Abstract: A driving force interrupting mechanism includes input and output members. A coupling sleeve is to be movable on the input and output members along a rotational axis. A fork is swingable around a swing shaft to move the coupling sleeve between a connecting position and a disconnecting position. The coupling sleeve is positioned on both of the input and output members in the connecting position. The coupling sleeve is positioned on either the input member or the output member in the disconnecting position. An operating member is integrally rotatable with the swing shaft. A spring is provided on the swing shaft between the operating member and the fork relatively rotatably with respect to the swing shaft. A motion of one of the operating member and the fork follows a motion of another of the operating member and the fork via an elastic force of the spring.

Abstract: A projection exposure apparatus has a substrate table on which a substrate is mounted that can be moved holding the substrate, a position measuring system that measures positional information of the substrate table, and a correction unit that corrects positional deviation occurring in at least either the substrate or the substrate table due to supply of a liquid. In this case, the correction unit corrects the positional deviation occurring in at least either the substrate or the substrate table due to the supply of the liquid. Accordingly, exposure with high precision using a liquid immersion method is performed on the substrate.

Abstract: An exposure apparatus exposes a substrate by projecting an image of a pattern onto the substrate via a projection optical system and a liquid that fills a space between the projection optical system and the substrate. The exposure apparatus has a liquid supply system having a supply path that supplies liquid to the space between the projection optical system and the substrate. A liquid recovery system having a recovery path recovers the liquid from the space during the exposure. The apparatus also includes a suction path with which at least part of the supply path of the liquid supply system is connected when the exposure apparatus functions abnormally.

Abstract: An exposure apparatus exposes a substrate by projecting an image of a pattern onto the substrate via a projection optical system and a liquid that fills a gap between the projection optical system and the substrate. The exposure apparatus has a liquid recovery mechanism with a drive section powered by electric power supplied from a commercial power source and an uninterruptible power source separate from the commercial power source. When the commercial power source has a failure, the supply of electric power to the drive section is switched to the uninterruptible power source.

Abstract: An exposure apparatus and method exposes, using an optical member, a pattern of a mask onto a substrate that is located on a substrate stage which is movable over a supporting plate. A liquid is provided between the optical member and the substrate, Fluid is sprayed toward the supporting plate to remove liquid from the supporting plate.

Abstract: An exposure apparatus exposes a substrate by projecting an image of a pattern onto the substrate via a projection optical system and a liquid that fills a gap between the projection optical system and the substrate. The exposure apparatus has a liquid recovery mechanism with a drive section powered by electric power supplied from a commercial power source and an uninterruptible power source separate from the commercial power source. When the commercial power source has a failure, the supply of electric power to the drive section is switched to the uninterruptible power source.

Abstract: A sufficient moving stroke can be secured without connecting a tube, etc. for supply of air. A movable body (3) having a pad part (73) and a fixed body (2) are provided. The movable body (3) is movably supported by the fixed body (2) by supplying the medium to the pad part (73). A supply part (5) which is provided in the fixed body (2) and to which the medium is supplied; a connecting part (75) which connects the supply part (5) with the pad part (73); and an opening and closing unit (6) which opens and closes the connecting part (75) according to the position of the movable body (3) with respect to the fixed body (2), are provided.

Abstract: To provide a drive switching mechanism for a vehicle which allows the number of parts to be reduced by simplifying the structure for 2WD/4WD switching and differential lock switching. In a drive switching mechanism for a vehicle which enables 2WD/4WD switching and differential lock switching to be effected by a single operating lever, a flange is supported on the body side so as to be pivotable in one direction, the operating lever is coupled to the flange and the flange is pivoted in the one direction, and the operating lever is supported so as to be pivotable in the other direction different from the one direction, the operating lever being operated in the one direction or the other direction to enable the 2WD/4WD switching and the differential lock switching.

Abstract: Liquid is held in a prescribed region between a first object and a second object. An electrostatic holder holds the liquid by electrostatic force.

Abstract: A lubricating system for an internal combustion engine in which oil in a crankcase is supplied into an oil tank by a scavenging pump wherein it is possible to reduce the size of an engine body and the size of the scavenging pump. An oil tank is provided in an engine body adjacent, in the direction along the axis of a crankshaft, to a centrifugal clutch contained in a clutch containing chamber communicating with the inside of a crank chamber. A wall portion for partitioning the inside of the oil tank and the clutch containing chamber from each other is provided with an opening portion for communication between the clutch containing chamber and the inside of the oil tank, the opening portion being located on the outer side relative to the outermost rotational locus of a centrifugal clutch as viewed in the direction along the axis of the crankshaft.

Abstract: An exposure apparatus can mitigate the impact of fluctuations in the refractive index of ambient gas, and improve, for example, stage positioning accuracy. An exposure apparatus radiates an exposure illumination light to a wafer on a wafer stage through a projection optical system, and forms a prescribed pattern on the wafer, and comprises: a scale, which is provided to the wafer stage; a plurality of X heads, which detect information related to the position of the scale; a measurement frame that integrally supports the plurality of X heads and has a coefficient of linear thermal expansion that is smaller than that of the main body of the wafer stage (portions excepting a plate wherein the scale is formed); and a control apparatus that derives information related to the displacement of the wafer stage based on the detection results of the plurality of X heads.

Abstract: An exposure apparatus exposes a substrate P by locally filling a side of an image plane of a projection optical system PL with a liquid 50 and projecting an image of a pattern onto the substrate P through the liquid 50 and the projection optical system PL. The exposure apparatus includes a recovery unit 20 which recovers the liquid 50 outflowed to the outside of the substrate P. When the exposure process is performed in accordance with the liquid immersion method, the pattern can be transferred accurately while suppressing any environmental change even when the liquid outflows to the outside of the substrate.

Abstract: An exposure apparatus equipped with a measurement stage that is provided with various measuring instruments disposed in a relationship wherein measurement accuracy is not lowered, and a device manufacturing method using the exposure apparatus are provided. An exposure apparatus according to the present invention is equipped with a measurement stage provided independent of a wafer stage that holds a wafer, On a measurement table (MTB) held on the upper face of this measurement stage, a reference plate (53) on which a first reference mark (FM1) being used for an aerial image measuring instrument and a second reference mark (FM2) for measuring the positional relationship of the wafer stage with respect to the projection image of the pattern of a reticle are formed is provided.

Abstract: A connection apparatus for a utilities supply member, comprises: a holding part (41), a drive apparatus (43), a measuring apparatus (47), and a control apparatus. The holding part (41) is supported to freely move relative to a first member (CL) and holds a part of a utilities supply member (TB) connected between the first member (CL) and a second member (15). The drive apparatus moves the holding part (41) relative to the first member (CL). A measuring apparatus (47) obtains information relating to the relative position between the holding part (41) and the second member (15). The control apparatus controls the drive apparatus (43) based on the measurement results of the measuring apparatus (47).

Abstract: An exposure apparatus exposes a pattern onto a substrate. The exposure apparatus includes a supporting plate having a surface, a substrate stage which holds the substrate and is movable over the supporting plate, a liquid supply device having a supply nozzle which supplies liquid to the substrate, a first collection device which collects the liquid directly from the substrate, and a second collection device which collects liquid which has been discharged to the supporting plate.

Abstract: A lithographic projection apparatus includes a substrate table by which a substrate is held, a projection system via which a patterned beam is projected onto the substrate to expose the substrate through liquid, and a liquid supply system. The liquid supply system includes a supply flow path, and supplies the liquid via the supply flow path during the exposure. The liquid supply system also includes a device by which the supply flow path is connected with a vacuum system to prevent liquid in the supply flow path from leaking.

Abstract: An aligning apparatus and the like are provided which can improve stage alignment accuracy during stage acceleration and suppress the generation of internal vibration of the stage to improve throughput.

Abstract: An exposure apparatus and method exposes, using an optical member, a pattern of a mask onto a substrate that is located on a substrate stage which is movable over a supporting plate. A liquid is provided between the optical member and the substrate, Fluid is sprayed toward the supporting plate to remove liquid from the supporting plate.

Abstract: A driving force interrupting mechanism includes input and output members. A coupling sleeve is to be movable on the input and output members along a rotational axis. A fork is swingable around a swing shaft to move the coupling sleeve between a connecting position and a disconnecting position. The coupling sleeve is positioned on both of the input and output members in the connecting position. The coupling sleeve is positioned on either the input member or the output member in the disconnecting position. An operating member is integrally rotatable with the swing shaft. A spring is provided on the swing shaft between the operating member and the fork relatively rotatably with respect to the swing shaft. A motion of one of the operating member and the fork follows a motion of another of the operating member and the fork via an elastic force of the spring.

Abstract: A sufficient moving stroke can be secured without connecting a tube, etc. for supply of air. A movable body (3) having a pad part (73) and a fixed body (2) are provided. The movable body (3) is movably supported by the fixed body (2) by supplying the medium to the pad part (73). A supply part (5) which is provided in the fixed body (2) and to which the medium is supplied; a connecting part (75) which connects the supply part (5) with the pad part (73); and an opening and closing unit (6) which opens and closes the connecting part (75) according to the position of the movable body (3) with respect to the fixed body (2), are provided.