Abstract: An apparatus for passively aligning first and second substrates having micro-components disposed thereon when the substrates do not include patterned surfaces which face each other. The apparatus includes a first depression which cooperates with an alignment sphere to mechanically engage a corresponding depression disposed on the front surface of the first substrate and a second depression which cooperates with a second alignment sphere to mechanically engage a corresponding depression disposed on the front surface of the second substrate. The first and second depression of the alignment apparatus and the alignment spheres cooperate to passively align micro-components disposed on each of the substrates.

Abstract: A submount and a method for making the submount, is described. A substrate has a channel formed therein. An insulator material, such as a dielectric material, is deposited on the substrate within the channel and on an upper surface of the substrate. A conductive material is deposited over the dielectric material. Preferably, the conductive material within the boundaries of the channel should be lower than the upper surface. The substrate is then planarized, which eliminates the conductive material and the dielectric material from outside the boundaries of the channel. Alternatively, an electric ground plate can be formed by doping a region of the substrate surrounding the channel or by depositing a second conductive material prior to laying down the dielectric material. Optionally, a second dielectric material may be positioned over the conductive material, and after planarization a conductive material may be deposited and patterned thereon.

Abstract: A lithography multi-level mask includes a base layer with at least one mesa disposed over the base layer. The mesa has a first transmittance and the substrate has a second transmittance. The first transmittance is greater than or equal to the second transmittance.

Abstract: A first waveguide holding member has a first transverse surface region and a first optical waveguide having an end terminating at the first transverse surface region. A second waveguide holding member has a second transverse surface region which confronts the first transverse surface region of the first waveguide holding member and a second optical waveguide having an end terminating at the second transverse surface region. A guide member is operatively coupled to the first and second waveguide holding members and guides the first waveguide holding member in a transverse direction relative to the second waveguide holding member so as to selectively optically couple and decouple the ends of the first and second optical waveguides.

Abstract: A method for fabricating an at least one optical fiber array includes planarizing an endface of at least one optical fiber and inserting an endface of the at least one optical fiber in a tool. The at least one optical fiber is then secured in the tool, and at least a portion of the tool is removed exposing the endface of the at least one optical fiber. The resultant product has significant planarity, and enables the endfaces of the optical fiber of the optical fiber arrays to be substantially coplanar.

Abstract: A first waveguide holding member has a principal surface which confronts the principal surface of a second waveguide holding member. Each principal surface has a stepped configuration defined by an upper surface region, a lower surface region and a transverse region which separates the upper and lower surface regions. At least guide member guides the first and second waveguide holding members to operatively couple and decouple opposing ends of first and second optical waveguides which terminate at the transverse regions of the first and second waveguide holding members, respectively.

Abstract: An optical device includes a single-piece alignment frame and has at least one opening therein. The opening is adapted to receive a waveguide alignment member.

Abstract: A method for fabrication of an optical device includes disposing a photosensitive material over an optical fiber array. A master optical waveguide array is located adjacent the photosensitive material and light is transmitted through the master optical waveguide array. This forms accurately aligned coupling waveguides in the photosensitive material. An optical device includes an optical waveguide array optically coupled to a photosensitive layer having an array of coupling waveguides therein.

Abstract: A fiber optic chip having one or more fiber-retaining channels and a respective number of lenslets disposed in registry with the channels is provided. The fiber optic chip includes a substrate having a first surface and an etch stop layer disposed proximate the first surface of the substrate. A fiber retaining channel is disposed within the substrate. The fiber channel has an end disposed proximate the first surface of the substrate and has a longitudinal axis extending along the channel. A lenslet is disposed on the etch stop layer and has an optical axis substantially aligned with the longitudinal axis of the channel.

Abstract: A multi-level optical device includes a substrate having a baseline level. At least one feature is disposed at a level above the baseline level. At least one feature is disposed at a level below the baseline level, or in the feature above the baseline level is located at a distance apart from the feature below the baseline level. The distance has an accuracy inn the range of approximately ±0.05 &mgr;m to less than approximately ±1.0 &mgr;m.

Abstract: A method of fabricating optical filter is disclosed. The method includes providing the substrate and selectively etching the substrate to form a plurality of freestanding layers. A plurality of dielectric layers is disposed over an outer surface of each of the freestanding layers. The resultant optical filters may be used in a variety of applications including etalon applications.

