Patents by Inventor Chuan-Fu Wang

Chuan-Fu Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230046058
    Abstract: A memory structure including a substrate, a first dielectric layer, a second dielectric layer, a charge storage layer, an oxide layer, and a conductive layer is provided. The first dielectric layer is disposed on the substrate. The second dielectric layer is disposed on the first dielectric layer. The charge storage layer is disposed between the first dielectric layer and the second dielectric layer. The oxide layer is located at two ends of the charge storage layer and is disposed between the first dielectric layer and the second dielectric layer. The conductive layer is disposed on the second dielectric layer.
    Type: Application
    Filed: November 3, 2022
    Publication date: February 16, 2023
    Applicant: United Microelectronics Corp.
    Inventors: Chia-Hung Chen, Yu-Huang Yeh, Chuan-Fu Wang
  • Patent number: 11581325
    Abstract: A memory structure including a substrate, a first dielectric layer, a second dielectric layer, a charge storage layer, an oxide layer, and a conductive layer is provided. The first dielectric layer is disposed on the substrate. The second dielectric layer is disposed on the first dielectric layer. The charge storage layer is disposed between the first dielectric layer and the second dielectric layer. The oxide layer is located at two ends of the charge storage layer and is disposed between the first dielectric layer and the second dielectric layer. The conductive layer is disposed on the second dielectric layer.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: February 14, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Hung Chen, Yu-Huang Yeh, Chuan-Fu Wang
  • Publication number: 20230027508
    Abstract: Provided are a resistive random access memory (RRAM) and a manufacturing method thereof. The resistive random access memory includes multiple unit structures disposed on a substrate. Each of the unit structures includes a first electrode, a first metal oxide layer, and a spacer. The first electrode is disposed on the substrate. The first metal oxide layer is disposed on the first electrode. The spacer is disposed on sidewalls of the first electrode and the first metal oxide layer. In addition, the resistive random access memory includes a second metal oxide layer and a second electrode. The second metal oxide layer is disposed on the unit structures and is connected to the unit structures. The second electrode is disposed on the second metal oxide layer.
    Type: Application
    Filed: August 6, 2021
    Publication date: January 26, 2023
    Applicant: United Microelectronics Corp.
    Inventors: Kai Jiun Chang, Chun-Hung Cheng, Chuan-Fu Wang
  • Publication number: 20230020564
    Abstract: Provided is a resistive random-access memory device, including a dielectric layer located on a substrate, a first electrode which is a column located on the dielectric layer, a second electrode covering a top surface and a sidewall of the first electrode, and a variable resistance layer sandwiched between the top surface of the first electrode and the second electrode and between the sidewall of the first electrode and the second electrode and located between the second electrode and the dielectric layer.
    Type: Application
    Filed: August 17, 2021
    Publication date: January 19, 2023
    Applicant: United Microelectronics Corp.
    Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
  • Publication number: 20230019178
    Abstract: A resistive random-access memory (RRAM) device, including a bottom electrode, a high work function layer, a resistive material layer and a top electrode sequentially stacked on a substrate, wherein the resistive material layer includes a bottom part and a top part, first spacers covering sidewalls of the top part and the top electrode, and second spacers covering sidewalls of the bottom part, thereby constituting a RRAM cell.
    Type: Application
    Filed: September 27, 2022
    Publication date: January 19, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Shu-Hung Yu, Chun-Hung Cheng, Chuan-Fu Wang
  • Patent number: 11538990
    Abstract: A method for forming a resistive random access memory structure. The resistive random access memory structure includes a bottom electrode; a variable resistance layer disposed on the bottom electrode; a top electrode disposed on the variable resistance layer; a protection layer surrounding the variable resistance layer, wherein a top surface of the protection layer and a top surface of the top electrode are coplanar; and an upper interconnect structure disposed on the top electrode, wherein the upper interconnect structure is electrically connected to the top electrode and directly contacts a sidewall of the protection layer.
    Type: Grant
    Filed: July 9, 2021
    Date of Patent: December 27, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
  • Publication number: 20220399495
    Abstract: A RRAM device includes a bottom electrode, a resistive material layer, a high work function layer, a top electrode, a hard mask and high work function sidewall parts. The bottom electrode, the resistive material layer, the high work function layer, the top electrode and the hard mask are sequentially stacked on a substrate. The high work function sidewall parts cover sidewalls of the top electrode and sidewalls of the hard mask, thereby constituting a RRAM cell. A method of forming said RRAM device is also provided.
