Patents by Inventor Chun-Lin Tsai

Chun-Lin Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9111849
    Abstract: Provided is a high voltage semiconductor device. The semiconductor device includes a doped well located in a substrate that is oppositely doped. The semiconductor device includes a dielectric structure located on the doped well. A portion of the doped well adjacent the dielectric structure has a higher doping concentration than a remaining portion of the doped well. The semiconductor device includes an elongate polysilicon structure located on the dielectric structure. The elongate polysilicon structure has a length L. The portion of the doped well adjacent the dielectric structure is electrically coupled to a segment of the elongate polysilicon structure that is located away from a midpoint of the elongate polysilicon structure by a predetermined distance that is measured along the elongate polysilicon structure. The predetermined distance is in a range from about 0*L to about 0.1*L.
    Type: Grant
    Filed: July 18, 2014
    Date of Patent: August 18, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
  • Patent number: 9111905
    Abstract: A high electron mobility transistor (HEMT) includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A carrier channel is located between the first III-V compound layer and the second III-V compound layer. A salicide source feature and a salicide drain feature are in contact with the first III-V compound layer through the second III-V compound layer. A gate electrode is disposed over a portion of the second III-V compound layer between the salicide source feature and the salicide drain feature.
    Type: Grant
    Filed: March 29, 2012
    Date of Patent: August 18, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Fu-Wei Yao, Chen-Ju Yu, King-Yuen Wong, Chun-Wei Hsu, Jiun-Lei Jerry Yu, Fu-Chih Yang, Chun Lin Tsai
  • Patent number: 9099556
    Abstract: A semiconductor device includes an active region having a channel region and at least a wing region adjoining the channel region under the gate dielectric layer. The at least one wing region may be two symmetrical wing regions across the channel region.
    Type: Grant
    Filed: August 19, 2011
    Date of Patent: August 4, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Liang Chu, Fei-Yuh Chen, Yi-Sheng Chen, Shih-Kuang Hsiao, Chun Lin Tsai, Kong-Beng Thei
  • Patent number: 9035379
    Abstract: A lateral DMOS transistor is provided with a source region, a drain region, and a conductive gate. The drain region is laterally separated from the conductive gate by a field oxide that encroaches beneath the conductive gate. The lateral DMOS transistor may be formed in a racetrack-like configuration with the conductive gate including a rectilinear portion and a curved portion and surrounded by the source region. Disposed between the conductive gate and the trapped drain is one or more levels of interlevel dielectric material. One or more groups of isolated conductor leads are formed in or on the dielectric layers and may be disposed at multiple device levels. The isolated conductive leads increase the breakdown voltage of the lateral DMOS transistor particularly in the curved regions where electric field crowding can otherwise degrade breakdown voltages.
    Type: Grant
    Filed: July 17, 2014
    Date of Patent: May 19, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ker Hsiao Huo, Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng
  • Publication number: 20150115328
    Abstract: A semiconductor structure comprises a first layer. The first layer comprises a first III-V semiconductor material. The semiconductor structure also comprises a second layer over the first layer. The second layer comprises a second III-V semiconductor material different from the first III-V semiconductor material. The semiconductor structure further comprises an insulating layer over the second layer. The insulating layer is patterned to expose a portion of the first layer. The exposed portion of the first layer comprises electrons of the second layer. The semiconductor structure additionally comprises an intermetallic compound over the exposed portion of the first layer.
    Type: Application
    Filed: December 31, 2014
    Publication date: April 30, 2015
    Inventors: Po-Chih CHEN, Jiun-Lei Jerry YU, Fu-Wei YAO, Chun-Wei HSU, Fu-Chih YANG, Chun Lin TSAI
  • Publication number: 20150072496
    Abstract: A method for fabricating a high voltage semiconductor transistor includes growing a first well region over a substrate having a first conductivity type, the first well region having a second type of conductivity. First, second and third portions of a second well region having the first type of conductivity are doped into the first well region. A first insulating layer is grown in and over the first well portion within the second well region. A second insulating layer is grown on the substrate over the third portion of the second well region. An anti-punch through region is doped into the first well region. A gate structure is formed on the substrate. A source region is formed in the first portion of the second well region on an opposite side of the gate structure from the first insulating layer. A drain region is formed in the first well region.
    Type: Application
    Filed: November 5, 2014
    Publication date: March 12, 2015
    Inventors: Ker Hsiao HUO, Chih-Chang CHENG, Ru-Yi SU, Jen-Hao YEH, Fu-Chih YANG, Chun Lin TSAI
  • Patent number: 8969913
    Abstract: A high voltage laterally diffused metal-oxide-semiconductor (HV LDMOS) device, particularly an insulated gate bipolar junction transistor (IGBT), and a method of making it are provided in this disclosure. The device includes a semiconductor substrate having at least one highly doped buried portion, a first doped well grown over the substrate, a gate structure formed on the first well, a source and a drain formed on either side of the gate structure, and a second doped well having a U-shaped cross section formed in the first well. A portion of the drain is formed over the first well outside of the second well.
    Type: Grant
    Filed: November 9, 2012
    Date of Patent: March 3, 2015
    Assignee: Taiwan Semiconductor Maufacturing Company, Ltd.
    Inventors: Ker Hsiao Huo, Chih-Chang Cheng, Ru-Yi Su, Jen-Hao Yeh, Fu-Chih Yang, Chun Lin Tsai
  • Patent number: 8946012
    Abstract: A method of forming a semiconductor structure having a substrate is disclosed. The semiconductor structure includes a first layer formed in contact with the substrate. The first layer made of a first III-V semiconductor material selected from GaN, GaAs and InP. A second layer is formed on the first layer. The second layer made of a second III-V semiconductor material selected from AlGaN, AlGaAs and AlInP. An interface is between the first layer and the second layer forms a carrier channel. An insulating layer is formed on the second layer. Portions of the insulating layer and the second layer are removed to expose a top surface of the first layer. A metal feature is formed in contact with the carrier channel and the metal feature is annealed to form a corresponding intermetallic compound.
    Type: Grant
    Filed: March 7, 2014
    Date of Patent: February 3, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Po-Chih Chen, Jiun-Lei Jerry Yu, Fu-Wei Yao, Chun-Wei Hsu, Fu-Chih Yang, Chun Lin Tsai
  • Patent number: 8895993
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a gallium nitride (GaN) layer on a substrate; an aluminum gallium nitride (AlGaN) layer disposed on the GaN layer; and a gate stack disposed on the AlGaN layer. The gate stack includes a III-V compound n-type doped layer; a III-V compound p-type doped layer adjacent the III-V compound n-type doped layer; and a metal layer formed over the III-V compound p-type doped layer and the III-V compound n-type doped layer.
    Type: Grant
    Filed: March 16, 2011
    Date of Patent: November 25, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Alexander Kalnitsky, Chih-Wen Hsiung, Chun Lin Tsai
  • Publication number: 20140327075
    Abstract: A lateral DMOS transistor is provided with a source region, a drain region, and a conductive gate. The drain region is laterally separated from the conductive gate by a field oxide that encroaches beneath the conductive gate. The lateral DMOS transistor may be formed in a racetrack-like configuration with the conductive gate including a rectilinear portion and a curved portion and surrounded by the source region. Disposed between the conductive gate and the trapped drain is one or more levels of interlevel dielectric material. One or more groups of isolated conductor leads are formed in or on the dielectric layers and may be disposed at multiple device levels. The isolated conductive leads increase the breakdown voltage of the lateral DMOS transistor particularly in the curved regions where electric field crowding can otherwise degrade breakdown voltages.
