Patents by Inventor Claire Fenouillet-Beranger

Claire Fenouillet-Beranger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170256531
    Abstract: A protection device for protecting an IC against electrostatic discharge includes a buried insulant layer having a thickness that is no greater than fifty nanometers with bipolar transistors arranged thereon, one of which is NPN and the other of which is PNP. A base of one merges with a collector of the other. The transistors selectively conduct a discharge current between electrodes. A first semiconductor ground plane under the buried insulant layer is capable of being electrically biased and extends underneath the base of the first bipolar transistor. The ground plane and a base of one transistor have the same doping. However, its dopant density is at least tenfold greater than that of the base.
    Type: Application
    Filed: May 10, 2017
    Publication date: September 7, 2017
    Inventors: Yohann Solaro, Sorin Cristoloveanu, Claire Fenouillet-Beranger, Pascal Fonteneau
  • Publication number: 20170179114
    Abstract: This method comprises the following steps: a) providing a first structure successively comprising a first substrate, a first electronic device, and a first dielectric layer; a second structure successively comprising a second substrate, an active layer, a second dielectric layer, and a polycrystalline semiconductor layer, the active layer being designed to form a second electronic device; b) bombarding the polycrystalline semiconductor layer by a beam of species configured to form an amorphous part and to preserve a superficial polycrystalline part; c) bonding the first and second structures; d) removing the second substrate of the second structure; e) introducing dopants into the amorphous part, through the exposed active layer; f) thermally activating the dopants by recrystallization of the amorphous part.
    Type: Application
    Filed: December 22, 2016
    Publication date: June 22, 2017
    Applicant: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Benoit MATHIEU, Claire FENOUILLET-BERANGER
  • Publication number: 20170178950
    Abstract: This method includes the following steps: a) providing a first structure successively including a substrate, an electronic device, a dielectric layer, and a first semiconductor layer; b) providing a second structure successively including a substrate, an active layer, a dielectric layer, and a second semiconductor layer, the active layer being designed to form an electronic device; c) bonding the first and second structures by direct bonding between the first and second semiconductor layers so as to form a bonding interface; d) removing the substrate of the second structure so as to expose the active layer; e) introducing dopants into the first and second semiconductor layers so as to form a ground plane.
    Type: Application
    Filed: December 22, 2016
    Publication date: June 22, 2017
    Applicant: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Perrine BATUDE, Laurent BRUNET, Claire FENOUILLET-BERANGER, Frank FOURNEL
  • Publication number: 20170162788
    Abstract: Method for producing a device with transistors distributed over several levels and provided with a resistive memory cell having an electrode formed of a conductor portion belonging to a connection element connected to a transistor of a given level.
    Type: Application
    Filed: November 30, 2016
    Publication date: June 8, 2017
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Claire FENOUILLET-BERANGER, Elisa VIANELLO
  • Patent number: 9666577
    Abstract: The invention relates to an IC with an electrostatic discharge protection device. There is a buried insulant layer 50 nm or less in thickness and first and second bipolar transistors on the insulant layer, one being an npn transistor and the other a pnp transistor. The base of the first transistor is merged with the collector of the second transistor and the base of the second transistor is merged with the collector of the first transistor. The first and second bipolar transistors are configured to selectively conduct a discharge current between two electrodes of the protection device. There is a first semiconductor ground plane under the insulant layer, being electrically biased, extending until it is plumb with the base of the first bipolar transistor, exhibiting a first type of doping identical to that of the base of the first bipolar transistor with a doping density at least ten times greater.
    Type: Grant
    Filed: August 4, 2014
    Date of Patent: May 30, 2017
    Assignees: Commissariat à l'énergie atomique et aux énergies alternatives, STMicroelectronics SA, Centre National De La Recherche Scientifique
    Inventors: Yohann Solaro, Sorin Cristoloveanu, Claire Fenouillet-Beranger, Pascal Fonteneau
  • Patent number: 9653476
    Abstract: An integrated circuit includes a transistor, an UTBOX buried insulating layer disposed under it and a ground plane disposed under the layer. A well is disposed under the plane and a first trench is at the periphery of the transistor and extends through the layer into the well. There is a substrate under the well and a p-n diode on a side of the transistor. The diode comprises first and second zones of opposite doping and the first zone is configured for electrical connection to a first electrode of the transistor. The first and second zones are coplanar with the plane and a second trench for separating the first and second zones. The second trench extends through the layer into the plane to a depth less than an interface between the plane and the well. There is a third zone under the second trench forming a junction between the zones.
