Patents by Inventor Franz-Josef Niedernostheide

Franz-Josef Niedernostheide has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7989888
    Abstract: Embodiments discussed herein relate to processes of producing a field stop zone within a semiconductor substrate by implanting dopant atoms into the substrate to form a field stop zone between a channel region and a surface of the substrate, at least some of the dopant atoms having energy levels of at least 0.15 eV below the energy level of the conduction band edge of semiconductor substrate; and laser annealing the field stop zone.
    Type: Grant
    Filed: August 31, 2006
    Date of Patent: August 2, 2011
    Assignee: Infineon Technologies Autria AG
    Inventors: Hans-Joachim Schulze, Frank Pfirsch, Stephan Voss, Franz-Josef Niedernostheide
  • Publication number: 20110127576
    Abstract: A bipolar power semiconductor component configured as an IGBT includes a semiconductor body, in which a p-doped emitter, an n-doped base, a p-doped base and an n-doped main emitter are arranged successively in a vertical direction. The p-doped emitter has a number of heavily p-doped zones having a locally increased p-type doping.
    Type: Application
    Filed: February 7, 2011
    Publication date: June 2, 2011
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide, Uwe Kellner-Werdehausen, Reiner Barthelmess
  • Patent number: 7884389
    Abstract: Bipolar power semiconductor component comprising a p-type emitter and more highly doped zones in the p-type emitter, and production method. The invention relates to a bipolar power semiconductor component comprising a semiconductor body (1), in which a p-doped emitter (8), an n-doped base (7), a p-doped base (6) and an n-doped main emitter (5) are arranged successively in a vertical direction (v). The p-doped emitter (8) has a number of heavily p-doped zones (82) having a locally increased p-type doping.
    Type: Grant
    Filed: January 10, 2007
    Date of Patent: February 8, 2011
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide, Uwe Kellner-Werdehausen, Reiner Barthelmess
  • Publication number: 20110018029
    Abstract: A semiconductor device includes a first trench and a second trench extending into a semiconductor body from a surface. A body region of a first conductivity type adjoins a first sidewall of the first trench and a first sidewall of the second trench, the body region including a channel portion adjoining to a source structure and being configured to be controlled in its conductivity by a gate structure. The channel portion is formed at the first sidewall of the second trench and is not formed at the first sidewall of the first trench. An electrically floating semiconductor zone of the first conductivity type adjoins the first trench and has a bottom side located deeper within the semiconductor body than the bottom side of the body region.
    Type: Application
    Filed: July 21, 2009
    Publication date: January 27, 2011
    Applicant: Infineon Technologies Austria AG
    Inventors: Frank Pfirsch, Maria Cotorogea, Franz Hirler, Franz-Josef Niedernostheide, Thomas Raker, Hans-Joachim Schulze, Hans Peter Felsl
  • Patent number: 7842590
    Abstract: A method for manufacturing a semiconductor device by laser annealing. One embodiment provides a semiconductor substrate having a first surface and a second surface. The second surface is arranged opposite to the first surface. A first dopant is introduced into the semiconductor substrate at the second surface such that its peak doping concentration in the semiconductor substrate is located at a first depth with respect to the second surface. A second dopant is introduced into the semiconductor surface at the second surface such that its peak doping concentration in the semiconductor substrate is located at a second depth with respect to the second surface, wherein the first depth is larger than the second depth. At least a first laser anneal is performed by directing at least one laser beam pulse onto the second surface to melt the semiconductor substrate, at least in sections, at the second surface.
    Type: Grant
    Filed: April 28, 2008
    Date of Patent: November 30, 2010
    Assignee: Infineon Technologies Austria AG
    Inventors: Thomas Gutt, Frank Umbach, Hans Peter Felsl, Manfred Pfaffenlehner, Franz-Josef Niedernostheide, Holger Schulze
  • Patent number: 7838969
    Abstract: A diode is disclosed. One embodiment provides a semiconductor body having a front and a back, opposite the front in a vertical direction of the semiconductor body. The semiconductor body contains, successively in the vertical direction from the back to the front, a heavily n-doped zone, a weakly n-doped zone, a weakly p-doped zone and a heavily p-doped zone. In the vertical direction, the weakly p-doped zone has a thickness of at least 25% and at most 50% of the thickness of the semiconductor body.
    Type: Grant
    Filed: January 3, 2008
    Date of Patent: November 23, 2010
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide, Reiner Barthelmess
  • Patent number: 7838970
    Abstract: A semiconductor component has a first and a second contact-making region, and a semiconductor volume arranged between the first and the second contact-making region. Within the semiconductor volume, it is possible to generate a current flow that runs from the first contact-making region to the second contact-making region, or vice versa. The semiconductor volume and/or the contact-making regions are configured in such a way that the local flow cross-section of a locally elevated current flow, which is caused by current splitting, is enlarged at least in partial regions of the semiconductor volume.
