Patents by Inventor Chih Lai

Chih Lai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11818882
    Abstract: In some embodiments, the present disclosure relates to a one-time program memory device that includes a source-line arranged over a bottom dielectric layer. Further, a bit-line is arranged directly over the source-line in a first direction. A channel isolation structure is arranged between the source-line and the bit-line. A channel structure is also arranged between the source-line and the bit-line and is arranged beside the channel isolation structure in a second direction perpendicular to the first direction. A vertical gate electrode extends in the first direction from the bottom dielectric layer to the bit-line and is arranged beside the channel isolation structure in the second direction. The one-time program memory device further includes a gate dielectric layer arranged between the vertical gate electrode and the bit-line, the source-line, and the channel structure.
    Type: Grant
    Filed: May 28, 2020
    Date of Patent: November 14, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Chih Lai, Chung-Te Lin
  • Publication number: 20230363074
    Abstract: A target droplet source for an extreme ultraviolet (EUV) source includes a droplet generator configured to generate target droplets of a given material. The droplet generator includes a nozzle configured to supply the target droplets in a space enclosed by a chamber. The target droplet source further includes a sleeve disposed in the chamber distal to the nozzle. The sleeve is configured to provide a path for the target droplets in the chamber.
    Type: Application
    Filed: July 19, 2023
    Publication date: November 9, 2023
    Inventors: Wei-Chih LAI, Han-Lung CHANG, Chi YANG, Shang-Chieh CHIEN, Bo--Tsun LIU, Li-Jui CHEN, Po-Chung CHENG
  • Publication number: 20230355686
    Abstract: The present disclosure provides a method for preventing and/or treating Helicobacter pylori-related disease, including administering to a subject in need thereof a pharmaceutical composition including an effective amount of Parabacteroides goldsteinii and its metabolites, wherein the accession number for the Parabacteroides goldsteinii is DSM 32939. The Parabacteroides goldsteinii and its metabolites of the present disclosure reduces serum cholesterol level to achieve the effect of preventing and/or treating Helicobacter pylori-related disease.
    Type: Application
    Filed: January 18, 2023
    Publication date: November 9, 2023
    Inventors: Hsin-Chih Lai, Chih-Ho Lai, Chia-Chen Lu, Tzu-Lung Lin, Po-I Wu
  • Publication number: 20230363181
    Abstract: Various embodiments of the present application are directed towards a bipolar selector having independently tunable threshold voltages, as well as a memory cell comprising the bipolar selector and a memory array comprising the memory cell. In some embodiments, the bipolar selector comprises a first unipolar selector and a second unipolar selector. The first and second unipolar selectors are electrically coupled in parallel with opposite orientations and may, for example, be diodes or some other suitable unipolar selectors. By placing the first and second unipolar selectors in parallel with opposite orientations, the first unipolar selector independently defines a first threshold voltage of the bipolar selector and the second unipolar selector independently defines a second threshold voltage of the bipolar selector. As a result, the first and second threshold voltages can be independently tuned by adjusting parameters of the first and second unipolar selectors.
    Type: Application
    Filed: July 21, 2023
    Publication date: November 9, 2023
    Inventors: Sheng-Chih Lai, Chung-Te Lin, Min Cao, Randy Osborne
  • Publication number: 20230363175
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a substrate and a stacked structure disposed on the substrate. The stacked structure includes multiple alternately stacked insulating layers and gate members. A core structure is disposed in the stacked structure. The core structure includes a memory layer, a channel member, a contact member, and a liner member. The channel member is disposed on the memory layer. The contact member is disposed on the channel member. The liner member surrounds a portion of the core structure. The present disclosure also provides a method for fabricating the semiconductor structure.