    Type: Grant
    Filed: July 2, 2013
    Date of Patent: May 16, 2017
    Assignees: Commissariate a l'energie atomique et aux energies alternatives, STMicroelectronics SA
    Inventors: Claire Fenouillet-Beranger, Pascal Fonteneau
  • Patent number: 9646846
    Abstract: A method for producing a multilevel microelectronic structure includes formation of a first layer, production of at least one second layer at least partially covering the first layer, and production of at least one microelectronic pattern on or in the second layer. The second layer is formed so as to generate a mechanical stress in it, the first layer forms, for the second layer, a support preventing relaxation of the stress. After the production of at least one microelectronic pattern, the method includes at least elimination of at least part of the first layer, thus making it possible to relax at least part of the mechanical stress on the second layer so that at least a portion of the second layer covering the eliminated part of the first layer moves, and fixing the moved portion of the second layer to a structure part that has remained fixed.
    Type: Grant
    Filed: September 25, 2015
    Date of Patent: May 9, 2017
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Philippe Coronel, Claire Fenouillet-Beranger
  • Publication number: 20170117186
    Abstract: Fabrication of an integrated circuit comprising: at least one first transistor made at least partially in a first semiconducting layer, at least one second transistor made at least partially in a second semiconducting layer formed above the first semiconducting layer, an insulating layer formed between the first transistor and the second transistor, one or several connection elements passing through the insulating layer between the first and the second transistor, at least one connection element being connected to the first and/or the second transistor and being based on a metal—semiconductor alloy.
    Type: Application
    Filed: October 26, 2016
    Publication date: April 27, 2017
    Applicant: Commissariat a L'Energie Atomique et aux Energies Alternatives
    Inventors: Claire FENOUILLET-BERANGER, Fabrice NEMOUCHI
  • Publication number: 20160372375
    Abstract: Integrated circuit equipped with at least two levels of superimposed transistors, comprising: a first transistor at a first level, a first plug, a second plug and a third plug, connected to a drain region, a gate and a source region respectively of the first transistor, the first plug, the second plug and the third plug passing through an insulating layer covering the first transistor a second transistor equipped with an active zone defined in a semi-conducting layer arranged at one end of the plugs and facing the first transistor, the transistor comprising a gate arranged between the first plug and the third plug.
    Type: Application
    Filed: June 16, 2016
    Publication date: December 22, 2016
    Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Claire FENOUILLET-BERANGER, Philippe CORONEL
  • Publication number: 20160365342
    Abstract: Method for making connection elements between two different levels of components in a 3D integrated circuit including steps of: forming a lateral insulating area supported on at least one given conducting area among several interconnection areas on a first level of components, the insulating area extending around a semiconducting layer on a second level in which at least one transistor can be formed, removing a first portion of the lateral insulating area so as to form a first hole exposing said given conducting area; deposit a conducting material in the hole so as to form a first electrical connection element between the second component and said given conducting area.
    Type: Application
    Filed: June 8, 2016
    Publication date: December 15, 2016
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Claire FENOUILLET-BERANGER, Bernard PREVITALI, Olivier ROZEAU
  • Patent number: 9502566
    Abstract: The invention concerns a method for producing a transistor. The gate of the transistor is produced after having produced source and drain electrodes of the transistor. From a substrate having a stack of layers comprising at least two surface layers with a first layer of a first semiconductor material intended to produce a conduction channel of the transistor, and a second layer of a second semiconductor material situated on the first layer and intended to at least partly produce the source and drain electrodes of the transistor, the formation of a mask defining a cavity of a gate pattern and the creation of lateral recesses at the periphery of the gate pattern in the second layer and under the mask by an isotropic etching of the second material, and in that it comprises a filling of the lateral recesses with a dielectric material so as to form gate spacers therein.
