Patents by Inventor Chuan-Fu Wang
Chuan-Fu Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20210336133Abstract: A method for forming a resistive random access memory structure. The resistive random access memory structure includes a bottom electrode; a variable resistance layer disposed on the bottom electrode; a top electrode disposed on the variable resistance layer; a protection layer surrounding the variable resistance layer, wherein a top surface of the protection layer and a top surface of the top electrode are coplanar; and an upper interconnect structure disposed on the top electrode, wherein the upper interconnect structure is electrically connected to the top electrode and directly contacts a sidewall of the protection layer.Type: ApplicationFiled: July 9, 2021Publication date: October 28, 2021Inventors: Wen-Jen WANG, Chun-Hung CHENG, Chuan-Fu WANG
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Patent number: 11094880Abstract: A resistive random access memory structure includes a bottom electrode; a variable resistance layer disposed on the bottom electrode; a top electrode disposed on the variable resistance layer; a protection layer surrounding the variable resistance layer, wherein a top surface of the protection layer and a top surface of the top electrode are coplanar; and an upper interconnect structure disposed on the top electrode, wherein the upper interconnect structure is electrically connected to the top electrode and directly contacts a sidewall of the protection layer.Type: GrantFiled: July 8, 2019Date of Patent: August 17, 2021Assignee: UNITED MICROELECTRONICS CORP.Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
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Publication number: 20210217813Abstract: An RRAM structure includes a substrate. The substrate is divided into a memory cell region and a logic device region. A metal plug is disposed within the memory cell region. An RRAM is disposed on and contacts the metal plug. The RRAM includes a top electrode, a variable resistive layer, and a bottom electrode. The variable resistive layer is disposed between the top electrode and the bottom electrode. The variable resistive layer includes a first bottom surface. The bottom electrode includes a first top surface. The first bottom surface and the first top surface are coplanar. The first bottom surface only overlaps and contacts part of the first top surface.Type: ApplicationFiled: February 18, 2020Publication date: July 15, 2021Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
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Publication number: 20210119124Abstract: A memory device structure includes a substrate, a memory stacked structure, and a spacer. The memory stacked structure is formed on the substrate by stacking a first electrode layer, a memory material layer, and a second electrode layer. The memory material layer has a tilted sidewall, or the memory material layer and the first electrode layer have a tilted sidewall. The tilted sidewall is indented with respect to a sidewall of the second electrode layer. The spacer is disposed on the tilted sidewall.Type: ApplicationFiled: November 18, 2019Publication date: April 22, 2021Applicant: United Microelectronics Corp.Inventors: WEN-JEN WANG, Chun-Hung Cheng, Chuan-Fu Wang
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Publication number: 20210028025Abstract: A semiconductor device includes a substrate, having a cell region and a core region. A plurality of gate structures is disposed on the substrate in the cell region. Each of the gate structures has a spacer on a sidewall of the gate structures. The gate structure includes a charge storage layer, on the substrate; a first polysilicon layer on the charge storage layer; and a mask layer on the first polysilicon layer, the mask layer comprising a first polishing stop layer on top. A preliminary material layer also with the first polishing stop layer on top is disposed on the substrate at the core region. A second polysilicon layer is filled between the gate structures at the cell region. A second polishing stop layer is on the second polysilicon layer. The first polishing stop layer and the second polishing stop layer are same material and same height.Type: ApplicationFiled: October 9, 2020Publication date: January 28, 2021Applicant: United Microelectronics Corp.Inventors: Chia-Hung Chen, Yu-Huang Yeh, Chuan-Fu Wang, Chin-Chin Tsai
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Publication number: 20210013403Abstract: A resistive random access memory structure includes a bottom electrode; a variable resistance layer disposed on the bottom electrode; a top electrode disposed on the variable resistance layer; a protection layer surrounding the variable resistance layer, wherein a top surface of the protection layer and a top surface of the top electrode are coplanar; and an upper interconnect structure disposed on the top electrode, wherein the upper interconnect structure is electrically connected to the top electrode and directly contacts a sidewall of the protection layer.Type: ApplicationFiled: July 8, 2019Publication date: January 14, 2021Inventors: Wen-Jen WANG, Chun-Hung CHENG, Chuan-Fu WANG