    Type: Application
    Filed: July 17, 2014
    Publication date: November 6, 2014
    Inventors: Ker Hsiao HUO, Ru-Yi SU, Fu-Chih YANG, Chun Lin TSAI, Chih-Chang CHENG
  • Publication number: 20140322889
    Abstract: Provided is a high voltage semiconductor device. The semiconductor device includes a doped well located in a substrate that is oppositely doped. The semiconductor device includes a dielectric structure located on the doped well. A portion of the doped well adjacent the dielectric structure has a higher doping concentration than a remaining portion of the doped well. The semiconductor device includes an elongate polysilicon structure located on the dielectric structure. The elongate polysilicon structure has a length L. The portion of the doped well adjacent the dielectric structure is electrically coupled to a segment of the elongate polysilicon structure that is located away from a midpoint of the elongate polysilicon structure by a predetermined distance that is measured along the elongate polysilicon structure. The predetermined distance is in a range from about 0*L to about 0.1*L.
    Type: Application
    Filed: July 18, 2014
    Publication date: October 30, 2014
    Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
  • Publication number: 20140235028
    Abstract: Provided is a high voltage semiconductor device that includes a PIN diode structure formed in a substrate. The PIN diode includes an intrinsic region located between a first doped well and a second doped well. The first and second doped wells have opposite doping polarities and greater doping concentration levels than the intrinsic region. The semiconductor device includes an insulating structure formed over a portion of the first doped well. The semiconductor device includes an elongate resistor device formed over the insulating structure. The resistor device has first and second portions disposed at opposite ends of the resistor device, respectively. The semiconductor device includes an interconnect structure formed over the resistor device. The interconnect structure includes: a first contact that is electrically coupled to the first doped well and a second contact that is electrically coupled to a third portion of the resistor located between the first and second portions.
    Type: Application
    Filed: February 13, 2014
    Publication date: August 21, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
  • Publication number: 20140231884
    Abstract: A device includes a p-well region, and a first High-Voltage N-type Well (HVNW) region and a second HVNW region contacting opposite edges of the p-well region. A P-type Buried Layer (PBL) has opposite edges in contact with the first HVNW region and the second HVNW region. An n-type buried well region is underlying the PBL. The p-well region and the n-type buried well region are in contact with a top surface and a bottom surface, respectively, of the PBL. The device further includes a n-well region in a top portion of the p-well region, an n-type source region in the n-well region, a gate stack overlapping a portion of the p-well region and a portion of the second HVNW region, and a channel region under the gate stack. The channel region interconnects the n-well region and the second HVNW region.
    Type: Application
    Filed: April 30, 2014
    Publication date: August 21, 2014
    Inventors: Jen-Hao Yeh, Chih-Chang Cheng, Ru-Yi Su, Ker Hsiao Huo, Po-Chih Chen, Fu-Chih Yang, Chun-Lin Tsai
  • Patent number: 8803232
    Abstract: A lateral DMOS transistor is provided with a source region, a drain region, and a conductive gate. The drain region is laterally separated from the conductive gate by a field oxide that encroaches beneath the conductive gate. The lateral DMOS transistor may be formed in a racetrack-like configuration with the conductive gate including a rectilinear portion and a curved portion and surrounded by the source region. Disposed between the conductive gate and the trapped drain is one or more levels of interlevel dielectric material. One or more groups of isolated conductor leads are formed in or on the dielectric layers and may be disposed at multiple device levels. The isolated conductive leads increase the breakdown voltage of the lateral DMOS transistor particularly in the curved regions where electric field crowding can otherwise degrade breakdown voltages.
    Type: Grant
    Filed: July 20, 2011
    Date of Patent: August 12, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ker Hsiao Huo, Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng
  • Patent number: 8786050
    Abstract: Provided is a high voltage semiconductor device. The semiconductor device includes a doped well located in a substrate that is oppositely doped. The semiconductor device includes a dielectric structure located on the doped well. A portion of the doped well adjacent the dielectric structure has a higher doping concentration than a remaining portion of the doped well. The semiconductor device includes an elongate polysilicon structure located on the dielectric structure. The elongate polysilicon structure has a length L. The portion of the doped well adjacent the dielectric structure is electrically coupled to a segment of the elongate polysilicon structure that is located away from a midpoint of the elongate polysilicon structure by a predetermined distance that is measured along the elongate polysilicon structure. The predetermined distance is in a range from about 0*L to about 0.1*L.
