Patents by Inventor Durai Vishak Nirmal Ramaswamy

Durai Vishak Nirmal Ramaswamy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11063054
    Abstract: A method of forming an array comprising pairs of vertically opposed capacitors comprises forming a conductive lining in individual capacitor openings in support material. An elevational mid-portion of individual of the conductive linings is removed to form an upper capacitor electrode lining and a lower capacitor electrode lining that are elevationally separate and spaced from one another in the individual capacitor openings. A capacitor insulator is formed laterally outward of the upper and lower capacitor electrode linings. Conductive material is formed laterally outward of the capacitor insulator to comprise a shared capacitor electrode that is shared by vertically opposed capacitors in individual of the pairs of vertically opposed capacitors. Other methods and structure independent of method of manufacture are disclosed.
    Type: Grant
    Filed: September 25, 2019
    Date of Patent: July 13, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Ashonita A. Chavan, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11049804
    Abstract: An array of memory cells individually comprising a capacitor and a transistor comprises, in a first level, alternating columns of digitlines and conductive shield lines. In a second level above the first level there are rows of transistor wordlines. In a third level above the second level there are rows and columns of capacitors. In a fourth level above the third level there are rows of transistor wordlines. In a fifth level above the fourth level there are alternating columns of digitlines and conductive shield lines. Other embodiments and aspects are disclosed, including method.
    Type: Grant
    Filed: August 26, 2020
    Date of Patent: June 29, 2021
    Assignee: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Patent number: 11043502
    Abstract: A method of forming a ferroelectric memory cell. The method comprises forming an electrode material exhibiting a desired dominant crystallographic orientation. A hafnium-based material is formed over the electrode material and the hafnium-based material is crystallized to induce formation of a ferroelectric material having a desired crystallographic orientation. Additional methods are also described, as are semiconductor device structures including the ferroelectric material.
    Type: Grant
    Filed: August 26, 2019
    Date of Patent: June 22, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Qian Tao, Matthew N. Rocklein, Beth R. Cook, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11043260
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes multiple two-transistor (2T) memory cells. Each of the multiple 2T memory cells includes: a p-channel field effect transistor (PFET) including a charge storage node and a read channel portion, an n-channel field effect transistor (NFET) including a write channel portion that is directly coupled to the charge storage node of the PFET; a single bit line pair coupled to the read channel portion of the PFET; and a single access line overlapping at least part of each of the read channel portion and the write channel portion.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: June 22, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Haitao Liu, Karthik Sarpatwari, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20210183951
    Abstract: Methods of forming a semiconductor device are disclosed. A method comprising forming a hybrid transistor supported by a substrate. Forming the hybrid transistor comprises forming a source including a first low bandgap high mobility material, and forming a channel including a high bandgap low mobility material coupled with the first low bandgap high mobility material. Forming the hybrid transistor further comprises forming a drain including a second low bandgap high mobility material coupled with the a high bandgap low mobility material, and forming a gate separated from the channel via a gate oxide material. Methods of forming a transistor are also disclosed.
    Type: Application
    Filed: February 23, 2021
    Publication date: June 17, 2021
    Inventors: Kamal M. Karda, Haitao Liu, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20210183864
    Abstract: A transistor comprises semiconductor material that is generally L-shaped or generally mirror L-shaped in at least one straight-line vertical cross-section thereby having an elevationally-extending stem and a base extending horizontally from a lateral side of the stem above a bottom of the stem. The semiconductor material of the stem comprises an upper source/drain region and a channel region there-below. The transistor comprises at least one of (a) and (b), where (a): the semiconductor material of the stem comprises a lower source/drain region below the channel region, and (b): the semiconductor material of the base comprises a lower source/drain region. A gate is operatively laterally adjacent the channel region of the stem. Other embodiments are disclosed, including arrays of memory cells individually comprising a capacitor and an elevationally-extending transistor. Methods are disclosed.
    Type: Application
    Filed: February 9, 2021
    Publication date: June 17, 2021
    Applicant: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Patent number: 11037942
    Abstract: A memory cell includes a first electrode and a second electrode. A select device and a programmable device are in series with each other between the first and second electrodes. The select device is proximate and electrically coupled to the first electrode. The programmable device is proximate and electrically coupled to the second electrode. The programmable device includes a radially inner electrode having radially outer sidewalls. Ferroelectric material is radially outward of the outer sidewalls of the inner electrode. A radially outer electrode is radially outward of the ferroelectric material. One of the outer electrode or the inner electrode is electrically coupled to the select device. The other of the outer electrode and the inner electrode is electrically coupled to the second electrode. Arrays of memory cells are disclosed.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: June 15, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Durai Vishak Nirmal Ramaswamy, Wayne Kinney, Marco Domenico Tiburzi
  • Publication number: 20210175363
    Abstract: A transistor comprises a pair of source/drain regions having a channel there-between. A transistor gate construction is operatively proximate the channel. The channel comprises Si1-yGey, where “y” is from 0 to 0.6. At least a portion of each of the source/drain regions comprises Si1-xGex, where “x” is from 0.5 to 1. Other embodiments, including methods, are disclosed.
    Type: Application
    Filed: February 17, 2021
    Publication date: June 10, 2021
    Applicant: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Publication number: 20210175239
    Abstract: A ferroelectric capacitor comprises two conductive capacitor electrodes having ferroelectric material there-between. At least one of the capacitor electrodes comprise MxSiOy, where “M” is at least one of Ru, Ti, Ta, Co, Pt, Ir, Os, Mo, V, W, Sr, Re, Rh, Pd, La, Zn, In, Sn, and Nb. Other aspects, including method, are disclosed.
    Type: Application
    Filed: December 5, 2019
    Publication date: June 10, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Clement Jacob, Vassil N. Antonov, Jaydeb Goswami, Albert Liao, Christopher W. Petz, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11011529
    Abstract: A memory array comprises vertically-alternating tiers of insulative material and memory cells, with the memory cells individually comprising a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region. At least a portion of the channel region is horizontally-oriented for horizontal current flow in the portion between the first and second source/drain regions. A capacitor of the memory cell comprises first and second electrodes having a capacitor insulator there-between. The first electrode is electrically coupled to the first source/drain region. A horizontal longitudinally-elongated sense line is in individual of the memory-cell tiers. Individual of the second source/drain regions of individual of the transistors that are in the same memory-cell tier are electrically coupled to the horizontal longitudinally-elongated sense line in that individual tier of memory cells.
    Type: Grant
    Filed: June 25, 2018
    Date of Patent: May 18, 2021
    Assignee: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Publication number: 20210134816
    Abstract: Some embodiments include an integrated assembly having first electrodes with top surfaces, and with sidewall surfaces extending downwardly from the top surfaces. The first electrodes are solid pillars. Insulative material is along the sidewall surfaces of the first electrodes. Second electrodes extend along the sidewall surfaces of the first electrodes and are spaced from the sidewall surfaces by the insulative material. Conductive-plate-material extends across the first and second electrodes, and couples the second electrodes to one another. Leaker-devices electrically couple the first electrodes to the conductive-plate-material and are configured to discharge at least a portion of excess charge from the first electrodes to the conductive-plate-material. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: December 22, 2020
    Publication date: May 6, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Alessandro Calderoni, Beth R. Cook, Durai Vishak Nirmal Ramaswamy, Ashonita A. Chavan
  • Patent number: 10998338
    Abstract: Some embodiments include a ferroelectric transistor having an active region which includes a first source/drain region, a second source/drain region, and a body region between the first and second source/drain regions. The body region has a different semiconductor composition than at least one of the first and second source/drain regions to enable replenishment of carrier within the body region. An insulative material is along the body region. A ferroelectric material is along the insulative material. A conductive gate material is along the ferroelectric material.
    Type: Grant
    Filed: November 13, 2018
    Date of Patent: May 4, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Durai Vishak Nirmal Ramaswamy, Haitao Liu
  • Patent number: 10998440
    Abstract: A device comprises a vertical transistor. The vertical transistor comprises a semiconductive pillar, at least one gate electrode, a gate dielectric material, and void spaces. The semiconductive pillar comprises a source region, a drain region, and a channel region extending vertically between the source region and the drain region, the channel region comprising a semiconductive material having a band gap greater than 1.65 electronvolts. The at least one gate electrode laterally neighbors the semiconductive pillar. The gate dielectric material is laterally between the semiconductive pillar and the at least one gate electrode. The void spaces are vertically adjacent the gate dielectric material and laterally intervening between the at least one gate electrode and each of the source region and the drain region of the semiconductive pillar. Related electronic systems and methods are also disclosed.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: May 4, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Ramanathan Gandhi, Hong Li, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Sanh D. Tang, Scott E. Sills
  • Patent number: 10991427
    Abstract: Memory programming methods and memory systems are described. One example memory programming method includes first applying a first signal to a memory cell to attempt to program the memory cell to a desired state, wherein the first signal corresponds to the desired state, after the first applying, determining that the memory cell failed to place in the desired state, after the determining, second applying a second signal to the memory cell, wherein the second signal corresponds to another state which is different than the desired state, and after the second applying, third applying a third signal to the memory cell to program the memory cell to the desired state, wherein the third signal corresponds to the desired state. Additional method and apparatus are described.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: April 27, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Jonathan Strand, Adam Johnson, Xiaonan Chen, Durai Vishak Nirmal Ramaswamy
  • Patent number: 10978128