    Type: Application
    Filed: July 18, 2023
    Publication date: November 9, 2023
    Inventors: Yu-Wei Jiang, Sheng-Chih Lai, Feng-Cheng Yang, Chung-Te Lin
  • Publication number: 20230363171
    Abstract: Various embodiments of the present disclosure are directed towards a metal-ferroelectric-insulator-semiconductor (MFIS) memory device, as well as a method for forming the MFIS memory device. According to some embodiments of the MFIS memory device, a lower source/drain region and an upper source/drain region are vertically stacked. A semiconductor channel overlies the lower source/drain region and underlies the upper source/drain region. The semiconductor channel extends from the lower source/drain region to the upper source/drain region. A control gate electrode extends along a sidewall of the semiconductor channel and further along individual sidewalls of the lower and upper source/drain regions. A gate dielectric layer and a ferroelectric layer separate the control gate electrode from the semiconductor channel and the lower and upper source/drain regions.
    Type: Application
    Filed: July 18, 2023
    Publication date: November 9, 2023
    Inventors: Sheng-Chih Lai, Chung-Te Lin
  • Patent number: 11805658
    Abstract: In a method of manufacturing a semiconductor device, a magnetic random access memory (MRAM) cell structure is formed. The MRAM cell structure includes a bottom electrode, a magnetic tunnel junction (MTJ) stack and a top electrode. A first insulating cover layer is formed over the MRAM cell structure. A second insulating cover layer is formed over the first insulating cover layer. An interlayer dielectric (ILD) layer is formed. A contact opening in the ILD layer is formed, thereby exposing the second insulating cover layer. A part of the second insulating cover layer and a part of the first insulating cover layer are removed, thereby exposing the top electrode. A conductive layer is formed in the opening contacting the top electrode.
    Type: Grant
    Filed: November 29, 2021
    Date of Patent: October 31, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hui-Hsien Wei, Chung-Te Lin, Han-Ting Tsai, Tai-Yen Peng, Yu-Teng Dai, Chien-Min Lee, Sheng-Chih Lai, Wei-Chih Wen
  • Publication number: 20230345731
    Abstract: A memory device includes a multi-layer stack, a channel layer, a memory material layer and a memory material layer. The multi-layer stack includes a plurality of conductive layers and a plurality of dielectric layers stacked alternately along a first direction. The memory material layer is disposed between the channel layer and each of the conductive layers and the dielectric layers. The conductive pillars extend in the first direction, wherein the at least three conductive pillars are aligned along a second direction substantially perpendicular to the first direction.
    Type: Application
    Filed: June 27, 2023
    Publication date: October 26, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Wei Jiang, Sheng-Chih Lai, TsuChing Yang, Hung-Chang Sun, Kuo-Chang Chiang
  • Patent number: 11800718
    Abstract: A semiconductor memory device is provided. The semiconductor memory device includes a via above a substrate, a dielectric layer over the via, a first source/drain feature above the dielectric layer, a first channel feature above the first source/drain feature, a second source/drain feature above the first channel feature, and a gate line laterally spaced apart from the first source/drain feature, the first channel feature and the second source/drain feature. The gate line passes through the dielectric layer and is on the via.
    Type: Grant
    Filed: July 14, 2021
    Date of Patent: October 24, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Chih Lai, Chung-Te Lin
  • Patent number: 11800703
    Abstract: In some embodiments, the present disclosure relates to a one-time program memory device that includes a source-line arranged over a bottom dielectric layer. Further, a bit-line is arranged directly over the source-line in a first direction. A channel isolation structure is arranged between the source-line and the bit-line. A channel structure is also arranged between the source-line and the bit-line and is arranged beside the channel isolation structure in a second direction perpendicular to the first direction. A vertical gate electrode extends in the first direction from the bottom dielectric layer to the bit-line and is arranged beside the channel isolation structure in the second direction. The one-time program memory device further includes a gate dielectric layer arranged between the vertical gate electrode and the bit-line, the source-line, and the channel structure.
    Type: Grant
    Filed: August 4, 2022
    Date of Patent: October 24, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Chih Lai, Chung-Te Lin
  • Publication number: 20230337437
    Abstract: A memory cell includes a thin film transistor over a semiconductor substrate, the thin film transistor including: a memory film contacting a word line; and an oxide semiconductor (OS) layer contacting a source line and a bit line, wherein the memory film is disposed between the OS layer and the word line, wherein the source line and the bit line each comprise a first conductive material touching the OS layer, and wherein the first conductive material has a work function less than 4.6. The memory cell further includes a dielectric material separating the source line and the bit line.
    Type: Application
    Filed: June 26, 2023
    Publication date: October 19, 2023
    Inventors: Kuo-Chang Chiang, Hung-Chang Sun, Sheng-Chih Lai, TsuChing Yang, Yu-Wei Jiang
  • Patent number: 11792909
    Abstract: A target droplet source for an extreme ultraviolet (EUV) source includes a droplet generator configured to generate target droplets of a given material. The droplet generator includes a nozzle configured to supply the target droplets in a space enclosed by a chamber. The target droplet source further includes a sleeve disposed in the chamber distal to the nozzle. The sleeve is configured to provide a path for the target droplets in the chamber.
    Type: Grant
    Filed: May 17, 2021
    Date of Patent: October 17, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wei-Chih Lai, Han-Lung Chang, Chi Yang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng
  • Patent number: 11792999
    Abstract: Various embodiments of the present application are directed towards a bipolar selector having independently tunable threshold voltages, as well as a memory cell comprising the bipolar selector and a memory array comprising the memory cell. In some embodiments, the bipolar selector comprises a first unipolar selector and a second unipolar selector. The first and second unipolar selectors are electrically coupled in parallel with opposite orientations and may, for example, be diodes or some other suitable unipolar selectors. By placing the first and second unipolar selectors in parallel with opposite orientations, the first unipolar selector independently defines a first threshold voltage of the bipolar selector and the second unipolar selector independently defines a second threshold voltage of the bipolar selector. As a result, the first and second threshold voltages can be independently tuned by adjusting parameters of the first and second unipolar selectors.
    Type: Grant
    Filed: June 21, 2022
    Date of Patent: October 17, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Chih Lai, Chung-Te Lin, Min Cao, Randy Osborne
  • Publication number: 20230327006
    Abstract: A transistor includes a gate electrode, a ferroelectric layer, a channel layer, a gas impermeable layer, a dielectric layer, a source line and a bit line. The ferroelectric layer is disposed on the gate electrode. The channel layer is disposed on the ferroelectric layer. The gas impermeable layer is disposed in between the channel layer and the gate electrode, and in contact with the ferroelectric layer. The dielectric layer is surrounding the ferroelectric layer and the channel layer, and in contact with the gas impermeable layer. The source line and the bit line are embedded in the dielectric layer and connected to the channel layer.
    Type: Application
    Filed: June 16, 2023
    Publication date: October 12, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Wei Jiang, Sheng-Chih Lai, Feng-Cheng Yang, Chung-Te Lin
  • Publication number: 20230327024
    Abstract: A transistor including a channel layer including an oxide semiconductor material and methods of making the same. The transistor includes a channel layer having a first oxide semiconductor layer having a first oxygen concentration, a second oxide semiconductor layer having a second oxygen concentration and a third oxide semiconductor layer having a third oxygen concentration. The second oxide semiconductor layer is located between the first semiconductor oxide layer and the third oxide semiconductor layer. The second oxygen concentration is lower than the first oxygen concentration and the third oxygen concentration.
