Patents by Inventor Chih-Ming Lai

Chih-Ming Lai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11092899
    Abstract: A method for manufacturing a lithographic mask for an integrated circuit includes performing an optical proximity correction (OPC) process to an integrated circuit mask layout to produce a corrected mask layout. The method further includes performing an inverse lithographic technology (ILT) process to the corrected mask layout to enhance the corrected mask layout to produce an OPC-ILT-enhanced mask layout. The method also includes performing an inverse lithographic technology (ILT) process to the corrected mask layout to enhance the corrected mask layout to produce an OPC-ILT-enhanced mask layout.
    Type: Grant
    Filed: November 27, 2019
    Date of Patent: August 17, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsu-Ting Huang, Tung-Chin Wu, Shih-Hsiang Lo, Chih-Ming Lai, Jue-Chin Yu, Ru-Gun Liu, Chin-Hsiang Lin
  • Publication number: 20210249267
    Abstract: A method of defining a pattern includes forming a plurality of cut shapes and a first plurality of openings within a first layer of a multi-layer hard mask to expose first portions of the second layer. A plurality of etch stops is formed by implanting an etch rate modifying species in a portion of the plurality of cut shapes. The first layer is directionally etched at the plurality of cut shapes such that the plurality of etch stops remain. A spacer layer is formed on the first layer and the first portions. A second plurality of openings is formed within the spacer layer to expose second portions of the second layer. The spacer layer is directionally etched to remove the spacer layer from sidewalls of the plurality of etch stops. Portions of the second layer exposed through the first plurality of openings and the second plurality of openings are etched.
    Type: Application
    Filed: April 26, 2021
    Publication date: August 12, 2021
    Inventors: Chih-Min HSIAO, Chien-Wen LAI, Shih-Chun HUANG, Yung-Sung YEN, Chih-Ming LAI, Ru-Gun LIU
  • Publication number: 20210248298
    Abstract: An IC structure includes a first plurality of metal segments extending in a first metal layer in a first direction and having a first pitch in a second direction perpendicular to the first direction, a second plurality of metal segments extending in a second metal layer in the second direction and having a second pitch in the first direction, and a third plurality of metal segments extending in a third metal layer in the first direction and having a third pitch in the second direction. The second metal layer is a next consecutive layer overlying the first metal layer, the third metal layer is a next consecutive layer overlying the second metal layer, and a ratio of the second pitch to the third pitch is greater than one.
    Type: Application
    Filed: April 1, 2021
    Publication date: August 12, 2021
    Inventors: Shih-Wei PENG, Wei-Cheng LIN, Chih-Ming LAI, Jiann-Tyng TZENG, Charles Chew-Yuen YOUNG
  • Patent number: 11088092
    Abstract: The present disclosure relates to a method of forming an integrated chip. The method may be performed by forming first and second source regions within a substrate. The first and second source regions are separated by a drain region along a first direction. First and second middle-end-of-the-line (MEOL) structures are formed over the substrate. The first and second MEOL structures have bottom surfaces that continually extend past edges of the first and second source regions, respectively, along a second direction perpendicular to the first direction. A power rail is formed that is electrically coupled to the first and second MEOL structures. The power rail has a first interconnect wire, a via rail on and in contact with the first interconnect wire, and a second interconnect wire on and in contact with the via rail. The via rail continuously extends along the first direction past the first and second MEOL structures.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: August 10, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kam-Tou Sio, Chih-Ming Lai, Chun-Kuang Chen, Chih-Liang Chen, Charles Chew-Yuen Young, Chi-Yeh Yu, Jiann-Tyng Tzeng, Ru-Gun Liu, Wen-Hao Chen
  • Patent number: 11089684
    Abstract: A motherboard module is adapted for an M.2 expansion card to configure. The M.2 expansion card includes a connecting end and a fixing end. An edge of the fixing end has a semi-circular hole. The motherboard module includes a motherboard body, a locking member, and an abutting member. The motherboard body includes an expansion card slot, a first fixing hole, and a second fixing hole. The locking member is detachably fixed in the first fixing hole. The abutting member has a first end and a second end. The first end is detachably fixed in the second fixing hole. When the M.2 expansion card is installed on the motherboard module, the abutting member is located between the M.2 expansion card and the motherboard body, and the second end abuts against the M.2 expansion card. An electronic device is further provided.
    Type: Grant
    Filed: August 27, 2019
    Date of Patent: August 10, 2021
    Assignee: GIGA-BYTE TECHNOLOGY CO., LTD.
    Inventors: Chih-Ming Lai, Chung-Wei Chiang, Tzu-Hsiang Huang, Yung-Shun Kao
  • Patent number: 11087994
    Abstract: An integrated circuit structure includes a first metal feature formed into a first dielectric layer, a second metal feature formed into a second dielectric layer, the second dielectric layer being disposed on said first dielectric layer, and a via connecting the first metal feature to the second metal feature, wherein a top portion of the via is offset from a bottom portion of the via.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: August 10, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Ming Chang, Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau, Chung-Ju Lee, Tien-I Bao, Shau-Lin Shue
  • Publication number: 20210242212
    Abstract: An integrated circuit includes a semiconductor substrate, an isolation region extending into, and overlying a bulk portion of, the semiconductor substrate, a buried conductive track comprising a portion in the isolation region, and a transistor having a source/drain region and a gate electrode. The source/drain region or the gate electrode is connected to the buried conductive track.
    Type: Application
    Filed: April 19, 2021
    Publication date: August 5, 2021
    Inventors: Pochun Wang, Ting-Wei Chiang, Chih-Ming Lai, Hui-Zhong Zhuang, Jung-Chan Yang, Ru-Gun Liu, Shih-Ming Chang, Ya-Chi Chou, Yi-Hsiung Lin, Yu-Xuan Huang, Guo-Huei Wu, Yu-Jung Chang
  • Publication number: 20210242130
    Abstract: Methods and devices are described herein for random cut patterning. A first metal line and a second metal line are formed within a cell of a substrate and extend in a vertical direction. A third metal line and a fourth metal line are formed within the cell and are perpendicular to the first metal line and the second metal line, respectively. A first circular region at one end of the first metal line is formed using a first patterning technique and a second circular region at one end of the second metal line is formed using a second patterning technique. The first circular region is laterally extended using a second patterning technique to form the third metal line and the second circular region is laterally extended using the second patterning technique to form the fourth metal line.
    Type: Application
    Filed: April 19, 2021
    Publication date: August 5, 2021
    Inventors: Shih-Wei Peng, Wei-Cheng Lin, Chih-Ming Lai, Jiann-Tyng Tzeng
  • Patent number: 11080454
    Abstract: A method of generating an integrated circuit (IC) layout diagram includes arranging first conductive feature layout patterns in a cell region. The first conductive feature layout patterns extend in a first direction, and the cell region has opposite first and second cell boundaries extending in a second direction. Second conductive feature layout patterns are arranged in the cell region and extending in the first direction. The first and second conductive feature layout patterns are alternately arranged. First cut feature layout patterns are arranged on the first cell boundary of the cell region and on ends of the first conductive feature layout patterns. One of the first cut feature layout patterns is offset from another one of the first cut feature layout patterns in the first direction. The IC layout diagram including the first and second conductive feature layout patterns and the first cut feature layout patterns is generated.
    Type: Grant
    Filed: April 16, 2020
    Date of Patent: August 3, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Wei Peng, Chih-Ming Lai, Jiann-Tyng Tzeng
  • Publication number: 20210227716
    Abstract: A heat dissipating assembly, adapted to be disposed at an M.2 expansion card and configured onto a main board with the M.2 expansion card, is provided. The heat dissipating assembly includes a first heat dissipating member and a first double-end screwing member. The first heat dissipating member is adapted to be disposed on the main board, located between the main board and the M.2 expansion card, and has at least one first through hole. The first double-end screwing member includes a first thread and a first nut having a first screw hole. The first thread passes through one of the at least one first through hole of the first heat dissipating member and is detachably fixed to the main board. The first nut presses against the first heat dissipating member.
    Type: Application
    Filed: July 2, 2020
    Publication date: July 22, 2021
    Applicant: GIGA-BYTE TECHNOLOGY CO.,LTD.