    Type: Grant
    Filed: February 2, 2005
    Date of Patent: November 23, 2010
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Franz Josef Niedernostheide, Gerald Soelkner
  • Patent number: 7812368
    Abstract: The invention relates to a high-speed diode comprising a semiconductor body (1), in which a heavily n-doped zone (8), a weakly n-doped zone (7) and a weakly p-doped zone (6) are arranged successively in a vertical direction (v), between which a pn load junction (4) is formed. A number of heavily p-doped islands (51-57) spaced apart from one another are arranged in the weakly p-doped zone (6). In this case, it is provided that the cross-sectional area density of the heavily p-doped islands (51-57) is smaller in a first area region (100) near to the edge than in a second area region (200) remote from the edge.
    Type: Grant
    Filed: May 23, 2006
    Date of Patent: October 12, 2010
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide, Reiner Barthelmess
  • Patent number: 7749876
    Abstract: According to one embodiment, a method for the production of a stop zone in a doped zone of a semiconductor body comprises irradiating the semiconductor body with particle radiation in order to produce defects in a crystal lattice of the semiconductor body. The semiconductor body is exposed to an environment containing dopant atoms, during which dopant atoms are indiffused into the semiconductor body at an elevated temperature.
    Type: Grant
    Filed: February 28, 2008
    Date of Patent: July 6, 2010
    Assignee: Infineon Technologies AG
    Inventors: Reiner Barthelmess, Anton Mauder, Franz-Josef Niedernostheide, Hans-Joachim Schulze
  • Publication number: 20100167509
    Abstract: A method for producing a buried n-doped semiconductor zone in a semiconductor body. In one embodiment, the method includes producing an oxygen concentration at least in the region to be doped in the semiconductor body. The semiconductor body is irradiated via one side with nondoping particles for producing defects in the region to be doped. A thermal process is carried out. The invention additionally relates to a semiconductor component with a field stop zone.
    Type: Application
    Filed: March 8, 2010
    Publication date: July 1, 2010
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Hans-Joachim Schulze, Josef Lutz, Franz-Josef Niedernostheide, Ralf Siemieniec
  • Publication number: 20100136774
    Abstract: A method of fabricating a diode is disclosed. One embodiment provides a semiconductor body having a front and a back, opposite the front in a vertical direction of the semiconductor body. The semiconductor body contains, successively in the vertical direction from the back to the front, a heavily n-doped zone, a weakly n-doped zone, a weakly p-doped zone and a heavily p-doped zone. In the vertical direction, the weakly p-doped zone has a thickness of at least 25% and at most 50% of the thickness of the semiconductor body.
    Type: Application
    Filed: December 29, 2009
    Publication date: June 3, 2010
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide, Reiner Barthelmess
  • Patent number: 7696528
    Abstract: A thyristor has a radiation-sensitive breakdown structure (20), a gate electrode (92) that is placed at a distance from the latter in a lateral direction and an ignition stage structure having at least one ignition stage (51, 91) equipped with an n-doped auxiliary emitter (51), which forms a pn-junction (55) together with the p-doped base (6), the thyristor being both electrically and radiation-ignited. In a method for contacting a thyristor that can be ignited by radiation with a gate electrode (92), a contact ram (200) that is adapted to the geometry of the gate electrode (92) is pressed against the thyristor. In a method for monitoring the ignition of a thyristor that is ignited by incident radiation, the electric voltage that is applied to the gate electrode (92) or the electrically conductive electrode (105, 201) is monitored.
    Type: Grant
    Filed: November 21, 2006
    Date of Patent: April 13, 2010
    Assignee: Infineon Technologies AG
    Inventors: Uwe Kellner-Werdehausen, Franz-Josef Niedernostheide, Hans-Joachim Schulze, Jörg Dorn
  • Publication number: 20100087053
    Abstract: A method for fabricating a semiconductor body is presented. The semiconductor body includes a p-conducting zone, an n-conducting zone and a pn junction in a depth T1 in the semiconductor body between the p-conducting zone and the n-conducting zone. The method includes providing the semiconductor body, producing the p-doped zone by the diffusion of an impurity that forms an acceptor in a first direction into the semiconductor body, and producing the n-conducting zone by the implantation of protons in the first direction into the semiconductor body into a depth T2>T1 and the subsequent heat treatment of the semiconductor body in order to form hydrogen-induced donors.
    Type: Application
    Filed: September 30, 2009
    Publication date: April 8, 2010
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Frank Hille, Franz Josef Niedernostheide, Hans-Joachim Schulze, Holger Schulze
  • Patent number: 7687826
    Abstract: A main thyristor (1) has a recovery protection which is integrated into a drive thyristor (2) whose n-doped emitter (25) is electrically connected to a main thyristor control terminal (140). Moreover, the p-doped emitter (28) of the drive thyristor (2) is electrically connected to the p-doped emitter (18) of the main thyristor (1). Various optional measures for realizing a recovery protection are provided in this case. A method for producing a thyristor system having a main thyristor and a drive thyristor, the drive thyristor (2) having anode short circuits (211) involves introducing particles (230) into a target region (225) of the semiconductor body (200) of the drive thyristor (2), the distance between the target region (225) and a front side (201) of the semiconductor body (200) opposite to the rear side (202) being less than or equal to the distance between the p-doped emitter (28) and the front side (201).
    Type: Grant
    Filed: August 8, 2006
    Date of Patent: March 30, 2010
    Inventors: Hans-Joachim Schulze, Franz Josef Niedernostheide, Uwe Kellner-Werdehausen, Reiner Barthelmess
  • Patent number: 7675108
    Abstract: A method for producing a buried n-doped semiconductor zone in a semiconductor body. In one embodiment, the method includes producing an oxygen concentration at least in the region to be doped in the semiconductor body. The semiconductor body is irradiated via one side with nondoping particles for producing defects in the region to be doped. A thermal process is carried out. The invention additionally relates to a semiconductor component with a field stop zone.
    Type: Grant
    Filed: August 11, 2005
    Date of Patent: March 9, 2010
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Josef Lutz, Franz-Josef Niedernostheide, Ralf Siemieniec
  • Patent number: 7667297
    Abstract: A method for producing a buried stop zone in a semiconductor body and a semiconductor component having a stop zone, has the method steps of: providing a semiconductor body having a first and a second side and a basic doping of a first conduction type, irradiating the semiconductor body via one of the sides with protons, as a result of which protons are introduced into a first region of the semiconductor body situated at a distance from the irradiation side, carrying out a thermal process in which the semiconductor body is heated to a predetermined temperature for a predetermined time duration, the temperature and the duration being chosen such that hydrogen-induced donors are generated both in the first region and in a second region adjacent to the first region in the direction of the irradiation side.
    Type: Grant
    Filed: June 8, 2006
    Date of Patent: February 23, 2010
    Assignee: Infineon Technologies AG
    Inventors: Reiner Barthelmess, Anton Mauder, Franz Josef Niedernostheide, Hans-Joachim Schulze
  • Patent number: 7656011
    Abstract: A diode is disclosed. One embodiment provides a semiconductor body having a front and a back, opposite the front in a vertical direction of the semiconductor body. The semiconductor body contains, successively in the vertical direction from the back to the front, a heavily n-doped zone, a weakly n-doped zone, a weakly p-doped zone and a heavily p-doped zone. In the vertical direction, the weakly p-doped zone has a thickness of at least 25% and at most 50% of the thickness of the semiconductor body.
    Type: Grant
    Filed: January 3, 2008
    Date of Patent: February 2, 2010
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide, Reiner Barthelmess
  • Publication number: 20100015818
    Abstract: A method for producing a buried stop zone in a semiconductor body and a semiconductor component having a stop zone, the method including providing a semiconductor body having a first and a second side and a basic doping of a first conduction type. The method further includes irradiating the semiconductor body via one of the sides with protons, as a result of which protons are introduced into a first region of the semiconductor body situated at a distance from the irradiation side. The method also includes carrying out a thermal process in which the semiconductor body is heated to a predetermined temperature for a predetermined time duration, the temperature and the duration being chosen such that hydrogen-induced donors are generated both in the first region and in a second region adjacent to the first region in the direction of the irradiation side.
    Type: Application
    Filed: August 31, 2009
    Publication date: January 21, 2010
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Reiner Barthelmess, Anton Mauder, Franz-Josef Niedernostheide, Hans-Joachim Schulze
  • Patent number: 7649244
    Abstract: A vertical semiconductor device comprises a semiconductor body, a first contact and a second contact, wherein a first semiconductor region of a first conductivity type, a second semiconductor region of a second conductivity type and a third semiconductor region of a second conductivity type are formed in the semiconductor body in a direction from the first contact to the second contact, wherein a basic doping density of the second semiconductor region is smaller than a doping density of the third semiconductor region, and wherein in the second semiconductor region a semiconductor zone of the second conductivity type is arranged in which the doping density is increased relative to the basic doping density of the second semiconductor region.
    Type: Grant
    Filed: October 11, 2006
    Date of Patent: January 19, 2010
    Assignee: Infineon Technologies Austria AG
    Inventors: Franz Josef Niedernostheide, Hans-Joachim Schulze
  • Publication number: 20090267200
    Abstract: A method for manufacturing a semiconductor device by laser annealing. One embodiment provides a semiconductor substrate having a first surface and a second surface. The second surface is arranged opposite to the first surface. A first dopant is introduced into the semiconductor substrate at the second surface such that its peak doping concentration in the semiconductor substrate is located at a first depth with respect to the second surface. A second dopant is introduced into the semiconductor surface at the second surface such that its peak doping concentration in the semiconductor substrate is located at a second depth with respect to the second surface, wherein the first depth is larger than the second depth. At least a first laser anneal is performed by directing at least one laser beam pulse onto the second surface to melt the semiconductor substrate, at least in sections, at the second surface.
    Type: Application
    Filed: April 28, 2008
    Publication date: October 29, 2009
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Thomas Gutt, Frank Umbach, Hans Peter Felsl, Manfred Pfaffenlehner, Franz-Josef Niedernostheide, Holger Schulze