Patents by Inventor En-Chiuan Liou

En-Chiuan Liou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10529667
    Abstract: A method of forming an overlay mark structure includes the following steps. An insulation layer is formed on a substrate. A first overlay mark is formed in the insulation layer. A metal layer is formed on the substrate. The metal layer covers the insulation layer and the first overlay mark. The metal layer on the first overlay mark is removed. A top surface of the first overlay mark is lower than a top surface of the insulation layer after the step of removing the metal layer on the first overlay mark. A second overlay mark is formed on the metal layer. In the method of forming the overlay mark structure, the first overlay mark may not be covered by the metal layer for avoiding influences on related measurements, and the second overlay mark may be formed on the metal layer for avoiding related defects generated by the height difference.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: January 7, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Zheng-Feng Chen, Sho-Shen Lee, En-Chiuan Liou, Hsiao-Lin Hsu, Yi-Ting Chen, Lu-Wei Kuo
  • Patent number: 10522415
    Abstract: A semiconductor device includes a semiconductor substrate, a gate structure, an isolation structure, and a source/drain region. The semiconductor substrate includes a fin. The gate structure is disposed on the fin and is disposed straddling the fin. The isolation structure covers a sidewall and a top surface of the fin. The source/drain region is disposed in the fin and extends beyond the top surface of the fin.
    Type: Grant
    Filed: September 6, 2019
    Date of Patent: December 31, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: En-Chiuan Liou, Yu-Cheng Tung, Chih-Wei Yang
  • Publication number: 20190393099
    Abstract: A semiconductor device includes a semiconductor substrate, a gate structure, an isolation structure, and a source/drain region. The semiconductor substrate includes a fin. The gate structure is disposed on the fin and is disposed straddling the fin. The isolation structure covers a sidewall and a top surface of the fin. The source/drain region is disposed in the fin and extends beyond the top surface of the fin.
    Type: Application
    Filed: September 6, 2019
    Publication date: December 26, 2019
    Inventors: En-Chiuan Liou, Yu-Cheng Tung, Chih-Wei Yang
  • Patent number: 10504791
    Abstract: A semiconductor device includes a semiconductor substrate, a shallow trench isolation structure, a plurality of gate electrodes, and a gate isolation structure. The semiconductor substrate includes a plurality of fin structures, and each of the fin structures is elongated in a first direction. The shallow trench isolation structure is disposed on the semiconductor substrate and disposed between the fin structures. The gate electrodes are disposed on the semiconductor substrate and the shallow trench isolation structure. Each of the gate electrodes is elongated in a second direction and disposed straddling at least one of the fin structures. The gate isolation structure is disposed between two adjacent gate electrodes in the second direction. A total height of the gate isolation structure is greater than a height of the shallow trench isolation structure formed on the semiconductor substrate and located between the fin structures.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: December 10, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: En-Chiuan Liou, Yu-Cheng Tung
  • Patent number: 10460997
    Abstract: A semiconductor device includes a semiconductor substrate, an isolation structure, and a spacer. The semiconductor substrate includes at least one fin structure. The isolation structure is partly disposed in the fin structure and partly disposed above the fin structure. The fin structure includes a first fin and a second fin elongated in the same direction. A part of the isolation structure is disposed between the first fin and the second fin in the direction where the first fin and the second fin are elongated. The spacer is disposed on sidewalls of the isolation structure on the fin structure. The isolation structure in the present invention is partly disposed in the fin structure and partly disposed above the fin structure. The negative influence of a gate structure formed on the isolation structure and sinking into the isolation structure on the isolation performance of the isolation structure may be avoided accordingly.
    Type: Grant
    Filed: March 21, 2019
    Date of Patent: October 29, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: En-Chiuan Liou, Yu-Cheng Tung, Chih-Wei Yang
  • Patent number: 10453849
    Abstract: The present invention provides a dynamic random access memory structure, comprising a substrate defining a cell region and a peripheral region on the substrate, a shallow trench isolation structure located in the peripheral region adjacent to the cell region, wherein the shallow trench isolation structure has a concave top surface, a first dummy bit line gate located within the shallow trench isolation structure of the peripheral area, and a second dummy bit line gate located in the cell region and adjacent to the first dummy bit line gate, wherein a top surface of the first dummy bit line gate is lower than a top surface of the second dummy bit line gate.
    Type: Grant
    Filed: March 26, 2018
    Date of Patent: October 22, 2019
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: En-Chiuan Liou, Yu-Cheng Tung, Chih-Wei Yang, Sho-Shen Lee
  • Patent number: 10431457
    Abstract: A method for forming a patterned structure includes following steps. First lines elongated in a first direction and second lines elongated in a second direction in a layout pattern are decomposed into two masks. A first mask includes first line patterns and a first block pattern. A second mask includes second line patterns and a second block pattern. Two photolithography processes with the first mask and the second mask are performed for forming a patterned structure including first line structures and second line structures. Each first line structure is elongated in the first direction. The first line structures are defined by a region where the first line patterns and the second block pattern overlap with one another. Each second line structure is elongated in the second direction. The second line structures are defined by a region where the second line patterns and the first block pattern overlap with one another.
