Patents by Inventor Feng Yi

Feng Yi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10825818
    Abstract: A semiconductor device and method of forming the same, the semiconductor device includes bit lines, a transistor, a dielectric layer, plugs and a capping layer. The bit lines are disposed on a substrate within a cell region thereof, and the transistor is disposed on the substrate within a periphery region. The plugs are disposed in the dielectric layer, within the cell region and the periphery region respectively. The capping layer is disposed on the dielectric layer, and the capping layer disposed within the periphery region is between those plugs. That is, a portion of the dielectric layer is therefore between the capping layer and the transistor.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: November 3, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Feng-Yi Chang, Fu-Che Lee, Chieh-Te Chen
  • Patent number: 10818664
    Abstract: A method of forming semiconductor memory device, the semiconductor memory device includes a substrate, plural gates, plural cell plugs, a capacitor structure and a stacked structure. The gates are disposed in the substrate, and the cell plugs are disposed on the substrate, to electrically connect the substrate at two sides of each gate. The capacitor structure includes plural capacitors, and each capacitor is electrically connected each cell plug. The stacked structure covers the capacitor structure, and the stacked structure includes a semiconductor layer, a conductive layer on the semiconductor layer and an insulating layer stacked on the conductive layer. Two gaps are defined respectively between a side portion of the insulating layer and a lateral portion of the conductive layer at two sides of the capacitor structure, and the two gaps have different lengths.
    Type: Grant
    Filed: July 15, 2019
    Date of Patent: October 27, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Feng-Yi Chang, Fu-Che Lee, Chieh-Te Chen
  • Patent number: 10795255
    Abstract: A method of forming a layout definition of a semiconductor device includes the following steps. Firstly, a plurality of first patterns is established to form a material layer over a substrate, with the first patterns being regularly arranged in a plurality of columns along a first direction to form an array arrangement. Next, a plurality of second patterns is established to surround the first patterns. Then, a third pattern is established to form a blocking layer on the material layer, with the third pattern being overlapped with a portion of the second patterns and with at least one of the second patterns being partially exposed from the third pattern. Finally, the first patterns are used to form a plurality of first openings in a stacked structure on the substrate to expose a portion of the substrate respectively.
    Type: Grant
    Filed: October 31, 2018
    Date of Patent: October 6, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Wei-Lun Hsu, Gang-Yi Lin, Yu-Hsiang Hung, Ying-Chih Lin, Feng-Yi Chang, Ming-Te Wei, Shih-Fang Tzou, Fu-Che Lee, Chia-Liang Liao
  • Patent number: 10784334
    Abstract: The present invention discloses a method of manufacturing a capacitor, which includes the steps of forming a capacitor recess in a sacrificial layer, wherein the sidewall of capacitor recess has a wave profile, forming a bottom electrode layer on the sidewall of capacitor recess, filling up the capacitor recess with a supporting layer, removing the sacrificial layer to forma capacitor pillar made up by the bottom electrode layer and the supporting layer, forming a capacitor dielectric layer on the capacitor pillar, and forming a top electrode layer on the capacitor dielectric layer.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: September 22, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Feng-Yi Chang, Fu-Che Lee
  • Patent number: 10784265
    Abstract: The present invention provides a semiconductor device including a semiconductor substrate with a memory cell region and a peripheral region, a gate line in the peripheral region, an etch-stop layer covering the gate line and the semiconductor substrate, a first insulating layer covering the etch-stop layer, two contact plugs disposed on the semiconductor substrate in the peripheral region, two pads disposed on the contact plugs respectively, and a second insulating layer disposed between the pads. The contact plugs are located at two sides of the gate line respectively, and the contact plugs penetrate through the etch-stop layer and the first insulating layer to contact the semiconductor substrate. The second insulating layer is not in contact with the etch-stop layer.
    Type: Grant
    Filed: February 11, 2019
    Date of Patent: September 22, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Feng-Yi Chang, Fu-Che Lee, Chieh-Te Chen
  • Patent number: 10777559
    Abstract: A semiconductor memory device includes a semiconductor substrate, bit line structures, storage node contacts, isolation structures, a first spacer, a second spacer, and a third spacer. Each bit line structure is elongated in a first direction. The bit line structures are repeatedly arranged in a second direction. Each storage node contact and each isolation structure are disposed between two adjacent bit line structures. The first spacer is partly disposed between each isolation structure and the bit line structure adjacent to the isolation structure and partly disposed between each storage node contact and the bit line structure adjacent to the storage node contact. The second spacer is disposed between each storage node contact and the first spacer. The third spacer is disposed between each storage node contact and the second spacer. A thickness of the third spacer is less than a thickness of the second spacer in the second direction.
    Type: Grant
    Filed: March 22, 2019
    Date of Patent: September 15, 2020
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Han Wu, Feng-Yi Chang, Fu-Che Lee, Wen-Chieh Lu
  • Publication number: 20200273862
    Abstract: A semiconductor memory device includes a semiconductor substrate, bit line structures, storage node contacts, isolation structures, a first spacer, a second spacer, and a third spacer. Each bit line structure is elongated in a first direction. The bit line structures are repeatedly arranged in a second direction. Each storage node contact and each isolation structure are disposed between two adjacent bit line structures. The first spacer is partly disposed between each isolation structure and the bit line structure adjacent to the isolation structure and partly disposed between each storage node contact and the bit line structure adjacent to the storage node contact. The second spacer is disposed between each storage node contact and the first spacer. The third spacer is disposed between each storage node contact and the second spacer. A thickness of the third spacer is less than a thickness of the second spacer in the second direction.
    Type: Application
    Filed: March 22, 2019
    Publication date: August 27, 2020
    Inventors: Po-Han Wu, Feng-Yi Chang, Fu-Che Lee, Wen-Chieh Lu
  • Publication number: 20200259260
    Abstract: An antenna structure includes a first radiation element, a second radiation element, and a third radiation element. The first radiation element has a feeding point. The third radiation element is coupled through the second radiation element to the first radiation element. The third radiation element has a first opening and a second opening which are separate from each other. The antenna structure covers a first frequency band, a second frequency band, and a third frequency band.
    Type: Application
    Filed: April 10, 2019
    Publication date: August 13, 2020
    Inventors: Nien-Chao CHUANG, Pei-Cheng HU, Feng-Yi LIN
  • Patent number: 10734284
    Abstract: A method of self-aligned double patterning is disclosed in the present invention, which includes the step of forming multiple mandrels on a hard mask layer and spacers at two sides of each mandrel, forming a protection layer filling between the spacers, removing the mandrels to expose the hard mask layer, and performing an anisotropic etch process using the spacers and the protection layer as an etch mask to remove a portion of hard mask layer, so that a thickness of hard mask layer exposed between the spacers equals to a thickness of hard mask layer under the protection layer.
    Type: Grant
    Filed: September 19, 2018
    Date of Patent: August 4, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Feng-Yi Chang, Fu-Che Lee, Ying-Chih Lin, Gang-Yi Lin, Chieh-Te Chen, Yi-Ching Chang
  • Patent number: 10731024
    Abstract: A superabsorbent polymer includes polymer particles, surface cross-linking agents and particles made of silicon-containing inorganic salt. The polymer particles have cross-linking inside the polymer particles. The surface cross-linking agents are covalently bound to the surface of the polymer particles so as to constitute a surface cross-linked region at the surface of each said resin particle, and the particles made of silicon-containing inorganic salt cover the surface of the polymer particles.
    Type: Grant
    Filed: December 4, 2017
    Date of Patent: August 4, 2020
    Assignee: FORMOSA PLASTICS CORPORATION
    Inventors: Zhong-Yi Chen, Yu-Yen Chuang, Li-Han Huang, Yu-Sam Lin, Feng-Yi Chen, Ching-Hua Liang
  • Patent number: 10714481
    Abstract: A semiconductor structure includes a semiconductor substrate having a trench isolation region formed therein. A conductive gate electrode is buried in the trench isolation region. An air gap is disposed between the conductive gate electrode and the semiconductor substrate.
    Type: Grant
    Filed: May 15, 2019
    Date of Patent: July 14, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Feng-Yi Chang, Fu-Che Lee
  • Patent number: 10714480
    Abstract: A method for fabricating a semiconductor device includes the following steps. First, a contact structure is formed in the insulating layer. Preferably, the contact structure includes a bottom portion in part of the insulating layer and a top portion on part of the bottom portion and extending to cover part of the insulating layer. Next, a dielectric layer is formed on the bottom portion and the top portion, part of the dielectric layer is removed to form a first opening exposing part of the top portion and part of the bottom portion, and a capacitor is formed in the first opening and contacting the pad portion and the contact portion directly.
    Type: Grant
    Filed: October 28, 2018
    Date of Patent: July 14, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Feng-Yi Chang, Fu-Che Lee
  • Publication number: 20200212042
    Abstract: A capacitor structure including a semiconductor substrate; a dielectric layer on the semiconductor substrate; a storage node pad in the dielectric layer; a lower electrode including a bottle-shaped bottom portion recessed into the dielectric layer and being in direct contact with the storage node pad; and a lattice layer supporting a topmost part of the lower electrode, wherein the lattice layer is not directly contacting the dielectric layer, but is directly contacting the topmost part of the lower electrode. The bottle-shaped bottom portion extends to a sidewall of the storage node pad. The bottle-shaped bottom portion has a width that is wider than other portion of the lower electrode.
    Type: Application
    Filed: March 9, 2020
    Publication date: July 2, 2020
    Inventors: Feng-Yi Chang, Fu-Che Lee, Yi-Wang Zhan, Chieh-Te Chen
  • Publication number: 20200212048
    Abstract: The present invention provides a method for forming a semiconductor pattern, comprising: firstly, a target layer is provided and a first material layer is formed on the target layer, and then a first pattern is formed on the first material layer, followed by a first self-aligned double pattering step is performed, a plurality of first grooves are formed in the first material layer. Next, a second material layer is formed on the first material layer, and a plurality of second grooves are formed in the second material layer. Next, transferring a pattern of the overlapping portion of the first grooves and the second grooves into the target layer, the target layer includes a plurality of third patterns and a plurality of fourth patterns, an area of each fourth pattern is larger than an area of each third pattern.
    Type: Application
    Filed: January 27, 2019
    Publication date: July 2, 2020
    Inventors: Gang-Yi Lin, Shih-Fang Tzou, Fu-Che Lee, Feng-Yi Chang, Ying-Chih Lin, Kai-Lou Huang, Yi-Ching Chang
  • Patent number: 10700071
    Abstract: The present invention provides a method for forming a semiconductor pattern, comprising: firstly, a target layer is provided and a first material layer is formed on the target layer, and then a first pattern is formed on the first material layer, followed by a first self-aligned double pattering step is performed, a plurality of first grooves are formed in the first material layer. Next, a second material layer is formed on the first material layer, and a plurality of second grooves are formed in the second material layer. Next, transferring a pattern of the overlapping portion of the first grooves and the second grooves into the target layer, the target layer includes a plurality of third patterns and a plurality of fourth patterns, an area of each fourth pattern is larger than an area of each third pattern.
    Type: Grant
    Filed: January 27, 2019
    Date of Patent: June 30, 2020
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Gang-Yi Lin, Shih-Fang Tzou, Fu-Che Lee, Feng-Yi Chang, Ying-Chih Lin, Kai-Lou Huang, Yi-Ching Chang
  • Patent number: 10685871
    Abstract: The present invention provides a method for fabricating a semiconductor structure. A multilayer structure on is formed a substrate, the multilayer structure includes at least a first dielectric layer, a second dielectric layer and an amorphous silicon layer, next, a first etching step is performed, to forma first recess in the amorphous silicon layer and in the second dielectric layer, parts of the first dielectric layer is exposed by the first recess, afterwards, a hard mask layer is formed in the first recess, a second etching step is then performed to remove the hard mask layer and to expose a surface of the first dielectric layer, and a third etching step is performed with the remaining hard mask layer, to remove a portion of the first dielectric layer, so as to form a second recess in the first dielectric layer.
    Type: Grant
    Filed: May 8, 2018
    Date of Patent: June 16, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Feng-Yi Chang, Fu-Che Lee
  • Patent number: 10685868
    Abstract: A method of fabricating a contact hole includes the steps of providing a conductive line, a mask layer covering and contacting the conductive line, a high-k dielectric layer covering and contacting the mask layer, and a first silicon oxide layer covering and contacting the high-k dielectric layer, wherein the high-k dielectric layer includes a first metal oxide layer, a second metal oxide layer and a third metal oxide layer stacked from bottom to top. A dry etching process is performed to etch the first silicon oxide layer, the high-k dielectric layer, and the mask layer to expose the conductive line and form a contact hole. Finally, a wet etching process is performed to etch the first silicon oxide layer, the third metal oxide layer and the second metal oxide layer to widen the contact hole, and the first metal oxide layer remains after the wet etching process.
    Type: Grant
    Filed: August 28, 2019
    Date of Patent: June 16, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Feng-Yi Chang, Shih-Fang Tzou, Fu-Che Lee, Hsin-Yu Chiang, Yu-Ching Chen
  • Patent number: 10681162
    Abstract: In some implementations, a server device can segment users based on user engagement with an application on a user device. For example, server device can receive user event data from many user devices indicating user activities with respect to the application and/or content presented by the application. The server device can generate user engagement segments based on the received user event data. The server device can generate predictive models for each user engagement segment based on the received user event data. The server device can determine which particular user engagement segments a particular user is associated with based on user event data associated with the particular user and/or the predictions generated by the predictive models. The application on the user device associated with the particular user can then be configured according to the user engagement segments associated with the particular user.
    Type: Grant
    Filed: May 31, 2019
    Date of Patent: June 9, 2020
    Assignee: Apple Inc.
    Inventors: Balaji Ramachandran, Collin D. Ruffenach, Feng Yi, Guillermo Ortiz, Jean S. Metz, Christopher S. Schepman, Casey M. Dougherty, Martin J. Murrett
  • Publication number: 20200176453
    Abstract: The present invention discloses a semiconductor structure with capacitor landing pad and a method for fabricating a capacitor landing pad. The semiconductor structure with capacitor landing pad includes a substrate having a plurality of contact structures, a first dielectric layer disposed on the substrate and the contact structures, and a plurality of capacitor landing pads, each of the capacitor landing pads being located in the first dielectric layer and electrically connected to the contact structure, wherein the capacitor landing pads presents a shape of a wide top and a narrow bottom and a top surface of the capacitor landing pads have a concave shape.
    Type: Application
    Filed: February 3, 2020
    Publication date: June 4, 2020
    Inventors: Feng-Yi Chang, Fu-Che Lee, Chieh-Te Chen, Yi-Ching Chang
  • Patent number: 10672648
    Abstract: A method of forming a semiconductor memory device includes following steps. First of all, a dielectric layer is formed on a semiconductor substrate, and a conductive pad is formed in the dielectric layer. Then, a stacked structure is formed on the dielectric layer, and the stacked structure includes a first layer, a second layer and a third layer stacked one over another on the conductive pad. Next, a patterned mask layer is formed on the stacked structure, and a portion of the stacked structure is removed, to form an opening in the stacked structure, with the opening having a tapered sidewall in the second layer and the first layer. After that, the tapered sidewall of the opening in the second layer is vertically etched, to form a contact opening in the stacked structure. Finally, the patterned mask layer is removed.
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: June 2, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Feng-Yi Chang, Fu-Che Lee, Yi-Wang Zhan