Patents by Inventor Fu-Wei YAO

Fu-Wei YAO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10283599
    Abstract: A transistor includes a first layer over a substrate. The transistor also includes a second layer over the first layer. The transistor further includes a carrier channel layer at an interface of the first layer and the second layer. The transistor additionally includes a gate structure, a drain, and a source over the second layer. The transistor also includes a passivation material in the second layer between an edge of the gate structure and an edge of the drain in a top-side view. The carrier channel layer has a smaller surface area than the first layer between the edge of the gate structure and the edge of the drain in the top-side view.
    Type: Grant
    Filed: August 7, 2017
    Date of Patent: May 7, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Fu-Wei Yao, Chun-Wei Hsu, Chen-Ju Yu, Jiun-Lei Jerry Yu, Fu-Chih Yang, Chih-Wen Hsiung, King-Yuen Wong
  • Publication number: 20190131427
    Abstract: A high electron mobility transistor (HEMT) includes a silicon substrate, an unintentionally doped gallium nitride (UID GaN) layer over the silicon substrate. The HEMT further includes a donor-supply layer over the UID GaN layer, a gate structure, a drain, and a source over the donor-supply layer. The HEMT further includes a dielectric layer having one or more dielectric plug portions in the donor-supply layer and top portions between the gate structure and the drain over the donor-supply layer. A method for making the HEMT is also provided.
    Type: Application
    Filed: December 13, 2018
    Publication date: May 2, 2019
    Inventors: Chen-Ju YU, Chih-Wen HSIUNG, Fu-Wei YAO, Chun-Wei HSU, King-Yuen WONG, Jiun-Lei Jerry YU, Fu-Chih YANG
  • Patent number: 10276682
    Abstract: A high electron mobility transistor (HEMT) includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A salicide source feature and a salicide drain feature are in contact with the first III-V compound layer through the second III-V compound layer. A gate electrode is disposed over a portion of the second III-V compound layer between the salicide source feature and the salicide drain feature.
    Type: Grant
    Filed: May 25, 2018
    Date of Patent: April 30, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Fu-Wei Yao, Chen-Ju Yu, King-Yuen Wong, Chun-Wei Hsu, Jiun-Lei Jerry Yu, Fu-Chih Yang, Chun Lin Tsai
  • Patent number: 10276657
    Abstract: An isolation structure for active devices is provided. In some embodiments, the isolation structure is used in a transistor. The transistore includes a substrate having a first doping type. The transistor also includes a channel layer positioned over the substrate and comprising a first section and a second section. The transistor further includes an active layer positioned over the channel layer. The isolation structure includes a horizontal segment, a first vertical segment, and a second vertical segment. The horizontal segment is arranged below the second section of the channel layer and continuously extends between the first vertical segment and the second vertical segment. The isolation structure has a second doping type that is different than the first doping type.
    Type: Grant
    Filed: September 13, 2017
    Date of Patent: April 30, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Fu-Wei Yao, Chun Lin Tsai, Jiun-Lei Jerry Yu, Man-Ho Kwan
  • Publication number: 20190081137
    Abstract: An isolation structure for active devices is provided. In some embodiments, the isolation structure is used in a transistor. The transistore includes a substrate having a first doping type. The transistor also includes a channel layer positioned over the substrate and comprising a first section and a second section. The transistor further includes an active layer positioned over the channel layer. The isolation structure includes a horizontal segment, a first vertical segment, and a second vertical segment. The horizontal segment is arranged below the second section of the channel layer and continuously extends between the first vertical segment and the second vertical segment. The isolation structure has a second doping type that is different than the first doping type.
    Type: Application
    Filed: September 13, 2017
    Publication date: March 14, 2019
    Inventors: Fu-Wei Yao, Chun Lin Tsai, Jiun-Lei Jerry Yu, Man-Ho Kwan
  • Patent number: 10164047
    Abstract: A high electron mobility transistor (HEMT) includes a silicon substrate, an unintentionally doped gallium nitride (UID GaN) layer over the silicon substrate. The HEMT further includes a donor-supply layer over the UID GaN layer, a gate structure, a drain, and a source over the donor-supply layer. The HEMT further includes a dielectric layer having one or more dielectric plug portions in the donor-supply layer and top portions between the gate structure and the drain over the donor-supply layer. A method for making the HEMT is also provided.
    Type: Grant
    Filed: February 27, 2017
    Date of Patent: December 25, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Ju Yu, Chih-Wen Hsiung, Fu-Wei Yao, Chun-Wei Hsu, King-Yuen Wong, Jiun-Lei Jerry Yu, Fu-Chih Yang
  • Publication number: 20180350945
    Abstract: A high electron mobility transistor (HEMT) includes a first III-V compound layer and a second III-V compound layer disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A source feature and a drain feature are disposed on the second III-V compound layer. A p-type layer is disposed on a portion of the second III-V compound layer between the source feature and the drain feature. A gate electrode is disposed on the p-type layer. A capping layer is disposed on the second III-V compound layer.
    Type: Application
    Filed: August 10, 2018
    Publication date: December 6, 2018
    Inventors: Chun-Wei HSU, Jiun-Lei Jerry YU, Fu-Wei YAO, Chen-Ju YU, Fu-Chih YANG, Chun Lin TSAI
  • Patent number: 10115813
    Abstract: A semiconductor structure includes a first III-V compound layer. A second III-V compound layer is over the first III-V compound layer and is different from the first III-V compound layer in composition. A carrier channel is located at an interface of the first III-V compound layer and the second III-V compound layer. Slanted field plates are in an opening in a dielectric layer over the second III-V compound layer; the gate electrode is disposed in the opening.
    Type: Grant
    Filed: August 22, 2016
    Date of Patent: October 30, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Ju Yu, Chih-Wen Hsiung, Chun-Wei Hsu, Fu-Chih Yang, Fu-Wei Yao, Jiun-Lei Jerry Yu
  • Publication number: 20180308953
    Abstract: Some embodiments of the present disclosure relate to a high electron mobility transistor (HEMT) which includes a heterojunction structure arranged over a semiconductor substrate. The heterojunction structure includes a first III/V semiconductor layer, and a second III/V semiconductor layer arranged over the first III/V semiconductor layer. Source and drain regions are arranged over the second III/V semiconductor layer and are spaced apart laterally from one another. A gate structure is arranged over the heterojunction structure and is arranged between the source and drain regions. The gate structure is made of a third III-nitride material. A first passivation layer is disposed about sidewalls of the gate structure and is made of a fourth III-nitride material.
    Type: Application
    Filed: June 18, 2018
    Publication date: October 25, 2018
    Inventors: Han-Chin Chiu, Chi-Ming Chen, Cheng-Yuan Tsai, Fu-Wei Yao
  • Patent number: 10096690
    Abstract: A circuit structure includes a substrate, a III-V semiconductor compound over the substrate, a AlxGa(1-X)N (AlGaN) layer over the III-V semiconductor compound, a gate over the AlGaN layer, a passivation film over the gate and over a portion of the AlGaN layer, a source structure, and a drain structure on an opposite side of the gate from the source structure, wherein X ranges from 0.1 to 1. The source structure has a source contact portion and an overhead portion. The overhead portion is over at least a portion of the passivation film between the source contact portion and the gate. A distance between the source contact portion and the gate is less than a distance between the gate and the drain structure.
    Type: Grant
    Filed: January 23, 2017
    Date of Patent: October 9, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jiun-Lei Jerry Yu, Fu-Wei Yao, Chen-Ju Yu, Chun-Wei Hsu, King-Yuen Wong
  • Publication number: 20180277646
    Abstract: A high electron mobility transistor (HEMT) includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A salicide source feature and a salicide drain feature are in contact with the first III-V compound layer through the second III-V compound layer. A gate electrode is disposed over a portion of the second III-V compound layer between the salicide source feature and the salicide drain feature.
    Type: Application
    Filed: May 25, 2018
    Publication date: September 27, 2018
    Inventors: Fu-Wei YAO, Chen-Ju YU, King-Yuen WONG, Chun-Wei HSU, Jiun-Lei Jerry YU, Fu-Chih YANG, Chun Lin TSAI
  • Patent number: 10050117
    Abstract: A high electron mobility transistor (HEMT) includes a first III-V compound layer and a second III-V compound layer disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A source feature and a drain feature are disposed on the second III-V compound layer. A p-type layer is disposed on a portion of the second III-V compound layer between the source feature and the drain feature. A gate electrode is disposed on the p-type layer. A capping layer is disposed on the second III-V compound layer.
    Type: Grant
    Filed: July 10, 2017
    Date of Patent: August 14, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Wei Hsu, Jiun-Lei Jerry Yu, Fu-Wei Yao, Chen-Ju Yu, Fu-Chih Yang, Chun Lin Tsai
  • Patent number: 10020361
    Abstract: A method of making a circuit structure includes growing a bulk layer over a substrate, and growing a donor-supply layer over the bulk layer. The method further includes depositing a doped layer over the donor-supply layer, and patterning the doped layer to form a plurality of islands. The method further includes forming a gate structure over the donor-supply layer, wherein the gate structure is partially over a largest island of the plurality of islands. The method further includes forming a drain over the donor-supply layer, wherein at least one island of the plurality of islands is between the gate structure and the drain.
    Type: Grant
    Filed: July 1, 2016
    Date of Patent: July 10, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Ju Yu, Chih-Wen Hsiung, Fu-Wei Yao, Chun-Wei Hsu, Jiun-Lei Jerry Yu, Fu-Chih Yang
  • Patent number: 10020376
    Abstract: Some embodiments of the present disclosure relate to a high electron mobility transistor (HEMT) which includes a heterojunction structure arranged over a semiconductor substrate. The heterojunction structure includes a binary III/V semiconductor layer made of a first III-nitride material to act as a channel region of the e-HEMT, and a ternary III/V semiconductor layer arranged over the binary III/V semiconductor layer and made of a second III-nitride material to act as a barrier layer. Source and drain regions are arranged over the ternary III/V semiconductor layer and are spaced apart laterally from one another. A gate structure is arranged over the heterojunction structure and is arranged between the source and drain regions. The gate structure is made of a third III-nitride material. A first passivation layer is disposed about sidewalls of the gate structure and is made of a fourth III-nitride material.
    Type: Grant
    Filed: June 5, 2017
    Date of Patent: July 10, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Han-Chin Chiu, Chi-Ming Chen, Cheng-Yuan Tsai, Fu-Wei Yao
  • Patent number: 9985103
    Abstract: A high electron mobility transistor (HEMT) includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A salicide source feature and a salicide drain feature are in contact with the first III-V compound layer through the second III-V compound layer. A gate electrode is disposed over a portion of the second III-V compound layer between the salicide source feature and the salicide drain feature.
    Type: Grant
    Filed: November 28, 2016
    Date of Patent: May 29, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fu-Wei Yao, Chen-Ju Yu, King-Yuen Wong, Chun-Wei Hsu, Jiun-Lei Jerry Yu, Fu-Chih Yang, Chun-Lin Tsai
  • Publication number: 20180145669
    Abstract: A device includes a first transistor having a first source terminal, a first drain terminal, and a first gate terminal; and a second transistor having a second source terminal, a second drain terminal, and a second gate terminal. The second source terminal is coupled to the first gate terminal and the first source terminal is coupled to the second gate terminal. The first transistor has a first threshold voltage, and the second transistor has a second threshold voltage different from the first threshold voltage.
    Type: Application
    Filed: January 5, 2018
    Publication date: May 24, 2018
    Inventors: Man-Ho Kwan, Fu-Wei Yao, Ru-Yi Su, King-Yuen Wong
  • Patent number: 9882553
    Abstract: A semiconductor device includes a first transistor and a clamping circuit. The first transistor is arranged to generate an output signal according to a control signal. The clamping circuit is arranged to generate the control signal according to an input signal, and to clamp the control signal to a predetermined signal level when the input signal exceeds the predetermined signal level.
    Type: Grant
    Filed: September 8, 2016
    Date of Patent: January 30, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Man-Ho Kwan, Fu-Wei Yao, Ru-Yi Su, King-Yuen Wong
  • Patent number: 9871030
    Abstract: A silicon substrate having a III-V compound layer disposed thereon is provided. A diode is formed in the silicon substrate through an ion implantation process. The diode is formed proximate to an interface between the silicon substrate and the III-V compound layer. An opening is etched through the III-V compound layer to expose the diode. The opening is filled with a conductive material. Thereby, a via is formed that is coupled to the diode. A High Electron Mobility Transistor (HEMT) device is formed at least partially in the III-V compound layer.
    Type: Grant
    Filed: November 21, 2016
    Date of Patent: January 16, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: King-Yuen Wong, Chun-Wei Hsu, Chen-Ju Yu, Fu-Wei Yao, Jiun-Lei Jerry Yu, Fu-Chih Yang, Po-Chih Chen
  • Publication number: 20170338316
    Abstract: A transistor includes a first layer over a substrate. The transistor also includes a second layer over the first layer. The transistor further includes a carrier channel layer at an interface of the first layer and the second layer. The transistor additionally includes a gate structure, a drain, and a source over the second layer. The transistor also includes a passivation material in the second layer between an edge of the gate structure and an edge of the drain in a top-side view. The carrier channel layer has a smaller surface area than the first layer between the edge of the gate structure and the edge of the drain in the top-side view.
    Type: Application
    Filed: August 7, 2017
    Publication date: November 23, 2017
    Inventors: Fu-Wei Yao, Chun-Wei Hsu, Chen-Ju Yu, Jiun-Lei Jerry Yu, Fu-Chih Yang, Chih-Wen Hsiung, King-Yuen Wong
  • Publication number: 20170317184
    Abstract: A high electron mobility transistor (HEMT) includes a first III-V compound layer and a second III-V compound layer disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A source feature and a drain feature are disposed on the second III-V compound layer. A p-type layer is disposed on a portion of the second III-V compound layer between the source feature and the drain feature. A gate electrode is disposed on the p-type layer. A capping layer is disposed on the second III-V compound layer.
    Type: Application
    Filed: July 10, 2017
    Publication date: November 2, 2017
    Inventors: Chun-Wei Hsu, Jiun-Lei Jerry YU, Fu-Wei YAO, Chen-Ju YU, Fu-Chih YANG, Chun Lin TSAI