Patents by Inventor Chih-Yang Chang

Chih-Yang Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9425392
    Abstract: The present disclosure relates to a method of forming a resistive random access memory (RRAM) cell. The method forms a bottom electrode over a bottom electrode via. The method further forms a variable resistive dielectric layer over the bottom electrode, and a top electrode over the variable resistive dielectric layer. The method forms a top electrode via vertically extending outward from an upper surface of the top electrode at a position centered along a first axis that is laterally offset from a second axis centered upon the bottom electrode via. The top electrode via has a smaller width than the top electrode. Laterally offsetting the top electrode via from the bottom electrode via provides the top electrode via with good contact resistance.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: August 23, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Yang Chang, Wen-Ting Chu, Kuo-Chi Tu, Yu-Wen Liao, Hsia-Wei Chen, Chin-Chieh Yang, Sheng-Hung Shih, Wen-Chun You
  • Patent number: 9424917
    Abstract: Methods for operating memory are disclosed. A method includes applying a select word line voltage to a word line node of a first resistive random access memory (RRAM) cell; applying a first programming voltage to a source line node of the first RRAM cell; and setting the first RRAM cell comprising applying a second programming voltage to a bit line node of the first RRAM cell. The first programming voltage is greater than zero volts, and the second programming voltage is greater than the first programming voltage. Other disclosed methods include concurrently setting and resetting RRAM cells.
    Type: Grant
    Filed: March 7, 2013
    Date of Patent: August 23, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yang Chang, Wen-Ting Chu, Chia-Fu Lee
  • Publication number: 20160225988
    Abstract: A method includes forming a protection material over a conductive structure, an opening over the structure is partially filled with a first electrode material to form a first electrode; a resistance variable layer and a second electrode material are also formed in the opening. The second electrode material and the resistance variable layer are patterned to form a memory element. The method includes forming an interlayer dielectric over the memory element and the periphery region of the substrate and disposing contacts in the interlayer dielectric.
    Type: Application
    Filed: April 8, 2016
    Publication date: August 4, 2016
    Inventors: Kuo-Chi Tu, Chih-Yang Chang, Hsia-Wei Chen, Yu-Wen Liao, Chin-Chieh Yang, Wen-Ting Chu
  • Publication number: 20160196875
    Abstract: A device includes a first word line, a resistive random access memory (RRAM) cell, a second word line, and a charge pump circuit. The RRAM cell is coupled to the first word line and is not formed. The charge pump circuit is coupled to the second word line and is configured to provide a negative voltage. Methods of forming the device are also disclosed.
    Type: Application
    Filed: March 11, 2016
    Publication date: July 7, 2016
    Inventors: CHIH-YANG CHANG, WEN-TING CHU, YU-WEI TING, CHUN-YANG TSAI, KUO-CHING HUANG
  • Patent number: 9368722
    Abstract: One embodiment in the present disclosure provides a resistor in a resistive random access memory (RRAM). The resistor includes a first electrode; a resistive layer on the first electrode; an electric field enhancement array in the resistive layer; and a second electrode on the resistive layer. The electric field enhancement array includes a plurality of electric field enhancers arranged in a same plane. One embodiment in the present disclosure provides a method of manufacturing a resistor structure in an RRAM. The method comprises (1) forming a first resistive layer on a first electrode; (2) forming a metal layer on the resistive layer; (3) patterning the metal layer to form a metal dot array on the resistive layer; and (4) forming a second electrode on the metal dot array. The metal dot array comprises a plurality of metal dots, and a distance between adjacent metal dots is less than 40 nm.
    Type: Grant
    Filed: September 6, 2013
    Date of Patent: June 14, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Sheng-Hung Shih, Wen-Ting Chu, Kuo-Chi Tu, Yu-Wen Liao, Chih-Yang Chang, Chin-Chieh Yang, Hsia-Wei Chen, Wen-Chun You, Chih-Ming Chen
  • Publication number: 20160155499
    Abstract: A device is disclosed that includes memory cells, bit lines and a source line. The bit lines and the source line are electrically connected to the memory cells. In the I/O memory block, the source line and the bit lines are configured to provide logical data to the memory cells.
    Type: Application
    Filed: February 8, 2016
    Publication date: June 2, 2016
    Inventors: Chih-Yang CHANG, Chia-Fu LEE, Wen-Ting CHU, Yu-Der CHIH
  • Patent number: 9356072
    Abstract: A resistive random access memory (RRAM) cell comprises a transistor having a gate and a source/drain region, a bottom electrode having an upper surface coplanar with a top surface of the gate, a resistive material layer on the bottom electrode, a top electrode on the resistive material layer, and a conductive material connecting the bottom electrode to the source/drain region.
