Patents by Inventor Hai-Ching Chen

Hai-Ching Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etching Apparatus
    Publication number: 20170053809
    Abstract: A system and method of etching a semiconductor device are provided. Etching solution is sampled and analyzed by a monitoring unit to determine a concentration of components within the etching solution, such as an oxidant concentration. Then, based upon such measurement, a makeup amount of the components may be added be a makeup unit to the etching solution to control the concentration of the components within the etching system.
    Type: Application
    Filed: November 8, 2016
    Publication date: February 23, 2017
    Inventors: Wan-Yu Lee, Ying-Hao Kuo, Hai-Ching Chen, Tien-I Bao
  • Method and Structure for Semiconductor Device Having Gate Spacer Protection Layer
    Publication number: 20170053804
    Abstract: A method of forming a semiconductor device includes providing a precursor. The precursor includes a substrate; a gate stack over the substrate; a first dielectric layer over the gate stack; a gate spacer on sidewalls of the gate stack and on sidewalls of the first dielectric layer; and source and drain (S/D) contacts on opposing sides of the gate stack. The method further includes recessing the gate spacer to at least partially expose the sidewalls of the first dielectric layer but not to expose the sidewalls of the gate stack. The method further includes forming a spacer protection layer over the gate spacer, the first dielectric layer, and the S/D contacts.
    Type: Application
    Filed: August 19, 2015
    Publication date: February 23, 2017
    Inventors: Chih Wei Lu, Chung-Ju Lee, Hai-Ching Chen, Chien-Hua Huang, Tien-I Bao
  • Etchant and Etching Process
    Publication number: 20170045685
    Abstract: A system and method for manufacturing semiconductor devices is provided. An embodiment comprises using an etchant to remove a portion of a substrate to form an opening with a 45° angle with a major surface of the substrate. The etchant comprises a base, a surfactant, and an oxidant. The oxidant may be hydrogen peroxide.
    Type: Application
    Filed: October 31, 2016
    Publication date: February 16, 2017
    Inventors: Wan-Yu Lee, Ying-Hao Kuo, Hai-Ching Chen, Tien-I Bao
  • Waveguide structure and method for fabricating the same
    Patent number: 9568677
    Abstract: Embodiments of forming a waveguide structure are provided. The waveguide structure includes a substrate, and the substrate has an interconnection region and a waveguide region. The waveguide structure also includes a trench formed in the substrate, and the trench has a sloping sidewall surface and a substantially flat bottom. The waveguide structure further includes a bottom cladding layer formed on the substrate, and the bottom cladding layer extends from the interconnection region to the waveguide region, and the bottom cladding layer acts as an insulating layer in the interconnection region. The waveguide structure further includes a metal layer formed on the bottom cladding layer on the sloping sidewall surface.
    Type: Grant
    Filed: May 30, 2013
    Date of Patent: February 14, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Hao Tseng, Ying-Hao Kuo, Hai-Ching Chen, Tien-I Bao
  • Interconnect structure and method of forming the same
    Patent number: 9564397
    Abstract: An interconnect structure and a method of forming an interconnect structure are disclosed. The interconnect structure includes a low-k (LK) dielectric layer over a substrate; a first conductive feature and a second conductive feature in the LK dielectric layer; a first spacer along a first sidewall of the first conductive feature; a second spacer along a second sidewall of the second conductive feature, wherein the second sidewall of the second conductive feature faces the first sidewall of the first conductive feature; an air gap between the first spacer and the second spacer; and a third conductive feature over the first conductive feature, wherein the third conductive feature is connected to the first conductive feature.
    Type: Grant
    Filed: January 4, 2016
    Date of Patent: February 7, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Hsiung Tsai, Chung-Ju Lee, Hai-Ching Chen, Shau-Lin Shue, Tien-I Bao
  • Semiconductor Device Having a Porous Low-K Structure
    Publication number: 20170033043
    Abstract: The present disclosure involves forming a porous low-k dielectric structure. A plurality of conductive elements is formed over the substrate. The conductive elements are separated from one another by a plurality of openings. A barrier layer is formed over the conductive elements. The barrier layer is formed to cover sidewalls of the openings. A treatment process is performed to the barrier layer. The barrier layer becomes hydrophilic after the treatment process is performed. A dielectric material is formed over the barrier layer after the treatment process has been performed. The dielectric material fills the openings and contains a plurality of porogens.
