Patents by Inventor Deepak C. Sekar

Deepak C. Sekar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11355380
    Abstract: A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming first alignment marks and control circuits in and on the first level, where the control circuits include first single crystal transistors, where the control circuits include at least two metal layers; forming at least one second level disposed on top of the first level; performing a first etch step within the second level; forming at least one third level disposed on top of the at least one second level; performing a second etch step within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where the first memory cells include second transistors, and where the second memory cells include third transistors.
    Type: Grant
    Filed: September 13, 2021
    Date of Patent: June 7, 2022
    Assignee: MONOLITHIC 3D INC.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Publication number: 20220165602
    Abstract: A method for producing a 3D memory device, including: providing a first level including a single crystal layer and control circuits, the control circuits include a plurality of first single crystal transistors; forming at least one second level disposed above the first level; processing to form a plurality of second transistors, where the processing includes forming a plurality of memory cells, each of the plurality of memory cells includes at least one of the plurality of second transistors, where the control circuits control the plurality of memory cells, where at least one of the plurality of memory cells is at least partially atop a portion of the control circuits, where processing the control circuits accounts for a thermal budget associated with processing of the second transistors by adjusting annealing of the first transistors accordingly; processing to replace gate material of at least one of the plurality of second transistors.
    Type: Application
    Filed: February 12, 2022
    Publication date: May 26, 2022
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Patent number: 11342214
    Abstract: A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming a plurality of first transistors each including a single crystal channel; forming a first metal layer and a second metal layer, where the first level includes the plurality of first transistors, the first metal layer, and the second metal layer; forming at least one second level disposed above the second metal layer; performing a first etch step including etching first holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching second holes within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where memory cells each include one memory transistor.
    Type: Grant
    Filed: March 10, 2022
    Date of Patent: May 24, 2022
    Assignee: MONOLITHIC 3D INC.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Patent number: 11335731
    Abstract: A semiconductor device, the device comprising: a plurality of transistors, wherein at least one of said plurality of transistors comprises a first single crystal source, channel, and drain, wherein at least one of said plurality of transistors comprises a second single crystal source, channel, and drain, wherein said second single crystal source, channel, and drain is disposed above said first single crystal source, channel, and drain, wherein at least one of said plurality of transistors comprises a third single crystal source, channel, and drain, wherein said third single crystal source, channel, and drain is disposed above said second single crystal source, channel, and drain, wherein at least one of said plurality of transistors comprises a fourth single crystal source, channel, and drain, and wherein said first single crystal channel is self-aligned to said second single crystal channel being processed following the same lithography step.
    Type: Grant
    Filed: February 28, 2022
    Date of Patent: May 17, 2022
    Assignee: MONOLITHIC 3D INC.
    Inventors: Deepak C. Sekar, Zvi Or-Bach
  • Patent number: 11327227
    Abstract: A multi-level semiconductor device, the device including: a first level including integrated circuits; a second level including a structure designed to conduct electromagnetic waves, where the second level is disposed above the first level, where the first level includes crystalline silicon; an oxide layer disposed between the first level and the second level; and a plurality of electromagnetic modulators, where the second level is bonded to the oxide layer, and where the bonded includes oxide to oxide bonds.
    Type: Grant
    Filed: October 3, 2021
    Date of Patent: May 10, 2022
    Assignee: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Deepak C. Sekar, Brian Cronquist
  • Publication number: 20220130905
    Abstract: A semiconductor device, the device including: a plurality of transistors, where at least one of the plurality of transistors includes a first single crystal source, channel, and drain, where at least one of the plurality of transistors includes a second single crystal source, channel, and drain, where the second single crystal source, channel, and drain is disposed above the first single crystal source, channel, and drain, where at least one of the plurality of transistors includes a third single crystal source, channel, and drain, where the third single crystal source, channel, and drain is disposed above the second single crystal source, channel, and drain, where at least one of the plurality of transistors includes a fourth single crystal source, channel, and drain, and where the first single crystal source or drain, and the second single crystal source or drain each include n+ doped regions.
    Type: Application
    Filed: January 10, 2022
    Publication date: April 28, 2022
    Applicant: Monolithic 3D Inc.
    Inventors: Deepak C. Sekar, Zvi Or-Bach
  • Patent number: 11315965
    Abstract: A 3D micro display, the 3D micro display including: a first single crystal layer including a first plurality of light emitting diodes (LEDs); a second single crystal layer including a second plurality of light emitting diodes (LEDs), where the first single crystal layer includes at least ten individual first LED pixels, where the second single crystal layer includes at least ten individual second LED pixels, where the first plurality of light emitting diodes (LEDs) emits a first light with a first wavelength, where the second plurality of light emitting diodes (LEDs) emits a second light with a second wavelength, where the first wavelength and the second wavelength differ by greater than 10 nm; and further including a third single crystal layer including at least one LED driving circuit.
    Type: Grant
    Filed: September 28, 2021
    Date of Patent: April 26, 2022
    Assignee: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Deepak C. Sekar
  • Patent number: 11315980
    Abstract: A semiconductor device, the device including: a plurality of transistors, where at least one of the plurality of transistors includes a first single crystal source, channel, and drain, where at least one of the plurality of transistors includes a second single crystal source, channel, and drain, where the second single crystal source, channel, and drain is disposed above the first single crystal source, channel, and drain, where at least one of the plurality of transistors includes a third single crystal source, channel, and drain, where the third single crystal source, channel, and drain is disposed above the second single crystal source, channel, and drain, where at least one of the plurality of transistors includes a fourth single crystal source, channel, and drain, and where the first single crystal source or drain, and the second single crystal source or drain each include n+ doped regions.
    Type: Grant
    Filed: January 10, 2022
    Date of Patent: April 26, 2022
    Assignee: Monolithic 3D Inc.
    Inventors: Deepak C. Sekar, Zvi Or-Bach
  • Publication number: 20220122877
    Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; and a second level including a second single crystal layer, the second level including second transistors, where the second level overlays the first level, where the second level is bonded to the first level, where the bonded includes oxide to oxide bonds, where the second transistors each include at least two side-gates, and where through the first metal layers power is provided to at least one of the second transistors.
    Type: Application
    Filed: December 31, 2021
    Publication date: April 21, 2022
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Publication number: 20220093441
    Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; and a second level including a second single crystal layer, the second level including second transistors, where the second level overlays the first level, where the second level is bonded to the first level, where the bonded includes oxide to oxide bonds, where the second level includes an array of memory cells, and where each of the memory cells includes at least one recessed-channel-array-transistor (RCAT).
    Type: Application
    Filed: December 6, 2021
    Publication date: March 24, 2022
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Publication number: 20220093440
    Abstract: A semiconductor device, the device including: a first single crystal substrate and plurality of logic circuits, where the first single crystal substrate has a device area, where the device area is significantly larger than a reticle size, where the plurality of logic circuits include an array of processors, where the plurality of logic circuits include a first logic circuit, a second logic circuit, and third logic circuit, where the plurality of logic circuits include switching circuits to support replacing the first logic circuit and the second logic circuit by the third logic circuit; and a built-in-test-circuit (“BIST”), where the built-in-test-circuit is connected to test at least the first logic circuit and the second logic circuit.
    Type: Application
    Filed: December 5, 2021
    Publication date: March 24, 2022
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Publication number: 20220084869
    Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; second metal layer overlaying the first metal layer, and a second level including a second single crystal layer, the second level including second transistors, where the second level overlays the first level, where the second transistors each include a High-k metal gate, where the second level is bonded to the first level, and where the bonded includes oxide to oxide bonds.
    Type: Application
    Filed: November 29, 2021
    Publication date: March 17, 2022
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Patent number: 11257867
    Abstract: A semiconductor device, the device including: a plurality of transistors, where at least one of the plurality of transistors includes a first single crystal channel, where at least one of the plurality of transistors includes a second single crystal channel, where the second single crystal channel is disposed above the first single crystal channel, where at least one of the plurality of transistors includes a third single crystal channel, where the third single crystal channel is disposed above the second single crystal channel, where at least one of the plurality of transistors includes a fourth single crystal channel, and where the fourth single crystal channel is disposed above the third single crystal channel; and at least one region of oxide to oxide bonds.
    Type: Grant
    Filed: December 5, 2021
    Date of Patent: February 22, 2022
    Assignee: MONOLITHIC 3D INC.
    Inventors: Deepak C. Sekar, Zvi Or-Bach
  • Publication number: 20220028759
    Abstract: A 3D semiconductor device, the device including: a first level including a plurality of first metal layers; a second level, where the second level overlays the first level, where the second level includes at least one single crystal silicon layer, where the second level includes a plurality of transistors, where each of the plurality of transistors includes a single crystal channel, where the second level includes a plurality of second metal layers, where the plurality of second metal layers include interconnections between the plurality of transistors, and where the second level is overlaid by a first isolation layer; and a connective path between the plurality of transistors and the plurality of first metal layers, where the connective path includes a via disposed through at least the single crystal silicon layer, and where the via has a diameter of less than 400 nm and greater than 5 nm.
    Type: Application
    Filed: October 2, 2021
    Publication date: January 27, 2022
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Deepak C. Sekar, Brian Cronquist
  • Publication number: 20220026636
    Abstract: A multi-level semiconductor device, the device including: a first level including integrated circuits; a second level including a structure designed to conduct electromagnetic waves, where the second level is disposed above the first level, where the first level includes crystalline silicon; an oxide layer disposed between the first level and the second level; and a plurality of electromagnetic modulators, where the second level is bonded to the oxide layer, and where the bonded includes oxide to oxide bonds.
    Type: Application
    Filed: October 3, 2021
    Publication date: January 27, 2022
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Deepak C. Sekar, Brian Cronquist
  • Patent number: 11227897
    Abstract: A method for producing a 3D memory device, the method including: providing a first level including a single crystal layer and first alignment marks; forming memory control circuits including first single crystal transistors, where the first single crystal transistors include portions of the single crystal layer; forming at least one second level above the first level; performing a first etch step including etching lithography windows within the at least one second level; performing a first lithographic step over the at least one second level aligned to the first alignment marks; and performing additional processing steps to form a plurality of first memory cells within the at last one second level, where each of the plurality of first memory cells include one of a plurality of second transistors, and where the plurality of second transistors are aligned to the first alignment marks with a less than 40 nm alignment error.
    Type: Grant
    Filed: August 14, 2021
    Date of Patent: January 18, 2022
    Assignee: MONOLITHIC 3D INC.
    Inventors: Deepak C. Sekar, Zvi Or-Bach
  • Publication number: 20220013556
    Abstract: A 3D micro display, the 3D micro display including: a first single crystal layer including a first plurality of light emitting diodes (LEDs); a second single crystal layer including a second plurality of light emitting diodes (LEDs), where the first single crystal layer includes at least ten individual first LED pixels, where the second single crystal layer includes at least ten individual second LED pixels, where the first plurality of light emitting diodes (LEDs) emits a first light with a first wavelength, where the second plurality of light emitting diodes (LEDs) emits a second light with a second wavelength, where the first wavelength and the second wavelength differ by greater than 10 nm; and further including a third single crystal layer including at least one LED driving circuit.
    Type: Application
    Filed: September 28, 2021
    Publication date: January 13, 2022
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Deepak C. Sekar
  • Patent number: 11217472
    Abstract: A 3D semiconductor device, the device including: a first level including single crystal first transistors, and a first metal layer, where the first level is overlaid by a first isolation layer; a second level including second transistors, where the first isolation layer is overlaid by the second level, and where the second level is overlaid by a second isolation layer; a third level including single crystal third transistors, where the second isolation layer is overlaid by the third level, where the third level is overlaid by a third isolation layer, where the third level is bonded to the second isolation layer, where the bonded includes at least one oxide to oxide bond, and where the bonded includes at least one metal to metal bond.
    Type: Grant
    Filed: April 18, 2021
    Date of Patent: January 4, 2022
    Assignee: MONOLITHIC 3D INC.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Publication number: 20210407842
    Abstract: A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming first alignment marks and control circuits in and on the first level, where the control circuits include first single crystal transistors, where the control circuits include at least two metal layers; forming at least one second level disposed on top of the first level; performing a first etch step within the second level; forming at least one third level disposed on top of the at least one second level; performing a second etch step within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where the first memory cells include second transistors, and where the second memory cells include third transistors.
    Type: Application
    Filed: September 13, 2021
    Publication date: December 30, 2021
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Patent number: 11211279
    Abstract: A method for processing a 3D integrated circuit, the method including: providing a first level including a first wafer, the first wafer including a first crystalline substrate, a plurality of first transistors, and first copper interconnecting layers, where the first copper interconnecting layers at least interconnect the plurality of first transistors; processing a second level including a second wafer, the second wafer including a second crystalline substrate, a plurality of second transistors, and second copper interconnecting layers, where the second copper interconnecting layers at least interconnect the plurality of second transistors; then forming a bonded structure by bonding the second level to the first level, where the bonding includes metal to metal bonding, where the bonding includes oxide to oxide bonding; and then performing a lithography process to define dice lines for the bonded structure; and etching the dice lines.
    Type: Grant
    Filed: January 3, 2021
    Date of Patent: December 28, 2021
    Assignee: MONOLITHIC 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar