Abstract: Stopper mechanisms keep a wafer table and a measurement table from moving closer than a predetermined distance, and the blocking by the stopper mechanisms can also be released by a drive mechanism. Therefore, for example, in the case X-axis stators are driven independently, even if at least one of the two tables go out of control, the stopper mechanisms can keep the tables from coming into contact with each other, and for example, in the case the tables are to be in a state closer than the predetermined distance, by a release mechanism that releases the blocking of the stopper mechanisms, the tables can approach each other without the stopper mechanisms interfering.

Abstract: For example, to control an effect due to entrance and leakage of liquid for exposure and allow a preferable exposure processing, a support surface is provided which supports an object. The support surface is liquid repellant, and a collection device is provided which collects liquid from the support surface.

Abstract: A transmission driving mechanism of a transmission in an internal combustion engine is provided in which where a separate transmission driving mechanism for manual operation is not required in addition to an automatic transmission driving mechanism, whereby the number of parts is reduced, the structure is simple, no maintenance is required and the cost is reduced The transmission transmits the rotation of a crankshaft to an output shaft at a modified speed, and includes a transmission driving mechanism which rotates a shift spindle using a shift actuator in order to automatically shift gears within the transmission and change the outputted speed of the engine. One end of the shift spindle extends through an engine case cover, and protrudes outside, and a turning tool is fitted onto a fitting portion formed at the protruding end of the shift spindle, whereby manual shifting of the transmission gears can also be achieved.

Abstract: To provide a drive switching mechanism for a vehicle which allows the number of parts to be reduced by simplifying the structure for 2WD/4WD switching and differential lock switching. In a drive switching mechanism for a vehicle which enables 2WD/4WD switching and differential lock switching to be effected by a single operating lever, a flange is supported on the body side so as to be pivotable in one direction, the operating lever is coupled to the flange and the flange is pivoted in the one direction, and the operating lever is supported so as to be pivotable in the other direction different from the one direction, the operating lever being operated in the one direction or the other direction to enable the 2WD/4WD switching and the differential lock switching.

Abstract: An exposure apparatus exposes a pattern onto a substrate. The exposure apparatus includes a supporting plate having a surface, a substrate stage which holds the substrate and is movable over the supporting plate, a liquid supply device having a supply nozzle which supplies liquid to the substrate, a first collection device which collects the liquid directly from the substrate, and a second collection device which collects liquid which has been discharged to the supporting plate.

Abstract: An exposure system includes an exposure section for irradiating a formed resist film with exposing light through a mask with an immersion liquid provided on the resist film, and a drying section for drying a surface of the resist film after irradiation.

Abstract: A lubricating system for an internal combustion engine in which oil in a crankcase is supplied into an oil tank by a scavenging pump wherein it is possible to reduce the size of an engine body and the size of the scavenging pump. An oil tank is provided in an engine body adjacent, in the direction along the axis of a crankshaft, to a centrifugal clutch contained in a clutch containing chamber communicating with the inside of a crank chamber. A wall portion for partitioning the inside of the oil tank and the clutch containing chamber from each other is provided with an opening portion for communication between the clutch containing chamber and the inside of the oil tank, the opening portion being located on the outer side relative to the outermost rotational locus of a centrifugal clutch as viewed in the direction along the axis of the crankshaft.

Abstract: A projection exposure apparatus (100) has a substrate table (30) on which a substrate (W) is mounted that can be moved holding the substrate, a position measuring system (18 and others) that measures positional information of the substrate table, and a correction unit (19) that corrects positional deviation occurring in at least either the substrate or the substrate table due to supply of a liquid. In this case, the correction unit corrects the positional deviation occurring in at least either the substrate or the substrate table due to the supply of the liquid. Accordingly, exposure with high precision using a liquid immersion method is performed on the substrate.

Abstract: An exposure apparatus exposes a substrate by projecting an image of a pattern onto the substrate via a projection optical system and a liquid that fills a gap between the projection optical system and the substrate. The exposure apparatus has a liquid recovery mechanism with a drive section powered by electric power supplied from a commercial power source and an uninterruptible power source separate from the commercial power source. When the commercial power source has a failure, the supply of electric power to the drive section is switched to the uninterruptible power source.

Abstract: A projection exposure apparatus (100) has a substrate table (30) on which a substrate (W) is mounted that can be moved holding the substrate, a position measuring system (18 and others) that measures positional information of the substrate table, and a correction unit (19) that corrects positional deviation occurring in at least either the substrate or the substrate table due to supply of a liquid. In this case, the correction unit corrects the positional deviation occurring in at least either the substrate or the substrate table due to the supply of the liquid. Accordingly, exposure with high precision using a liquid immersion method is performed on the substrate.

Abstract: An exposure apparatus exposes a substrate P by locally filling a side of an image plane of a projection optical system PL with a liquid 50 and projecting an image of a pattern onto the substrate P through the liquid 50 and the projection optical system PL. The exposure apparatus includes a recovery unit 20 which recovers the liquid 50 outflowed to the outside of the substrate P. When the exposure process is performed in accordance with the liquid immersion method, the pattern can be transferred accurately while suppressing any environmental change even when the liquid outflows to the outside of the substrate.

Abstract: A lubricating system for a power unit for a vehicle with an internal combustion engine. A static oil hydraulic type non-stage transmission is disposed on a left lateral side of a crankshaft, and a lubricating oil tank is formed integrally with a main body of the internal combustion engine and is disposed on a right lateral side opposite to the side of the transmission, with the crankshaft therebetween.

Abstract: An exposure apparatus exposes a substrate by projecting an image of a pattern onto the substrate via a projection optical system and a liquid that fills a gap between the projection optical system and the substrate. The exposure apparatus has a liquid recovery mechanism with a drive section powered by electric power supplied from a commercial power source and an uninterruptible power source separate from the commercial power source. When the commercial power source has a failure, the supply of electric power to the drive section is switched to the uninterruptible power source.

Abstract: An exposure apparatus which performs an exposure while filling a space between a projection optical system and a substrate with liquid, and in which deterioration of a device caused by adherent liquid on the substrate is suppressed is provided. A device manufacturing system (SYS) includes a main body of an exposure apparatus (EX) which fills a space between a projection optical system (PL) and a substrate (P) with a liquid (50) and projects an image of a pattern onto the substrate (P) via the projection optical system (PL) and the liquid (50); an interface section (IF) arranged between the exposure apparatus main body (EX) and a coater/developer main body (C/D) which processes the substrate (P) after exposure; and a liquid-removing unit (100) which removes the liquid (50) adhering to the substrate (P) before the exposed substrate (P) is transferred into the coater/developer main body (C/D) through the interface section (IF).

Abstract: An exposure apparatus exposes a substrate P by locally filling a side of an image plane of a projection optical system PL with a liquid 50 and projecting an image of a pattern onto the substrate P through the liquid 50 and the projection optical system PL. The exposure apparatus includes a recovery unit 20 which recovers the liquid 50 outflowed to the outside of the substrate P. When the exposure process is performed in accordance with the liquid immersion method, the pattern can be transferred accurately while suppressing any environmental change even when the liquid outflows to the outside of the substrate.

Abstract: A hydraulic motor includes a motor cylinder having motor plunger holes, motor plungers disposed in the respective plunger holes, a motor rolling member which is tilted and rolled to change the angle of a swash plate, and a motor servo mechanism for tilting and rolling the motor rolling member. The motor servo mechanism includes a screw shaft with male screw, a ball nut having a ball thread mated to the male screw and connected to an arm portion of the motor rolling member, a swash plate control motor, and a stopper mounted to the end of the screw shaft. The stopper includes a ring portion adjacent to the end of the male screw at a limit position of the ball nut and a flange portion which contacts the side face of the ball nut at the limit position.

Abstract: A temperature control technique and an exposure technique are provided with which high temperature control accuracy can be realized even when a device, which causes thermal fluctuation depending on a temperature-controlled fluid, is used. A gas recovered from a reticle chamber as the temperature control objective, and a high purity purge gas supplied from a gas supply source are mixed in a mixing section. The temperature of the mixed gas is lowered by a refrigerator. Subsequently, the humidity of the gas is measured by a temperature sensor. The gas is then supplied to the reticle chamber via a heating mechanism, a chemical filter which absorbs or generates heat depending on the humidity and a dust protective filter. The heating amount to the gas by the heating mechanism is controlled based on temperature information by a temperature sensor in the reticle chamber and humidity information by the humidity sensor.

Abstract: For example, to control an effect due to entrance and leakage of liquid for exposure and allow a preferable exposure processing, a support surface is provided which supports an object. The support surface is liquid repellant, and a collection device is provided which collects liquid from the support surface.

Abstract: A hydraulic motor includes a motor cylinder having motor plunger holes, motor plungers disposed in the respective plunger holes, a motor rolling member which is tilted and rolled to change the angle of a swash plate, and a motor servo mechanism for tilting and rolling the motor rolling member. The motor servo mechanism includes a screw shaft with male screw, a ball nut having a ball thread mated to the male screw and connected to an arm portion of the motor rolling member, a swash plate control motor, and a stopper mounted to the end of the screw shaft. The stopper includes a ring portion adjacent to the end of the male screw at a limit position of the ball nut and a flange portion which contacts the side face of the ball nut at the limit position.

Abstract: A lubricating system for a power unit for a vehicle with an internal combustion engine. A static oil hydraulic type non-stage transmission is disposed on a left lateral side of a crankshaft, and a lubricating oil tank is formed integrally with a main body of the internal combustion engine and is disposed on a right lateral side opposite to the side of the transmission, with the crankshaft therebetween.