Patents by Inventor Durai Vishak Nirmal Ramaswamy

Durai Vishak Nirmal Ramaswamy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10676722
    Abstract: A method of forming a tier of an array of memory cells within an array area, the memory cells individually comprising a capacitor and an elevationally-extending transistor, the method comprising using two, and only two, sacrificial masking steps within the array area of the tier in forming the memory cells. Other methods are disclosed, as are structures independent of method of fabrication.
    Type: Grant
    Filed: September 25, 2019
    Date of Patent: June 9, 2020
    Assignee: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Patent number: 10680057
    Abstract: A memory cell comprises a capacitor having a first conductive capacitor electrode having laterally-spaced walls that individually have a top surface. A second conductive capacitor electrode is laterally between the walls of the first capacitor electrode, and comprises a portion above the first capacitor electrode. Ferroelectric material is laterally between the walls of the first capacitor electrode and laterally between the second capacitor electrode and the first capacitor electrode. The capacitor comprises an intrinsic current leakage path from one of the first and second capacitor electrodes to the other through the ferroelectric material. A parallel current leakage path is between an elevationally-inner surface of the portion of the second capacitor electrode that is above the first capacitor electrode and at least one of the individual top surfaces of the laterally-spaced walls of the first capacitor electrode.
    Type: Grant
    Filed: July 31, 2019
    Date of Patent: June 9, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Muralikrishnan Balakrishnan, Beth R. Cook, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20200152633
    Abstract: A method of forming an array of cross point memory cells comprises using two, and only two, masking steps to collectively pattern within the array spaced lower first lines, spaced upper second lines which cross the first lines, and individual programmable devices between the first lines and the second lines where such cross that have an upwardly open generally U-shape vertical cross-section of programmable material laterally between immediately adjacent of the first lines beneath individual of the upper second lines. Arrays of cross point memory cells independent of method of manufacture are disclosed.
    Type: Application
    Filed: January 20, 2020
    Publication date: May 14, 2020
    Applicant: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Publication number: 20200152645
    Abstract: A memory cell includes a first electrode and a second electrode. A select device and a programmable device are in series with each other between the first and second electrodes. The select device is proximate and electrically coupled to the first electrode. The programmable device is proximate and electrically coupled to the second electrode. The programmable device includes a radially inner electrode having radially outer sidewalls. Ferroelectric material is radially outward of the outer sidewalls of the inner electrode. A radially outer electrode is radially outward of the ferroelectric material. One of the outer electrode or the inner electrode is electrically coupled to the select device. The other of the outer electrode and the inner electrode is electrically coupled to the second electrode. Arrays of memory cells are disclosed.
    Type: Application
    Filed: January 15, 2020
    Publication date: May 14, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Durai Vishak Nirmal Ramaswamy, Wayne Kinney, Marco Domenico Tiburzi
  • Publication number: 20200152644
    Abstract: Some embodiments include a ferroelectric transistor having an active region which includes a first source/drain region, a second source/drain region, and a body region between the first and second source/drain regions. The body region has a different semiconductor composition than at least one of the first and second source/drain regions to enable replenishment of carrier within the body region. An insulative material is along the body region. A ferroelectric material is along the insulative material. A conductive gate material is along the ferroelectric material.
    Type: Application
    Filed: November 13, 2018
    Publication date: May 14, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Durai Vishak Nirmal Ramaswamy, Haitao Liu
  • Patent number: 10650978
    Abstract: Some embodiments include an apparatus having horizontally-spaced bottom electrodes supported by a supporting structure. Leaker device material is directly against the bottom electrodes. Insulative material is over the bottom electrodes, and upper electrodes are over the insulative material. Plate material extends across the upper electrodes and couples the upper electrodes to one another. The plate material is directly against the leaker device material. The leaker device material electrically couples the bottom electrodes to the plate material, and may be configured to discharge at least a portion of excess charge from the bottom electrodes to the plate material. Some embodiments include methods of forming apparatuses which include capacitors having bottom electrodes and top electrodes, with the top electrodes being electrically coupled to one another through a conductive plate. Leaker devices are formed to electrically couple the bottom electrodes to the conductive plate.
    Type: Grant
    Filed: December 15, 2017
    Date of Patent: May 12, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Ashonita A. Chavan, Beth R. Cook, Manuj Nahar, Durai Vishak Nirmal Ramaswamy
  • Patent number: 10636471
    Abstract: Some embodiments include a ferroelectric transistor. The transistor has gate dielectric material configured as a first container, with the first container having a first inner surface. Metal-containing material is configured as a second container nested within said first container. The second container has a second inner surface with an area less than the first inner surface. Ferroelectric material is configured as a third container nested within the second container. The third container has a third inner surface with an area less than the second inner surface. Gate material is within the third container. Some embodiments include memory arrays having ferroelectric transistors as memory cells. Some embodiments include methods of writing/reading relative to memory cells of memory arrays when the memory cells are metal-ferroelectric-metal-insulator-semiconductor (MFMIS) transistors.