    Type: Grant
    Filed: April 13, 2015
    Date of Patent: May 31, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yang Chang, Wen-Ting Chu, Kuo-Chi Tu, Yu-Wen Liao, Hsia-Wei Chen, Chin-Chieh Yang
  • Patent number: 9349953
    Abstract: A semiconductor structure includes a memory region. A memory structure is disposed on the memory region. The memory structure includes a first electrode, a resistance variable layer, protection spacers and a second electrode. The first electrode has a top surface and a first outer sidewall surface on the memory region. The resistance variable layer has a first portion and a second portion. The first portion is disposed over the top surface of the first electrode and the second portion extends upwardly from the first portion. The protection spacers are disposed over a portion of the top surface of the first electrode and surround the second portion of the resistance variable layer. The protection spacers are configurable to protect at least one conductive path in the resistance variable layer. The protection spacers have a second outer sidewall surface substantially aligned with the first outer sidewall surface of the first electrode.
    Type: Grant
    Filed: May 16, 2013
    Date of Patent: May 24, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Chi Tu, Chih-Yang Chang, Hsia-Wei Chen, Yu-Wen Liao, Chin-Chieh Yang, Wen-Chun You, Sheng-Hung Shih, Wen-Ting Chu
  • Patent number: 9331277
    Abstract: The present disclosure provides a resistive random access memory (RRAM) cells and methods of making the same. The RRAM cell includes a transistor and an RRAM structure. The RRAM structure includes a bottom electrode having a via portion and a top portion, a resistive material layer on the bottom electrode having a width that is same as a width of the top portion of the bottom electrode; a capping layer over the bottom electrode; a spacer surrounding the capping layer; and, a top electrode on the capping layer having a smaller width than the resistive material layer. The RRAM cell further includes a conductive material connecting the top electrode of the RRAM structure to a metal layer.
    Type: Grant
    Filed: January 21, 2013
    Date of Patent: May 3, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsia-Wei Chen, Wen-Ting Chu, Kuo-Chi Tu, Chin-Chieh Yang, Chih-Yang Chang, Yu-Wen Liao
  • Publication number: 20160118583
    Abstract: A memory cell and method including a first electrode formed through a first opening in a first dielectric layer, a resistive layer formed on the first electrode, a spacing layer formed on the resistive layer, a second electrode formed on the resistive layer, and a second dielectric layer formed on the second electrode, the second dielectric layer including a second opening. The first dielectric layer formed on a substrate including a first metal layer. The first electrode and the resistive layer collectively include a first lip region that extends a first distance beyond the first opening. The second electrode and the second dielectric layer collectively include a second lip region that extends a second distance beyond the first opening. The spacing layer extends from the second distance to the first distance. The second electrode is coupled to a second metal layer using a via that extends through the second opening.
    Type: Application
    Filed: December 30, 2015
    Publication date: April 28, 2016
    Inventors: Chih-Yang Chang, Hsia-Wei Chen, Chin-Chieh Yang, Kuo-Chi Tu, Wen-Ting Chu, Yu-Wen Liao
  • Publication number: 20160118584
    Abstract: The present disclosure provides a resistive random access memory (RRAM) cells and methods of making the same. The RRAM cell includes a transistor and an RRAM structure. The RRAM structure includes a bottom electrode having a via portion and a non-planar portion, a resistive material layer conformally covering the non-planar portion of the bottom electrode; and, a top electrode on the resistive material layer. The via portion of the bottom electrode is embedded in a first RRAM stop layer. The non-planar portion of the bottom electrode has an apex and is centered above the via portion.
    Type: Application
    Filed: January 4, 2016
    Publication date: April 28, 2016
    Inventors: Chin-Chieh Yang, Wen-Ting Chu, Yu-Wen Liao, Chih-Yang Chang, Hsia-Wei Chen, Kuo-Chi Tu, Ching-Pei Hsieh
  • Publication number: 20160111156
    Abstract: A method includes applying a first voltage setting to a memory cell for a first period of time in response to a command for programming a first logical state to the memory cell, obtaining a first stored logical state of the memory cell after the applying the first voltage setting operation, and if the first stored logical state differs from the first logical state, applying a second voltage setting to the memory cell.
    Type: Application
    Filed: December 28, 2015
    Publication date: April 21, 2016
    Inventors: Yi-Chieh CHIU, Chih-Yang CHANG, Tassa YANG, Wen-Ting CHU
  • Patent number: 9312482
    Abstract: A semiconductor structure includes a memory region. A memory structure is disposed on the memory region. The memory structure includes a first electrode, a resistance variable layer, a protection material and a second electrode. The first electrode has a top surface on the memory region. The resistance variable layer has at least a first portion and a second portion. The first portion is disposed over the top surface of the first electrode and the second portion extends upwardly from the first portion. The protection material surrounds the second portion of the resistance variable layer. The protection material is configurable to protect at least one conductive path in the resistance variable layer. The second electrode is disposed over the resistance variable layer.