    Type: Grant
    Filed: September 23, 2014
    Date of Patent: November 22, 2016
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Claire Fenouillet-Beranger, Perrine Batude
  • Patent number: 9391057
    Abstract: An integrated circuit includes first and second electronic components, a buried UTBOX insulating layer, first and second ground planes plumb with the first and second electronic components, first and second wells, first and second biasing electrodes making contact with the first and second wells and with the first and second ground planes, a third electrode making contact with the first well, a first trench isolation separating the first and third electrodes and extending through the buried insulating layer as far as into the first well, and a second trench isolation that isolates the first electrode from the first component, and that does not extend as far as the interface between the first ground plane and the first well.
    Type: Grant
    Filed: April 25, 2014
    Date of Patent: July 12, 2016
    Assignees: Commissariat a l'energie atomique et aux energies alternatives, STMicroelectronics SA
    Inventors: Claire Fenouillet-Beranger, Pascal Fonteneau
  • Patent number: 9337302
    Abstract: An integrated circuit features a FET, an UTBOX layer plumb with the FET, an underlayer ground plane with first doping plumb with the FET's gate and channel, first and second underlayer semiconducting elements, both plumb with the drain or source, electrodes in contact respectively with the ground plane and with the first element, one having first doping and being connected to a first voltage, the other having the first doping and connected to a second bias voltage different from the first, a semiconducting well having the second doping and plumb with the first ground plane and both elements, a first trench isolating the first FET from other components of the integrated circuit and extending through the layer into the well, and second and third trenches isolating the FET from the electrodes, and extending to a depth less than a plane/well interface.
    Type: Grant
    Filed: July 2, 2013
    Date of Patent: May 10, 2016
    Assignees: Commissariat à l'énergie atomique et aux énergies alternatives, STMicroelectronics SA
    Inventors: Claire Fenouillet-Beranger, Pascal Fonteneau
  • Publication number: 20160111330
    Abstract: Method for producing one or more connection elements for integrated circuit including the formation of sacrificial elements passing through a porous layer formed between two superimposed levels of transistors, then the removal of the sacrificial elements through the porous layer and their replacement by a conductor material before or after having produced a higher level transistor.
    Type: Application
    Filed: October 20, 2015
    Publication date: April 21, 2016
    Applicant: Commissariat a L'Energie Atomique et aux Energies Alternatives
    Inventors: Claire FENOUILLET-BERANGER, Philippe CORONEL
  • Publication number: 20160093504
    Abstract: The invention relates to a method for producing a multilevel microelectronic structure, comprising at least: the formation of a first layer (236); the production of at least one second layer (239) at least partially covering the first layer (236); the production of at least one microelectronic pattern (220, 220a, 220b) on or in the second layer (239); characterised in that: the second layer (239) is formed so as to generate a mechanical stress in it; the first layer (236) forms for the second layer (239) a support preventing relaxation of said stress; and in that it comprises at least the following steps performed after the production of at least one microelectronic pattern (220, 220a, 220b), elimination of at least part of the first layer (236), thus making it possible to relax at least part of the mechanical stress on the second layer (239) so that at least a portion of the second layer (239) covering said eliminated part of the first layer (236) moves; fixing the moved portion of the second lay
    Type: Application
    Filed: September 25, 2015
    Publication date: March 31, 2016
    Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Philippe CORONEL, Claire Fenouillet-Beranger
  • Patent number: 9275891
    Abstract: A process for fabricating an integrated circuit includes, in a stack of layers including a silicon substrate overlaid with a buried insulating layer overlaid with a silicon layer, etching first trenches into the silicon substrate, depositing a silicon nitride layer on the silicon layer to fill the first trenches and form first trench isolations, forming a mask on the silicon nitride layer, etching second trenches into the silicon substrate, in a pattern defined by the mask, to a depth greater than a depth of the first trenches, filling the second trenches with an electrical insulator to form second trench isolations, carrying out a chemical etch until the silicon layer is exposed, and forming a FET by forming a channel, a source, and a drain of the field effect transistor in the silicon layer.
