Patents by Inventor Chun-Yuan Wu

Chun-Yuan Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130092954
    Abstract: A method for fabricating a strained channel semiconductor structure includes providing a substrate, forming at least one gate structure on said substrate, performing an etching process to form two recesses in said substrate at opposites sides of said gate structure, the sidewall of said recess being concaved in the direction to said gate structure and forming an included angle with respect to horizontal plane, and performing a pre-bake process to modify the recess such that said included angle between the sidewall of said recess and the horizontal plane is increased.
    Type: Application
    Filed: October 17, 2011
    Publication date: April 18, 2013
    Inventors: Chan-Lon Yang, Ted Ming-Lang Guo, Chin-I Liao, Chin-Cheng Chien, Shu-Yen Chan, Chun-Yuan Wu
  • Publication number: 20130089962
    Abstract: A semiconductor process includes the following steps. A substrate is provided. A gate structure is formed on the substrate. A spacer is formed on the substrate beside the gate structure. The spacer includes a first spacer and a second spacer located on the external surface of the first spacer. A first etching process is performed to etch and form at least a recess in the substrate beside the spacer and entirely remove the second spacer. The etching rate of the first etching process to the first spacer is lower than the etching rate of the first etching process to the second spacer. An epitaxial layer is formed in the recess.
    Type: Application
    Filed: October 11, 2011
    Publication date: April 11, 2013
    Inventors: Chung-Fu Chang, Shin-Chuan Huang, Yu-Hsiang Hung, Chia-Jong Liu, Pei-Yu Chou, Jyh-Shyang Jenq, Ling-Chun Chou, I-Chang Wang, Ching-Wen Hung, Ted Ming-Lang Guo, Chun-Yuan Wu
  • Publication number: 20130078780
    Abstract: A semiconductor process includes the following steps. An interlayer is formed on a substrate. A first metallic oxide layer is formed on the interlayer. A reduction process is performed to reduce the first metallic oxide layer into a metal layer. A high temperature process is performed to transform the metal layer to a second metallic oxide layer.
    Type: Application
    Filed: September 22, 2011
    Publication date: March 28, 2013
    Inventors: Chin-Fu Lin, Chih-Chien Liu, Teng-Chun Tsai, Chin-Cheng Chien, Chun-Yuan Wu
  • Publication number: 20130078778
    Abstract: A semiconductor process is described as follows. A plurality of dummy patterns is formed on a substrate. A mask material layer is conformally formed on the substrate, so as to cover the dummy patterns. The mask material layer has an etching rate different from that of the dummy patterns. A portion of the mask material layer is removed, so as to form a mask layer on respective sidewalls of each dummy pattern. An upper surface of the mask layer and an upper surface of each dummy pattern are substantially coplanar. The dummy patterns are removed. A portion of the substrate is removed using the mask layer as a mask, so as to form a plurality of fin structures and a plurality of trenches alternately arranged in the substrate. The mask layer is removed.
    Type: Application
    Filed: September 23, 2011
    Publication date: March 28, 2013
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chin-Cheng Chien, Chun-Yuan Wu, Chih-Chien Liu, Chin-Fu Lin, Teng-Chun Tsai
  • Patent number: 8405155
    Abstract: A semiconductor structure comprises a substrate, a gate structure, at least a source/drain region, a recess and an epitaxial layer. The substrate includes an up surface. A gate structure is located on the upper surface. The source/drain region is located within the substrate beside the gate structure. The recess is located within the source/drain region. The epitaxial layer fills the recess, and the cross-sectional profile of the epitaxial layer is an octagon.
    Type: Grant
    Filed: September 23, 2010
    Date of Patent: March 26, 2013
    Assignee: United Microelectronics Corp.
    Inventors: Chiu-Hsien Yeh, Chun-Yuan Wu, Chin-Cheng Chien
  • Publication number: 20130056827
    Abstract: A non-planar semiconductor structure includes a substrate, at least two fin-shaped structures, at least an isolation structure, and a plurality of epitaxial layers. The fin-shaped structures are located on the substrate. The isolation structure is located between the fin-shaped structures, and the isolation structure has a nitrogen-containing layer. The epitaxial layers respectively cover a part of the fin-shaped structures and are located on the nitrogen-containing layer. A non-planar semiconductor process is also provided for forming the semiconductor structure.
    Type: Application
    Filed: September 2, 2011
    Publication date: March 7, 2013
    Inventors: Shih-Hung Tsai, Chien-Ting Lin, Chin-Cheng Chien, Chin-Fu Lin, Chih-Chien Liu, Teng-Chun Tsai, Chun-Yuan Wu
  • Publication number: 20130045579
    Abstract: A method of forming a semiconductor device includes the following steps. A semiconductor substrate having a first strained silicon layer is provided. Then, an insulating region such as a shallow trench isolation (STI) is formed, where a depth of the insulating region is substantially larger than a depth of the first strained silicon layer. Subsequently, the first strained silicon layer is removed, and a second strained silicon layer is formed to substitute the first strained silicon layer.
    Type: Application
    Filed: August 17, 2011
    Publication date: February 21, 2013
    Inventors: Chin-Cheng Chien, Chun-Yuan Wu, Chih-Chien Liu, Chin-Fu Lin, Teng-Chun Tsai
  • Publication number: 20130037886
    Abstract: A semiconductor device includes a semiconductor substrate, at least a first fin structure, at least a second fin structure, a first gate, a second gate, a first source/drain region and a second source/drain region. The semiconductor substrate has at least a first active region to dispose the first fin structure and at least a second active region to dispose the second fin structure. The first/second fin structure partially overlapped by the first/second gate has a first/second stress, and the first stress and the second stress are different from each other. The first/second source/drain region is disposed in the first/second fin structure at two sides of the first/second gate.
    Type: Application
    Filed: August 10, 2011
    Publication date: February 14, 2013
    Inventors: Teng-Chun Tsai, Chun-Yuan Wu, Chih-Chien Liu, Chin-Cheng Chien, Chin-Fu Lin
  • Patent number: 8361854
    Abstract: A fin field-effect transistor structure includes a substrate, a fin channel and a high-k metal gate. The high-k metal gate is formed on the substrate and the fin channel. A process of manufacturing the fin field-effect transistor structure includes the following steps. Firstly, a polysilicon pseudo gate structure is formed on the substrate and a surface of the fin channel. By using the polysilicon pseudo gate structure as a mask, a source/drain region is formed in the fin channel. After the polysilicon pseudo gate structure is removed, a high-k dielectric layer and a metal gate layer are successively formed. Afterwards, a planarization process is performed on the substrate having the metal gate layer until the first dielectric layer is exposed, so that a high-k metal gate is produced.
    Type: Grant
    Filed: March 21, 2011
    Date of Patent: January 29, 2013
    Assignee: United Microelectronics Corp.
    Inventors: Teng-Chun Tsai, Chun-Yuan Wu, Chin-Fu Lin, Chih-Chien Liu, Chin-Cheng Chien
  • Publication number: 20130020648
    Abstract: A semiconductor device is disclosed. The semiconductor device includes: a substrate; a metal-oxide semiconductor (MOS) transistor disposed in the substrate; and a shallow trench isolation (STI) disposed in the substrate and around the MOS transistor, in which the STI comprises a stress material.
    Type: Application
    Filed: July 19, 2011
    Publication date: January 24, 2013
    Inventors: Chun-Yuan Wu, Chih-Chien Liu
  • Publication number: 20130001707
    Abstract: A fabricating method of a MOS transistor includes the following steps. A substrate is provided. A gate dielectric layer is formed on the substrate. A nitridation process containing nitrogen plasma and helium gas is performed to nitride the gate dielectric layer. A fin field-effect transistor and fabrication method thereof are also provided.
    Type: Application
    Filed: June 30, 2011
    Publication date: January 3, 2013
    Inventors: Chien-Liang Lin, Ying-Wei Yen, Yu-Ren Wang, Chan-Lon Yang, Chin-Cheng Chien, Chun-Yuan Wu, Chih-Chien Liu, Chin-Fu Lin, Teng-Chun Tsai
  • Publication number: 20120319198
    Abstract: A semiconductor device including a substrate, a spacer and a high-k dielectric layer having a U-shape profile is provided. The spacer located on the substrate surrounds and defines a trench. The high-k dielectric layer having a U-shape profile is located in the trench, and the high-k dielectric layer having a U-shape profile exposes an upper portion of the sidewalls of the trench.
    Type: Application
    Filed: June 16, 2011
    Publication date: December 20, 2012
    Inventors: Chin-Cheng Chien, Chun-Yuan Wu, Chih-Chien Liu, Chin-Fu Lin, Teng-Chun Tsai
  • Publication number: 20120322260
    Abstract: A through-silicon via forming method includes the following steps. Firstly, a semiconductor substrate is provided. Then, a through-silicon via conductor is formed in the semiconductor substrate, and a topside of the through-silicon via conductor is allowed to be at the same level as a surface of the semiconductor substrate. Afterwards, a portion of the through-silicon via conductor is removed, and the topside of the through-silicon via conductor is allowed to be at a level lower than the surface of the semiconductor substrate, so that a recess is formed over the through-silicon via conductor.