    Type: Grant
    Filed: November 25, 2016
    Date of Patent: October 1, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: En-Chiuan Liou, Yu-Cheng Tung
  • Patent number: 10418290
    Abstract: A method of patterning a semiconductor device includes following steps. First of all, a substrate is provided, and a first target pattern is formed in the substrate. Next, a second target pattern is formed on the substrate, across the first target pattern. Then, a third pattern is formed on a hard mask layer formed on the substrate, by using an electron beam apparatus, wherein two opposite edges of the third pattern are formed under an asymmetry control.
    Type: Grant
    Filed: February 2, 2017
    Date of Patent: September 17, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: En-Chiuan Liou, Hon-Huei Liu, Chia-Hung Lin, Yu-Cheng Tung
  • Publication number: 20190273083
    Abstract: The present invention provides a dynamic random access memory structure, comprising a substrate defining a cell region and a peripheral region on the substrate, a shallow trench isolation structure located in the peripheral region adjacent to the cell region, wherein the shallow trench isolation structure has a concave top surface, a first dummy bit line gate located within the shallow trench isolation structure of the peripheral area, and a second dummy bit line gate located in the cell region and adjacent to the first dummy bit line gate, wherein a top surface of the first dummy bit line gate is lower than a top surface of the second dummy bit line gate.
    Type: Application
    Filed: March 26, 2018
    Publication date: September 5, 2019
    Inventors: En-Chiuan Liou, Yu-Cheng Tung, Chih-Wei Yang, Sho-Shen Lee
  • Publication number: 20190267373
    Abstract: A manufacturing method of a semiconductor device includes the following steps. A semiconductor substrate including at least one fin structure is provided. A gate material layer is formed on the semiconductor substrate, and the fin structure is covered by the gate material layer. A trench is formed partly in the gate material layer and partly in the fin structure. An isolation structure is formed partly in the trench and partly outside the trench. At least one gate structure is formed straddling the fin structure by patterning the gate material layer after the step of forming the isolation structure. A top surface of the isolation structure is higher than a top surface of the gate structure in a vertical direction for enhancing the isolation performance of the isolation structure. A sidewall spacer is formed on sidewalls of the isolation structure, and there is no gate structure formed on the isolation structure.
    Type: Application
    Filed: May 9, 2019
    Publication date: August 29, 2019
    Inventors: En-Chiuan Liou, Yu-Cheng Tung, Chih-Wei Yang
  • Patent number: 10396171
    Abstract: The present invention provides a method for forming a semiconductor structure, including the following steps: first, a substrate is provided, an interlayer dielectric (ILD) is formed on the substrate, a first dummy gate is formed in the ILD, wherein the first dummy gate includes a dummy gate electrode and two spacers disposed on two sides of the dummy gate electrode respectively. Next, two contact holes are formed in the ILD at two sides of the first dummy gate respectively. Afterwards, the dummy gate electrode is removed, so as to form a gate recess in the ILD, a first material layer is filled in the gate recess and a second material layer is filled in the two contact holes respectively, and an anneal process is performed on the first material layer and the second material layer, to bend the two spacers into two inward curving spacers.
    Type: Grant
    Filed: November 1, 2018
    Date of Patent: August 27, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: En-Chiuan Liou, Yu-Cheng Tung, Rung-Yuan Lee, Chih-Wei Yang
  • Patent number: 10395999
    Abstract: A method for monitoring fin removal includes providing a substrate having a first region with first fins extending along a first direction and a second region with second fins extending along a second direction, wherein the first direction is perpendicular to the second direction; forming a material layer on the substrate to cover the first fins and the second fins; identically patterning the first fins and the second fins using a first pattern and a second pattern respectively for simultaneously removing parts of the first and second fins, thereby forming first fin features in the first region and second fin features in the second region, wherein the first pattern has a first dimension along the second direction, the second pattern has a second dimension along the second direction, and the second dimension is equal to the first dimension; and monitoring the first fin features using the second fin features.
    Type: Grant
    Filed: May 16, 2018
    Date of Patent: August 27, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Cheng-Hao Yang, En-Chiuan Liou, Hsiao-Lin Hsu, Tang-Chun Weng, Chia-Ching Lin, Yen-Pu Chen
  • Patent number: 10373827
    Abstract: A method of pattern transfer is provided, comprising: providing a target layer; forming a first pattern above the target layer; forming a second pattern (such as spacer loops) above the target layer and above the first pattern, wherein one closed end of the second pattern partially overlaps with the first pattern; and transferring the second pattern to the target layer, wherein the first pattern stops transferring pattern of the closed end of the second pattern to the target layer.
    Type: Grant
    Filed: April 18, 2017
    Date of Patent: August 6, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: En-Chiuan Liou, Yu-Cheng Tung
  • Patent number: 10373915
    Abstract: A measurement make includes four rectangular regions having a first region and a second region arranged diagonally, and a third region and a fourth region arranged diagonally. A plurality sets of first inner pattern blocks, first middle pattern blocks, and first outer reference pattern blocks, are disposed within the first region. Each first inner pattern block comprises line patterns and a block pattern. The block pattern has multiple space patterns arranged therein. The first inner pattern block is rotational symmetrical to the first middle pattern block.