    Type: Application
    Filed: July 19, 2021
    Publication date: December 15, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
  • Publication number: 20220359618
    Abstract: A semiconductor device includes a substrate having a memory region and a logic region. A first dielectric layer is disposed on the substrate. A first conductive structure and a second conductive structure are respectively formed in the first dielectric layer on the memory region and the logic region. A memory cell is formed on the first dielectric layer and directly contacts a top surface of the first conductive structure. A first cap layer continuously covers a top surface and a sidewall of the memory cell and directly contacts a top surface of the second conductive structure. A second dielectric layer is formed on the first cap layer. A third conductive structure penetrates through the second dielectric layer and the first cap layer to contact the memory cell.
    Type: Application
    Filed: July 21, 2022
    Publication date: November 10, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
  • Patent number: 11489114
    Abstract: A resistive random-access memory (RRAM) device includes a bottom electrode, a high work function layer, a resistive material layer, a top electrode and high work function spacers. The bottom electrode, the high work function layer, the resistive material layer and the top electrode are sequentially stacked on a substrate, wherein the resistive material layer includes a bottom part and a top part. The high work function spacers cover sidewalls of the bottom part, thereby constituting a RRAM cell. The present invention also provides a method of forming a RRAM device.
    Type: Grant
    Filed: March 25, 2021
    Date of Patent: November 1, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shu-Hung Yu, Chun-Hung Cheng, Chuan-Fu Wang
  • Publication number: 20220341451
    Abstract: A connecting apparatus includes a main body having a first half member and a second half member; the second ends of the two half members configured to open or close relatively to each other; an accommodating cavity formed between the first and second half members; a driving member and an actuating member installed inside the accommodating cavity; the driving member capable of driving the actuating member to move toward the second ends of the two half members to an opened position, thereby expanding the second ends of the two half members outward. The connecting apparatus is installed inside an elongated member, and latch portions on the second ends of the two half members are able to latch onto another elongated member to achieve a connection between elongated members.
    Type: Application
    Filed: April 23, 2021
    Publication date: October 27, 2022
    Inventor: Chuan-Fu WANG
  • Patent number: 11437436
    Abstract: A semiconductor device includes a substrate having a memory region and a logic region. A first dielectric layer is disposed on the substrate. A first conductive structure and a second conductive structure are formed in the first dielectric layer and respectively on the memory region and the logic region of the substrate. A memory cell is disposed on the first dielectric layer and directly contacts a top surface of the first conductive structure. A first cap layer is formed on the first dielectric layer and continuously covers a top surface and a sidewall of the memory cell and a top surface of the second conductive structure. A second dielectric layer is formed on the first cap. A third conductive structure is formed in the second dielectric layer and penetrates through the first cap layer to contacts the memory cell.
    Type: Grant
    Filed: October 29, 2020
    Date of Patent: September 6, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
  • Publication number: 20220271222
    Abstract: A resistive random-access memory (RRAM) device includes a bottom electrode, a high work function layer, a resistive material layer, a top electrode and high work function spacers. The bottom electrode, the high work function layer, the resistive material layer and the top electrode are sequentially stacked on a substrate, wherein the resistive material layer includes a bottom part and a top part. The high work function spacers cover sidewalls of the bottom part, thereby constituting a RRAM cell. The present invention also provides a method of forming a RRAM device.
    Type: Application
    Filed: March 25, 2021
    Publication date: August 25, 2022
    Inventors: Shu-Hung Yu, Chun-Hung Cheng, Chuan-Fu Wang
  • Publication number: 20220271223
    Abstract: A resistive random-access memory (RRAM) device includes a bottom electrode, a high work function layer, a resistive material layer, a top electrode and high work function spacers. The bottom electrode, the high work function layer, the resistive material layer and the top electrode are sequentially stacked on a substrate, wherein the resistive material layer includes a bottom part and a top part. The high work function spacers cover sidewalls of the bottom part, thereby constituting a RRAM cell. The present invention also provides a method of forming a RRAM device.
    Type: Application
    Filed: May 11, 2022
    Publication date: August 25, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Shu-Hung Yu, Chun-Hung Cheng, Chuan-Fu Wang
  • Publication number: 20220223612
    Abstract: A memory structure including a substrate, a first dielectric layer, a second dielectric layer, a charge storage layer, an oxide layer, and a conductive layer is provided. The first dielectric layer is disposed on the substrate. The second dielectric layer is disposed on the first dielectric layer. The charge storage layer is disposed between the first dielectric layer and the second dielectric layer. The oxide layer is located at two ends of the charge storage layer and is disposed between the first dielectric layer and the second dielectric layer. The conductive layer is disposed on the second dielectric layer.