    Type: Application
    Filed: July 30, 2015
    Publication date: February 2, 2017
    Inventors: Bo-Jiun Lin, Hai-Ching Chen, Tien-I Bao
  • Semiconductor device metallization systems and methods
    Patent number: 9548241
    Abstract: Semiconductor device metallization systems and methods are disclosed. In some embodiments, a metallization system for semiconductor devices includes a mainframe, and a plurality of modules disposed proximate the mainframe. One of the plurality of modules comprises a physical vapor deposition (PVD) module and one of the plurality of modules comprises an ultraviolet light (UV) cure module.
    Type: Grant
    Filed: February 29, 2016
    Date of Patent: January 17, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsiang-Huan Lee, Shau-Lin Shue, Keith Kuang-Kuo Koai, Hai-Ching Chen, Tung-Ching Tseng, Wen-Cheng Yang, Chung-En Kao, Ming-Han Lee, Hsin-Yen Huang
  • Porogen Bonded Gap Filling Material in Semiconductor Manufacturing
    Publication number: 20160379874
    Abstract: A method for semiconductor manufacturing includes receiving a device that includes a substrate and a first layer disposed over the substrate, wherein the first layer includes a trench. The method further includes applying a first material over the first layer and filling in the trench, wherein the first material contains a matrix and a porogen that is chemically bonded with the matrix. The method further includes curing the first material to form a porous material layer. The porous material layer has a first portion and a second portion. The first portion is disposed in the trench. The second portion is disposed over the first layer. The first and second portions contain substantially the same percentage of each of Si, O, and C. The first and second portions contain substantially the same level of porosity.
    Type: Application
    Filed: June 26, 2015
    Publication date: December 29, 2016
    Inventors: Bo-Jiun Lin, Ching-Yu Chang, Hai-Ching Chen, Tien-I Bao
  • Etching apparatus
    Patent number: 9490133
    Abstract: A system and method of etching a semiconductor device are provided. Etching solution is sampled and analyzed by a monitoring unit to determine a concentration of components within the etching solution, such as an oxidant concentration. Then, based upon such measurement, a makeup amount of the components may be added be a makeup unit to the etching solution to control the concentration of the components within the etching system.
    Type: Grant
    Filed: January 24, 2013
    Date of Patent: November 8, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wan-Yu Lee, Ying-Hao Kuo, Hai-Ching Chen, Tien-I Bao
  • Adhesion promoter apparatus and method
    Patent number: 9490148
    Abstract: A structure comprises a substrate having a plateau region and a trench region, a reflecting layer formed over a top surface of the trench region, a first adhesion promoter layer formed over the reflecting layer, a bottom cladding layer deposited over the first adhesion promoter layer, a core layer formed over the bottom cladding layer and a top cladding layer formed over the core layer.
    Type: Grant
    Filed: September 27, 2012
    Date of Patent: November 8, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Hao Tseng, Ying-Hao Kuo, Kai-Feng Cheng, Hai-Ching Chen, Tien-I Bao
  • Etchant and etching process
    Patent number: 9484211
    Abstract: A system and method for manufacturing semiconductor devices is provided. An embodiment comprises using an etchant to remove a portion of a substrate to form an opening with a 45° angle with a major surface of the substrate. The etchant comprises a base, a surfactant, and an oxidant. The oxidant may be hydrogen peroxide.
    Type: Grant
    Filed: January 24, 2013
    Date of Patent: November 1, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wan-Yu Lee, Ying-Hao Kuo, Hai-Ching Chen, Tien-I Bao
  • Light coupling device and methods of forming same
    Patent number: 9478939
    Abstract: An embodiment is a semiconductor device comprising an optical device over a first substrate, a vertical waveguide on a top surface of the optical device, the vertical waveguide having a first refractive index, and a capping layer over the vertical waveguide, the capping layer configured to be a lens for the vertical waveguide and the capping layer having a second refractive index.
    Type: Grant
    Filed: February 26, 2015
    Date of Patent: October 25, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jui Hsieh Lai, Ying-Hao Kuo, Hai-Ching Chen, Tien-I Bao
  • Protecting Layer in a Semiconductor Structure
    Publication number: 20160300760
    Abstract: A method for forming a protecting layer includes determining an expected concentration of metal ions in a dielectric layer. The method also includes determining a thickness of the protecting layer based on the expected concentration of metal ions. The method also includes forming the protecting layer at the determined thickness and in contact with the dielectric layer. The protecting layer can include at least one of silicon doped nitride, carbon nitride, silicon nitride, or silicon carbon.
    Type: Application
    Filed: June 15, 2016
    Publication date: October 13, 2016
    Inventors: Chi-Lin Teng, Hai-Ching Chen, Tien-I Bao
  • Interconnect structures
    Patent number: 9460988
    Abstract: A semiconductor structure includes a first dielectric layer over a substrate. At least one first conductive structure is within the first dielectric layer. The first conductive structure includes a cap portion extending above a top surface of the first dielectric layer. At least one first dielectric spacer is on at least one sidewall of the cap portion of the first conductive structure.
    Type: Grant
    Filed: April 23, 2013
    Date of Patent: October 4, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chen-Hua Yu, Hai-Ching Chen, Tien-I Bao
  • Package Structure and Methods of Forming Same
    Publication number: 20160245998
    Abstract: A semiconductor device, a package structure, and methods of forming the same are disclosed. An embodiment is a semiconductor device comprising a first optical device over a first substrate, a vertical waveguide on a top surface of the first optical device, and a second substrate over the vertical waveguide. The semiconductor device further comprises a lens capping layer on a top surface of the second substrate, wherein the lens capping layer is aligned with the vertical waveguide, and a second optical device over the lens capping layer.
    Type: Application
    Filed: May 2, 2016
    Publication date: August 25, 2016
    Inventors: Jui Hsieh Lai, Ying-Hao Kuo, Hai-Ching Chen, Tien-I Bao
  • Integrated metal grating
    Patent number: 9405063
    Abstract: An integrated circuit includes a substrate, a metal grating disposed over the substrate, and a waveguide layer disposed over or under the metal grating. The metal grating is arranged to change a propagation direction of an optical signal and the waveguide layer is arranged to guide the optical signal to a desired direction.
    Type: Grant
    Filed: June 11, 2013
    Date of Patent: August 2, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jui Hsieh Lai, Tien-I Bao, Hai-Ching Chen, Ying-Hao Kuo
  • High Boiling Temperature Solvent Additives for Semiconductor Processing
    Publication number: 20160190002
    Abstract: A method for forming an interconnect structure includes forming a patterned layer over a substrate, the patterned layer having an opening therein. A dielectric material is filled in the opening. The dielectric material has a precursor and a solvent, the solvent having a boiling point temperature greater than a precursor cross-linking temperature. A thermal treatment is performed on the dielectric material to form a dielectric layer.
    Type: Application
    Filed: December 26, 2014
    Publication date: June 30, 2016
    Inventors: Bo-Jiun Lin, Ching-Yu Chang, Hai-Ching Chen, Tien-I Bao
  • Semiconductor Device Metallization Systems and Methods
    Publication number: 20160181152
    Abstract: Semiconductor device metallization systems and methods are disclosed. In some embodiments, a metallization system for semiconductor devices includes a mainframe, and a plurality of modules disposed proximate the mainframe. One of the plurality of modules comprises a physical vapor deposition (PVD) module and one of the plurality of modules comprises an ultraviolet light (UV) cure module.
    Type: Application
    Filed: February 29, 2016
    Publication date: June 23, 2016
    Inventors: Hsiang-Huan Lee, Shau-Lin Shue, Keith Kuang-Kuo Koai, Hai-Ching Chen, Tung-Ching Tseng, Wen-Cheng Yang, Chung-En Kao, Ming-Han Lee, Hsin-Yen Huang
  • Protecting layer in a semiconductor structure
    Patent number: 9373579
    Abstract: A semiconductor structure comprises a dielectric layer, a conduction piece, a first metal piece, a first protecting layer, and a second protecting layer. The conduction piece is surrounded by electrical materials of the dielectric layer. The first metal piece is over the dielectric layer and is in contact with the conduction piece. The first protecting layer covers dielectric materials of the dielectric layer that are not covered by the first metal piece. The second protecting layer is over the first protecting layer.
    Type: Grant
    Filed: March 6, 2013
    Date of Patent: June 21, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Lin Teng, Hai-Ching Chen, Tien-I Bao
  • Package structure and methods of forming same
    Patent number: 9335473
    Abstract: A semiconductor device, a package structure, and methods of forming the same are disclosed. An embodiment is a semiconductor device comprising a first optical device over a first substrate, a vertical waveguide on a top surface of the first optical device, and a second substrate over the vertical waveguide. The semiconductor device further comprises a lens capping layer on a top surface of the second substrate, wherein the lens capping layer is aligned with the vertical waveguide, and a second optical device over the lens capping layer.
    Type: Grant
    Filed: April 9, 2015
    Date of Patent: May 10, 2016
    Assignee: Taiwan Semiconductor Manfacturing Company, Ltd.
    Inventors: Jui Hsieh Lai, Ying-Hao Kuo, Hai-Ching Chen, Tien-I Bao