Patents by Inventor Fu-Yu Tsai

Fu-Yu Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220392850
    Abstract: A warpage-reducing semiconductor structure includes a wafer. The wafer includes a front side and a back side. Numerous semiconductor elements are disposed at the front side. A silicon oxide layer is disposed at the back side. A UV-transparent silicon nitride layer covers and contacts the silicon oxide layer. The refractive index of the UV-transparent silicon nitride layer is between 1.55 and 2.10.
    Type: Application
    Filed: July 7, 2021
    Publication date: December 8, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Chin-Chia Yang, Tai-Cheng Hou, Fu-Yu Tsai, Bin-Siang Tsai
  • Patent number: 11462513
    Abstract: A chip bonding alignment structure includes a semiconductor chip, a metal layer, an etching stop layer, at least one metal bump, a dielectric barrier layer, a silicon oxide layer, and a silicon carbonitride layer. The metal layer is disposed on a bonding surface of the semiconductor chip and has a metal alignment pattern. The etching stop layer covers the bonding surface and the metal layer. The metal bump extends upward from the metal layer and penetrates through the etching stop layer. The dielectric barrier layer covers the etching stop layer and the metal bump. The silicon oxide layer covers the dielectric barrier layer. The silicon carbonitride layer covers the silicon oxide layer.
    Type: Grant
    Filed: February 22, 2021
    Date of Patent: October 4, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chin-Chia Yang, Fu-Yu Tsai, Da-Jun Lin, Bin-Siang Tsai
  • Publication number: 20220246839
    Abstract: An MRAM structure includes a dielectric layer. A first MRAM, a second MRAM and a third MRAM are disposed on the dielectric layer, wherein the second MRAM is disposed between the first MRAM and the third MRAM, and the second MRAM includes an MTJ. Two gaps are respectively disposed between the first MRAM and the second MRAM and between the second MRAM and the third MRAM. Two tensile stress pieces are respectively disposed in each of the two gaps. A first compressive stress layer surrounds and contacts the sidewall of the MTJ entirely. A second compressive stress layer covers the openings of each of the gaps and contacts the two tensile material pieces.
    Type: Application
    Filed: April 20, 2022
    Publication date: August 4, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Da-Jun Lin, Min-Hua Tsai, Tai-Cheng Hou, Fu-Yu Tsai, Bin-Siang Tsai
  • Publication number: 20220238468
    Abstract: A method for fabricating a semiconductor device includes the steps of first forming an aluminum (Al) pad on a substrate, forming a passivation layer on the substrate and an opening exposing the Al pad, forming a cobalt (Co) layer in the opening and on the Al pad, bonding a wire onto the Co layer, and then performing a thermal treatment process to form a Co—Pd alloy on the Al pad.
    Type: Application
    Filed: January 26, 2021
    Publication date: July 28, 2022
    Inventors: Da-Jun Lin, Bin-Siang Tsai, Fu-Yu Tsai
  • Publication number: 20220238800
    Abstract: A method for fabricating a semiconductor device includes the steps of: providing a substrate, wherein the substrate comprises a MRAM region and a logic region; forming a magnetic tunneling junction (MTJ) on the MRAM region; forming a top electrode on the MTJ; and then performing a flowable chemical vapor deposition (FCVD) process to form a first inter-metal dielectric (IMD) layer around the top electrode and the MTJ.
    Type: Application
    Filed: February 22, 2021
    Publication date: July 28, 2022
    Inventors: Tai-Cheng Hou, Fu-Yu Tsai, Bin-Siang Tsai, Da-Jun Lin, Chau-Chung Hou, Wei-Xin Gao
  • Publication number: 20220208727
    Abstract: A chip bonding alignment structure includes a semiconductor chip, a metal layer, an etching stop layer, at least one metal bump, a dielectric barrier layer, a silicon oxide layer, and a silicon carbonitride layer. The metal layer is disposed on a bonding surface of the semiconductor chip and has a metal alignment pattern. The etching stop layer covers the bonding surface and the metal layer. The metal bump extends upward from the metal layer and penetrates through the etching stop layer. The dielectric barrier layer covers the etching stop layer and the metal bump. The silicon oxide layer covers the dielectric barrier layer. The silicon carbonitride layer covers the silicon oxide layer.
    Type: Application
    Filed: February 22, 2021
    Publication date: June 30, 2022
    Inventors: Chin-Chia YANG, Fu-Yu TSAI, Da-Jun LIN, Bin-Siang TSAI
  • Publication number: 20220173311
    Abstract: A memory device and a manufacturing method thereof are provided. The memory device includes a device substrate, a resistance variable layer and a top electrode. The bottom electrode is disposed on the device substrate. The resistance variable layer is disposed on the bottom electrode. The top electrode is disposed on the resistance variable layer. The bottom electrode is formed with a tensile stress, while the top electrode is formed with a compressive stress.
    Type: Application
    Filed: January 4, 2021
    Publication date: June 2, 2022
    Applicant: United Microelectronics Corp.
    Inventors: Chich-Neng Chang, Da-Jun Lin, Shih-Wei Su, Fu-Yu Tsai, Bin-Siang Tsai
  • Publication number: 20220140002
    Abstract: A method for fabricating a semiconductor device includes the steps of first forming a magnetic tunneling junction (MTJ) on a substrate, forming a top electrode on the MTJ, forming an inter-metal dielectric (IMD) layer around the top electrode and the MTJ, forming a landing layer on the IMD layer and the MTJ, and then patterning the landing layer to form a landing pad. Preferably, the landing pad is disposed on the top electrode and the IMD layer adjacent to one side of the top electrode.
    Type: Application
    Filed: November 30, 2020
    Publication date: May 5, 2022
    Inventors: Da-Jun Lin, Yi-An Shih, Bin-Siang Tsai, Fu-Yu Tsai
  • Publication number: 20220085283
    Abstract: A method for fabricating semiconductor device includes first forming a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate, performing an atomic layer deposition (ALD) process or a high-density plasma (HDP) process to form a passivation layer on the first MTJ and the second MTJ, performing an etching process to remove the passivation layer adjacent to the first MTJ and the second MTJ, and then forming an ultra low-k (ULK) dielectric layer on the passivation layer.
    Type: Application
    Filed: November 22, 2021
    Publication date: March 17, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Hui-Lin Wang, Tai-Cheng Hou, Wei-Xin Gao, Fu-Yu Tsai, Chin-Yang Hsieh, Chen-Yi Weng, Jing-Yin Jhang, Bin-Siang Tsai, Kun-Ju Li, Chih-Yueh Li, Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Yu-Tsung Lai, Wei-Hao Huang
  • Publication number: 20220045266
    Abstract: An MRAM structure includes a dielectric layer. A first MRAM, a second MRAM and a third MRAM are disposed on the dielectric layer, wherein the second MRAM is disposed between the first MRAM and the third MRAM, and the second MRAM includes an MTJ. Two gaps are respectively disposed between the first MRAM and the second MRAM and between the second MRAM and the third MRAM. Two tensile stress pieces are respectively disposed in each of the two gaps. A first compressive stress layer surrounds and contacts the sidewall of the MTJ entirely. A second compressive stress layer covers the openings of each of the gaps and contacts the two tensile material pieces.
    Type: Application
    Filed: August 31, 2020
    Publication date: February 10, 2022
    Inventors: Da-Jun Lin, Min-Hua Tsai, Tai-Cheng Hou, Fu-Yu Tsai, Bin-Siang Tsai
  • Publication number: 20210314951
    Abstract: A wireless communication terminal including a wireless transceiver and a controller is provided. The wireless transceiver performs wireless transmission and reception to and from an AP. The controller is coupled to the wireless transceiver, and is operable to configure the wireless communication terminal to operate as a non-AP STA, and transmit a MU PPDU with a single RU spanning a partial bandwidth of the MU PPDU to the AP via the wireless transceiver. In particular, the partial bandwidth excludes a frequency band of a primary channel.
    Type: Application
    Filed: March 18, 2021
    Publication date: October 7, 2021
    Inventors: Cheng-Yi CHANG, Chao-Wen CHOU, Kun-Sheng HUANG, Fu-Yu TSAI, Hung-Tao HSIEH
  • Publication number: 20210225932
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate; forming a first top electrode on the first MTJ and a second top electrode on the second MTJ; forming a first ultra low-k (ULK) dielectric layer on the first MTJ and the second MTJ; forming a passivation layer on the first ULK dielectric layer, wherein a bottom surface of the passivation layer between the first MTJ and the second MTJ is lower than a top surface of the first MTJ; and forming a second ULK dielectric layer on the passivation layer.
    Type: Application
    Filed: April 6, 2021
    Publication date: July 22, 2021
    Inventors: Kun-Ju Li, Tai-Cheng Hou, Hsin-Jung Liu, Fu-Yu Tsai, Bin-Siang Tsai, Chau-Chung Hou, Yu-Lung Shih, Ang Chan, Chih-Yueh Li, Chun-Tsen Lu
  • Publication number: 20210151666
    Abstract: A semiconductor device includes a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate, a passivation layer on the first MTJ and the second MTJ, and an ultra low-k (ULK) dielectric layer on the passivation layer. Preferably, a top surface of the passivation layer between the first MTJ and the second MTJ is lower than a top surface of the passivation layer directly on top of the first MTJ.
    Type: Application
    Filed: January 4, 2021
    Publication date: May 20, 2021
    Inventors: Hui-Lin Wang, Tai-Cheng Hou, Wei-Xin Gao, Fu-Yu Tsai, Chin-Yang Hsieh, Chen-Yi Weng, Jing-Yin Jhang, Bin-Siang Tsai, Kun-Ju Li, Chih-Yueh Li, Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Yu-Tsung Lai, Wei-Hao Huang
  • Patent number: 11004897
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate; forming a first top electrode on the first MTJ and a second top electrode on the second MTJ; forming a first ultra low-k (ULK) dielectric layer on the first MTJ and the second MTJ; forming a passivation layer on the first ULK dielectric layer, wherein a bottom surface of the passivation layer between the first MTJ and the second MTJ is lower than a top surface of the first MTJ; and forming a second ULK dielectric layer on the passivation layer.
    Type: Grant
    Filed: August 4, 2019
    Date of Patent: May 11, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kun-Ju Li, Tai-Cheng Hou, Hsin-Jung Liu, Fu-Yu Tsai, Bin-Siang Tsai, Chau-Chung Hou, Yu-Lung Shih, Ang Chan, Chih-Yueh Li, Chun-Tsen Lu
  • Publication number: 20210119115
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a first magnetic tunneling junction (MTJ) on a substrate; forming a first ultra low-k (ULK) dielectric layer on the first MTJ; performing a first etching process to remove part of the first ULK dielectric layer and forming a damaged layer on the first ULK dielectric layer; and forming a second ULK dielectric layer on the damaged layer.
    Type: Application
    Filed: December 27, 2020
    Publication date: April 22, 2021
    Inventors: Hui-Lin Wang, Tai-Cheng Hou, Wei-Xin Gao, Fu-Yu Tsai, Chin-Yang Hsieh, Chen-Yi Weng, Jing-Yin Jhang, Bin-Siang Tsai, Kun-Ju Li, Chih-Yueh Li, Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Yu-Tsung Lai, Wei-Hao Huang
  • Patent number: 10916694
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a first magnetic tunneling junction (MTJ) on a substrate; forming a first ultra low-k (ULK) dielectric layer on the first MTJ; performing a first etching process to remove part of the first ULK dielectric layer and forming a damaged layer on the first ULK dielectric layer; and forming a second ULK dielectric layer on the damaged layer.
    Type: Grant
    Filed: January 23, 2019
    Date of Patent: February 9, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hui-Lin Wang, Tai-Cheng Hou, Wei-Xin Gao, Fu-Yu Tsai, Chin-Yang Hsieh, Chen-Yi Weng, Jing-Yin Jhang, Bin-Siang Tsai, Kun-Ju Li, Chih-Yueh Li, Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Yu-Tsung Lai, Wei-Hao Huang
  • Publication number: 20210005662
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate; forming a first top electrode on the first MTJ and a second top electrode on the second MTJ; forming a first ultra low-k (ULK) dielectric layer on the first MTJ and the second MTJ; forming a passivation layer on the first ULK dielectric layer, wherein a bottom surface of the passivation layer between the first MTJ and the second MTJ is lower than a top surface of the first MTJ; and forming a second ULK dielectric layer on the passivation layer.
    Type: Application
    Filed: August 4, 2019
    Publication date: January 7, 2021
    Inventors: Kun-Ju Li, Tai-Cheng Hou, Hsin-Jung Liu, Fu-Yu Tsai, Bin-Siang Tsai, Chau-Chung Hou, Yu-Lung Shih, Ang Chan, Chih-Yueh Li, Chun-Tsen Lu
  • Publication number: 20200220674
    Abstract: A wireless device performs spatial reuse in a wireless local area network. When receiving a packet, the wireless device measures a received signal quality from a first portion of the packet, and determines a required signal quality for correctly decoding a payload of the packet based on information in a packet header. The wireless device compares the received signal quality with the required signal quality. If the received signal quality is lower than the required signal quality, the wireless device transmits a signal that overlaps in time and in frequency with a second portion of the packet. Alternatively, a wireless device may identify a Basic Service Set Identification (BSSID) of a received packet. If the BSSID indicates that the packet is an inter-BSS packet, the wireless device transmits a signal overlapping in time and in frequency with the packet before reception of a frame check sequence (FCS) in the packet.
    Type: Application
    Filed: December 26, 2019
    Publication date: July 9, 2020
    Inventors: Ray-Kuo Lin, Tsungjung Lee, Fu-Yu Tsai, Wei-Chen Wang
  • Publication number: 20200212290
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a first magnetic tunneling junction (MTJ) on a substrate; forming a first ultra low-k (ULK) dielectric layer on the first MTJ; performing a first etching process to remove part of the first ULK dielectric layer and forming a damaged layer on the first ULK dielectric layer; and forming a second ULK dielectric layer on the damaged layer.
    Type: Application
    Filed: January 23, 2019
    Publication date: July 2, 2020
    Inventors: Hui-Lin Wang, Tai-Cheng Hou, Wei-Xin Gao, Fu-Yu Tsai, Chin-Yang Hsieh, Chen-Yi Weng, Jing-Yin Jhang, Bin-Siang Tsai, Kun-Ju Li, Chih-Yueh Li, Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Yu-Tsung Lai, Wei-Hao Huang
  • Patent number: 10663831
    Abstract: A method of making a curved electrochromic film includes: disposing a UV curable adhesive layer between a first electrochromic member and a second electrochromic member to form an electrochromic film semi-product in flat form; arching the electrochromic film semi-product between the first and second bending members of a forming apparatus and by moving the first and second bending members toward each other; and curing the UV curable adhesive layer using a UV light source while the electrochromic film semi-product is arched. Forming apparatuses for forming a flat electrochromic film semi-product into a curved electrochromic film are also disclosed.
    Type: Grant
    Filed: May 31, 2018
    Date of Patent: May 26, 2020
    Assignee: TINTABLE KIBING CO., LTD.
    Inventors: Fu-Yu Tsai, Keng-Ming Hu, Jui-Wen Tsai, Yau-Ren Yang, Yi-Wen Chung