Abstract: The same mask pattern is used as an etching mask in defining the horizontal location of micro-machined (etched) features at the substrate surface of an optical device relative to the waveguide cores also at the substrate surface of the optical device. Exemplary micro-machined features include grooves, recesses and inclined surfaces formed in the substrate surface for any of a variety of purposes. The accurate horizontal positioning of these features relative to the integrated waveguide cores fosters accurate optical coupling between the integrated waveguide cores and external and/or internal components.

Abstract: An optical fiber pressure sensor having a base layer 20 with an optical fiber hole, a fiber stop layer 28 and, optionally, an etch stop layer 24. The fiber stop layer optionally has a fiber stop hole 33 that is smaller than the optical fiber 22. A diaphragm cap layer 32 is bonded to the fiber stop layer 28. The diaphragm cap layer 32 has a diaphragm 34 spaced apart from the optical fiber. The optical fiber and diaphragm form an Etalon that changes cavity length with applied pressure. Optionally, the device is made almost entirely of silicon, and so has reduced mechanical stress problems caused by thermal expansion mismatches. This allows the present sensor to be used in high temperature environments such as internal combustion engines.

Abstract: In an integrated optical waveguide device including a first top portion on the substrate, and a plurality of juxtaposed waveguide cores within cladding layers on a second top portion of the substrate, the waveguide cores having respective inner endfaces parallel to a longitudinal open slotway formed in the substrate between the first and second top portions, the substrate being undercut from the slotway to produce a cantilevered section of the waveguide cores and cladding layers, for permitting the plurality of waveguide cores and associated cladding layers to be simultaneously cleaved, thereby providing a smooth endface thereacross.

Abstract: The present invention relates to an optical device having a passive alignment frame with an opening therethrough. The opening has a non-circular cross-sectional shape, and a polarization maintaining optical fiber is disposed in the opening. The polarization maintaining optical fiber is rotationally aligned in the opening and the rotational alignment is maintained. The polarization maintaining optical fiber also has a non-circular cross-sectional shape, which may or may not match the non-circular cross-sectional shape of the opening.

Abstract: A dry etched optical fiber ferrule includes two semicircular half-sections each bonded together by diametric edge portions having respective semicircular notches opposing one another, for providing a hole in receiving and being bond to a portion of an optical fiber.

Abstract: Methods for making a micromachined device (e.g. an microoptical submount) having positive features (extending up from a device surface) and negative features (extending into the device surface). The present techniques locate the positive feature and negative features according to a single mask step. In one embodiment, a hard mask is patterned on top of the device layer of an SOI wafer. Then, RIE is used to vertically etch to the etch stop layer, forming the positive feature. Then, the positive feature is masked, and metal or hard mask is deposited on the exposed areas of the etch stop layer. Then, portions of the device layer are removed, leaving the patterned metal layer on the etch stop layer. Then, the etch stop layer is removed in an exposed area, uncovering the handle layer. Then, the handle layer is etched in an exposed area to form the negative feature.

Abstract: An optical switch is provided for selectively coupling outputs of one or more fibers of a first array to one or more inputs of fibers of a second array. The first array includes a first groove disposed within a front face of the first array. The second array optionally includes a second groove disposed within a front face of the second array. The first and second fiber arrays are oriented so that their respective front faces are disposed in a facing relationship. A roller element is located within at least the first groove, permitting the first array to translate relative to the second array upon the roller element along the direction of the first groove. In addition, detents may be formed within the grooves of each array to create areas in which the roller element may at least temporarily seat. The location and number of detents are arranged to correspond to the location and number of rows of fibers in the respective arrays.

Abstract: A method for shaping an end of an optical fiber having a core to provide a novel optical fiber (or waveguide) includes the steps of contacting the fiber against a mold having a predetermined shape, The fiber and/or mold is heated. The fibers can be made of silica. The method is well suited for making wedge-shaped (i.e., standard screwdriver-like shaped) fiber tips. In addition, an apparatus for molding a shaped tip precisely located with respect to a core of an optical fiber includes a mold having one or more surfaces of the mold being configured and dimensioned to impart a predetermined shape to an end of an optical fiber contacted therewith, the predetermined shape being precisely located with respect to the core of the optical fiber.

Abstract: An optical switch includes a first wavedguide holding member and a second waveguide holding member disposed on a substrate. The first waveguide holding member moves relative to the second waveguide holding member. A movement guiding member guides the motion of the first waveguide holding member and the substrate.