    Abstract: Methods, systems, and devices for operating a ferroelectric memory cell or cells are described. A cell may be written with a value that is intended to convey a different logic state than may typically be associated with the value. For example, a cell that has stored a charge associated with one logic state for a time period may be re-written to store a different charge, and the re-written cell may still be read to have the originally stored logic state. An indicator may be stored in a latch to indicate whether the logic state currently stored by the cell is the intended logic state of the cell. A cell may, for example, be re-written with an opposite value periodically, based on the occurrence of an event, or based on a determination that the cell has stored one value (or charge) for a certain time period.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: April 13, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Alessandro Calderoni, Durai Vishak Nirmal Ramaswamy, Kirk Prall, Ferdinando Bedeschi
  • Publication number: 20210104597
    Abstract: A memory cell comprises a capacitor having a first conductive capacitor electrode having laterally-spaced walls that individually have a top surface. A second conductive capacitor electrode is laterally between the walls of the first capacitor electrode, and comprises a portion above the first capacitor electrode. Ferroelectric material is laterally between the walls of the first capacitor electrode and laterally between the second capacitor electrode and the first capacitor electrode. The capacitor comprises an intrinsic current leakage path from one of the first and second capacitor electrodes to the other through the ferroelectric material. A parallel current leakage path is between an elevationally-inner surface of the portion of the second capacitor electrode that is above the first capacitor electrode and at least one of the individual top surfaces of the laterally-spaced walls of the first capacitor electrode.
    Type: Application
    Filed: December 17, 2020
    Publication date: April 8, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Muralikrishnan Balakrishnan, Beth R. Cook, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20210091234
    Abstract: A transistor comprises a pair of source/drain regions having a channel region there-between. A transistor gate construction is operatively proximate the channel region. The channel region comprises a direction of current flow there-through between the pair of source/drain regions. The channel region comprises at least one of GaP, GaN, and GaAs extending all along the current-flow direction. Each of the source/drain regions comprises at least one of GaP, GaN, and GaAs extending completely through the respective source/drain region orthogonal to the current-flow direction. The at least one of the GaP, the GaN, and the GaAs of the respective source/drain region is directly against the at least one of the GaP, the GaN, and the GaAs of the channel region. Each of the source/drain regions comprises at least one of elemental silicon and metal material extending completely through the respective source/drain region orthogonal to the current-flow direction. Other embodiments are disclosed.
    Type: Application
    Filed: December 4, 2020
    Publication date: March 25, 2021
    Applicant: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Patent number: 10943953
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a hybrid transistor including a gate electrode, a drain material, a source material, and a channel material operatively coupled between the drain material and the source material. The source material and the drain material include a low bandgap high mobility material relative to the channel material that is high bandgap low mobility material. Memory arrays, semiconductor devices, and systems incorporating memory cells, and hybrid transistors are also disclosed, as well as related methods for forming and operating such devices.
    Type: Grant
    Filed: August 30, 2018
    Date of Patent: March 9, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Haitao Liu, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20210066301
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a substrate, a conductive plate located over the substrate to couple a ground connection, a data line located between the substrate and the conductive plate, a memory cell, and a conductive line. The memory cell includes a first transistor and a second transistor. The first transistor includes a first region electrically coupled between the data line and the conductive plate, and a charge storage structure electrically separated from the first region. The second transistor includes a second region electrically coupled to the charge storage structure and the data line. The conductive line is electrically separated from the first and second regions and spans across part of the first region of the first transistor and part of the second region of the second transistor and forming a gate of the first and second transistors.
    Type: Application
    Filed: August 26, 2020
    Publication date: March 4, 2021
    Inventors: Kamal M. Karda, Karthik Sarpatwari, Haitao Liu, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20210066298
    Abstract: Some embodiments include apparatuses and methods using a substrate, a pillar having a length perpendicular to the substrate, a first conductive plate, a second conductive plate, a memory cell located between the first and second conductive plates and electrically separated from the first and second conductive plates, and a conductive connection. The first conductive plate is located in a first level of the apparatus and being separated from the pillar by a first dielectric located in the first level. The second conductive plate is located in a second level of the apparatus and being separated from the pillar by a second dielectric located in the second level. The memory cell includes a first semiconductor material located in a third level of the apparatus between the first and second levels and contacting the pillar and the conductive connection, and a second semiconductor material located in a fourth level of the apparatus between the first and second levels and contacting the pillar.
    Type: Application
    Filed: August 26, 2020
    Publication date: March 4, 2021
    Inventors: Kamal M. Karda, Kartthik Sarpatwari, Haitao Liu, Durai Vishak Nirmal Ramaswamy