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: August 6, 2019
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Hsiao-Lin Hsu, En-Chiuan Liou, Yi-Ting Chen, Sho-Shen Lee
  • Publication number: 20190229024
    Abstract: The present invention provides an overlay mark, including a substrate and plural sets of first pattern block and second pattern block. A first direction and a second direction are defined on the substrate, wherein the first direction and the second direction are perpendicular to each other. In each set, the first pattern block is rotational symmetrical to the second pattern block. Each first pattern block includes a big frame and plural small frame. Each second pattern block includes a big frame and plural small frame. The width of the big frame is greater than three times of the width of the small frame. The present invention further provides a method for evaluating the stability of a semiconductor manufacturing process.
    Type: Application
    Filed: March 28, 2019
    Publication date: July 25, 2019
    Inventors: En-Chiuan Liou, Yu-Cheng Tung
  • Publication number: 20190221482
    Abstract: A semiconductor device includes a semiconductor substrate, an isolation structure, and a spacer. The semiconductor substrate includes at least one fin structure. The isolation structure is partly disposed in the fin structure and partly disposed above the fin structure. The fin structure includes a first fin and a second fin elongated in the same direction. A part of the isolation structure is disposed between the first fin and the second fin in the direction where the first fin and the second fin are elongated. The spacer is disposed on sidewalls of the isolation structure on the fin structure. The isolation structure in the present invention is partly disposed in the fin structure and partly disposed above the fin structure. The negative influence of a gate structure formed on the isolation structure and sinking into the isolation structure on the isolation performance of the isolation structure may be avoided accordingly.
    Type: Application
    Filed: March 21, 2019
    Publication date: July 18, 2019
    Inventors: En-Chiuan Liou, Yu-Cheng Tung, Chih-Wei Yang
  • Publication number: 20190214480
    Abstract: A fabricating method of a semiconductor structure includes the following steps. A gate material layer is formed on a semiconductor substrate. A patterned mask layer is formed on the gate material layer. The pattern mask layer includes at least one opening exposing a part of the gate material layer. An impurity treatment is performed to the gate material layer partially covered by the pattern mask layer for forming at least one doped region in the gate material layer. An etching process is performed to remove the gate material layer including the doped region. A dummy gate may be formed by patterning the gate material layer, and the impurity treatment may be performed after the step of forming the dummy gate. The performance of the etching processes for removing the gate material layer and/or the dummy gate may be enhanced, and the gate material residue issue may be solved accordingly.
    Type: Application
    Filed: March 19, 2019
    Publication date: July 11, 2019
    Inventors: Wen-Chien Hsieh, En-Chiuan Liou, Chih-Wei Yang, Yu-Cheng Tung, Po-Wen Su
  • Patent number: 10347716
    Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a first region and a second region; forming a plurality of fin-shaped structures and a first shallow trench isolation (STI) around the fin-shaped structures on the first region and the second region; forming a patterned hard mask on the second region; removing the fin-shaped structures and the first STI from the first region; forming a second STI on the first region; removing the patterned hard mask; and forming a gate structure on the second STI.
    Type: Grant
    Filed: October 18, 2017
    Date of Patent: July 9, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: En-Chiuan Liou, Chih-Wei Yang, Yu-Cheng Tung, Chun-Yuan Wu
  • Patent number: 10340381
    Abstract: The present invention provides a method for fabricating a semiconductor structure, the method at least comprises: firstly, a substrate is provided, a dielectric layer is formed on the substrate, a gate conductive layer and two spacers are formed and disposed in the dielectric layer, wherein the two spacers are respectively disposed on both sides of the gate conductive layer, next, parts of the gate conductive layer are removed, and parts of the two spacers are removed, wherein a top surface of the two spacers is lower than a top surface of the gate conductive layer, and afterwards, a stress cap layer is then formed, overlying the gate conductive layer and the two spacers, wherein parts of the stress cap layer is located right above the two spacers.
    Type: Grant
    Filed: November 5, 2018
    Date of Patent: July 2, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: En-Chiuan Liou, Yu-Cheng Tung
  • Patent number: 10332877
    Abstract: A manufacturing method of a semiconductor device includes the following steps. A semiconductor substrate including at least one fin structure is provided. A gate material layer is formed on the semiconductor substrate, and the fin structure is covered by the gate material layer. A trench is formed partly in the gate material layer and partly in the fin structure. An isolation structure is formed partly in the trench and partly outside the trench. At least one gate structure is formed straddling the fin structure by patterning the gate material layer after the step of forming the isolation structure. A top surface of the isolation structure is higher than a top surface of the gate structure in a vertical direction for enhancing the isolation performance of the isolation structure. A sidewall spacer is formed on sidewalls of the isolation structure, and there is no gate structure formed on the isolation structure.
    Type: Grant
    Filed: August 21, 2016
    Date of Patent: June 25, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: En-Chiuan Liou, Yu-Cheng Tung, Chih-Wei Yang