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Patent number: 10847378Abstract: A semiconductor device includes a substrate, having a cell region and a core region. A plurality of gate structures is disposed on the substrate in the cell region. Each of the gate structures has a spacer on a sidewall of the gate structures. The gate structure includes a charge storage layer, on the substrate; a first polysilicon layer on the charge storage layer; and a mask layer on the first polysilicon layer, the mask layer comprising a first polishing stop layer on top. A preliminary material layer also with the first polishing stop layer on top is disposed on the substrate at the core region. A second polysilicon layer is filled between the gate structures at the cell region. A second polishing stop layer is on the second polysilicon layer. The first polishing stop layer and the second polishing stop layer are same material and same height.Type: GrantFiled: November 1, 2018Date of Patent: November 24, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chia-Hung Chen, Yu-Huang Yeh, Chuan-Fu Wang, Chin-Chin Tsai
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Patent number: 10770565Abstract: A memory structure including a substrate, a first gate structure, a second gate structure, a first spacer, a second spacer, and a third spacer is provided. The first gate structure includes a first gate and a charge storage layer. The charge storage layer is disposed between the first gate and the substrate. The second gate structure is disposed on the substrate. The second gate structure includes a second gate. A height of the first gate is higher than a height of the second gate. The first spacer and the second spacer are respectively disposed on one sidewall and the other sidewall of the first gate structure. The first spacer is located between the first gate structure and the second gate structure. The third spacer is disposed on a sidewall of the first spacer and covers a portion of a top surface of the second gate.Type: GrantFiled: September 6, 2018Date of Patent: September 8, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hsueh-Chun Hsiao, Tzu-Yun Chang, Chuan-Fu Wang, Yu-Huang Yeh
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Patent number: 10707225Abstract: A method for fabricating a semiconductor memory device is disclosed. A substrate having a main surface is provided. A memory gate is formed on the main surface of the substrate. The memory has a first sidewall and a second sidewall opposite to the first sidewall. A control gate is formed in proximity to the memory gate. The control gate has a third sidewall directly facing the second sidewall, and a fourth sidewall opposite to the third sidewall. A gap is formed between the second sidewall of the memory gate and the third sidewall of the control gate. A first single spacer structure is formed on the first sidewall of the memory gate and a second single spacer structure on the fourth sidewall of the control gate. A gap-filling layer is formed to fill up the gap.Type: GrantFiled: February 17, 2020Date of Patent: July 7, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
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Publication number: 20200185399Abstract: A method for fabricating a semiconductor memory device is disclosed. A substrate having a main surface is provided. A memory gate is formed on the main surface of the substrate. The memory has a first sidewall and a second sidewall opposite to the first sidewall. A control gate is formed in proximity to the memory gate. The control gate has a third sidewall directly facing the second sidewall, and a fourth sidewall opposite to the third sidewall. A gap is formed between the second sidewall of the memory gate and the third sidewall of the control gate. A first single spacer structure is formed on the first sidewall of the memory gate and a second single spacer structure on the fourth sidewall of the control gate. A gap-filling layer is formed to fill up the gap.Type: ApplicationFiled: February 17, 2020Publication date: June 11, 2020Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
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Publication number: 20200144072Abstract: A semiconductor device includes a substrate, having a cell region and a core region. A plurality of gate structures is disposed on the substrate in the cell region. Each of the gate structures has a spacer on a sidewall of the gate structures. The gate structure includes a charge storage layer, on the substrate; a first polysilicon layer on the charge storage layer; and a mask layer on the first polysilicon layer, the mask layer comprising a first polishing stop layer on top. A preliminary material layer also with the first polishing stop layer on top is disposed on the substrate at the core region. A second polysilicon layer is filled between the gate structures at the cell region. A second polishing stop layer is on the second polysilicon layer. The first polishing stop layer and the second polishing stop layer are same material and same height.Type: ApplicationFiled: November 1, 2018Publication date: May 7, 2020Inventors: CHIA-HUNG CHEN, YU-HUANG YEH, CHUAN-FU WANG, CHIN-CHIN TSAI
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Patent number: 10608006Abstract: A semiconductor memory device includes a memory gate disposed on a main surface of a substrate. The memory has a first sidewall and a second sidewall opposite to the first sidewall. A control gate is in proximity to the memory gate. The control gate has a third sidewall directly facing the second sidewall, and a fourth sidewall opposite to the third sidewall. A gap is provided between the second sidewall of the memory gate and the third sidewall of the control gate. A first single spacer structure is disposed on the first sidewall of the memory gate. A second single spacer structure is disposed on the fourth sidewall of the control gate. A gap-filling layer is deposited into the gap and fills up the gap.Type: GrantFiled: July 18, 2018Date of Patent: March 31, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
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Publication number: 20200083344Abstract: A memory structure including a substrate, a first gate structure, a second gate structure, a first spacer, a second spacer, and a third spacer is provided. The first gate structure includes a first gate and a charge storage layer. The charge storage layer is disposed between the first gate and the substrate. The second gate structure is disposed on the substrate. The second gate structure includes a second gate. A height of the first gate is higher than a height of the second gate. The first spacer and the second spacer are respectively disposed on one sidewall and the other sidewall of the first gate structure. The first spacer is located between the first gate structure and the second gate structure. The third spacer is disposed on a sidewall of the first spacer and covers a portion of a top surface of the second gate.Type: ApplicationFiled: September 6, 2018Publication date: March 12, 2020Applicant: United Microelectronics Corp.Inventors: Hsueh-Chun Hsiao, Tzu-Yun Chang, Chuan-Fu Wang, Yu-Huang Yeh
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Publication number: 20200013793Abstract: A semiconductor memory device includes a memory gate disposed on a main surface of a substrate. The memory has a first sidewall and a second sidewall opposite to the first sidewall. A control gate is in proximity to the memory gate. The control gate has a third sidewall directly facing the second sidewall, and a fourth sidewall opposite to the third sidewall. A gap is provided between the second sidewall of the memory gate and the third sidewall of the control gate. A first single spacer structure is disposed on the first sidewall of the memory gate. A second single spacer structure is disposed on the fourth sidewall of the control gate. A gap-filling layer is deposited into the gap and fills up the gap.Type: ApplicationFiled: July 18, 2018Publication date: January 9, 2020Inventors: Wen-Jen Wang, Chun-Hung Cheng, Chuan-Fu Wang
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Patent number: 10340282Abstract: A semiconductor memory device includes a substrate, having a plurality of cell regions, wherein the cell regions are parallel and extending along a first direction. A plurality of STI structures is disposed in the substrate, extending along the first direction to isolate the cell regions, wherein the STI structures have a uniform height lower than the substrate in the cell regions. A selection gate line is extending along a second direction and crossing over the cell regions and the STI structures. A control gate line is adjacent to the selection gate line in parallel extending along the second direction and also crosses over the cell regions and the STI structures. The selection gate line and the control gate line together form a two-transistor (2T) memory cell.Type: GrantFiled: February 13, 2018Date of Patent: July 2, 2019Assignee: United Microelectronics Corp.Inventors: Shu-Hung Yu, Chun-Hung Cheng, Chuan-Fu Wang, An-Hsiu Cheng, Ping-Chia Shih, Chi-Cheng Huang, Kuo-Lung Li, Chia-Hui Huang, Chih-Yao Wang, Zi-Jun Liu, Chih-Hao Pan
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Patent number: 8413401Abstract: A modular door case for bathing enclosure includes two jambs, two frame members, and four fasten components. Each frame member has an accommodating portion at ends thereof, and at least one pair clasp holes respectively formed on upper and lower walls of the accommodating portion. Each fasten component has a base, at least one pair of clasp members, and at least one compelling bolt. A clasp protrusion is disposed at opposite distal end of each clasp member, so that space between the pair of clasp members, in normal state, shrinks from the joint ends to the distal ones. Each clasp protrusion of the clasp member contacts each clasp hole of the frame member, while the base inserts into each accommodating portion. The compelling bolt is between the pair of the clasp members, and further capable of moving towards the distal ends of the clasp members.Type: GrantFiled: July 25, 2011Date of Patent: April 9, 2013Assignee: Hou-Tzu Aluminum Co., Ltd.Inventor: Chuan-Fu Wang
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Publication number: 20130025232Abstract: A modular door case for bathing enclosure includes two jambs, top and bottom frame members, and four fasten components. Each frame member has an accommodating portion disposed at ends thereof, and at least one pair clasp holes respectively formed on upper and lower walls of the accommodating portion. Each fasten component has a base, at least one pair of clasp members above and below, and at least one compelling bolt. A clasp protrusion is disposed at opposite distal end of each clasp member, so that space between the pair of clasp members, in normal state, shrinks from the joint ends to the distal ones. Each clasp protrusion of the clasp member contacts each clasp hole of the frame member, while the base inserts into each accommodating portion. The compelling bolt is between the pair of the clasp members, and further capable of moving towards the distal ends of the clasp members to shove the clasp members for engaging with each clasp hole.Type: ApplicationFiled: July 25, 2011Publication date: January 31, 2013Inventor: Chuan-Fu WANG
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Patent number: 7465640Abstract: A DRAM cell and a method for fabricating the same are provided. The method includes: forming a trench in a substrate; forming a first capacitor dielectric layer on the surface of the trench; forming a conducting layer inside the trench; forming a second capacitor dielectric layer on the surface of the substrate and on the conducting layer, wherein the substrate around the first and second capacitor dielectric layers serves as a bottom electrode; forming a protruding electrode on the substrate, the protruding electrode being on the substrate around the trench and covering a junction between the trench and the substrate; and electrically connecting the protruding electrode and the conducting layer, the conducting layer and the protruding electrode being an upper electrode.Type: GrantFiled: May 4, 2005Date of Patent: December 16, 2008Assignee: United Microelectronics Corp.Inventors: Yung-Chang Lin, Chia-Wen Liang, Chuan-Fu Wang
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Patent number: 7335933Abstract: A DRAM cell and a method for fabricating the same are provided. The method includes: forming a trench in a substrate; forming a first capacitor dielectric layer on the surface of the trench; forming a conducting layer inside the trench; forming a second capacitor dielectric layer on the surface of the substrate and on the conducting layer, wherein the substrate around the first and second capacitor dielectric layers serves as a bottom electrode; forming a protruding electrode on the substrate, the protruding electrode being on the substrate around the trench and covering a junction between the trench and the substrate; and electrically connecting the protruding electrode and the conducting layer, the conducting layer and the protruding electrode being an upper electrode.Type: GrantFiled: November 20, 2003Date of Patent: February 26, 2008Assignee: United Microelectronics Corp.Inventors: Yung-Chang Lin, Chia-Wen Liang, Chuan-Fu Wang
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Patent number: 7193265Abstract: The single-poly EEPROM includes a first PMOS transistor serially connected to a second PMOS transistor. The first and second PMOS transistors are both formed on an N-well of a P type substrate. The first PMOS transistor includes a floating gate, a first P+ doped drain region and a first P+ doped source region. The second PMOS transistor includes a gate and a second P+ doped source region. The first P+ doped drain region of the first PMOS transistor serves as a drain of the second PMOS transistor. A diode is located in the P type substrate including a P-well and a N+ doped region. The floating gate overlaps with the N-well and extends to the N+ doped region. The overlapped region of the P-well and the N+ doped region junction beneath the floating gate serves as an avalanche injection point in the vicinity of the first PMOS transistor.Type: GrantFiled: March 16, 2005Date of Patent: March 20, 2007Assignee: United Microelectronics Corp.Inventors: Nai-Chen Peng, Shui-Chin Huang, Tzyh-Cheang Lee, Chuan Fu Wang, Sung-Bin Lin