    Type: Grant
    Filed: April 20, 2016
    Date of Patent: April 28, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Durai Vishak Nirmal Ramaswamy, Wayne Kinney
  • Patent number: 10629732
    Abstract: A device comprises an array comprising rows and columns of elevationally-extending transistors. An access line interconnects multiple of the elevationally-extending transistors along individual of the rows. The transistors individually comprise an upper source/drain region, a lower source/drain region, and a channel region extending elevationally there-between. The channel region comprises an oxide semiconductor. A transistor gate is operatively laterally-proximate the channel region and comprises a portion of an individual of the access lines. Intra-row-insulating material is longitudinally between immediately-intra-row-adjacent of the elevationally-extending transistors. Inter-row-insulating material is laterally between immediately-adjacent of the rows of the elevationally-extending transistors. At least one of the intra-row-insulating material and the inter-row-insulating material comprises void space. Other embodiments, including method embodiments, are disclosed.
    Type: Grant
    Filed: October 9, 2018
    Date of Patent: April 21, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Sills, Kirk D. Prall, Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi
  • Patent number: 10622556
    Abstract: A method of forming an array of cross point memory cells comprises forming spaced conductive lower electrode pillars for individual of the memory cells being formed along and elevationally over spaced lower first lines. Walls cross elevationally over the first lines and between the electrode pillars that are along the first lines. The electrode pillars and walls form spaced openings between the first lines. The openings are lined with programmable material of the memory cells being formed to less-than-fill the openings with the programmable material. Conductive upper electrode material is formed over the programmable material within remaining volume of the openings and spaced upper second lines are formed which cross the first lines elevationally over the conductive upper electrode material that is within the openings.
    Type: Grant
    Filed: July 16, 2018
    Date of Patent: April 14, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Sills, Durai Vishak Nirmal Ramaswamy
  • Patent number: 10622366
    Abstract: A method of forming an array comprising pairs of vertically opposed capacitors comprises forming a conductive lining in individual capacitor openings in support material. An elevational mid-portion of individual of the conductive linings is removed to form an upper capacitor electrode lining and a lower capacitor electrode lining that are elevationally separate and spaced from one another in the individual capacitor openings. A capacitor insulator is formed laterally outward of the upper and lower capacitor electrode linings. Conductive material is formed laterally outward of the capacitor insulator to comprise a shared capacitor electrode that is shared by vertically opposed capacitors in individual of the pairs of vertically opposed capacitors. Other methods and structure independent of method of manufacture are disclosed.
    Type: Grant
    Filed: March 6, 2018
    Date of Patent: April 14, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Ashonita A. Chavan, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20200111907
    Abstract: A device comprises a vertical transistor. The vertical transistor comprises a semiconductive pillar, at least one gate electrode, a gate dielectric material, and void spaces. The semiconductive pillar comprises a source region, a drain region, and a channel region extending vertically between the source region and the drain region, the channel region comprising a semiconductive material having a band gap greater than 1.65 electronvolts. The at least one gate electrode laterally neighbors the semiconductive pillar. The gate dielectric material is laterally between the semiconductive pillar and the at least one gate electrode. The void spaces are vertically adjacent the gate dielectric material and laterally intervening between the at least one gate electrode and each of the source region and the drain region of the semiconductive pillar. Related electronic systems and methods are also disclosed.
    Type: Application
    Filed: October 8, 2019
    Publication date: April 9, 2020
    Inventors: Kamal M. Karda, Ramanathan Gandhi, Hong Li, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Sanh D. Tang, Scott E. Sills
  • Publication number: 20200111800
    Abstract: A method of forming a device comprises forming sacrificial pillar structures over conductive structures overlying a barrier structure substantially impermeable to hydrogen. The sacrificial pillar structures are separated from one another by trenches linearly extending in a first lateral direction orthogonal to a second lateral direction in which the conductive structures linearly extend. Gate electrodes are formed within the trenches and laterally adjacent sidewalls of the sacrificial pillar structures. The sacrificial pillar structures are removed to form openings between the gate electrodes. Dielectric liner structures are formed within the openings and laterally adjacent sidewalls of the gate electrodes. Channel structures are formed within the openings after forming the dielectric liner structures. The channel structures comprise a semiconductive material having a band gap larger than that of polycrystalline silicon. Conductive contacts are formed on the channel structures.
    Type: Application
    Filed: October 8, 2019
    Publication date: April 9, 2020
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Publication number: 20200111917
    Abstract: A device comprises vertically oriented transistors. The device comprises a pillar comprising at least one oxide semiconductor material, the pillars wider in a first lateral direction at an upper portion thereof than at a lower portion thereof, a gate dielectric material over sidewalls of the pillar and extending in the first lateral direction, and at least one gate electrode adjacent to at least a portion of the gate dielectric material. Related devices, electronic systems, and methods are also disclosed.
    Type: Application
    Filed: October 8, 2019
    Publication date: April 9, 2020
    Inventors: Durai Vishak Nirmal Ramaswamy, Scott E. Sills
  • Publication number: 20200111919
    Abstract: A device comprises a vertical transistor. The vertical transistor comprises a pillar structure, at least one gate electrode, and a dielectric material. The pillar structure comprises a source region, a drain region, and a channel region. The source region and the drain region each individually comprise at least one electrically conductive material configured to inhibit hydrogen permeation therethrough. The channel region comprises a semiconductive material vertically between the source region and the drain region. The at least one gate electrode laterally neighbors the channel region of the semiconductive structure. The dielectric material is laterally between the semiconductive structure and the at least one gate electrode. Additional devices, and related electronic systems and methods are also disclosed.
    Type: Application
    Filed: October 8, 2019
    Publication date: April 9, 2020
    Inventors: Kamal M. Karda, Ramanathan Gandhi, Yi Fang Lee, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Scott E. Sills
  • Publication number: 20200111920
    Abstract: A method of forming a device comprises forming dielectric structures over other dielectric structures overlying conductive contact structures, the dielectric structures separated from one another by trenches and laterally extending orthogonal to the other dielectric structures and the conductive contact structures. Conductive gate structures are formed on exposed side surfaces of the dielectric structures within the trenches. Dielectric oxide structures are formed on exposed side surfaces of the conductive gate structures within the trenches. Exposed portions of the other dielectric structures are removed to form isolation structures. Semiconductive pillars are formed on exposed side surfaces of the dielectric oxide structures and the isolation structures within the trenches. The semiconductive pillars are in electrical contact with the conductive contact structures. Additional conductive contact structures are formed on upper surfaces of the semiconductive pillars.
    Type: Application
    Filed: October 8, 2019
    Publication date: April 9, 2020
    Inventors: Scott E. Sills, Ramanathan Gandhi, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20200111918
    Abstract: A transistor comprising threshold voltage control gates. The transistor also comprises active control gates adjacent opposing first sides of a channel region, the threshold voltage control gates adjacent opposing second sides of the channel region, and a dielectric region between the threshold voltage control gates and the channel region and between the active control gates and the channel region. A semiconductor device comprising memory cells comprising the transistor is also disclosed, as are systems comprising the memory cells, methods of forming the semiconductor device, and methods of operating a semiconductor device.
    Type: Application
    Filed: October 8, 2019
    Publication date: April 9, 2020
    Inventors: Kamal M. Karda, Kirk D. Prall, Haitao Liu, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20200111915
    Abstract: A device comprises an array comprising rows and columns of elevationally-extending transistors. An access line interconnects multiple of the elevationally-extending transistors along individual of the rows. The transistors individually comprise an upper source/drain region, a lower source/drain region, and a channel region extending elevationally there-between. The channel region comprises an oxide semiconductor. A transistor gate is operatively laterally-proximate the channel region and comprises a portion of an individual of the access lines. Intra-row-insulating material is longitudinally between immediately-intra-row-adjacent of the elevationally-extending transistors. Inter-row-insulating material is laterally between immediately-adjacent of the rows of the elevationally-extending transistors. At least one of the intra-row-insulating material and the inter-row-insulating material comprises void space. Other embodiments, including method embodiments, are disclosed.
    Type: Application
    Filed: October 9, 2018
    Publication date: April 9, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Scott E. Sills, Kirk D. Prall, Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi
  • Publication number: 20200111916
    Abstract: A device comprises a first conductive line and a vertical transistor over the first conductive line. The vertical transistor comprises a gate electrode, a gate dielectric material overlying sides of the gate electrode, and a channel region on sides of the gate dielectric material, the gate dielectric material located between the channel region and the gate electrode. The device further comprises a second conductive line overlying a conductive contact of the at least one vertical transistor. Related devices and methods of forming the devices are also disclosed.
    Type: Application
    Filed: October 8, 2019
    Publication date: April 9, 2020
    Inventors: Kamal M. Karda, Durai Vishak Nirmal Ramaswamy, Haitao Liu
  • Publication number: 20200111908
    Abstract: A transistor comprises a first conductive contact, a heterogeneous channel comprising at least one oxide semiconductor material over the first conductive contact, a second conductive contact over the heterogeneous channel, and a gate electrode laterally neighboring the heterogeneous channel. A device, a method of forming a device, a memory device, and an electronic system are also described.
    Type: Application
    Filed: October 8, 2019
    Publication date: April 9, 2020
    Inventors: Scott E. Sills, Ramanathan Gandhi, Durai Vishak Nirmal Ramaswamy, Yi Fang Lee, Kamal M. Karda
  • Patent number: 10615114
    Abstract: An array of memory cells individually comprising a capacitor and a transistor comprises, in a first level, alternating columns of digitlines and conductive shield lines. In a second level above the first level there are rows of transistor wordlines. In a third level above the second level there are rows and columns of capacitors. In a fourth level above the third level there are rows of transistor wordlines. In a fifth level above the fourth level there are alternating columns of digitlines and conductive shield lines. Other embodiments and aspects are disclosed, including method.
    Type: Grant
    Filed: February 7, 2019
    Date of Patent: April 7, 2020
    Assignee: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy