Patents by Inventor Fu-Yu Tsai

Fu-Yu Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12293941
    Abstract: A gallium nitride (GaN) device with field plate structure, including a substrate, a gate on the substrate and a passivation layer covering on the gate, a source and a drain on the substrate and the passivation layer, a stop layer on the source, the drain and the passivation layer, and dual-damascene interconnects connecting respectively with the source and the drain, wherein the dual-damascene interconnect is provided with a via portion under the stop layer and a trench portion on the stop layer, and the via portion is connected with the source or the drain, and the trench portion of one of the dual-damascene interconnects extends horizontally toward the drain and overlaps the gate below in vertical direction, thereby functioning as a field plate structure for the GaN device.
    Type: Grant
    Filed: June 9, 2022
    Date of Patent: May 6, 2025
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Fu-Yu Tsai, Bin-Siang Tsai, Chung-Yi Chiu
  • Publication number: 20250142958
    Abstract: A semiconductor structure includes a SOI substrate having a device layer and a buried oxide layer contiguous with the device layer; a transistor disposed on the device layer; a dielectric layer surrounding the transistor; an interconnect structure disposed on the dielectric layer and electrically connected to a gate of the transistor; a charge trapping layer contiguous with the buried oxide layer; a capping layer contiguous with the charge trapping layer; and a conductive via penetrating through the capping layer, the charge trapping layer, the buried oxide layer, the device layer, and the dielectric layer. The conductive via is electrically connected to the interconnect structure.
    Type: Application
    Filed: December 11, 2023
    Publication date: May 1, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Tai-Cheng Hou, Da-Jun Lin, Bin-Siang Tsai, Fu-Yu Tsai
  • Publication number: 20250140666
    Abstract: A semiconductor package includes a RDL interposer having a first surface and a second surface; fanout pads and peripheral pads on the second surface; a first semiconductor die on the first surface and electrically connected to the fanout pads; a molding compound surrounding the first semiconductor die and the first surface of the RDL interposer; through mold vias in the molding compound around the first semiconductor die; peripheral solder bumps within the through mold vias and directly disposed on the peripheral pads; through silicon via pads on the rear surface of the first semiconductor die; a second semiconductor die bonded to the through silicon via pads of the first semiconductor die and the peripheral solder bumps within the through mold vias.
    Type: Application
    Filed: December 14, 2023
    Publication date: May 1, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Bin-Siang Tsai, Fu-Yu Tsai, Tai-Cheng Hou
  • Publication number: 20250132210
    Abstract: A wafer structure includes a substrate having a pre-bonding structure thereon. The pre-bonding structure includes an outer dielectric layer covering a central region of the substrate and a ring-shaped absorbent layer within a ring-shaped peripheral region of the substrate. The ring-shaped absorbent layer is contiguous with the outer dielectric layer.
    Type: Application
    Filed: December 4, 2023
    Publication date: April 24, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Yao-Hsien Chung, Tai-Cheng Hou, Chin-Chia Yang, Fu-Yu Tsai, Bin-Siang Tsai
  • Publication number: 20250125252
    Abstract: A semiconductor device includes a device layer, an interlayer dielectric layer disposed above the device layer, a first interconnection structure, a second interconnection structure, and a first dielectric layer. The interlayer dielectric layer includes a first portion and a second portion disposed above a first device region and a second device region, respectively. A top surface of the first portion is lower than a top surface of the second portion in a vertical direction. The first interconnection structure includes first conductive lines partly located in the first portion. The second interconnection structure includes second conductive lines located in the second portion. The first dielectric layer is disposed on the first portion, a part of the first dielectric layer is sandwiched between two adjacent first conductive lines, and a bottom surface of the first dielectric layer is lower than the top surface of the second portion in the vertical direction.
    Type: Application
    Filed: November 21, 2023
    Publication date: April 17, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chin-Chia Yang, Da-Jun Lin, Fu-Yu Tsai, Bin-Siang Tsai
  • Publication number: 20250120092
    Abstract: An MRAM structure includes a first memory unit and a second memory unit. A conductive line is disposed between the first memory unit and the second memory unit. An SOT metal conductive line contacts and electrically connects an end of the first memory unit, an end of the conductive line and an end of the second memory unit. A first switch element is electrically connected to an end of the SOT metal conductive line, and a second switch element is electrically connected to the other end of the SOT metal conductive line. A third switch element is electrically connected to the other end of the first memory unit. A fourth switch element is electrically connected to the other end of the conductive line. A fifth switch element is electrically connected to the other end of the second memory unit.