    Inventors: Chih-Ming Lai, Yung-Shun Kao, Tzu-Hsiang Huang
  • Publication number: 20210225831
    Abstract: A system that generates a layout diagram has a processor that implements a method, the method including: generating first and second conductor shapes; generating first, second and third cap shapes correspondingly over the first and second conductor shapes; arranging a corresponding one of the second conductor shapes to be interspersed between each pair of neighboring ones of the first conductor shapes; generating first cut patterns over selected portions of corresponding ones of the first cap shapes; and generating second cut patterns over selected portions of corresponding ones of the second cap shapes. In some circumstances, the first cut patterns are designated as selective for a first etch sensitivity corresponding to the first cap shapes; and the second cut patterns are designated as selective for a second etch sensitivity corresponding to the second cap shapes.
    Type: Application
    Filed: April 8, 2021
    Publication date: July 22, 2021
    Inventors: Kam-Tou SIO, Chih-Liang CHEN, Hui-Ting YANG, Shun Li CHEN, Ko-Bin KAO, Chih-Ming LAI, Ru-Gun LIU, Charles Chew-Yuen YOUNG
  • Publication number: 20210225649
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a first layer over a substrate. The first layer has a trench. The method includes forming a first spacer and a second spacer respectively over opposite inner walls of the trench. The first spacer and the second spacer are spaced apart from each other. The method includes removing a first portion of the first spacer to form a first gap in the first spacer, wherein a first part and a second part of the first spacer are spaced apart by the first gap, and the first gap communicates with the trench. The method includes forming a filling layer into the trench and the first gap to cover the first spacer and the second spacer. The filling layer, the first spacer, and the second spacer together form a strip structure. The method includes removing the first layer.
    Type: Application
    Filed: April 1, 2021
    Publication date: July 22, 2021
    Inventors: Chih-Ming LAI, Shih-Ming CHANG, Wei-Liang LIN, Chin-Yuan TSENG, Ru-Gun LIU
  • Publication number: 20210219471
    Abstract: A floated-type shielding mechanism including a cover, a shielding sheet, and a flexible conductor is provided. The cover is adapted to be fixed to a circuit board and covers a plurality of input/output (IO) ports of the circuit board. The shielding sheet is movably disposed at the cover and a back plate, and has a plurality of openings respectively corresponding to the IO ports. The flexible conductor deformably protrudes from an inner surface of the shielding sheet and is adapted to contact the IO ports. When the circuit board, the back plate, and the floated-type shielding mechanism are assembled into a case, the IO ports are exposed from a case opening and the flexible conductor is adapted to be deformed by pressing so that the shielding sheet presses against an inner wall surface around the case opening.
    Type: Application
    Filed: July 2, 2020
    Publication date: July 15, 2021
    Applicant: GIGA-BYTE TECHNOLOGY CO.,LTD.
    Inventors: Chih-Ming Lai, Yung-Shun Kao, Tzu-Hsiang Huang
  • Patent number: 11063005
    Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a first conductive interconnect wire extending in a first direction over a substrate. A second conductive interconnect wire is arranged over the first conductive interconnect wire. A via rail is configured to electrically couple the first conductive interconnect wire and the second conductive interconnect wire. The first conductive interconnect wire and the second conductive interconnect wire extend as continuous structures past one or more sides of the via rail.
    Type: Grant
    Filed: November 13, 2019
    Date of Patent: July 13, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kam-Tou Sio, Chih-Ming Lai, Chun-Kuang Chen, Chih-Liang Chen, Charles Chew-Yuen Young, Chi-Yeh Yu, Jiann-Tyng Tzeng, Ru-Gun Liu, Wen-Hao Chen
  • Publication number: 20210193504
    Abstract: A semiconductor device includes a buried metal line disposed in a semiconductor substrate, a first dielectric material on a first sidewall of the buried metal line and a second dielectric material on a second sidewall of the buried metal line, a first multiple fins disposed proximate the first sidewall of the buried metal line, a second multiple fins disposed proximate the second sidewall of the buried metal line, a first metal gate structure over the first multiple fins and over the buried metal line, wherein the first metal gate structure extends through the first dielectric material to contact the buried metal line, and a second metal gate structure over the second multiple fins and over the buried metal line.
