Patents by Inventor Chih-Chien Liu

Chih-Chien Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190305414
    Abstract: A communication apparatus, an electronic apparatus and an antenna adjustment method thereof are provided. The communication apparatus includes an antenna system, a tuning portion and a switch circuit. The antenna system includes at least two antenna units. The tuning portion is disposed between the at least two antenna units and includes at least two branch units. The switch circuit is coupled to the tuning portion. The switch circuit switches a conduction from a first one of the branch units to a second one of the branch units according to a switching signal. The switching signal is related to performances of the antenna system. Accordingly, a dynamic and flexible adjustment mechanism can be provided to increase throughput and improve users' internet experience.
    Type: Application
    Filed: April 2, 2019
    Publication date: October 3, 2019
    Applicant: COMPAL ELECTRONICS, INC.
    Inventors: Liang-Che Chou, Li-Chun Lee, Yu-Chun Hsieh, Mau-Chi Sun, Jui-Hung Lai, Wen-Feng Tsai, Chih-Chien Liu
  • Publication number: 20190287976
    Abstract: A fabricating method of a stop layer includes providing a substrate. The substrate is divided into a memory region and a peripheral circuit region. Two conductive lines are disposed within the peripheral circuit region. Then, an atomic layer deposition is performed to form a silicon nitride layer to cover the conductive lines. Later, after forming the silicon nitride layer, a silicon carbon nitride layer is formed to cover the silicon nitride layer. The silicon carbon nitride layer serves as a stop layer.
    Type: Application
    Filed: April 23, 2018
    Publication date: September 19, 2019
    Inventors: Chih-Chien Liu, Tzu-Chin Wu, Po-Chun Chen, Chia-Lung Chang
  • Publication number: 20190259762
    Abstract: A magnetic tunnel junction (MTJ) structure of a magnetic random access memory (MRAM) cell includes an insulation layer, a patterned MTJ film stack, an aluminum oxide protection layer, an interlayer dielectric, and a connection structure. The patterned MTJ film stack is disposed on the insulation layer. The aluminum oxide protection layer is disposed on a sidewall of the patterned MTJ film stack, and the aluminum oxide protection layer includes an aluminum film oxidized by an oxidation treatment. The interlayer dielectric covers the aluminum oxide protection layer and the patterned MTJ film stack. The connection structure penetrates the interlayer dielectric above the patterned MTJ film stack, and the connection structure is electrically connected to a topmost portion of the patterned MTJ film stack.
    Type: Application
    Filed: May 2, 2019
    Publication date: August 22, 2019
    Inventors: Hsiao-Pang Chou, Yu-Ru Yang, Chih-Chien Liu, Chao-Ching Hsieh, Chun-Hsien Lin
  • Publication number: 20190249297
    Abstract: A semiconductor device includes a substrate, a dielectric layer, a first tungsten layer, an interface layer and a second tungsten layer. The dielectric layer is disposed on the substrate and has a first opening and a second opening larger than the first opening. The first tungsten layer is filled in the first opening and is disposed in the second opening. The second tungsten layer is disposed on the first tungsten layer in the second opening, wherein the second tungsten layer has a grain size gradually increased from a bottom surface to a top surface. The interface layer is disposed between the first tungsten layer and the second tungsten layer, wherein the interface layer comprises a nitrogen containing layer. The present invention further includes a method of forming a semiconductor device.
    Type: Application
    Filed: March 12, 2018
    Publication date: August 15, 2019
    Inventors: Chih-Chien Liu, Pin-Hong Chen, Tsun-Min Cheng, Yi-Wei Chen
  • Patent number: 10381228
    Abstract: An epitaxial process applying light illumination includes the following steps. A substrate is provided. A dry etching process and a wet etching process are performed to form a recess in the substrate, wherein an infrared light illuminates while the wet etching process is performed. An epitaxial structure is formed in the recess.
    Type: Grant
    Filed: February 25, 2015
    Date of Patent: August 13, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yu-Ying Lin, Ted Ming-Lang Guo, Chin-Cheng Chien, Chih-Chien Liu, Hsin-Kuo Hsu, Chin-Fu Lin, Chun-Yuan Wu
  • Patent number: 10374051
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a silicon layer on a substrate; forming a metal silicon nitride layer on the silicon layer; forming a stress layer on the metal silicon nitride layer; performing a thermal treatment process; removing the stress layer; forming a conductive layer on the metal silicon nitride layer; and patterning the conductive layer, the metal silicon nitride layer, and the silicon layer to form a gate structure.
    Type: Grant
    Filed: May 23, 2018
    Date of Patent: August 6, 2019
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Ji-Min Lin, Yi-Wei Chen, Tsun-Min Cheng, Pin-Hong Chen, Chih-Chien Liu, Chun-Chieh Chiu, Tzu-Chieh Chen, Chih-Chieh Tsai, Yi-An Huang, Kai-Jiun Chang
  • Publication number: 20190221570
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a bit line structure on a substrate; forming a first spacer, a second spacer, and a third spacer around the bit line structure; forming an interlayer dielectric (ILD) layer on the bit line structure; planarizing part of the ILD layer; removing the ILD layer and the second spacer to form a recess between the first spacer and the third spacer; and forming a liner in the recess.
    Type: Application
    Filed: February 14, 2018
    Publication date: July 18, 2019
    Inventors: Chih-Chien Liu, Chia-Lung Chang, Tzu-Chin Wu, Wei-Lun Hsu
  • Patent number: 10332888
    Abstract: A method of manufacturing memory devices is provided in the present invention. The method includes the steps of providing a substrate with multiple capacitors, wherein the capacitor includes a lower electrode layer, an insulating layer and an upper electrode layer and a top plate, forming a tungsten layer on the upper electrode, performing a nitriding plasma treatment to the tungsten layer to form a tungsten nitride layer, and forming a pre-metal dielectric layer on the tungsten nitride layer.
    Type: Grant
    Filed: November 13, 2017
    Date of Patent: June 25, 2019
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Chih-Chien Liu, Chia-Lung Chang, Han-Yung Tsai, Tzu-Chin Wu
  • Patent number: 10312238
    Abstract: A manufacturing method of a magnetic random access memory (MRAM) cell includes the following steps. A magnetic tunnel junction (MTJ) film stack is formed on an insulation layer. An aluminum mask layer is formed on the MTJ film stack. A hard mask layer is formed on the aluminum mask layer. An ion beam etching (IBE) process is performed with the aluminum mask layer and the hard mask layer as a mask. The MTJ film stack is patterned to be a patterned MTJ film stack by the IBE process, and at least apart of the aluminum mask layer is bombarded by the IBE process for forming an aluminum film on a sidewall of the patterned MTJ film stack. An oxidation treatment is performed, and the aluminum film is oxidized to be an aluminum oxide protection layer on the sidewall of the patterned MTJ film stack by the oxidation treatment.
    Type: Grant
    Filed: November 6, 2017
    Date of Patent: June 4, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hsiao-Pang Chou, Yu-Ru Yang, Chih-Chien Liu, Chao-Ching Hsieh, Chun-Hsien Lin
  • Publication number: 20190148382
    Abstract: A method of manufacturing memory devices is provided in the present invention. The method includes the steps of providing a substrate with multiple capacitors, wherein the capacitor includes a lower electrode layer, an insulating layer and an upper electrode layer and a top plate, forming a tungsten layer on the upper electrode, performing a nitriding plasma treatment to the tungsten layer to form a tungsten nitride layer, and forming a pre-metal dielectric layer on the tungsten nitride layer.
    Type: Application
    Filed: November 13, 2017
    Publication date: May 16, 2019
    Inventors: Chih-Chien Liu, Chia-Lung Chang, Han-Yung Tsai, Tzu-Chin Wu
  • Publication number: 20190139959
    Abstract: A manufacturing method of a magnetic random access memory (MRAM) cell includes the following steps. A magnetic tunnel junction (MTJ) film stack is formed on an insulation layer. An aluminum mask layer is formed on the MTJ film stack. A hard mask layer is formed on the aluminum mask layer. An ion beam etching (IBE) process is performed with the aluminum mask layer and the hard mask layer as a mask. The MTJ film stack is patterned to be a patterned MTJ film stack by the IBE process, and at least apart of the aluminum mask layer is bombarded by the IBE process for forming an aluminum film on a sidewall of the patterned MTJ film stack. An oxidation treatment is performed, and the aluminum film is oxidized to be an aluminum oxide protection layer on the sidewall of the patterned MTJ film stack by the oxidation treatment.
    Type: Application
    Filed: November 6, 2017
    Publication date: May 9, 2019
    Inventors: Hsiao-Pang Chou, Yu-Ru Yang, Chih-Chien Liu, Chao-Ching Hsieh, Chun-Hsien Lin
  • Patent number: 10283564
    Abstract: The present invention provides a semiconductor structure, the semiconductor structure includes a substrate comprising a diffusion region, a transistor structure on the substrate, and a resistive random access memory (RRAM) on the substrate, wherein the resistive random access memory includes at least one metal silicide layer in direct contact with the diffusion region, and a lower electrode, a resistive switching layer and an upper electrode are sequentially disposed on the metal silicide layer.
    Type: Grant
    Filed: November 8, 2017
    Date of Patent: May 7, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Chien Liu, Chao-Ching Hsieh, Yu-Ru Yang, Hsiao-Pang Chou
  • Patent number: 10276389
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a silicon layer on a substrate; forming a first metal silicon nitride layer on the silicon layer; performing an oxygen treatment process to form an oxide layer on the first metal silicon nitride layer; forming a second metal silicon nitride layer on the oxide layer; forming a conductive layer on the second metal silicon nitride layer; and patterning the conductive layer, the second metal silicon nitride layer, the oxide layer, the first metal silicon nitride layer, and the silicon layer to form a gate structure.
    Type: Grant
    Filed: May 23, 2018
    Date of Patent: April 30, 2019
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Chih-Chieh Tsai, Yi-Wei Chen, Pin-Hong Chen, Chih-Chien Liu, Tzu-Chieh Chen, Chun-Chieh Chiu, Tsun-Min Cheng, Kai-Jiun Chang, Chia-Chen Wu, Yi-An Huang
  • Publication number: 20190123104
    Abstract: The present invention provides a semiconductor structure, the semiconductor structure includes a fin transistor (fin filed effect transistor, finFET) located on a substrate, the fin transistor includes a gate structure crossing over a fin structure, and at least one source/drain region. And a resistive random access memory (RRAM) includes a lower electrode, a resistance switching layer and a top electrode being sequentially located on the source/drain region and electrically connected to the fin transistor.
    Type: Application
    Filed: November 20, 2017
    Publication date: April 25, 2019
    Inventors: Yu-Ru Yang, Chih-Chien Liu, Chao-Ching Hsieh, Hsiao-Pang Chou
  • Patent number: 10269868
    Abstract: The present invention provides a semiconductor structure, the semiconductor structure includes a fin transistor (fin filed effect transistor, finFET) located on a substrate, the fin transistor includes a gate structure crossing over a fin structure, and at least one source/drain region. And a resistive random access memory (RRAM) includes a lower electrode, a resistance switching layer and a top electrode being sequentially located on the source/drain region and electrically connected to the fin transistor.
    Type: Grant
    Filed: November 20, 2017
    Date of Patent: April 23, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yu-Ru Yang, Chih-Chien Liu, Chao-Ching Hsieh, Hsiao-Pang Chou
  • Publication number: 20190115394
    Abstract: The present invention provides a semiconductor structure, the semiconductor structure includes a substrate comprising a diffusion region, a transistor structure on the substrate, and a resistive random access memory (RRAM) on the substrate, wherein the resistive random access memory includes at least one metal silicide layer in direct contact with the diffusion region, and a lower electrode, a resistive switching layer and an upper electrode are sequentially disposed on the metal silicide layer.
    Type: Application
    Filed: November 8, 2017
    Publication date: April 18, 2019
    Inventors: Chih-Chien Liu, Chao-Ching Hsieh, Yu-Ru Yang, Hsiao-Pang Chou
  • Patent number: 10177311
    Abstract: A resistive random access memory (RRAM) cell includes a substrate, a transistor having a gate on the substrate and a source/drain region in the substrate, a first inter-layer dielectric layer covering the transistor, a contact plug disposed in the first inter-layer dielectric layer and landing on the source/drain region, a resistive material layer conformally covering a protruding upper end portion of the contact plug, and a top electrode on the resistive material layer.
    Type: Grant
    Filed: October 12, 2017
    Date of Patent: January 8, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chao-Ching Hsieh, Chih-Chien Liu, Yu-Ru Yang, Hsiao-Pang Chou
  • Patent number: 10141193
    Abstract: A semiconductor device including a substrate, a spacer and a high-k dielectric layer having a U-shape profile is provided. The spacer located on the substrate surrounds and defines a trench. The high-k dielectric layer having a U-shape profile is located in the trench, and the high-k dielectric layer having a U-shape profile exposes an upper portion of the sidewalls of the trench.
    Type: Grant
    Filed: November 24, 2015
    Date of Patent: November 27, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chin-Cheng Chien, Chun-Yuan Wu, Chih-Chien Liu, Chin-Fu Lin, Teng-Chun Tsai
  • Publication number: 20180331044
    Abstract: A semiconductor device including a tungsten contact structure formed in a first dielectric layer on a substrate is provided. The tungsten contact structure contains a seam structure. A tungsten oxide layer is formed at least on a sidewall of the seam structure.
    Type: Application
    Filed: June 15, 2017
    Publication date: November 15, 2018
    Applicant: United Microelectronics Corp.
    Inventors: Yi-Yu Wu, Chun-Yuan Wu, Chih-Chien Liu, Bin-Siang Tsai
  • Patent number: 10089457
    Abstract: An application program is implemented by an electrical device for executing a wireless network certification process, which includes the following steps: driving a network module of the electrical device to receive a certification code broadcasted by a wireless network access point (AP), determining whether or not the certification code is in an identified list, wherein when the certification code is not in the identified list, the application program executes a first action to limit the electrical device to a limited function mode; and when an unlock password is received, the application program executing a second action to unlock the electrical device to an un-limited function mode; and when the electrical device is in the un-limited function mode and a connecting password is received, driving the network module of the electrical device to connect to the network AP.
    Type: Grant
    Filed: April 13, 2016
    Date of Patent: October 2, 2018
    Assignee: COMPAL ELECTRONICS, INC.
    Inventors: Chih-Chien Liu, Yi-Chang Chen, Chih-Hsing Kang