Patents by Inventor Chun-Chieh Wang

Chun-Chieh Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200251574
    Abstract: An embodiment is a method of semiconductor processing. The method includes depositing a high-k gate dielectric layer over a semiconductor fin. A barrier layer is deposited over the high-k gate dielectric layer. A silicon passivation layer is deposited over the barrier layer. A nitrogen treatment is performed on the silicon passivation layer. A capping layer is deposited over the silicon passivation layer. The capping layer is annealed.
    Type: Application
    Filed: April 20, 2020
    Publication date: August 6, 2020
    Inventors: Chien-Shun Liao, Huai-Tei Yang, Chun-Chieh Wang, Yueh-Ching Pai, Chun-I Wu
  • Publication number: 20200251390
    Abstract: A method includes forming a gate stack of a transistor. The formation of the gate stack includes forming a silicon oxide layer on a semiconductor region, depositing a hafnium oxide layer over the silicon oxide layer, depositing a lanthanum oxide layer over the hafnium oxide layer, and depositing a work-function layer over the lanthanum oxide layer. Source/drain regions are formed on opposite sides of the gate stack.
    Type: Application
    Filed: April 20, 2020
    Publication date: August 6, 2020
    Inventors: Shahaji B. More, Zheng-Yang Pan, Shih-Chieh Chang, Chun-Chieh Wang
  • Publication number: 20200243683
    Abstract: A method for forming a semiconductor device is provided. The method includes forming a gate stack to partially cover a semiconductor structure. The method also includes forming a first semiconductor material over the semiconductor structure. The method further includes forming a second semiconductor material over the first semiconductor material. In addition, the method includes forming a third semiconductor material over the second semiconductor material. The first semiconductor material and the third semiconductor material together surround the second semiconductor material. The second semiconductor material has a greater dopant concentration than that of the first semiconductor material or that of the third semiconductor material.
    Type: Application
    Filed: April 17, 2020
    Publication date: July 30, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shahaji B. MORE, Zheng-Yang PAN, Chun-Chieh WANG, Cheng-Han LEE, Shih-Chieh CHANG
  • Patent number: 10714334
    Abstract: Generally, the present disclosure provides example embodiments relating to conductive features, such as metal contacts, vias, lines, etc., and methods for forming those conductive features. In a method embodiment, a dielectric layer is formed on a semiconductor substrate. The semiconductor substrate has a source/drain region. An opening is formed through the dielectric layer to the source/drain region. A silicide region is formed on the source/drain region and a barrier layer is formed in the opening along sidewalls of the dielectric layer by a same Plasma-Enhance Chemical Vapor Deposition (PECVD) process.
    Type: Grant
    Filed: January 2, 2018
    Date of Patent: July 14, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Cheng-Wei Chang, Huang-Yi Huang, Chun-chieh Wang, Yu-Ting Lin, Min-Hsiu Hung
  • Patent number: 10693950
    Abstract: A control method for network communication system including base station network management server comprises of obtaining an item of neighbor base station identification information of a neighbor base station by a first base station; providing the first base station identification information to a base station network management server by the first base station; obtaining a first base station neighbor information from the base station network management server by a first MEC platform; producing an item of first platform neighbor information by the first MEC platform; determining whether a request signal matches the first platform neighbor information after receiving the request signal from a second MEC platform; providing the first platform identification information to the second MEC platform while determining that the request signal matches the first platform neighbor information.
    Type: Grant
    Filed: December 15, 2017
    Date of Patent: June 23, 2020
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Yen-Chiu Chen, Chun-Chieh Wang
  • Publication number: 20200191157
    Abstract: A heat dissipation fan suited for being assembled in an electronic device is provided. The heat dissipation fan includes a hub and a plurality of fan blades disposed at and surrounding the hub. The fan blade has ductility and flexibility, and any two fan blades next to each other are in different thickness.
    Type: Application
    Filed: December 17, 2019
    Publication date: June 18, 2020
    Applicant: Acer Incorporated
    Inventors: Yu-Ming Lin, Wen-Neng Liao, Cheng-Wen Hsieh, Chun-Chieh Wang, Hung-Chi Chen, Yu-Shih Wang, Ming-Fei Tsai
  • Publication number: 20200183469
    Abstract: A heat dissipation module including a chamber, a first cooling fin, and a barrier part is provided. The chamber has an accommodating space, at least one inlet, and at least one outlet. The at least one inlet is disposed in a first side wall of the chamber and communicates with the accommodating space. The at least one outlet is disposed in a second side wall of the chamber away from the at least one inlet and communicates with the accommodating space. The first cooling fin is disposed in the accommodating space. The first cooling fin has a guiding surface which extends obliquely upward. The barrier part is disposed outside the guiding surface of the first cooling fin and has at least one through hole.
    Type: Application
    Filed: March 18, 2019
    Publication date: June 11, 2020
    Applicant: Acer Incorporated
    Inventors: Chun-Chieh Wang, Wen-Neng Liao, Cheng-Wen Hsieh, Wei-Chin Chen, Jau-Han Ke
  • Publication number: 20200182253
    Abstract: A fan blade includes an arch-shaped body, a connecting portion, at least one sheet and at least one reinforcement component. The arch-shaped body has a pressure bearing surface and a negative pressure surface opposite to the pressure bearing surface. The connecting portion is connected to a first end portion of the arch-shaped main body. The sheet is connected to the pressure bearing surface or the negative pressure surface. The reinforcement component is connected to the pressure bearing surface. An orthogonal projection of the sheet on the arch-shaped body and an orthogonal projection of the reinforcement component on the arch-shaped body are not overlapped with each other. A fan is also provided.
    Type: Application
    Filed: December 5, 2019
    Publication date: June 11, 2020
    Applicant: Acer Incorporated
    Inventors: Chun-Chieh Wang, Wen-Neng Liao, Cheng-Wen Hsieh, Yu-Ming Lin
  • Patent number: 10679995
    Abstract: A semiconductor device including a cap layer and a method for forming the same are disclosed. In an embodiment, a method includes epitaxially growing a first semiconductor layer over an N-well; etching the first semiconductor layer to form a first recess; epitaxially growing a second semiconductor layer filling the first recess; etching the second semiconductor layer, the first semiconductor layer, and the N-well to form a first fin; forming a shallow trench isolation region adjacent the first fin; and forming a cap layer over the first fin, the cap layer contacting the second semiconductor layer, forming the cap layer including performing a pre-clean process to remove a native oxide from exposed surfaces of the second semiconductor layer; performing a sublimation process to produce a first precursor; and performing a deposition process wherein material from the first precursor is deposited on the second semiconductor layer to form the cap layer.
    Type: Grant
    Filed: February 14, 2019
    Date of Patent: June 9, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Chieh Wang, Yueh-Ching Pai, Huai-Tei Yang
  • Patent number: 10672886
    Abstract: A method of forming a gate dielectric material includes forming a high-K dielectric material in a first region over a substrate, where forming the high-K dielectric material includes forming a first dielectric layer comprising hafnium over the substrate, and forming a second dielectric layer comprising lanthanum over the first dielectric layer.
    Type: Grant
    Filed: October 2, 2017
    Date of Patent: June 2, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shahaji B. More, Cheng-Han Lee, Zheng-Yang Pan, Shih-Chieh Chang, Chun-Chieh Wang
  • Publication number: 20200164439
    Abstract: A manufacturing method of a porous biomedical implant includes the steps of providing a supporter having a bearing surface, forming the porous biomedical implant on the bearing surface by additive manufacturing and removing the supporter after additive manufacturing. The porous biomedical implant includes a solid part and a porous part, the solid part is coupled to the bearing surface of the supporter and the porous part is coupled to the solid part. Particularly, the solid and porous parts are created in same layers by additive manufacturing.
    Type: Application
    Filed: November 27, 2018
    Publication date: May 28, 2020
    Inventors: Meng-Hsiu Tsai, Tai-I Hsu, Chun-Chieh Wang, Chia-Min Wei
  • Publication number: 20200152732
    Abstract: Provided is a capacitor structure including a substrate, a cup-shaped lower electrode, a top supporting layer, a capacitor dielectric layer, and an upper electrode. The cup-shaped lower electrode is located on the substrate. The top supporting layer surrounds the upper portion of the cup-shaped lower electrode. The top supporting layer includes a high-k material. Surfaces of the cup-shaped lower electrode and the top supporting layer are covered by the capacitor dielectric layer. A surface of the capacitor dielectric layer is covered by the upper electrode.
    Type: Application
    Filed: January 10, 2020
    Publication date: May 14, 2020
    Applicant: Winbond Electronics Corp.
    Inventors: CHEOL SOO PARK, Ming-Tang Chen, Chun-Chieh Wang
  • Publication number: 20200152742
    Abstract: The present disclosure describes an exemplary method to form p-type fully strained channel (PFSC) or an n-type fully strained channel (NFSC) that can mitigate epitaxial growth defects or structural deformations in the channel region due to processing. The exemplary method can include (i) two or more surface pre-clean treatment cycles with nitrogen trifluoride (NF3) and ammonia (NH3) plasma, followed by a thermal treatment; (ii) a prebake (anneal); and (iii) a silicon germanium epitaxial growth with a silicon seed layer, a silicon germanium seed layer, or a combination thereof.
    Type: Application
    Filed: January 13, 2020
    Publication date: May 14, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shahaji B. More, Huai-Tei YANG, Zheng-Yang PAN, Shih-Chieh CHANG, Chun-Chieh WANG, Cheng-Han Lee
  • Publication number: 20200135471
    Abstract: The present disclosure relates to a semiconductor device and a manufacturing method of fabricating a semiconductor structure. The method includes forming an opening in a substrate and depositing a conformal metal layer in the opening. The depositing includes performing one or more deposition cycles. The deposition includes flowing a first precursor into a deposition chamber and purging the deposition chamber to remove at least a portion of the first precursor. The method also includes flowing a second precursor into the deposition chamber to form a sublayer of the conformal metal layer and purging the deposition chamber to remove at least a portion of the second precursor. The method further includes performing a metallic halide etching (MHE) process that includes flowing a third precursor into the deposition chamber.
    Type: Application
    Filed: December 30, 2019
    Publication date: April 30, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Po-Yu LIN, Chi-Yu CHOU, Hsien-Ming LEE, Huai-Tei YANG, Chun-Chieh WANG, Yueh-Ching PAI, Chi-Jen YANG, Tsung-Ta TANG, Yi-Ting WANG
  • Publication number: 20200135543
    Abstract: Methods of manufacturing redistribution circuit structures are disclosed and one of the methods includes the following steps. A seed layer is formed over a die and an encapsulant encapsulating the die. A photoresist material is formed over the seed layer. The photoresist material is exposed through a phase shift mask to an I-line wavelength within an I-line stepper using a numerical aperture equal to or less than 0.18. The photoresist material is developed to form a photoresist layer including photoresist patterns and openings therebetween. A conductive material is formed in the openings. The photoresist patterns are removed to form conductive patterns. By using the conductive patterns as a mask, the seed layer is partially removed, to form seed layer patterns under the conductive patterns, wherein redistribution conductive patterns include the seed layer patterns and the conductive patterns respectively.
    Type: Application
    Filed: October 2, 2019
    Publication date: April 30, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Chieh Wang, Hung-Jui Kuo, Jaw-Jung Shin, Ming-Tan Lee
  • Patent number: 10636909
    Abstract: A method for forming a semiconductor device is provided. The method includes forming a gate stack to partially cover a semiconductor structure. The method also includes forming a first semiconductor material over the semiconductor structure. The method further includes forming a second semiconductor material over the first semiconductor material. In addition, the method includes forming a third semiconductor material over the second semiconductor material. The first semiconductor material and the third semiconductor material together surround the second semiconductor material. The second semiconductor material has a greater dopant concentration than that of the first semiconductor material or that of the third semiconductor material.
    Type: Grant
    Filed: December 24, 2018
    Date of Patent: April 28, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shahaji B. More, Zheng-Yang Pan, Chun-Chieh Wang, Cheng-Han Lee, Shih-Chieh Chang
  • Publication number: 20200126797
    Abstract: A method of forming an integrated circuit structure includes forming a gate dielectric on a wafer, forming a work function layer over the gate dielectric, depositing a capping layer over the work function layer, soaking the capping layer in a silicon-containing gas to form a silicon-containing layer, forming a blocking layer after the silicon-containing layer is formed, and forming a metal-filling region over the blocking layer.
    Type: Application
    Filed: March 1, 2019
    Publication date: April 23, 2020
    Inventors: Chun-Chieh Wang, Kuo-Jung Huang, Yueh-Ching Pai, Huai-Tei Yang
  • Patent number: 10629496
    Abstract: A method includes forming a gate stack of a transistor. The formation of the gate stack includes forming a silicon oxide layer on a semiconductor region, depositing a hafnium oxide layer over the silicon oxide layer, depositing a lanthanum oxide layer over the hafnium oxide layer, and depositing a work-function layer over the lanthanum oxide layer. Source/drain regions are formed on opposite sides of the gate stack.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: April 21, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shahaji B. More, Zheng-Yang Pan, Chun-Chieh Wang, Shih-Chieh Chang
  • Publication number: 20200105532
    Abstract: An embodiment is a method of semiconductor processing. The method includes depositing a high-k gate dielectric layer over a semiconductor fin. A barrier layer is deposited over the high-k gate dielectric layer. A silicon passivation layer is deposited over the barrier layer. A nitrogen treatment is performed on the silicon passivation layer. A capping layer is deposited over the silicon passivation layer. The capping layer is annealed.
    Type: Application
    Filed: September 28, 2018
    Publication date: April 2, 2020
    Inventors: Chien-Shun Liao, Huai-Tei Yang, Chun-Chieh Wang, Yueh-Ching Pai, Chun-I Wu
  • Publication number: 20200105534
    Abstract: A FinFET device and method of forming the same are disclosed. The method includes forming a gate dielectric layer and depositing a metal oxide layer over the gate dielectric layer. The method also includes annealing the gate dielectric layer and the metal oxide layer, causing ions to diffuse from the metal oxide layer to the gate dielectric layer to form a doped gate dielectric layer. The method also includes forming a work function layer over the doped gate dielectric layer, and forming a gate electrode over the work function layer.
    Type: Application
    Filed: December 3, 2019
    Publication date: April 2, 2020
    Inventors: Chun-Chieh Wang, Zheng-Yang Pan, Shih-Chieh Chang, Cheng-Han Lee, Huai-Tei Yang, Shahaji B. More