    Type: Application
    Filed: June 14, 2023
    Publication date: October 12, 2023
    Inventors: Kuo-Chang Chiang, Hung-Chang Sun, Sheng-Chih Lai, TsuChing Yang, Yu-Wei Jiang, Feng-Cheng Yang, Neil Quinn Murray
  • Publication number: 20230328996
    Abstract: In some embodiments, the present disclosure relates to a method for forming a memory device, including forming a plurality of word line stacks respectively including a plurality of word lines alternatingly stacked with a plurality of insulating layers over a semiconductor substrate, forming a data storage layer along opposing sidewalls of the word line stacks, forming a channel layer along opposing sidewalls of the data storage layer, forming an inner insulating layer between inner sidewalls of the channel layer and including a first dielectric material, performing an isolation cut process including a first etching process through the inner insulating layer and the channel layer to form an isolation opening, forming an isolation structure filling the isolation opening and including a second dielectric material, performing a second etching process through the inner insulating layer on opposing sides of the isolation structure to form source/drain openings, and forming source/drain contacts in the source/drain
    Type: Application
    Filed: June 14, 2023
    Publication date: October 12, 2023
    Inventors: Tsu Ching Yang, Feng-Cheng Yang, Sheng-Chih Lai, Yu-Wei Jiang, Kuo-Chang Chiang, Hung-Chang Sun, Chen-Jun Wu, Chung-Te Lin
  • Publication number: 20230328980
    Abstract: A memory device includes a stack of gate electrode layers and interconnect layers arranged over a substrate. A first memory cell that is arranged over the substrate includes a first source/drain conductive lines and a second source/drain conductive line extending vertically through the stack of gate electrode layers. A channel layer and a memory layer are arranged on outer sidewalls of the first and second source/drain conductive lines. A first barrier structure is arranged between the first and second source/drain conductive lines. A first protective liner layer separates the first barrier structure from each of the first and second source/drain conductive lines. A second barrier structure is arranged on an opposite side of the first source/drain conductive line and is spaced apart from the first source/drain conductive line by a second protective liner layer.
    Type: Application
    Filed: June 16, 2023
    Publication date: October 12, 2023
    Inventors: Tsu Ching Yang, Sheng-Chih Lai, Yu-Wei Jiang, Kuo-Chang Chiang, Hung-Chang Sun, Chen-Jun Wu, Feng-Cheng Yang, Chung-Te Lin
  • Patent number: 11785779
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a substrate and a stacked structure disposed on the substrate. The stacked structure includes multiple alternately stacked insulating layers and gate members. A core structure is disposed in the stacked structure. The core structure includes a memory layer, a channel member, a contact member, and a liner member. The channel member is disposed on the memory layer. The contact member is disposed on the channel member. The liner member surrounds a portion of the core structure. The present disclosure also provides a method for fabricating the semiconductor structure.
    Type: Grant
    Filed: June 11, 2021
    Date of Patent: October 10, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Wei Jiang, Sheng-Chih Lai, Feng-Cheng Yang, Chung-Te Lin
  • Publication number: 20230317848
    Abstract: A memory cell includes a ferroelectric (FE) material contacting a word line; and an oxide semiconductor (OS) layer contacting a source line and a bit line, wherein the FE material is disposed between the OS layer and the word line. The OS layer comprises: a first region adjacent the FE material, the first region having a first concentration of a semiconductor element; a second region adjacent the source line, the second region having a second concentration of the semiconductor element; and a third region between the first region and the second region, the third region having a third concentration of the semiconductor element, the third concentration is greater than the second concentration and less than the first concentration.
    Type: Application
    Filed: June 7, 2023
    Publication date: October 5, 2023
    Inventors: Kuo-Chang Chiang, Hung-Chang Sun, Sheng-Chih Lai, TsuChing Yang, Yu-Wei Jiang
  • Patent number: 11770935
    Abstract: Various embodiments of the present disclosure are directed towards a metal-ferroelectric-insulator-semiconductor (MFIS) memory device, as well as a method for forming the MFIS memory device. According to some embodiments of the MFIS memory device, a lower source/drain region and an upper source/drain region are vertically stacked. A semiconductor channel overlies the lower source/drain region and underlies the upper source/drain region. The semiconductor channel extends from the lower source/drain region to the upper source/drain region. A control gate electrode extends along a sidewall of the semiconductor channel and further along individual sidewalls of the lower and upper source/drain regions. A gate dielectric layer and a ferroelectric layer separate the control gate electrode from the semiconductor channel and the lower and upper source/drain regions.
    Type: Grant
    Filed: June 30, 2022
    Date of Patent: September 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Chih Lai, Chung-Te Lin