Abstract: A method for manufacturing a semiconductor device includes preparing a first group of wafers having a plurality of first semiconductor dies embedded in a first photosensitive material layer; forming a plurality of first through vias in the first photosensitive material layer; attaching at least two of the first group of wafers using a first adhesive layer to form a first structure; preparing a second group of wafers having a plurality of second semiconductor dies embedded in a second photosensitive material layer; forming a plurality of second through vias in the second photosensitive material layer; attaching at least two of the second group of wafers using a second adhesive layer to form a second structure; and connecting the first structure to the second structure with a plurality of first metal bumps.

Abstract: The present disclosure provides a die assembly. The die assembly includes a first die, a second die and a third die stacked together. The first die includes a plurality of first metal lines facing a plurality of second metal lines of the second die, and a second substrate beneath the second metal lines faces a plurality of third metal lines of the third die. The die assembly further includes at least one first plug, a first redistribution layer and a second redistribution layer. The first plug penetrates through the second substrate to connect to at least one of the second metal lines. A first redistribution layer physically connects at least one of the first metal lines to at least one of the second metal lines, and a second redistribution layer physically connects at least one of the third metal lines to the first plug.

Abstract: A semiconductor structure and a method of manufacturing thereof are provided. The semiconductor includes a semiconductor integrated circuit device and a redistribution layer structure. The semiconductor integrated circuit device has a top surface and an electrode on the top surface. The redistribution layer structure is formed on the top surface. The redistribution layer structure includes an oxide layer, a nitride layer, a dielectric layer, a groove and a through via. The oxide layer and the nitride layer are formed on the top surface. The dielectric layer is formed on the nitride layer. The groove is formed at a topside of the dielectric layer and overlaps the electrode. The through via is formed at a bottom of the groove and extends within the electrode through the dielectric layer, the nitride layer and the oxide layer. The through via and the groove are filled with a conductive material.

Abstract: A semiconductor device includes a plurality of first semiconductor dies, a first adhesive layer, a plurality of second semiconductor dies, a second adhesive layer, and a plurality of first metal bumps. The first semiconductor dies are embedded in a first photosensitive layer of a first group of wafers. The first adhesive layer is disposed between at least two of the first group of wafers to form a first structure. The second semiconductor dies are embedded in a second photosensitive layer of a second group of wafers. The second adhesive layer is disposed between at least two of the second group of wafers to form a second structure. The first metal bumps are disposed between the first structure and second structure, in which the first structure is connected to the second structure with the first metal bumps.

Abstract: A semiconductor structure and a method of manufacturing thereof are provided. The semiconductor includes a semiconductor integrated circuit device and a redistribution layer structure. The semiconductor integrated circuit device has a top surface and an electrode on the top surface. The redistribution layer structure is formed on the top surface. The redistribution layer structure includes an oxide layer, a nitride layer, a dielectric layer, a groove and a through via. The oxide layer and the nitride layer are formed on the top surface. The dielectric layer is formed on the nitride layer. The groove is formed at a topside of the dielectric layer and overlaps the electrode. The through via is formed at a bottom of the groove and extends within the electrode through the dielectric layer, the nitride layer and the oxide layer. The through via and the groove are filled with a conductive material.

Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a semiconductor component, a re-routing layer, a bonding dielectric and an insulating layer. The re-routing layer is disposed over the semiconductor component and electrically coupled to the semiconductor component. The bonding dielectric is disposed over the semiconductor component to surround a top portion of the re-routing layer. The insulating layer is disposed between the semiconductor component and the bonding dielectric to surround a bottom portion of the re-routing layer.

Abstract: The present disclosure provides a die assembly. The die assembly includes a first die, a second die and a third die stacked together. The first die includes a plurality of first metal lines facing a plurality of second metal lines of the second die, and a second substrate beneath the second metal lines faces a plurality of third metal lines of the third die. The die assembly further includes at least one first plug, a first redistribution layer and a second redistribution layer. The first plug penetrates through the second substrate to connect to at least one of the second metal lines. A first redistribution layer physically connects at least one of the first metal lines to at least one of the second metal lines, and a second redistribution layer physically connects at least one of the third metal lines to the first plug.