    Type: Application
    Filed: November 13, 2023
    Publication date: April 10, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Fu-Yu Tsai, Bin-Siang Tsai
  • Publication number: 20250113494
    Abstract: A method for fabricating a semiconductor device includes the steps of first forming a magnetic tunneling junction (MTJ) on a substrate, forming a top electrode on the MTJ, forming an inter-metal dielectric (IMD) layer around the top electrode and the MTJ, forming a landing layer on the IMD layer and the MTJ, and then patterning the landing layer to form a landing pad. Preferably, the landing pad is disposed on the top electrode and the IMD layer adjacent to one side of the top electrode.
    Type: Application
    Filed: December 13, 2024
    Publication date: April 3, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Yi-An Shih, Bin-Siang Tsai, Fu-Yu Tsai
  • Publication number: 20250112184
    Abstract: A semiconductor device includes an aluminum (Al) pad on a substrate, a wire bonded onto the Al pad, a cobalt (Co) layer between and directly contacting the Al pad and the wire, and a Co—Pd alloy on the Al pad and divide the Co layer into a first portion, a second portion, and a third portion. Preferably, the wire includes a copper (Cu) wire and a palladium (Pd) layer coated on the Cu wire.
    Type: Application
    Filed: December 13, 2024
    Publication date: April 3, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Bin-Siang Tsai, Fu-Yu Tsai
  • Publication number: 20250079293
    Abstract: A semiconductor device and a method of fabricating the same, includes at least one dielectric layer, a conductive structure, and a first insulator. The at least one dielectric layer includes a stacked structure having a low-k dielectric layer, an etching stop layer, and a conductive layer between the low-k dielectric layer and the etching stop layer. The conductive structure is disposed in the first dielectric layer. The first insulator is disposed between the conductive layer and the conductive structure.
    Type: Application
    Filed: October 13, 2023
    Publication date: March 6, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Tai-Cheng Hou, Da-Jun Lin, Fu-Yu Tsai, Bin-Siang Tsai
  • Publication number: 20250072075
    Abstract: A compound semiconductor device includes a substrate, a channel layer on the substrate, a barrier layer on the channel layer, a passivation layer on the barrier layer, and a contact area recessed into the passivation layer and the barrier layer. The channel layer is partially exposed at a bottom of the contact area. Abi-layer silicide film is disposed on the contact area.
    Type: Application
    Filed: November 13, 2024
    Publication date: February 27, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Fu-Yu Tsai, Bin-Siang Tsai, Chung-Yi Chiu
  • Publication number: 20250062222
    Abstract: The present disclosure is related to a semiconductor device and a fabricating method thereof, and the semiconductor device includes a first dielectric layer and a first conductive structure. The first dielectric layer includes a stacked structure including a low-k dielectric layer, an etching stop layer, and a carbon-rich dielectric layer between the low-k dielectric layer and the etching stop layer, wherein a carbon concentration within the carbon-rich dielectric layer is above 15%. The first conductive structure is disposed in the first dielectric layer.
    Type: Application
    Filed: October 13, 2023
    Publication date: February 20, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Tai-Cheng Hou, Da-Jun Lin, Fu-Yu Tsai, Bin-Siang Tsai
  • Publication number: 20250054883
    Abstract: An interposer includes a substrate having an inductor forming region thereon, a plurality of trenches within the inductor forming region in the substrate, a buffer layer lining interior surfaces of the plurality of trenches and forming air gaps within the plurality of trenches, and an inductor coil pattern embedded in the buffer layer within the inductor forming region.
    Type: Application
    Filed: September 11, 2023
    Publication date: February 13, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Bin-Siang Tsai, Fu-Yu Tsai, Chung-Yi Chiu
  • Publication number: 20250040158
    Abstract: A metal-insulator-metal capacitor includes a bottom electrode, a dielectric layer, a superlattice layer, a silicon dioxide layer and a top electrode stacked from bottom to top. The superlattice layer contacts the dielectric layer. A silicon dioxide layer has a negative voltage coefficient of capacitance.
    Type: Application
    Filed: August 15, 2023
    Publication date: January 30, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Bin-Siang Tsai, Fu-Yu Tsai, Chung-Yi Chiu
  • Publication number: 20250038103
    Abstract: A structure of an MIM capacitor and a heat sink include a dielectric layer. The dielectric layer includes a capacitor region and a heat dispensing region. A bottom electrode is embedded in the dielectric layer. A first heat conductive layer covers the dielectric layer. A capacitor dielectric layer is disposed on the first heat conductive layer within the capacitor region. A second heat conductive layer covers and contacts the capacitor dielectric layer and the first heat conductive layer. A top electrode is disposed within the capacitor region and the heat dispensing region and covers the second heat conductive layer. A first heat sink is disposed within the heat dispensing region and contacts the top electrode. A second heat sink is disposed within the heat dispensing region and contacts the first heat conductive layer and the second heat conductive layer.
    Type: Application
    Filed: August 14, 2023
    Publication date: January 30, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Bin-Siang Tsai, Fu-Yu Tsai, Chung-Yi Chiu
  • Patent number: 12207475
    Abstract: A method for fabricating a semiconductor device includes the steps of first forming a magnetic tunneling junction (MTJ) on a substrate, forming a top electrode on the MTJ, forming an inter-metal dielectric (IMD) layer around the top electrode and the MTJ, forming a landing layer on the IMD layer and the MTJ, and then patterning the landing layer to form a landing pad. Preferably, the landing pad is disposed on the top electrode and the IMD layer adjacent to one side of the top electrode.
    Type: Grant
    Filed: June 14, 2023
    Date of Patent: January 21, 2025
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Yi-An Shih, Bin-Siang Tsai, Fu-Yu Tsai
  • Patent number: 12205909
    Abstract: A method for fabricating a semiconductor device includes the steps of first forming an aluminum (Al) pad on a substrate, forming a passivation layer on the substrate and an opening exposing the Al pad, forming a cobalt (Co) layer in the opening and on the Al pad, bonding a wire onto the Co layer, and then performing a thermal treatment process to form a Co—Pd alloy on the Al pad.
    Type: Grant
    Filed: April 25, 2023
    Date of Patent: January 21, 2025
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Bin-Siang Tsai, Fu-Yu Tsai
  • Publication number: 20250017022
    Abstract: A method for fabricating a semiconductor device includes the steps of first forming a magnetic tunneling junction (MTJ) on a substrate, forming a top electrode on the MTJ, forming an inter-metal dielectric (IMD) layer around the top electrode and the MTJ, forming a landing layer on the IMD layer and the MTJ, and then patterning the landing layer to form a landing pad. Preferably, the landing pad is disposed on the top electrode and the IMD layer adjacent to one side of the top electrode.
    Type: Application
    Filed: September 17, 2024
    Publication date: January 9, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Yi-AN Shih, Bin-Siang Tsai, Fu-Yu Tsai
  • Publication number: 20250008842
    Abstract: A method for fabricating a semiconductor device includes the steps of: providing a substrate, wherein the substrate comprises a MRAM region and a logic region; forming a magnetic tunneling junction (MTJ) on the MRAM region; forming a top electrode on the MTJ; and then performing a flowable chemical vapor deposition (FCVD) process to form a first inter-metal dielectric (IMD) layer around the top electrode and the MTJ.
    Type: Application
    Filed: September 15, 2024
    Publication date: January 2, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Tai-Cheng Hou, Fu-Yu Tsai, Bin-Siang Tsai, Da-Jun Lin, Chau-Chung Hou, Wei-Xin Gao
  • Publication number: 20250008743
    Abstract: A semiconductor device includes a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate, a first ultra low-k (ULK) dielectric layer on the first MTJ and the second MTJ, a passivation layer on the first ULK dielectric layer, and a second ULK dielectric layer on the passivation layer.
    Type: Application
    Filed: September 15, 2024
    Publication date: January 2, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Kun-Ju Li, Tai-Cheng Hou, Hsin-Jung Liu, Fu-Yu Tsai, Bin-Siang Tsai, Chau-Chung Hou, Yu-Lung Shih, Ang Chan, Chih-Yueh Li, Chun-Tsen Lu
  • Patent number: 12127413
    Abstract: A semiconductor device includes a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate, a first ultra low-k (ULK) dielectric layer on the first MTJ and the second MTJ, a passivation layer on the first ULK dielectric layer, and a second ULK dielectric layer on the passivation layer.
    Type: Grant
    Filed: February 23, 2023
    Date of Patent: October 22, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kun-Ju Li, Tai-Cheng Hou, Hsin-Jung Liu, Fu-Yu Tsai, Bin-Siang Tsai, Chau-Chung Hou, Yu-Lung Shih, Ang Chan, Chih-Yueh Li, Chun-Tsen Lu