    Type: Grant
    Filed: May 4, 2011
    Date of Patent: July 22, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
  • Publication number: 20140197488
    Abstract: A method of forming a device includes forming a buried well region of a first dopant type in a substrate. A well region of the first dopant type is formed over the buried well region. A first well region of a second dopant type is formed between the well region of the first dopant type and the buried well region of the first dopant type. A second well region of the second dopant type is formed in the well region of the first dopant type. An isolation structure is formed at least partially in the well region of the first dopant type. A first gate electrode is formed over the isolation structure and the second well region of the second dopant type.
    Type: Application
    Filed: March 14, 2014
    Publication date: July 17, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Chang CHENG, Ruey-Hsin LIU, Chih-Wen YAO, Chia-Chin SHEN, Eric HUANG, Fu Chin YANG, Chun Lin TSAI, Chin Tuan HSIAO
  • Publication number: 20140187002
    Abstract: A method of forming a semiconductor structure having a substrate is disclosed. The semiconductor structure includes a first layer formed in contact with the substrate. The first layer made of a first III-V semiconductor material selected from GaN, GaAs and InP. A second layer is formed on the first layer. The second layer made of a second III-V semiconductor material selected from AlGaN, AlGaAs and AlInP. An interface is between the first layer and the second layer forms a carrier channel. An insulating layer is formed on the second layer. Portions of the insulating layer and the second layer are removed to expose a top surface of the first layer. A metal feature is formed in contact with the carrier channel and the metal feature is annealed to form a corresponding intermetallic compound.
    Type: Application
    Filed: March 7, 2014
    Publication date: July 3, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Chih CHEN, Jiun-Lei Jerry YU, Fu-Wei YAO, Chun-Wei HSU, Fu-Chih YANG, Chun Lin TSAI
  • Publication number: 20140139282
    Abstract: A device includes a buried well region and a first HVW region of the first conductivity, and an insulation region over the first HVW region. A drain region of the first conductivity type is disposed on a first side of the insulation region and in a top surface region of the first HVW region. A first well region and a second well region of a second conductivity type opposite the first conductivity type are on the second side of the insulation region. A second HVW region of the first conductivity type is disposed between the first and the second well regions, wherein the second HVW region is connected to the buried well region. A source region of the first conductivity type is in a top surface region of the second HVW region, wherein the source region, the drain region, and the buried well region form a JFET.
    Type: Application
    Filed: January 28, 2014
    Publication date: May 22, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jen-Hao Yeh, Chih-Chang Cheng, Ru-Yi Su, Ker Hsiao Huo, Po-Chih Chen, Fu-Chih Yang, Chun-Lin Tsai
  • Publication number: 20140110782
    Abstract: The present disclosure provides a method for fabricating a high-voltage semiconductor device. The method includes designating first, second, and third regions in a substrate. The first and second regions are regions where a source and a drain of the semiconductor device will be formed, respectively. The third region separates the first and second regions. The method further includes forming a slotted implant mask layer at least partially over the third region. The method also includes implanting dopants into the first, second, and third regions. The slotted implant mask layer protects portions of the third region therebelow during the implanting. The method further includes annealing the substrate in a manner to cause diffusion of the dopants in the third region.
    Type: Application
    Filed: January 13, 2014
    Publication date: April 24, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
  • Patent number: 8704312
    Abstract: A high voltage (HV) device includes a well region of a first dopant type disposed in a substrate. A first well region of a second dopant type is disposed in the well region of the first dopant type. An isolation structure is at least partially disposed in the well region of the first dopant type. A first gate electrode is disposed over the isolation structure and the first well region of the second dopant type. A second well region of the second dopant type is disposed in the well region of the first dopant type. The second well region of the second dopant type is spaced from the first well region of the second dopant type. A second gate electrode is disposed between and over the first well region of the second dopant type and the second well region of the second dopant type.
    Type: Grant
    Filed: January 5, 2010
    Date of Patent: April 22, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Chang Cheng, Ruey-Hsin Liu, Chih-Wen Yao, Chia-Chin Shen, Eric Huang, Fu Chin Yang, Chun Lin Tsai, Hsiao-Chin Tuan