Abstract: The present disclosure provides a semiconductor device and a method of manufacturing the same. The semiconductor device includes a first die, a second die, a first redistribution layer, a second redistribution layer, a first interconnect structure, and a second interconnect structure. The second die is stacked on the first die, the first redistribution layer is disposed between a first substrate of the first die and a second ILD layer of the second die, and the second redistribution layer is disposed on a second substrate of the second die. The first interconnect structure connects the first redistribution layer to one of first metal lines of the first die, and the second interconnect structure connects the second redistribution layer to one of the second metal lines in the second ILD layer.

Abstract: A semiconductor device includes a plurality of first semiconductor dies, a first adhesive layer, a plurality of second semiconductor dies, a second adhesive layer, and a plurality of first metal bumps. The first semiconductor dies are embedded in a first photosensitive layer of a first group of wafers. The first adhesive layer is disposed between at least two of the first group of wafers to form a first structure. The second semiconductor dies are embedded in a second photosensitive layer of a second group of wafers. The second adhesive layer is disposed between at least two of the second group of wafers to form a second structure. The first metal bumps are disposed between the first structure and second structure, in which the first structure is connected to the second structure with the first metal bumps.

Abstract: An anti-fuse structure includes a substrate, an active layer, an electrode layer, and a dielectric layer. The active layer is on the substrate and has a body portion and a convex portion protruding from the body portion. The electrode layer is on the active layer and partially overlaps the convex portion of the active layer. The electrode layer has a hollow region, and the convex portion of the active layer is in the hollow region. The dielectric layer is between the active layer and the electrode layer.

Abstract: The present disclosure provides a method of manufacturing a semiconductor device. The method includes steps of providing a first wafer including a first substrate and a plurality of first conductors over the first substrate; forming a first interconnect structure penetrating through the first substrate and contacting one of the first conductors; forming a bonding dielectric on the first substrate and the first interconnect structure; bonding a second wafer on the first wafer, wherein the second wafer includes a second substrate, a second ILD layer on a second front surface of the second substrate, and a plurality of second conductors in the second ILD layer, wherein the second ILD layer is in contact with the bonding dielectric; forming a second interconnect structure penetrating through the second substrate and into the second ILD layer and contacting the second conductor and the first interconnect structure.

Abstract: The present disclosure provides a semiconductor device and a method of manufacturing the same. The semiconductor device includes a first die, a second die, a first redistribution layer, a second redistribution layer, a first interconnect structure, and a second interconnect structure. The second die is stacked on the first die, the first redistribution layer is disposed between a first substrate of the first die and a second ILD layer of the second die, and the second redistribution layer is disposed on a second substrate of the second die. The first interconnect structure connects the first redistribution layer to one of first metal lines of the first die, and the second interconnect structure connects the second redistribution layer to one of the second metal lines in the second ILD layer.

Abstract: The present disclosure provides a method of manufacturing a semiconductor device. The method includes steps of providing a first wafer including a first substrate and a plurality of first conductors over the first substrate; forming a first interconnect structure penetrating through the first substrate and contacting one of the first conductors; forming a bonding dielectric on the first substrate and the first interconnect structure; bonding a second wafer on the first wafer, wherein the second wafer includes a second substrate, a second ILD layer on a second front surface of the second substrate, and a plurality of second conductors in the second ILD layer, wherein the second ILD layer is in contact with the bonding dielectric; forming a second interconnect structure penetrating through the second substrate and into the second ILD layer and contacting the second conductor and the first interconnect structure.

Abstract: The present disclosure relates to a multi-ring bonding pad, a semiconductor structure having the multi-ring bonding pad, and a method of manufacturing the semiconductor structure. The bonding pad includes an inner ring member, an outer ring member, and multiple bridge members. The inner ring member has a pair of first inner edges opposite to each other, a pair of second inner edges opposite to each other, and multiple third inner edges for connecting the first inner edges to the second inner edges. The outer ring member surrounds the inner ring member and has a pair of first outer edges opposite to each other, a pair of second outer edges opposite to each other, and multiple third outer edges for connecting the first outer edges to the second outer edges. The bridge members are disposed between the inner ring member and the outer ring member for connecting the inner ring member to the outer ring member.

Abstract: The present disclosure relates to a multi-ring bonding pad, a semiconductor structure having the multi-ring bonding pad, and a method of manufacturing the semiconductor structure. The bonding pad includes an inner ring member, an outer ring member, and multiple bridge members. The inner ring member has a pair of first inner edges opposite to each other, a pair of second inner edges opposite to each other, and multiple third inner edges for connecting the first inner edges to the second inner edges. The outer ring member surrounds the inner ring member and has a pair of first outer edges opposite to each other, a pair of second outer edges opposite to each other, and multiple third outer edges for connecting the first outer edges to the second outer edges. The bridge members are disposed between the inner ring member and the outer ring member for connecting the inner ring member to the outer ring member.

Abstract: An antifuse structure includes an active area and a gate electrode over the active area. The active area includes a first body portion and a first extending portion extending in a first direction. The gate electrode includes a second body portion and a second extending portion extending in a second direction perpendicular to the first direction. The first body portion includes a first surface facing a portion of the second body portion, and the second body portion includes a second surface facing a portion of the first extending portion. The first extending portion and the second extending portion are partially overlapped in a third direction perpendicular to both the first direction and the second direction, with a dielectric layer sandwiched between the first and second extending portions, forming an intersection area.

Abstract: An antifuse structure includes an active area and a gate electrode over the active area. The active area includes a first body portion and a first extending portion extending in a first direction. The gate electrode includes a second body portion and a second extending portion extending in a second direction perpendicular to the first direction. The first body portion includes a first surface facing a portion of the second body portion, and the second body portion includes a second surface facing a portion of the first extending portion. The first extending portion and the second extending portion are partially overlapped in a third direction perpendicular to both the first direction and the second direction, with a dielectric layer sandwiched between the first and second extending portions, forming an intersection area.

Abstract: A method includes forming a plurality of first core features and one frame feature encircling the first core features. The first core features extend along a first direction and are arranged along a second direction perpendicular to the first direction, and each of the first core features is spaced apart from the frame feature by a first gap along the first direction. The method also includes forming a spacer layer filling the first gaps and forming a plurality of individual recesses entirely separated from each other. The method also includes forming a plurality of second core features in the individual recesses, wherein the second core features are entirely separated from each other and are spaced apart from the frame feature by the spacer layer. The method then removes the spacer layer to form a plurality of openings between the first core features, the second core features and the frame feature.

Abstract: The present disclosure provides a method of forming fine interconnection for semiconductor devices. The method includes the following steps: A substrate is provided. A first core layer is formed over the substrate. The first core layer includes a base portion, a plurality of extending line portions extending from the base portion along a first direction, and a plurality of isolated line portions isolated from the base portion. Subsequently, a spacer is formed on the sidewalls of the first core layer. A second core layer is then formed to over the substrate. The second core layer includes a plurality of surrounding line portions surrounding the plurality of isolated line portions, and includes a plurality of enclosed line portions enclosed by the plurality of extending line portions. The spacer is removed to form a plurality of openings between the first core layer and the second core layer.

Abstract: A method includes forming a plurality of first core features and one frame feature encircling the first core features. The first core features extend along a first direction and are arranged along a second direction perpendicular to the first direction, and each of the first core features is spaced apart from the frame feature by a first gap along the first direction. The method also includes forming a spacer layer filling the first gaps and forming a plurality of individual recesses entirely separated from each other. The method also includes forming a plurality of second core features in the individual recesses, wherein the second core features are entirely separated from each other and are spaced apart from the frame feature by the spacer layer. The method then removes the spacer layer to form a plurality of openings between the first core features, the second core features and the frame feature.