung-Yi YU, Chia-Shiung TSAI
  • Patent number: 10868024
    Abstract: A method includes forming first and second gate stacks over a substrate. Each of the first and second gate stacks includes a tunneling dielectric layer, a floating gate over the tunneling dielectric layer, a middle dielectric layer over the floating gate, and a control gate over the middle dielectric layer. A conductive layer is formed over the first and second gate stacks. The conductive layer is etched to form a erase gate between the first and second gate stacks. Etching the conductive layer is performed such that a top surface of the erase gate is not higher than a top surface of the control gate and such that the top surface of the erase gate is at least partially curved inwards.
    Type: Grant
    Filed: December 16, 2019
    Date of Patent: December 15, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chang-Ming Wu, Wei-Cheng Wu, Yuan-Tai Tseng, Shih-Chang Liu, Chia-Shiung Tsai, Ru-Liang Lee, Harry-Hak-Lay Chuang
  • Publication number: 20200373357
    Abstract: Embodiments of forming an image sensor with organic photodiodes are provided. Trenches are formed in the organic photodiodes to increase the PN-junction interfacial area, which improves the quantum efficiency (QE) of the photodiodes. The organic P-type material is applied in liquid form to fill the trenches. A mixture of P-type materials with different work function values and thickness can be used to meet the desired work function value for the photodiodes.
    Type: Application
    Filed: August 14, 2020
    Publication date: November 26, 2020
    Inventors: Chin-Wei Liang, Chia-Shiung Tsai, Cheng-Yuan Tsai, Hsing-Lien Lin
  • Publication number: 20200373445
    Abstract: A photo-sensitive device includes a uniform layer, a gradated buffer layer over the uniform layer, a silicon layer over the gradated buffer layer, a photo-sensitive light-sensing region in the uniform layer and the silicon layer, a device layer on the silicon layer, and a carrier wafer bonded to the device layer.
    Type: Application
    Filed: August 14, 2020
    Publication date: November 26, 2020
    Inventors: Yu-Hung Cheng, Chia-Shiung Tsai, Cheng-Ta Wu, Xiaomeng Chen, Yen-Chang Chu, Yeur-Luen Tu
  • Patent number: 10840438
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: November 17, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 10840287
    Abstract: An interconnect apparatus and a method of forming the interconnect apparatus is provided. Two substrates, such as wafers, dies, or a wafer and a die, are bonded together. A first mask is used to form a first opening extending partially to an interconnect formed on the first wafer. A dielectric liner is formed, and then another etch process is performed using the same mask. The etch process continues to expose interconnects formed on the first substrate and the second substrate. The opening is filled with a conductive material to form a conductive plug.
    Type: Grant
    Filed: July 22, 2019
    Date of Patent: November 17, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih Pei Chou, Hung-Wen Hsu, Ching-Chung Su, Chun-Han Tsao, Chia-Chieh Lin, Shu-Ting Tsai, Jiech-Fun Lu, Shih-Chang Liu, Yeur-Luen Tu, Chia-Shiung Tsai
  • Patent number: 10825825
    Abstract: Semiconductor structures are provided. The semiconductor structure includes a substrate and a first gate electrode formed over the substrate. The semiconductor structure further includes a dielectric layer formed on a sidewall of the first gate electrode and a second gate electrode formed over the substrate and separated from the first gate electrode by the dielectric layer. The semiconductor structure further includes a contact formed over the second gate electrode. In addition, the contact has a first extending portion and a second extending portion extending along opposite sidewalls of the second gate electrode.
    Type: Grant
    Filed: July 12, 2019
    Date of Patent: November 3, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Fu-Ting Sung, Chung-Chiang Min, Wei-Hang Huang, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 10818857
    Abstract: The present disclosure provides a photosensitive device. The photosensitive device includes a donor-intermix-acceptor (PIN) structure. The PIN structure includes an organic hole transport layer; an organic electron transport layer; and an intermix layer sandwiched between the hole transport organic material layer and the electron transport organic material layer. The intermix layer includes a mixture of an n-type organic material and a p-type organic material.
    Type: Grant
    Filed: December 19, 2017
    Date of Patent: October 27, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chin-Wei Liang, Hsing-Lien Lin, Cheng-Yuan Tsai, Chia-Shiung Tsai
  • Patent number: 10811504
    Abstract: An exemplary method includes forming a common source region in a substrate, and forming an isolation feature over the common source region. The common source region is disposed between the substrate and the isolation feature. The common source region and the isolation feature span a plurality of active regions of the substrate. A gate, such as an erase gate, may be formed after forming the common source region. In some implementations, the common source region is formed by etching the substrate to form a saw-tooth shaped recess region (or a U-shaped recess region) and performing an ion implantation process to form a doped region in a portion of the saw-tooth shaped recess region (or the U-shaped recess region), such that the common source region has a sawtooth profile (or a U-shaped profile).
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: October 20, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming Chyi Liu, Chang-Ming Wu, Shih-Chang Liu, Wei Cheng Wu, Harry-Hak-Lay Chuang, Chia-Shiung Tsai, Ru-Liang Lee
  • Patent number: 10804101
    Abstract: A semiconductor structure including a substrate and a nucleation layer over the substrate. The semiconductor structure further includes a first III-V layer over the nucleation layer, wherein the first III-V layer includes a first dopant type. The semiconductor structure further includes one or more sets of III-V layers over the first III-V layer. Each set of the one or more sets of III-V layers includes a lower III-V layer, wherein the lower III-V layer has a second dopant type opposite the first dopant type, and an upper III-V layer on the lower III-V layer, wherein the upper III-V layer has the first dopant type. The semiconductor structure further includes a second III-V layer over the one or more sets of III-V layers, the second III-V layer having the second dopant type.
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: October 13, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Ming Chen, Po-Chun Liu, Chung-Yi Yu, Chia-Shiung Tsai
  • Publication number: 20200307993
    Abstract: A semiconductor arrangement and methods of formation are provided. The semiconductor arrangement includes a micro-electro mechanical system (MEMS). A via opening is formed through a substrate, first dielectric layer and a first plug of the MEMS. The first plug comprises a first material, where the first material has an etch selectivity different than an etch selectivity of the first dielectric layer. The different etch selectivity of first plug allows the via opening to be formed relatively quickly and with a relatively high aspect ratio and desired a profile, as compared to forming the via opening without using the first plug.
    Type: Application
    Filed: June 15, 2020
    Publication date: October 1, 2020
    Inventors: Chung-Yen CHOU, Lee-Chuan TSENG, Chia-Shiung TSAI, Ru-Liang LEE
  • Patent number: 10790189
    Abstract: An integrated circuit structure includes a package component, which further includes a non-porous dielectric layer having a first porosity, and a porous dielectric layer over and contacting the non-porous dielectric layer, wherein the porous dielectric layer has a second porosity higher than the first porosity. A bond pad penetrates through the non-porous dielectric layer and the porous dielectric layer. A dielectric barrier layer is overlying, and in contact with, the porous dielectric layer. The bond pad is exposed through the dielectric barrier layer. The dielectric barrier layer has a planar top surface. The bond pad has a planar top surface higher than a bottom surface of the dielectric barrier layer.
    Type: Grant
    Filed: October 2, 2018
    Date of Patent: September 29, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsun-Chung Kuang, Yen-Chang Chu, Cheng-Tai Hsiao, Ping-Yin Liu, Lan-Lin Chao, Yeur-Luen Tu, Chia-Shiung Tsai, Xiaomeng Chen
  • Patent number: 10781098
    Abstract: A method of manufacturing a semiconductor structure includes receiving a first substrate including a first dielectric layer disposed over the first substrate and a first conductive structure surrounded by the first dielectric layer; receiving a second substrate including a second dielectric layer disposed over the second substrate and a second conductive structure surrounded by the second dielectric layer; bonding the first dielectric layer with the second dielectric layer; and bonding the first conductive structure with the second conductive structure.
    Type: Grant
    Filed: May 6, 2019
    Date of Patent: September 22, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Hung-Hua Lin, Ping-Yin Liu, Kuan-Liang Liu, Chia-Shiung Tsai, Alexander Kalnitsky