    Type: Grant
    Filed: May 29, 2013
    Date of Patent: March 1, 2016
    Assignees: Commissariat a l'energie atomique et aux energies alternatives, STMicroelectronics (Crolles 2) SAS
    Inventors: Claire Fenouillet-Beranger, Stéphane Denorme
  • Patent number: 9165943
    Abstract: An integrated circuit includes an UTBOX insulating layer under and plumb with first and second electronic components, and corresponding ground planes and oppositely-doped wells made plumb with them. The wells contact with corresponding ground planes. A pair of oppositely doped bias electrodes, suitable for connecting corresponding bias voltages, contacts respective wells and ground planes. A third electrode contacts the first well. A first trench isolates one bias electrode from the third electrode and extends through the layer and into the first well. A second trench isolates the first bias electrode from one component. This trench has an extent that falls short of reaching an interface between the first ground plane and the first well.
    Type: Grant
    Filed: July 1, 2013
    Date of Patent: October 20, 2015
    Assignees: COMMISSARIAT Á L'ÉNERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, STMicroelectronics SA
    Inventors: Claire Fenouillet-Beranger, Pascal Fonteneau
  • Patent number: 9165908
    Abstract: An integrated circuit includes four electronic components, a buried UTBOX layer under and plumb with the electronic components, and two pairs of oppositely doped ground planes plumb with corresponding components under the layer. A first isolation trench mutually isolates the ground planes from corresponding wells made plumb and in contact with the ground planes and exhibiting the first doping type. Bias electrodes contact respective wells and ground planes. One pair of electrodes is for connecting to a first bias voltage and the other pair is for connecting to a second bias voltage. Also included are a semiconductor substrate exhibiting the first type of doping and a deeply buried well exhibiting the second type of doping. The deeply buried well contacts the other wells and separates them from the substrate. Finally, a control electrode couples to the deeply buried well.
    Type: Grant
    Filed: July 1, 2013
    Date of Patent: October 20, 2015
    Assignees: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, STMicroelectronics SA
    Inventors: Claire Fenouillet-Beranger, Pascal Fonteneau
  • Patent number: 9029955
    Abstract: An integrated circuit includes a semiconductor substrate, a silicon layer, a buried isolating layer arranged between the substrate and the layer, a bipolar transistor comprising a collector and emitter having a first doping, and a base and a base contact having a second doping, the base forming a junction with the collector and emitter, the collector, emitter, base contact, and the base being coplanar, a well having the second doping and plumb with the collector, emitter, base contact and base, the well separating the collector, emitter and base contact from the substrate, having the second doping and extending between the base contact and base, a isolating trench plumb with the base and extending beyond the layer but without reaching a bottom of the emitter and collector, and another isolating trench arranged between the base contact, collector, and emitter, the trench extending beyond the buried layer into the well.
    Type: Grant
    Filed: July 2, 2013
    Date of Patent: May 12, 2015
    Assignees: Commissariat á l'énergie atomique et aux énergies alternatives, STMicroelectronics SA
    Inventors: Claire Fenouillet-Beranger, Pascal Fonteneau
  • Publication number: 20150084095
    Abstract: The invention concerns a method for producing a transistor. The gate of the transistor is produced after having produced source and drain electrodes of the transistor. From a substrate having a stack of layers comprising at least two surface layers with a first layer of a first semiconductor material intended to produce a conduction channel of the transistor, and a second layer of a second semiconductor material situated on the first layer and intended to at least partly produce the source and drain electrodes of the transistor, the formation of a mask defining a cavity of a gate pattern and the creation of lateral recesses at the periphery of the gate pattern in the second layer and under the mask by an isotropic etching of the second material, and in that it comprises a filling of the lateral recesses with a dielectric material so as to form gate spacers therein.
    Type: Application
    Filed: September 23, 2014
    Publication date: March 26, 2015
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT
    Inventors: Claire FENOUILLET-BERANGER, Perrine Batude