    Type: Application
    Filed: March 15, 2021
    Publication date: July 14, 2022
    Applicant: United Microelectronics Corp.
    Inventors: Chia-Hung Chen, Yu-Huang Yeh, Chuan-Fu Wang
  • Publication number: 20220209112
    Abstract: A resistive random access memory (RRAM) structure includes a RRAM cell, spacers and a dielectric layer. The RRAM cell is disposed on a substrate. The spacers are disposed beside the RRAM cell, wherein widths of top surfaces of the spacers are larger than or equal to widths of bottom surfaces of the spacers. The dielectric layer blanketly covers the substrate and sandwiches the RRAM cell, wherein the spacers are located in the dielectric layer. A method for forming said resistive random access memory (RRAM) structure is also provided.
    Type: Application
    Filed: January 27, 2021
    Publication date: June 30, 2022
    Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
  • Patent number: 11348805
    Abstract: A semiconductor device includes a substrate, having a cell region and a core region. A plurality of gate structures is disposed on the substrate in the cell region. Each of the gate structures has a spacer on a sidewall of the gate structures. The gate structure includes a charge storage layer, on the substrate; a first polysilicon layer on the charge storage layer; and a mask layer on the first polysilicon layer, the mask layer comprising a first polishing stop layer on top. A preliminary material layer also with the first polishing stop layer on top is disposed on the substrate at the core region. A second polysilicon layer is filled between the gate structures at the cell region. A second polishing stop layer is on the second polysilicon layer. The first polishing stop layer and the second polishing stop layer are same material and same height.
    Type: Grant
    Filed: October 9, 2020
    Date of Patent: May 31, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Hung Chen, Yu-Huang Yeh, Chuan-Fu Wang, Chin-Chin Tsai
  • Publication number: 20220130903
    Abstract: An RRAM structure includes a substrate. The substrate is divided into a memory cell region and a logic device region. A metal plug is disposed within the memory cell region. An RRAM is disposed on and contacts the metal plug. The RRAM includes a top electrode, a variable resistive layer, and a bottom electrode. The variable resistive layer is disposed between the top electrode and the bottom electrode. The variable resistive layer includes a first bottom surface. The bottom electrode includes a first top surface. The first bottom surface and the first top surface are coplanar. The first bottom surface only overlaps and contacts part of the first top surface.
    Type: Application
    Filed: January 9, 2022
    Publication date: April 28, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
  • Publication number: 20220102429
    Abstract: A semiconductor device includes a substrate having a memory region and a logic region. A first dielectric layer is disposed on the substrate. A first conductive structure and a second conductive structure are formed in the first dielectric layer and respectively on the memory region and the logic region of the substrate. A memory cell is disposed on the first dielectric layer and directly contacts a top surface of the first conductive structure. A first cap layer is formed on the first dielectric layer and continuously covers a top surface and a sidewall of the memory cell and a top surface of the second conductive structure. A second dielectric layer is formed on the first cap. A third conductive structure is formed in the second dielectric layer and penetrates through the first cap layer to contacts the memory cell.
    Type: Application
    Filed: October 29, 2020
    Publication date: March 31, 2022
    Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
  • Patent number: 11257864
    Abstract: An RRAM structure includes a substrate. The substrate is divided into a memory cell region and a logic device region. A metal plug is disposed within the memory cell region. An RRAM is disposed on and contacts the metal plug. The RRAM includes a top electrode, a variable resistive layer, and a bottom electrode. The variable resistive layer is disposed between the top electrode and the bottom electrode. The variable resistive layer includes a first bottom surface. The bottom electrode includes a first top surface. The first bottom surface and the first top surface are coplanar. The first bottom surface only overlaps and contacts part of the first top surface.
    Type: Grant
    Filed: February 18, 2020
    Date of Patent: February 22, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
  • Patent number: 11233196
    Abstract: A memory device structure includes a substrate, a memory stacked structure, and a spacer. The memory stacked structure is formed on the substrate by stacking a first electrode layer, a memory material layer, and a second electrode layer. The memory material layer has a tilted sidewall, or the memory material layer and the first electrode layer have a tilted sidewall. The tilted sidewall is indented with respect to a sidewall of the second electrode layer. The spacer is disposed on the tilted sidewall.
    Type: Grant
    Filed: November 18, 2019
    Date of Patent: January 25, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang