Patents by Inventor Chia-Wei Wu

Chia-Wei Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11914915
    Abstract: A near eye display system is provided. The near eye display system includes: a frame comprising a main body and two temple arms; at least one near eye sensor mounted on the main body and configured to measure user eye parameters; a first near eye display mounted on the main body and configured to form a first image projected on a first retina of a first eye; a second near eye display mounted on the main body and configured to form a second image projected on a second retina of a second eye; and a processing unit located at least at one of the two temple arms and configured to generate a display control signal based at least on the user eye parameters, wherein the display control signal drives the first near eye display and the second near eye display.
    Type: Grant
    Filed: March 21, 2022
    Date of Patent: February 27, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jheng-Hong Jiang, Shing-Huang Wu, Chia-Wei Liu
  • Patent number: 11860168
    Abstract: Mycobacterial-specific biomarkers and methods of using such biomarkers for diagnosis of mycobacterial infection in a mammal are disclosed.
    Type: Grant
    Filed: August 29, 2019
    Date of Patent: January 2, 2024
    Assignee: WISCONSIN ALUMNI RESEARCH FOUNDATION
    Inventors: Adel Mohamed Talaat, Chia-wei Wu
  • Patent number: 11862666
    Abstract: A capacitor structure and a manufacturing method thereof are disclosed in this invention. The capacitor structure includes a first electrode, a second electrode, and a capacitor dielectric stacked layer. The capacitor dielectric stacked layer is disposed between the first electrode and the second electrode, and the capacitor dielectric stacked layer includes a first dielectric layer. The first dielectric layer includes a first zirconium oxide layer and a first zirconium silicon oxide layer. A manufacturing method of a capacitor structure includes the following steps. A capacitor dielectric stacked layer is formed on a first electrode, and the capacitor dielectric stacked layer includes a first dielectric layer. The first dielectric layer includes a first zirconium oxide layer and a first zirconium silicon oxide layer. Subsequently, a second electrode is formed on the capacitor dielectric stacked layer, and the capacitor dielectric stacked layer is located between the first electrode and the second electrode.
    Type: Grant
    Filed: December 5, 2021
    Date of Patent: January 2, 2024
    Assignee: Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Chia-Wei Wu, Yu-Cheng Tung
  • Publication number: 20230349574
    Abstract: The present disclosure is at least directed to utilizing air curtain devices to form air curtains to separate and isolate areas in which respective workpieces are stored from a transfer compartment within a workpiece processing apparatus. The transfer compartment of the workpiece processing apparatus includes a robot configured to transfer or transport ones of the workpieces to and from these respective storage areas through the transfer compartment and to and from a tool compartment. A tool is present in the tool compartment for processing and refining the respective workpieces. Clean dry air (CDA) may be circulated through the respective storage areas. The air curtains formed by the air curtain devices and the circulation of CDA through the respective storage areas reduces the likelihood of the generation of defects, damages, and degradation of the workpieces when present within the workpiece processing apparatus.
    Type: Application
    Filed: April 29, 2022
    Publication date: November 2, 2023
    Inventors: Chia-Wei WU, Hao YANG, Hsiao-Chieh CHOU, Chun-Hung CHAO, Jao Sheng HUANG, Neng-Jye YANG, Kuo-Bin HUANG
  • Publication number: 20230284436
    Abstract: The present disclosure provides a semiconductor device and a fabricating method thereof, and which includes a substrate, bit lines, bit line contacts, a gate structure, a first oxidized interface layer, and a second oxidized interface layer. The bit lines are disposed on the substrate, and the bit line contacts are disposed below the bit lines. The gate structure is disposed on the substrate, wherein each bit line and the gate structure respectively include a semiconductor layer, a conductive layer, and a covering layer stacked from bottom to top. The first oxidized interface layer is disposed between each bit line contact and the semiconductor layer of each bit line. The second oxidized interface layer is disposed within the semiconductor layer of the gate structure, wherein a topmost surface of the first oxidized interface layer is higher than a topmost surface of the second oxidized interface layer.
    Type: Application
    Filed: April 21, 2022
    Publication date: September 7, 2023
    Applicant: Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Yukihiro Nagai, Lu-Yung Lin, Chia-Wei Wu, Tsun-Min Cheng, Yu Chun Lin, Zheng Guo Zhang, Sun-Hung Chen, Wu Xiang Li, Hsiao-Han Lin
  • Patent number: 11652004
    Abstract: A memory device and a method for forming the same are provided. The method includes forming a plurality of gate structures on a substrate, forming a first spacer on opposite sides of the gate structures, filling a dielectric layer between adjacent first spacers, forming a metal silicide layer on the gate structures, conformally forming a spacer material layer over the metal silicide layer, the first spacer layer and the dielectric layer, and performing an etch back process on the spacer material layer to form a second spacer on opposite sides of the metal silicide layer.
    Type: Grant
    Filed: December 20, 2021
    Date of Patent: May 16, 2023
    Assignee: WINBOND ELECTRONICS CORP.
    Inventors: Yi-Tsung Tsai, Chia-Wei Wu, Chih-Hao Lin, Chien-Chih Li
  • Publication number: 20230139254
    Abstract: A capacitor structure and a manufacturing method thereof are disclosed in this invention. The capacitor structure includes a first electrode, a second electrode, and a capacitor dielectric stacked layer. The capacitor dielectric stacked layer is disposed between the first electrode and the second electrode, and the capacitor dielectric stacked layer includes a first dielectric layer. The first dielectric layer includes a first zirconium oxide layer and a first zirconium silicon oxide layer. A manufacturing method of a capacitor structure includes the following steps. A capacitor dielectric stacked layer is formed on a first electrode, and the capacitor dielectric stacked layer includes a first dielectric layer. The first dielectric layer includes a first zirconium oxide layer and a first zirconium silicon oxide layer. Subsequently, a second electrode is formed on the capacitor dielectric stacked layer, and the capacitor dielectric stacked layer is located between the first electrode and the second electrode.
    Type: Application
    Filed: December 5, 2021
    Publication date: May 4, 2023
    Applicant: Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Chia-Wei Wu, Yu-Cheng Tung
  • Patent number: 11502180
    Abstract: A semiconductor device includes a substrate having at least a trench formed therein. A conductive material fills a lower portion of the trench. A barrier layer is between the conductive material and the substrate. An insulating layer is in the trench and completely covers the conductive material and the barrier layer, wherein a portion of the insulating layer covering the barrier layer has a bird's peak profile.
    Type: Grant
    Filed: February 17, 2020
    Date of Patent: November 15, 2022
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Chia-Wei Wu, Ting-Pang Chung, Tien-Chen Chan, Shu-Yen Chan
  • Publication number: 20220334473
    Abstract: A method includes forming a tri-layer. The tri-layer includes a bottom layer; a middle layer over the bottom layer; and a top layer over the middle layer. The top layer includes a photo resist. The method further includes removing the top layer; and removing the middle layer using a chemical solution. The chemical solution is free from potassium hydroxide (KOH), and includes at least one of a quaternary ammonium hydroxide and a quaternary ammonium fluoride.
    Type: Application
    Filed: June 30, 2022
    Publication date: October 20, 2022
    Inventors: Li-Min Chen, Kuo Bin Huang, Neng-Jye Yang, Chia-Wei Wu, Jian-Jou Lian
  • Publication number: 20220319850
    Abstract: Aspects of the disclosure provide a method. The method includes forming a structure over a substrate, and forming a spacer layer on the structure, wherein the spacer layer has a recess. The method includes forming a mask layer over the spacer layer and in the recess, the mask layer including a first layer, a second layer and a third layer. The method includes patterning the third layer of the mask layer, and etching the first layer and the second layer of the mask layer to form an opening to expose the recess of the spacer layer, wherein the opening in the second layer has a first width; and. The method includes removing the second layer using a wet etchant, wherein the opening in the third layer has a second width, and the second with is greater than the first width.
    Type: Application
    Filed: June 21, 2022
    Publication date: October 6, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Nai-Chia CHEN, Wan Hsuan HSU, Chia-Wei WU, Neng-Jye YANG, Chun-Li CHOU
  • Patent number: 11398380
    Abstract: A middle layer removal method is provided. The method includes providing a substrate having a structure formed on the substrate, and forming a spacer layer on the structure. The method includes forming a mask layer over the spacer layer, the mask layer including a first layer, a second layer over the first layer, and a third layer over the second layer. The method also includes patterning the third layer of the mask layer, and etching the first layer and the second layer of the mask layer to form an opening to expose a bottom surface of the second layer. The method further includes removing the second layer using a wet etchant.
    Type: Grant
    Filed: May 8, 2020
    Date of Patent: July 26, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Nai-Chia Chen, Wan Hsuan Hsu, Chia-Wei Wu, Neng-Jye Yang, Chun-Li Chou
  • Patent number: 11378882
    Abstract: A method includes forming a tri-layer. The tri-layer includes a bottom layer; a middle layer over the bottom layer; and a top layer over the middle layer. The top layer includes a photo resist. The method further includes removing the top layer; and removing the middle layer using a chemical solution. The chemical solution is free from potassium hydroxide (KOH), and includes at least one of a quaternary ammonium hydroxide and a quaternary ammonium fluoride.
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: July 5, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Li-Min Chen, Kuo Bin Huang, Neng-Jye Yang, Chia-Wei Wu, Jian-Jou Lian
  • Publication number: 20220115518
    Abstract: A memory device and a method for forming the same are provided. The method includes forming a plurality of gate structures on a substrate, forming a first spacer on opposite sides of the gate structures, filling a dielectric layer between adjacent first spacers, forming a metal silicide layer on the gate structures, conformally forming a spacer material layer over the metal silicide layer, the first spacer layer and the dielectric layer, and performing an etch back process on the spacer material layer to form a second spacer on opposite sides of the metal silicide layer.
    Type: Application
    Filed: December 20, 2021
    Publication date: April 14, 2022
    Inventors: Yi-Tsung TSAI, Chia-Wei WU, Chih-Hao LIN, Chien-Chih LI
  • Patent number: 11245026
    Abstract: A memory device and a method for forming the same are provided. The method includes forming a plurality of gate structures on a substrate, forming a first spacer on opposite sides of the gate structures, filling a dielectric layer between adjacent first spacers, forming a metal silicide layer on the gate structures, conformally forming a spacer material layer over the metal silicide layer, the first spacer layer and the dielectric layer, and performing an etch back process on the spacer material layer to form a second spacer on opposite sides of the metal silicide layer.
    Type: Grant
    Filed: November 22, 2019
    Date of Patent: February 8, 2022
    Assignee: WINBOND ELECTRONICS CORP.
    Inventors: Yi-Tsung Tsai, Chia-Wei Wu, Chih-Hao Lin, Chien-Chih Li
  • Publication number: 20220013407
    Abstract: A semiconductor structure and method of forming the same are provided. The method includes: forming a plurality of mandrel patterns over a dielectric layer; forming a first spacer and a second spacer on sidewalls of the plurality of mandrel patterns, wherein a first width of the first spacer is larger than a second width of the second spacer; removing the plurality of mandrel patterns; patterning the dielectric layer using the first spacer and the second spacer as a patterning mask; and forming conductive lines laterally aside the dielectric layer.
    Type: Application
    Filed: July 9, 2020
    Publication date: January 13, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Hsin Chan, Jiing-Feng Yang, Kuan-Wei Huang, Meng-Shu Lin, Yu-Yu Chen, Chia-Wei Wu, Chang-Wen Chen, Wei-Hao Lin, Ching-Yu Chang
  • Publication number: 20210366704
    Abstract: A semiconductor device and method of manufacture are provided. After a patterning of a middle layer, the middle layer is removed. In order to reduce or prevent damage to other underlying layers exposed by the patterning of the middle layer and intervening layers, an inhibitor is included within an etching process in order to inhibit the amount of material removed from the underlying layers.
    Type: Application
    Filed: August 2, 2021
    Publication date: November 25, 2021
    Inventors: Jian-Jou Lian, Yao-Wen Hsu, Neng-Jye Yang, Li-Min Chen, Chia-Wei Wu, Kuan-Lin Chen, Kuo Bin Huang
  • Patent number: 11081350
    Abstract: A semiconductor device and method of manufacture are provided. After a patterning of a middle layer, the middle layer is removed. In order to reduce or prevent damage to other underlying layers exposed by the patterning of the middle layer and intervening layers, an inhibitor is included within an etching process in order to inhibit the amount of material removed from the underlying layers.
    Type: Grant
    Filed: November 18, 2019
    Date of Patent: August 3, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jian-Jou Lian, Yao-Wen Hsu, Neng-Jye Yang, Li-Min Chen, Chia-Wei Wu, Kuan-Lin Chen, Kuo Bin Huang
  • Publication number: 20210159235
    Abstract: A memory device and a method for forming the same are provided. The method includes forming a plurality of gate structures on a substrate, forming a first spacer on opposite sides of the gate structures, filling a dielectric layer between adjacent first spacers, forming a metal silicide layer on the gate structures, conformally forming a spacer material layer over the metal silicide layer, the first spacer layer and the dielectric layer, and performing an etch back process on the spacer material layer to form a second spacer on opposite sides of the metal silicide layer.
    Type: Application
    Filed: November 22, 2019
    Publication date: May 27, 2021
    Inventors: Yi-Tsung TSAI, Chia-Wei WU, Chih-Hao LIN, Chien-Chih LI
  • Patent number: 11018049
    Abstract: A manufacturing method of an isolation structure includes the following steps. A semiconductor substrate is provided. A trench is formed in the semiconductor substrate. A first film forming process is performed to form a first dielectric layer conformally on the semiconductor substrate and conformally in the trench. An annealing process is performed to densify the first dielectric layer and convert the first dielectric layer into a second dielectric layer. A thickness of the second dielectric layer is less than a thickness of the first dielectric layer. A second film forming process is performed after the annealing process to form a third dielectric layer on the second dielectric layer and in the trench. The trench is filled with the second dielectric layer and the third dielectric layer.
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: May 25, 2021
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Yu-Shan Su, Chia-Wei Wu
  • Publication number: 20200401041
    Abstract: A method includes forming a tri-layer. The tri-layer includes a bottom layer; a middle layer over the bottom layer; and a top layer over the middle layer. The top layer includes a photo resist. The method further includes removing the top layer; and removing the middle layer using a chemical solution. The chemical solution is free from potassium hydroxide (KOH), and includes at least one of a quaternary ammonium hydroxide and a quaternary ammonium fluoride.
    Type: Application
    Filed: August 31, 2020
    Publication date: December 24, 2020
    Inventors: Li-Min Chen, Kuo Bin Huang, Neng-Jye Yang, Chia-Wei Wu, Jian-Jou Lian