    Type: Application
    Filed: December 9, 2020
    Publication date: June 24, 2021
    Inventors: Lei-Chun Chou, Chih-Liang Chen, Jiann-Tyng Tzeng, Chih-Ming Lai, Ru-Gun Liu, Charles Chew-Yuen Young
  • Patent number: 11043426
    Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a plurality of gate structures over a substrate, and forming a plurality of source and drain regions along opposing sides of the plurality of gate structures. A plurality of middle-of-the-line (MOL) structures are formed at locations laterally interleaved between the plurality of gate structures. The plurality of MOL structures are redefined by getting rid of a part but not all of one or more of the plurality of MOL structures. Redefining the plurality of MOL structures results in a plurality of MOL active structures arranged over the plurality of source and drain regions at an irregular pitch.
    Type: Grant
    Filed: September 22, 2019
    Date of Patent: June 22, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hui-Ting Yang, Chih-Ming Lai, Chun-Kuang Chen, Chih-Liang Chen, Charles Chew-Yuen Young, Jiann-Tyng Tzeng, Kam-Tou Sio, Meng-Hung Shen, Ru-Gun Liu, Wei-Cheng Lin
  • Publication number: 20210175081
    Abstract: The present disclosure provides a method of patterning a target material layer over a semiconductor substrate. The method includes steps of forming a spacer feature over the target material layer using a first sub-layout and performing a photolithographic patterning process using a second sub-layout to form a first feature. A portion of the first feature extends over the spacer feature. The method further includes steps of removing the portion of the first feature extending over the spacer feature and removing the spacer feature. Other methods and associated patterned semiconductor wafers are also provided herein.
    Type: Application
    Filed: February 22, 2021
    Publication date: June 10, 2021
    Inventors: Tsong-Hua Ou, Ken-Hsien Hsieh, Shih-Ming Chang, Wen-Chun Huang, Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau
  • Publication number: 20210166947
    Abstract: A method of manufacturing a semiconductor device includes depositing a first material on a substrate, depositing on the substrate a second material that has an etch selectivity different from an etch selectively of the first material, depositing a spacer material on the first and second material, and etching the substrate using the spacer material as an etch mask to form a fin under the first material and a fin under the second material.
    Type: Application
    Filed: February 9, 2021
    Publication date: June 3, 2021
    Inventors: Lei-Chun Chou, Chih-Liang Chen, Chih-Ming Lai, Charles Chew-Yuen Young, Chin-Yuan Tseng, Hsin-Chih Chen, Shi Ning Ju, Jiann-Tyng Tzeng, Kam-Tou Sio, Ru-Gun Liu, Wei-Cheng Lin, Wei-Liang Lin
  • Patent number: 11024579
    Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method includes forming a plurality of gate structures extending in a first direction over a substrate between a plurality of source/drain regions. A lower power rail is formed extending in a second direction perpendicular to the first direction. A first connection pin is formed to be electrically coupled to one of the plurality of source/drain regions and to the lower power rail. The first connection pin is formed according to a cut mask having cut regions that define opposing ends of the first connection pin. An upper power rail is formed directly over the lower power rail and extending in the second direction. The upper power rail is electrically coupled to the first connection pin.
    Type: Grant
    Filed: April 12, 2019
    Date of Patent: June 1, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shih-Wei Peng, Chih-Ming Lai, Chun-Kuang Chen, Chih-Liang Chen, Charles Chew-Yuen Young, Jiann-Tyng Tzeng, Kam-Tou Sio, Ru-Gun Liu, Yung-Sung Yen
  • Patent number: 11024580
    Abstract: Methods and devices are described herein for random cut patterning. A first metal line and a second metal line are formed within a cell of a substrate and extend in a vertical direction. A third metal line and a fourth metal line are formed within the cell and are perpendicular to the first metal line and the second metal line, respectively. A first circular region at one end of the first metal line is formed using a first patterning technique and a second circular region at one end of the second metal line is formed using a second patterning technique. The first circular region is laterally extended using a second patterning technique to form the third metal line and the second circular region is laterally extended using the second patterning technique to form the fourth metal line.
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: June 1, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Shih-Wei Peng, Wei-Cheng Lin, Chih-Ming Lai, Jiann-Tyng Tzeng