    Type: Application
    Filed: June 16, 2011
    Publication date: December 20, 2012
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Teng-Chun Tsai, Chun-Yuan Wu, Chin-Fu Lin, Chih-Chien Liu, Chin-Cheng Chien
  • Patent number: 8329547
    Abstract: A semiconductor process is disclosed. The semiconductor process includes the steps of: providing a substrate having a specific area defined thereon; and performing an etch process by using an etchant comprising H2O2 to etch the specific area for forming a recess.
    Type: Grant
    Filed: July 22, 2010
    Date of Patent: December 11, 2012
    Assignee: United Microelectronics Corp.
    Inventors: Chun-Yuan Wu, Chiu-Hsien Yeh, Chin-Cheng Chien
  • Patent number: 8324118
    Abstract: A manufacturing method of a metal gate structure includes providing a substrate having at least a first metal oxide layer formed thereon, and transferring the surface of the first metal oxide layer into a second metal oxide layer. The first metal oxide layer includes a metal oxide (M1Ox) of a first metal (M1) and the second metal oxide layer includes a metal oxide ((M1M2Oy) of the first metal and a second metal (M2).
    Type: Grant
    Filed: March 28, 2011
    Date of Patent: December 4, 2012
    Assignee: United Microelectronics Corp.
    Inventors: Chih-Chien Liu, Chun-Yuan Wu, Chin-Fu Lin, Teng-Chun Tsai, Chin-Cheng Chien
  • Patent number: 8324059
    Abstract: A method of fabricating a semiconductor structure, in which after an etching process is performed to form at least one recess within a semiconductor beside a gate structure, a thermal treatment is performed on the recess in a gas atmosphere including an inert gas before a silicon-containing epitaxial layer is formed in the recess through an epitaxy growth process.
    Type: Grant
    Filed: April 25, 2011
    Date of Patent: December 4, 2012
    Assignee: United Microelectronics Corp.
    Inventors: Ted Ming-Lang Guo, Chin-Cheng Chien, Shu-Yen Chan, Chan-Lon Yang, Chun-Yuan Wu
  • Publication number: 20120273902
    Abstract: A gate stack structure with an etch stop layer is provided. The gate stack structure is formed over a substrate. A spacer is formed on a sidewall of the gate stack structure. The gate stack structure includes a gate dielectric layer, a barrier layer, a repair layer and the etch stop layer. The gate dielectric layer is formed on the substrate. The barrier layer is formed on the gate dielectric layer. The barrier layer and an inner sidewall of the spacer collectively define a trench. The repair layer is formed on the barrier layer and an inner wall of the trench. The etch stop layer is formed on the repair layer.
    Type: Application
    Filed: April 27, 2011
    Publication date: November 1, 2012
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Kun-Hsien LIN, Hsin-Fu Huang, Chi-Mao Hsu, Chin-Fu Lin, Chun-Yuan Wu
  • Publication number: 20120270377
    Abstract: A method of fabricating a semiconductor structure, in which after an etching process is performed to form at least one recess within a semiconductor beside a gate structure, a thermal treatment is performed on the recess in a gas atmosphere including an inert gas before a silicon-containing epitaxial layer is formed in the recess through an epitaxy growth process.
    Type: Application
    Filed: April 25, 2011
    Publication date: October 25, 2012
    Inventors: Ted Ming-Lang Guo, Chin-Cheng Chien, Shu-Yen Chan, Chan-Lon Yang, Chun-Yuan Wu
  • Publication number: 20120264306
    Abstract: The present invention provides a method of forming an opening on a semiconductor substrate. First, a substrate is provided. Then a dielectric layer and a cap layer are formed on the substrate. A ratio of a thickness of the dielectric layer and a thickness of the cap layer is substantially between 15 and 1.5. Next, a patterned boron nitride layer is formed on the cap layer. Lastly, an etching process is performed by using the patterned hard mask as a mask to etch the cap layer and the dielectric layer so as to form an opening in the cap layer and the dielectric layer.
    Type: Application
    Filed: April 15, 2011
    Publication date: October 18, 2012
    Inventors: Chun-Yuan Wu, Chih-Chien Liu, Chin-Fu Lin, Po-Chun Chen
  • Publication number: 20120248507
    Abstract: A manufacturing method of a metal gate structure includes providing a substrate having at least a first metal oxide layer formed thereon, and transferring the surface of the first metal oxide layer into a second metal oxide layer. The first metal oxide layer includes a metal oxide (M1Ox) of a first metal (M1) and the second metal oxide layer includes a metal oxide ((M1M2Oy) of the first metal and a second metal (M2).
    Type: Application
    Filed: March 28, 2011
    Publication date: October 4, 2012
    Inventors: Chih-Chien Liu, Chun-Yuan Wu, Chin-Fu Lin, Teng-Chun Tsai, Chin-Cheng Chien