Abstract: A liquid immersion exposure apparatus includes a projection system having a last optical element, a liquid supply system having a first path through which immersion liquid is supplied to a supply opening, and a liquid removal system having a second path connected to the first path. The liquid removal system removes the immersion liquid from the first path using the second path so that the supply flow path becomes a substantially gas filled space.

Abstract: A shift control system includes an engine speed detector, a multistage transmission, a gear position detector, a shifting operation detector, and an output controller. The engine speed detector is configured to detect an engine speed. The gear position detector is configured to detect a transmission gear. The shifting operation detector is configured to detect an operation of a shift operating element. The output controller is configured to restrict output of an engine in a case where an up-shifting operation is detected by the shifting operation detector. The output controller is configured to release output restriction of the engine before the gear position detector detects that switching to a next-stage transmission gear by the up-shifting operation of the shift operating element is completed.

Abstract: A lithographic projection apparatus includes a substrate table by which a substrate is held, a projection system via which a patterned beam is projected onto the substrate to expose the substrate through liquid, and a liquid supply system. The liquid supply system includes a supply flow path, and supplies the liquid via the supply flow path during the exposure. The liquid supply system also includes a device by which the supply flow path is connected with a vacuum system to prevent liquid in the supply flow path from leaking.

Abstract: A shift position detecting device where a shift position determining member is provided for determining a shift position based on a combination of switching modes of three switches corresponding to at least one of a plurality of projection rows each having a plurality of projection portions in a one-by-one basis, and “1, 1, 1” indicative of an ON state of each switch is allocated as a detection logic at a neutral position arranged between a first speed position and a second speed position, wherein a change in friction at the time of a shift operational to the neutral position is alleviated thus giving an operational feeling with no discomfort to a rider. Two projection rows that are objects to be detected by two specified switches among the three switches are formed so as to change switching modes of the specified switches from an OFF state to an ON state.

Abstract: A shift position detecting device that determines a shift position based on a detection logic formed of a combination of turning on or off of a plurality of switches that are fixedly arranged at least one by one at positions corresponding to a plurality of detecting object portion rows mounted on a shift drum. An accurate shift position can be detected even if there is an irregularity in switching timings of switching modes of the plurality of switches. A shift position detecting member establishes the shift position as a new shift position and outputs shift position information, while when the detection logic after the transition is a detection logic other than the detection logic corresponding to the changeable shift position, sets the new shift position not yet established and outputs information corresponding to non-establishment of the shift position.

Abstract: A liquid immersion exposure apparatus that exposes a substrate via a projection optical system and liquid includes a movable member having an upper surface, a part of which holds the substrate. A liquid immersion system that has a supply port and a recovery port supplies the liquid to a space between the projection optical system and the upper surface via the supply port of a supply path and recovers the liquid of a liquid immersion region formed in the space via the recovery port of a recovery path. A flow path is connected to the supply path between the supply port and a source of the liquid, the flow path permitting flow therethrough to remove liquid that remains in the supply path, the liquid that remains in the supply path having been supplied from the source of the liquid without being discharged from the supply port.

Abstract: A shift controlling apparatus includes an automatic shift mode returning member with a manual shift mode wherein a transmission is manually shifted and an automatic shift mode wherein the transmission is automatically shifted based on an automatic shift map and changes over. When a manual shift operation is carried out in the automatic shift mode, the shift mode moves to the manual shift mode and then automatically returns to the automatic shift mode after the manual shift operation. The automatic shift mode returning member includes a manual operational detection member for detecting a manual shift operation for shift up or shift down of the transmission during the automatic shift mode, first operational state discrimination member for discriminating an operational state of a vehicle when the manual shift operation is carried out, and second operational state discrimination member for discriminating an operational state of the vehicle after the manual shift operation.

Abstract: An exposure apparatus exposes a substrate by projecting an image of a pattern onto the substrate via a projection optical system and a liquid that fills a space between the projection optical system and the substrate. The exposure apparatus has a liquid supply system having a supply path that supplies liquid to the space between the projection optical system and the substrate. A liquid recovery system having a recovery path recovers the liquid from the space during the exposure. The apparatus also includes a suction path with which at least part of the supply path of the liquid supply system is connected when the exposure apparatus functions abnormally.

Abstract: A dog-clutch transmission system having dog-clutches is provided that can effectively lower the sound resulting from the engagement of dogs during the meshing of gears. A dog-clutch transmission system includes first gears installed adjacent to each other on respective shafts so as not to be rotatable relatively to the respective shafts and to be axially slidable; and second gears installed so as to be rotatable relatively to the respective shafts and not to be axially slidable. Each of the first gears has dog-teeth projecting in the axial direction and each of the other gears has dog-holes recessed in the axial direction. Speed-stages are switchable by bringing the dog-teeth and the dog-holes into engagement and disengagement. A speed-change ratio proportion of a change-speed ratio at an arbitrary n-speed speed-stage to a speed-change ratio at a (n+1)-speed speed-stage is set at 0.725 or more.

Abstract: A hydraulic clutch for preventing a drag of a clutch at the time of disengaging the clutch by decreasing an oil supply quantity between a plurality of clutch plates and a plurality of clutch discs thus decreasing a change hitting sound at the time of shifting. A hydraulic clutch is configured such that the superposition between an oil supply hole formed in a clutch pressure plate and an oil supply hole formed in a clutch center becomes maximum when the clutch is engaged.

Abstract: An exposure apparatus can mitigate the impact of fluctuations in the refractive index of ambient gas, and improve, for example, stage positioning accuracy. An exposure apparatus radiates an exposure illumination light to a wafer on a wafer stage through a projection optical system, and forms a prescribed pattern on the wafer, and comprises: a scale, which is provided to the wafer stage; a plurality of X heads, which detect information related to the position of the scale; a measurement frame that integrally supports the plurality of X heads and has a coefficient of linear thermal expansion that is smaller than that of the main body of the wafer stage (portions excepting a plate wherein the scale is formed); and a control apparatus that derives information related to the displacement of the wafer stage based on the detection results of the plurality of X heads.

Abstract: An exposure apparatus can mitigate the impact of fluctuations in the refractive index of ambient gas, and improve, for example, stage positioning accuracy. An exposure apparatus radiates an exposure illumination light to a wafer on a wafer stage through a projection optical system, and forms a prescribed pattern on the wafer, and comprises: a scale, which is provided to the wafer stage; a plurality of X heads, which detect information related to the position of the scale; a measurement frame that integrally supports the plurality of X heads and has a coefficient of linear thermal expansion that is smaller than that of the main body of the wafer stage (portions excepting a plate wherein the scale is formed); and a control apparatus that derives information related to the displacement of the wafer stage based on the detection results of the plurality of X heads.

Abstract: A transmission control apparatus for an automatic transmission to change a shift position automatically includes a cornering-state judging device, a modified shift-up table generator, and a gear-shift controller. The cornering-state judging device is configured to judge whether a vehicle has transitioned to a cornering state from a normal running state. The modified shift-up table generator is configured to generate a modified shift-up table when the vehicle is judged to have transitioned to the cornering state. The modified shift-up table makes a shift-up more difficult to occur than a reference shift-up table does. The gear-shift controller is configured to perform gear-shift control by using the reference shift-up table during the normal running state. The gear-shift controller is configured to suppress a gear shift by using the modified shift-up table instead of the reference shift-up table when the vehicle is judged to have transitioned to the cornering state.

Abstract: A transmission driving mechanism of a transmission in an internal combustion engine is provided in which where a separate transmission driving mechanism for manual operation is not required in addition to an automatic transmission driving mechanism, whereby the number of parts is reduced, the structure is simple, no maintenance is required and the cost is reduced. The transmission transmits the rotation of a crankshaft to an output shaft at a modified speed, and includes a transmission driving mechanism which rotates a shift spindle using a shift actuator in order to automatically shift gears within the transmission and change the outputted speed of the engine. One end of the shift spindle extends through an engine case cover, and protrudes outside, and a turning tool is fitted onto a fitting portion formed at the protruding end of the shift spindle, whereby manual shifting of the transmission gears can also be achieved.

Abstract: A shift controlling apparatus includes an automatic shift mode returning member with a manual shift mode wherein a transmission is manually shifted and an automatic shift mode wherein the transmission is automatically shifted based on an automatic shift map and changes over. When a manual shift operation is carried out in the automatic shift mode, the shift mode moves to the manual shift mode and then automatically returns to the automatic shift mode after the manual shift operation. The automatic shift mode returning member includes a manual operational detection member for detecting a manual shift operation for shift up or shift down of the transmission during the automatic shift mode, first operational state discrimination member for discriminating an operational state of a vehicle when the manual shift operation is carried out, and second operational state discrimination member for discriminating an operational state of the vehicle after the manual shift operation.

Abstract: A dog-clutch transmission system having dog-clutches is provided that can effectively lower the sound resulting from the engagement of dogs during the meshing of gears. A dog-clutch transmission system includes first gears installed adjacent to each other on respective shafts so as not to be rotatable relatively to the respective shafts and to be axially slidable; and second gears installed so as to be rotatable relatively to the respective shafts and not to be axially slidable. Each of the first gears has dog-teeth projecting in the axial direction and each of the other gears has dog-holes recessed in the axial direction. Speed-stages are switchable by bringing the dog-teeth and the dog-holes into engagement and disengagement. A speed-change ratio proportion of a change-speed ratio at an arbitrary n-speed speed-stage to a speed-change ratio at a (n+1)-speed speed-stage is set at 0.725 or more.

Abstract: An exposure system includes an exposure section for irradiating a formed resist film with exposing light through a mask with an immersion liquid provided on the resist film, and a drying section for drying a surface of the resist film after irradiation.

Abstract: A transmission control apparatus for an automatic transmission to change a shift position automatically includes a cornering-state judging device, a modified shift-up table generator, and a gear-shift controller. The cornering-state judging device is configured to judge whether a vehicle has transitioned to a cornering state from a normal running state. The modified shift-up table generator is configured to generate a modified shift-up table when the vehicle is judged to have transitioned to the cornering state. The modified shift-up table makes a shift-up more difficult to occur than a reference shift-up table does. The gear-shift controller is configured to perform gear-shift control by using the reference shift-up table during the normal running state. The gear-shift controller is configured to suppress a gear shift by using the modified shift-up table instead of the reference shift-up table when the vehicle is judged to have transitioned to the cornering state.

Abstract: A hydraulic clutch for preventing a drag of a clutch at the time of disengaging the clutch by decreasing an oil supply quantity between a plurality of clutch plates and a plurality of clutch discs thus decreasing a change hitting sound at the time of shifting. A hydraulic clutch is configured such that the superposition between an oil supply hole formed in a clutch pressure plate and an oil supply hole formed in a clutch center becomes maximum when the clutch is engaged.

Abstract: The twin clutch-type transmission can include a hydraulic twin clutch including the first clutch and the second clutch disposed on main shafts. The shift change controlling apparatus is configured to control shift change operation to and adjacent speed change stage by alternately changing an engagement state of the first clutch and the second clutch. The shift change controlling apparatus can also execute a pre-shift change of supplying a pre-pressure on one of the first and second clutches, while another of the first and second clutches is engaged. The pre-pressure provides a pre-engagement of the unengaged clutch. First and second clutch actuators are configured to actuate the first and second clutches, respectively. When the pre-shift change is executed, the pre-pressure is applied for a predetermined period and then removed prior to a driving of a shift gear or actuating a shift change.