    Type: Grant
    Filed: May 16, 2013
    Date of Patent: April 12, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Chi Tu, Chih-Yang Chang, Hsia-Wei Chen, Yu-Wen Liao, Chin-Chieh Yang, Wen-Ting Chu
  • Patent number: 9286973
    Abstract: A device and method for forming resistive random access memory cell are provided. The method includes: providing a first voltage to a first word line connected to a first RRAM cell to form the first RRAM cell; and providing a negative voltage to a second word line connected to a second RRAM cell that shares a first source line and a first bit line with the first RRAM cell. An exemplary device includes: a first RRAM cell, a second RRAM cell, a first voltage source and a charge pump circuit. The first RRAM cell is connected to a first word line. The second RRAM cell is connected to a second word line. The first voltage source provides a first voltage to the first word line to form the first RRAM cell. The charge pump circuit provides a negative voltage to the second word line.
    Type: Grant
    Filed: September 24, 2013
    Date of Patent: March 15, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chih-Yang Chang, Wen-Ting Chu, Yu-Wei Ting, Chun-Yang Tsai, Kuo-Ching Huang
  • Patent number: 9286974
    Abstract: A device is disclosed that includes an I/O memory block. The I/O memory block includes memory cells, bit lines and a source line. The number of the formed bit lines is at least 4. The bit lines and the source line are electrically connected to the memory cells. In the I/O memory block, the source line and the bit lines are configured to provide logical data to the memory cells.
    Type: Grant
    Filed: October 23, 2013
    Date of Patent: March 15, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Yang Chang, Chia-Fu Lee, Wen-Ting Chu, Yue-Der Chih
  • Publication number: 20160035975
    Abstract: Some embodiments relate to an integrated circuit device. The integrated circuit device includes a resistive random access memory (RRAM) cell, which includes a top electrode and a bottom electrode that are separated by a RRAM dielectric layer. The top electrode of the RRAM cell has a recess in its upper surface. A via is disposed over the RRAM cell and contacts the top electrode within the recess.
    Type: Application
    Filed: October 12, 2015
    Publication date: February 4, 2016
    Inventors: Hsia-Wei Chen, Wen-Ting Chu, Kuo-Chi Tu, Chih-Yang Chang, Chin-Chieh Yang, Yu-Wen Liao, Wen-Chun You, Sheng-Hung Shih
  • Patent number: 9236570
    Abstract: A method for forming a resistive memory cell within a memory array includes forming a patterned stopping layer on a first metal layer formed on a substrate and forming a bottom electrode into features of the patterned stopping layer. The method further includes forming a resistive memory layer. The resistive memory layer includes a metal oxide layer and a top electrode layer. The method further includes patterning the resistive memory layer so that the top electrode layer acts as a bit line within the memory array and a top electrode of the resistive memory cell.
    Type: Grant
    Filed: February 9, 2015
    Date of Patent: January 12, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yang Chang, Wen-Ting Chu, Kuo-Chi Tu, Hsia-Wei Chen, Yu-Wen Liao, Chin-Chieh Yang
  • Patent number: 9231205
    Abstract: The present disclosure provides a resistive random access memory (RRAM) cells and methods of making the same. The RRAM cell includes a transistor and an RRAM structure. The RRAM structure includes a bottom electrode having a via portion and a non-planar portion, a resistive material layer conformally covering the non-planar portion of the bottom electrode; and, a top electrode on the resistive material layer. The via portion of the bottom electrode is embedded in a first RRAM stop layer. The non-planar portion of the bottom electrode has an apex and is centered above the via portion.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: January 5, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chin-Chieh Yang, Wen-Ting Chu, Yu-Wen Liao, Chih-Yang Chang, Hsia-Wei Chen, Kuo-Chi Tu, Ching-Pei Hsieh
  • Patent number: 9231197
    Abstract: A memory cell and method including a first electrode conformally formed through a first opening in a first dielectric layer, a resistive layer conformally formed on the first electrode, a spacing layer conformally formed on the resistive layer, a second electrode conformally formed on the resistive layer, and a second dielectric layer conformally formed on the second electrode, the second dielectric layer including a second opening. The first dielectric layer is formed on a substrate including a first metal layer. The first electrode and the resistive layer collectively include a first lip region that extends a first distance beyond the first opening. The second electrode and the second dielectric layer collectively include a second lip region that extends a second distance beyond the first opening. The spacing layer extends from the second distance to the first distance. The second electrode is coupled to a second metal layer using a via that extends through the second opening.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: January 5, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Chi Tu, Wen-Ting Chu, Yu-Wen Liao, Chih-Yang Chang, Hsia-Wei Chen, Chin-Chieh Yang
  • Publication number: 20150380063
    Abstract: A semiconductor arrangement and method of use are provided. A semiconductor arrangement includes a resistance random access memory (RRAM) component including a source line electrically coupled to a first active area. The source line of the RRAM comprises a first metal line in parallel with a second metal line, where both the first metal line and the second metal line are electrically coupled to the first active area. The RRAM component also includes a resistor electrically coupled to a second active area. A positive bias is applied to a selected RRAM component during at least one of a set operation or reset operation while a negative bias is concurrently applied to a non-selected RRAM component of the semiconductor arrangement.
    Type: Application
    Filed: June 29, 2014
    Publication date: December 31, 2015
    Inventors: Chih-Yang Chang, Wen-Ting Chu